TW200725616A - Semiconductor memory device of cross structure - Google Patents

Semiconductor memory device of cross structure

Info

Publication number
TW200725616A
TW200725616A TW095139093A TW95139093A TW200725616A TW 200725616 A TW200725616 A TW 200725616A TW 095139093 A TW095139093 A TW 095139093A TW 95139093 A TW95139093 A TW 95139093A TW 200725616 A TW200725616 A TW 200725616A
Authority
TW
Taiwan
Prior art keywords
electrode
memory device
semiconductor memory
wiring
electrode wiring
Prior art date
Application number
TW095139093A
Other languages
English (en)
Other versions
TWI310185B (zh
Inventor
Tetsuya Ohnishi
Shogo Hayashi
Original Assignee
Sharp Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Kk filed Critical Sharp Kk
Publication of TW200725616A publication Critical patent/TW200725616A/zh
Application granted granted Critical
Publication of TWI310185B publication Critical patent/TWI310185B/zh

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C5/00—Details of stores covered by group G11C11/00
    • G11C5/06—Arrangements for interconnecting storage elements electrically, e.g. by wiring
    • G11C5/063—Voltage and signal distribution in integrated semi-conductor memory access lines, e.g. word-line, bit-line, cross-over resistance, propagation delay
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165—Auxiliary circuits
    • G11C11/1653—Address circuits or decoders
    • G11C11/1655—Bit-line or column circuits
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165—Auxiliary circuits
    • G11C11/1653—Address circuits or decoders
    • G11C11/1657—Word-line or row circuits
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
    • G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
    • G11C11/165—Auxiliary circuits
    • G11C11/1659—Cell access
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/22—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0021—Auxiliary circuits
    • G11C13/0023—Address circuits or decoders
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0021—Auxiliary circuits
    • G11C13/003—Cell access
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C7/00—Arrangements for writing information into, or reading information out from, a digital store
    • G11C7/18—Bit line organisation; Bit line lay-out
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C8/00—Arrangements for selecting an address in a digital store
    • G11C8/10—Decoders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
    • H01L27/101—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including resistors or capacitors only
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
    • G11C2213/70—Resistive array aspects
    • G11C2213/76—Array using an access device for each cell which being not a transistor and not a diode
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
    • G11C2213/70—Resistive array aspects
    • G11C2213/77—Array wherein the memory element being directly connected to the bit lines and word lines without any access device being used

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Semiconductor Memories (AREA)
  • Mram Or Spin Memory Techniques (AREA)
TW095139093A 2005-11-02 2006-10-24 Semiconductor memory device of cross structure TW200725616A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005319882A JP4231502B2 (ja) 2005-11-02 2005-11-02 クロスポイント構造の半導体記憶装置

Publications (2)

Publication Number Publication Date
TW200725616A true TW200725616A (en) 2007-07-01
TWI310185B TWI310185B (zh) 2009-05-21

Family

ID=38005581

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095139093A TW200725616A (en) 2005-11-02 2006-10-24 Semiconductor memory device of cross structure

Country Status (5)

