TW200722223A - Polymeric material, foam from the material and polishing pad prepared therefrom - Google Patents
Polymeric material, foam from the material and polishing pad prepared therefromInfo
- Publication number
- TW200722223A TW200722223A TW095134949A TW95134949A TW200722223A TW 200722223 A TW200722223 A TW 200722223A TW 095134949 A TW095134949 A TW 095134949A TW 95134949 A TW95134949 A TW 95134949A TW 200722223 A TW200722223 A TW 200722223A
- Authority
- TW
- Taiwan
- Prior art keywords
- foam
- polishing pad
- prepared therefrom
- pad prepared
- polymeric material
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/08—Processes
- C08G18/0895—Manufacture of polymers by continuous processes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
- C08G18/30—Low-molecular-weight compounds
- C08G18/32—Polyhydroxy compounds; Polyamines; Hydroxyamines
- C08G18/3203—Polyhydroxy compounds
- C08G18/3212—Polyhydroxy compounds containing cycloaliphatic groups
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
- C08G18/40—High-molecular-weight compounds
- C08G18/42—Polycondensates having carboxylic or carbonic ester groups in the main chain
- C08G18/4236—Polycondensates having carboxylic or carbonic ester groups in the main chain containing only aliphatic groups
- C08G18/4238—Polycondensates having carboxylic or carbonic ester groups in the main chain containing only aliphatic groups derived from dicarboxylic acids and dialcohols
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
- C08G18/40—High-molecular-weight compounds
- C08G18/48—Polyethers
- C08G18/4854—Polyethers containing oxyalkylene groups having four carbon atoms in the alkylene group
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
- C08G18/65—Low-molecular-weight compounds having active hydrogen with high-molecular-weight compounds having active hydrogen
- C08G18/66—Compounds of groups C08G18/42, C08G18/48, or C08G18/52
- C08G18/6633—Compounds of group C08G18/42
- C08G18/6637—Compounds of group C08G18/42 with compounds of group C08G18/32 or polyamines of C08G18/38
- C08G18/664—Compounds of group C08G18/42 with compounds of group C08G18/32 or polyamines of C08G18/38 with compounds of group C08G18/3203
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
- C08G18/65—Low-molecular-weight compounds having active hydrogen with high-molecular-weight compounds having active hydrogen
- C08G18/66—Compounds of groups C08G18/42, C08G18/48, or C08G18/52
- C08G18/6666—Compounds of group C08G18/48 or C08G18/52
- C08G18/667—Compounds of group C08G18/48 or C08G18/52 with compounds of group C08G18/32 or polyamines of C08G18/38
- C08G18/6674—Compounds of group C08G18/48 or C08G18/52 with compounds of group C08G18/32 or polyamines of C08G18/38 with compounds of group C08G18/3203
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J9/00—Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof
- C08J9/04—Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof using blowing gases generated by a previously added blowing agent
- C08J9/12—Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof using blowing gases generated by a previously added blowing agent by a physical blowing agent
- C08J9/122—Hydrogen, oxygen, CO2, nitrogen or noble gases
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L101/00—Compositions of unspecified macromolecular compounds
- C08L101/12—Compositions of unspecified macromolecular compounds characterised by physical features, e.g. anisotropy, viscosity or electrical conductivity
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L75/00—Compositions of polyureas or polyurethanes; Compositions of derivatives of such polymers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
- H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G2101/00—Manufacture of cellular products
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2375/00—Characterised by the use of polyureas or polyurethanes; Derivatives of such polymers
- C08J2375/04—Polyurethanes
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Materials Engineering (AREA)
- Polyurethanes Or Polyureas (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005275768 | 2005-09-22 | ||
JP2006094698 | 2006-03-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200722223A true TW200722223A (en) | 2007-06-16 |
