TW200802526A - Substrate treatment apparatus and substrate treatment method - Google Patents
Substrate treatment apparatus and substrate treatment methodInfo
- Publication number
- TW200802526A TW200802526A TW096111285A TW96111285A TW200802526A TW 200802526 A TW200802526 A TW 200802526A TW 096111285 A TW096111285 A TW 096111285A TW 96111285 A TW96111285 A TW 96111285A TW 200802526 A TW200802526 A TW 200802526A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- brush
- substrate treatment
- holding mechanism
- pushing pressure
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 12
- 238000000034 method Methods 0.000 title 1
- 230000002093 peripheral effect Effects 0.000 abstract 3
- 238000004140 cleaning Methods 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 1
Classifications
-
- B08B1/32—
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02082—Cleaning product to be cleaned
- H01L21/02087—Cleaning of wafer edges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006095553A JP2007273611A (ja) | 2006-03-30 | 2006-03-30 | 基板処理装置および基板処理方法 |
JP2006095554A JP4719052B2 (ja) | 2006-03-30 | 2006-03-30 | 基板処理装置および基板処理方法 |
JP2006095552A JP4719051B2 (ja) | 2006-03-30 | 2006-03-30 | 基板処理装置および基板処理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200802526A true TW200802526A (en) | 2008-01-01 |
TWI360154B TWI360154B (en) | 2012-03-11 |
Family
ID=38556735
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096111285A TWI360154B (en) | 2006-03-30 | 2007-03-30 | Substrate treatment apparatus and substrate treatm |
Country Status (3)
Country | Link |
---|---|
US (1) | US7979942B2 (zh) |
KR (1) | KR100892809B1 (zh) |
TW (1) | TWI360154B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112582298A (zh) * | 2019-09-30 | 2021-03-30 | 芝浦机械电子株式会社 | 基板处理装置 |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4928343B2 (ja) * | 2007-04-27 | 2012-05-09 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP5039468B2 (ja) * | 2007-07-26 | 2012-10-03 | 株式会社Sokudo | 基板洗浄装置およびそれを備えた基板処理装置 |
JP2009088244A (ja) * | 2007-09-28 | 2009-04-23 | Tokyo Electron Ltd | 基板クリーニング装置、基板処理装置、基板クリーニング方法、基板処理方法及び記憶媒体 |
JP4939376B2 (ja) * | 2007-11-13 | 2012-05-23 | 株式会社Sokudo | 基板処理装置 |
CN101869898B (zh) * | 2010-03-26 | 2011-12-07 | 华东交通大学 | 便携机械式垃圾广告清理器 |
US20140310895A1 (en) * | 2013-04-19 | 2014-10-23 | Applied Materials, Inc. | Scrubber brush force control assemblies, apparatus and methods for chemical mechanical polishing |
JP6178019B2 (ja) * | 2014-10-31 | 2017-08-09 | 株式会社荏原製作所 | 基板洗浄装置及び基板洗浄方法 |
KR101574111B1 (ko) | 2015-08-28 | 2015-12-03 | (주)패스트 | 세정브러시를 구비하는 패널세정장치 |
JP6508721B2 (ja) | 2015-09-28 | 2019-05-08 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
JP6684191B2 (ja) * | 2016-09-05 | 2020-04-22 | 株式会社Screenホールディングス | 基板洗浄装置およびそれを備える基板処理装置 |
US11139182B2 (en) * | 2017-12-13 | 2021-10-05 | Tokyo Electron Limited | Substrate processing apparatus and substrate processing method |
US10786939B2 (en) | 2017-12-21 | 2020-09-29 | The Boeing Company | Apparatuses for depositing an extrudable substance onto a surface |
US10933435B2 (en) | 2017-12-21 | 2021-03-02 | The Boeing Company | Apparatuses for depositing an extrudable substance onto a surface |
US10791825B2 (en) * | 2017-12-21 | 2020-10-06 | The Boeing Company | Apparatuses for dispensing a brushable substance onto a surface |
US10799910B2 (en) | 2017-12-21 | 2020-10-13 | The Boeing Company | Apparatuses for dispensing a brushable substance onto a surface |
US10781029B2 (en) | 2017-12-21 | 2020-09-22 | The Boeing Company | Apparatuses for depositing an extrudable substance onto a surface |
US10575628B2 (en) | 2018-02-07 | 2020-03-03 | The Boeing Company | Apparatuses for cleaning a surface |