Country Link
US (1) US20100128512A1 (zh)
JP (1) JP4231502B2 (zh)
CN (1) CN101300678B (zh)
TW (1) TW200725616A (zh)
WO (1) WO2007052426A1 (zh)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8358526B2 (en) 2008-02-28 2013-01-22 Contour Semiconductor, Inc. Diagonal connection storage array
TWI413121B (zh) 2008-02-29 2013-10-21 Toshiba Kk Semiconductor memory device
KR20100104624A (ko) * 2009-03-18 2010-09-29 삼성전자주식회사 반도체 메모리 소자
JP5197512B2 (ja) * 2009-07-02 2013-05-15 株式会社東芝 半導体記憶装置
JP2011040112A (ja) * 2009-08-06 2011-02-24 Toshiba Corp 不揮発性半導体記憶装置
US8437174B2 (en) 2010-02-15 2013-05-07 Micron Technology, Inc. Memcapacitor devices, field effect transistor devices, non-volatile memory arrays, and methods of programming
US8416609B2 (en) 2010-02-15 2013-04-09 Micron Technology, Inc. Cross-point memory cells, non-volatile memory arrays, methods of reading a memory cell, methods of programming a memory cell, methods of writing to and reading from a memory cell, and computer systems
US8634224B2 (en) 2010-08-12 2014-01-21 Micron Technology, Inc. Memory cells, non-volatile memory arrays, methods of operating memory cells, methods of writing to and reading from a memory cell, and methods of programming a memory cell
JP5214693B2 (ja) 2010-09-21 2013-06-19 株式会社東芝 不揮発性半導体記憶装置
JP2012069216A (ja) 2010-09-24 2012-04-05 Toshiba Corp 不揮発性半導体記憶装置
KR102115427B1 (ko) * 2013-02-28 2020-05-28 에스케이하이닉스 주식회사 반도체 장치, 프로세서, 시스템 및 반도체 장치의 동작 방법
GB2541961B (en) * 2015-09-01 2019-05-15 Lattice Semiconductor Corp Multi-time programmable non-volatile memory cell
KR102465966B1 (ko) * 2016-01-27 2022-11-10 삼성전자주식회사 메모리 소자, 및 그 메모리 소자를 포함한 전자 장치
JP2018085155A (ja) * 2016-11-21 2018-05-31 東芝メモリ株式会社 磁気メモリ
JP2019053804A (ja) 2017-09-15 2019-04-04 東芝メモリ株式会社 半導体記憶装置
KR101992953B1 (ko) * 2018-10-12 2019-06-27 브이메모리 주식회사 전기장을 이용한 전류 경로 제어 방법 및 전자 소자
JP2020155647A (ja) 2019-03-20 2020-09-24 キオクシア株式会社 不揮発性記憶装置
CN111951874B (zh) * 2019-05-14 2022-10-18 兆易创新科技集团股份有限公司 一种校验的方法和装置
US11043268B2 (en) * 2019-07-16 2021-06-22 Samsung Electronics Co., Ltd. Resistive memory devices and methods of operating resistive memory devices including adjustment of current path resistance of a selected memory cell in a resistive memory device
US11222695B2 (en) 2019-11-15 2022-01-11 Micron Technology, Inc. Socket design for a memory device
CN111427111A (zh) * 2020-03-30 2020-07-17 Tcl华星光电技术有限公司 量子点图案化方法、装置及系统
CN113594203A (zh) * 2021-07-27 2021-11-02 长江先进存储产业创新中心有限责任公司 相变存储器及其制作方法、定位方法和掩膜版

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0791930B1 (en) * 1995-10-02 2004-02-18 Matsushita Electric Industrial Co., Ltd. Electric signal supply circuit and semiconductor memory device
JP3308457B2 (ja) * 1995-10-02 2002-07-29 松下電器産業株式会社 電気信号供給回路および半導体メモリ装置
JP2002100182A (ja) * 2000-09-27 2002-04-05 Canon Inc 磁気薄膜メモリ
US6480438B1 (en) * 2001-06-12 2002-11-12 Ovonyx, Inc. Providing equal cell programming conditions across a large and high density array of phase-change memory cells
US6569745B2 (en) * 2001-06-28 2003-05-27 Sharp Laboratories Of America, Inc. Shared bit line cross point memory array
US6531371B2 (en) * 2001-06-28 2003-03-11 Sharp Laboratories Of America, Inc. Electrically programmable resistance cross point memory
US6693821B2 (en) * 2001-06-28 2004-02-17 Sharp Laboratories Of America, Inc. Low cross-talk electrically programmable resistance cross point memory
US6498747B1 (en) * 2002-02-08 2002-12-24 Infineon Technologies Ag Magnetoresistive random access memory (MRAM) cross-point array with reduced parasitic effects
JP4214708B2 (ja) * 2002-03-27 2009-01-28 セイコーエプソン株式会社 強誘電体記憶装置及びその駆動方法
JP4182671B2 (ja) * 2002-03-29 2008-11-19 セイコーエプソン株式会社 強誘電体記憶装置の調整方法
US6842369B2 (en) * 2002-05-07 2005-01-11 Hewlett-Packard Development Company, L.P. Intermesh memory device
US6753561B1 (en) * 2002-08-02 2004-06-22 Unity Semiconductor Corporation Cross point memory array using multiple thin films
JP2005236003A (ja) * 2004-02-19 2005-09-02 Sony Corp 抵抗変化型不揮発性メモリ、抵抗変化型不揮発性メモリの製造方法、記録方法、再生方法、消去方法、抵抗変化材料微細構造体および抵抗変化材料微細構造体の製造方法
US7339814B2 (en) * 2005-08-24 2008-03-04 Infineon Technologies Ag Phase change memory array having equalized resistance

Also Published As

Publication number Publication date
CN101300678B (zh) 2010-09-08
US20100128512A1 (en) 2010-05-27
JP2007129041A (ja) 2007-05-24
WO2007052426A1 (ja) 2007-05-10
JP4231502B2 (ja) 2009-03-04
TWI310185B (zh) 2009-05-21
CN101300678A (zh) 2008-11-05

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