US10905228B2 (en) | 2018-02-07 | 2021-02-02 | The Boeing Company | Apparatuses for cleaning a surface |
US10881192B2 (en) | 2018-02-07 | 2021-01-05 | The Boeing Company | Apparatuses and methods for cleaning a surface |
CN110767536A (zh) * | 2019-10-30 | 2020-02-07 | 上海华力微电子有限公司 | 晶圆清洗方法 |
US11664213B2 (en) * | 2019-12-26 | 2023-05-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Bevel edge removal methods, tools, and systems |
Family Cites Families (29)
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JPH04363022A (ja) * | 1991-06-06 | 1992-12-15 | Enya Syst:Kk | 貼付板洗浄装置 |
JPH04364730A (ja) | 1991-06-12 | 1992-12-17 | Hitachi Ltd | 自動ドレッシング装置 |
KR0171491B1 (ko) | 1994-09-20 | 1999-03-30 | 이시다 아키라 | 회전식 기판세정장치 |
JPH08238463A (ja) | 1995-03-03 | 1996-09-17 | Ebara Corp | 洗浄方法及び洗浄装置 |
US5624501A (en) | 1995-09-26 | 1997-04-29 | Gill, Jr.; Gerald L. | Apparatus for cleaning semiconductor wafers |
US5861066A (en) | 1996-05-01 | 1999-01-19 | Ontrak Systems, Inc. | Method and apparatus for cleaning edges of contaminated substrates |
US5725414A (en) * | 1996-12-30 | 1998-03-10 | Intel Corporation | Apparatus for cleaning the side-edge and top-edge of a semiconductor wafer |
JP3463908B2 (ja) | 1997-02-17 | 2003-11-05 | 大日本スクリーン製造株式会社 | 基板洗浄方法および基板洗浄装置 |
JPH10261605A (ja) | 1997-03-18 | 1998-09-29 | Toshiba Corp | 半導体処理装置 |
JPH11625A (ja) | 1997-06-13 | 1999-01-06 | Mitsubishi Materials Corp | ウェーハの洗浄装置 |
JP3320640B2 (ja) | 1997-07-23 | 2002-09-03 | 東京エレクトロン株式会社 | 洗浄装置 |
JP3314032B2 (ja) | 1998-04-28 | 2002-08-12 | 東京エレクトロン株式会社 | 処理装置 |
JP4040759B2 (ja) | 1998-07-29 | 2008-01-30 | 芝浦メカトロニクス株式会社 | 洗浄装置 |
US6248009B1 (en) | 1999-02-18 | 2001-06-19 | Ebara Corporation | Apparatus for cleaning substrate |
CN2374139Y (zh) | 1999-05-12 | 2000-04-19 | 邱天祥 | 一种拖把清洁棉头 |
JP3668640B2 (ja) * | 1999-06-28 | 2005-07-06 | 大日本スクリーン製造株式会社 | 基板洗浄装置 |
JP2001070896A (ja) * | 1999-07-06 | 2001-03-21 | Ebara Corp | 基板洗浄装置 |
JP3892635B2 (ja) | 2000-02-04 | 2007-03-14 | 大日本スクリーン製造株式会社 | 洗浄装置 |
US6622334B1 (en) | 2000-03-29 | 2003-09-23 | International Business Machines Corporation | Wafer edge cleaning utilizing polish pad material |
JP2002018368A (ja) * | 2000-07-05 | 2002-01-22 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JP4079205B2 (ja) | 2000-08-29 | 2008-04-23 | 東京エレクトロン株式会社 | 基板洗浄装置及び基板洗浄方法 |
US6550091B1 (en) * | 2000-10-04 | 2003-04-22 | Lam Research Corporation | Double-sided wafer edge scrubbing apparatus and method for using the same |
US6647579B2 (en) * | 2000-12-18 | 2003-11-18 | International Business Machines Corp. | Brush pressure control system for chemical and mechanical treatment of semiconductor surfaces |
KR100433452B1 (ko) | 2001-07-03 | 2004-05-31 | 주식회사 케이씨텍 | 브러시를 이용한 세정장치 |
JP2003151943A (ja) | 2001-11-19 | 2003-05-23 | Speedfam Clean System Co Ltd | スクラブ洗浄装置 |
JP2003197592A (ja) | 2001-12-27 | 2003-07-11 | Dainippon Screen Mfg Co Ltd | 基板端面洗浄装置および基板処理装置 |
US6910240B1 (en) | 2002-12-16 | 2005-06-28 | Lam Research Corporation | Wafer bevel edge cleaning system and apparatus |
JP4395012B2 (ja) | 2004-06-09 | 2010-01-06 | 三菱電機株式会社 | パネル洗浄装置およびパネルの製造方法 |
JP4364730B2 (ja) | 2004-06-22 | 2009-11-18 | 株式会社キーエンス | 表示部付制御ユニット |
-
2007
- 2007-03-28 KR KR1020070030358A patent/KR100892809B1/ko active IP Right Grant
- 2007-03-30 US US11/694,333 patent/US7979942B2/en active Active
- 2007-03-30 TW TW096111285A patent/TWI360154B/zh active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112582298A (zh) * | 2019-09-30 | 2021-03-30 | 芝浦机械电子株式会社 | 基板处理装置 |
Also Published As
Publication number | Publication date |
---|---|
TWI360154B (en) | 2012-03-11 |
KR20070098606A (ko) | 2007-10-05 |
US20070226926A1 (en) | 2007-10-04 |
US7979942B2 (en) | 2011-07-19 |
KR100892809B1 (ko) | 2009-04-10 |
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