TWI403387B TWI403387B (zh) | 2013-08-01 |
Family
ID=37889018
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095134949A TWI403387B (zh) | 2005-09-22 | 2006-09-21 | 高分子材料、由它得到之發泡體及使用它之研磨墊 |
Country Status (9)
Country | Link |
---|---|
US (1) | US9321142B2 (zh) |
EP (1) | EP1927605B1 (zh) |
JP (1) | JP5193595B2 (zh) |
KR (1) | KR101290490B1 (zh) |
CN (1) | CN101268111B (zh) |
HK (1) | HK1112012A1 (zh) |
IL (1) | IL189816A (zh) |
TW (1) | TWI403387B (zh) |
WO (1) | WO2007034980A1 (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI504735B (zh) * | 2012-09-28 | 2015-10-21 | Fujibo Holdings Inc | 研磨墊 |
TWI805850B (zh) * | 2018-09-28 | 2023-06-21 | 日商富士紡控股股份有限公司 | 研磨墊及研磨加工物之製造方法 |
TWI828771B (zh) * | 2018-09-28 | 2024-01-11 | 日商富士紡控股股份有限公司 | 研磨墊及研磨加工物的製造方法 |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG160368A1 (en) * | 2005-03-08 | 2010-04-29 | Toyo Tire & Rubber Co | Polishing pad and process for producing the same |
KR101134432B1 (ko) | 2005-05-17 | 2012-04-10 | 도요 고무 고교 가부시키가이샤 | 연마 패드 |
JP4884725B2 (ja) * | 2005-08-30 | 2012-02-29 | 東洋ゴム工業株式会社 | 研磨パッド |
JP5031236B2 (ja) * | 2006-01-10 | 2012-09-19 | 東洋ゴム工業株式会社 | 研磨パッド |
US8993648B2 (en) * | 2006-08-28 | 2015-03-31 | Toyo Tire & Rubber Co., Ltd. | Polishing pad |
JP5008927B2 (ja) | 2006-08-31 | 2012-08-22 | 東洋ゴム工業株式会社 | 研磨パッド |
JP5078000B2 (ja) | 2007-03-28 | 2012-11-21 | 東洋ゴム工業株式会社 | 研磨パッド |
JP5549111B2 (ja) * | 2008-05-22 | 2014-07-16 | Jsr株式会社 | 化学機械研磨パッドの研磨層形成用組成物、化学機械研磨パッドおよび化学機械研磨方法 |
JP2010045306A (ja) * | 2008-08-18 | 2010-02-25 | Kuraray Co Ltd | 研磨パッド |
US8303375B2 (en) * | 2009-01-12 | 2012-11-06 | Novaplanar Technology, Inc. | Polishing pads for chemical mechanical planarization and/or other polishing methods |
WO2010081084A2 (en) * | 2009-01-12 | 2010-07-15 | Novaplanar Technology Inc. | Polishing pads for chemical mechanical planarization and/or other polishing methods |
US8192249B2 (en) | 2009-03-12 | 2012-06-05 | Hitachi Global Storage Technologies Netherlands, B.V. | Systems and methods for polishing a magnetic disk |
SG176151A1 (en) * | 2009-05-27 | 2011-12-29 | Rogers Corp | Polishing pad, polyurethane layer therefor, and method of polishing a silicon wafer |
CN102159609B (zh) * | 2009-06-29 | 2013-11-13 | Dic株式会社 | 研磨垫用双组分型尿烷树脂组合物、聚氨酯研磨垫、和聚氨酯研磨垫的制造方法 |
JP5945874B2 (ja) * | 2011-10-18 | 2016-07-05 | 富士紡ホールディングス株式会社 | 研磨パッド及びその製造方法 |
JP5900196B2 (ja) * | 2012-07-05 | 2016-04-06 | 株式会社Sumco | ウェーハの片面研磨方法およびウェーハの片面研磨装置 |
KR102398130B1 (ko) | 2014-10-31 | 2022-05-13 | 주식회사 쿠라레 | 연마층용 비다공성 성형체, 연마 패드 및 연마 방법 |
US10328548B2 (en) | 2014-11-28 | 2019-06-25 | Kuraray Co., Ltd. | Polishing-layer molded body, and polishing pad |
US10106662B2 (en) * | 2016-08-04 | 2018-10-23 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Thermoplastic poromeric polishing pad |
KR20190086719A (ko) * | 2016-11-14 | 2019-07-23 | 바스프 에스이 | 팽창된 열가소성 폴리우레탄 비드, 그의 제조 방법 및 성형품의 제조 방법 |
JP6971839B2 (ja) * | 2017-12-27 | 2021-11-24 | ニッタ・デュポン株式会社 | 研磨パッド |
JP7292215B2 (ja) * | 2017-12-27 | 2023-06-16 | ニッタ・デュポン株式会社 | 研磨パッド |
JP6993513B2 (ja) * | 2018-08-11 | 2022-01-13 | 株式会社クラレ | 研磨層用ポリウレタン、研磨層及び研磨パッド |
CN112839985B (zh) * | 2018-11-09 | 2023-10-20 | 株式会社可乐丽 | 抛光层用聚氨酯、抛光层、抛光垫及抛光层的改性方法 |
JP7311749B2 (ja) * | 2019-03-29 | 2023-07-20 | 富士紡ホールディングス株式会社 | 研磨パッド |
US11845156B2 (en) * | 2019-07-12 | 2023-12-19 | Cmc Materials, Inc. | Polishing pad employing polyamine and cyclohexanedimethanol curatives |
KR102298114B1 (ko) * | 2019-11-05 | 2021-09-03 | 에스케이씨솔믹스 주식회사 | 연마패드, 이의 제조방법 및 이를 이용한 반도체 소자의 제조방법 |
KR102287923B1 (ko) * | 2019-10-30 | 2021-08-09 | 에스케이씨솔믹스 주식회사 | 연마패드, 이의 제조방법, 및 이를 이용한 반도체 소자의 제조방법 |
TWI761921B (zh) | 2019-10-30 | 2022-04-21 | 南韓商Skc索密思股份有限公司 | 研磨墊、製造該研磨墊之方法及使用該研磨墊以製造半導體裝置之方法 |
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-
2006
- 2006-09-21 KR KR1020087003907A patent/KR101290490B1/ko active IP Right Grant
- 2006-09-21 US US12/067,297 patent/US9321142B2/en active Active
- 2006-09-21 TW TW095134949A patent/TWI403387B/zh active
- 2006-09-21 CN CN2006800344506A patent/CN101268111B/zh active Active
- 2006-09-21 WO PCT/JP2006/319215 patent/WO2007034980A1/ja active Application Filing
- 2006-09-21 JP JP2007511009A patent/JP5193595B2/ja active Active
- 2006-09-21 EP EP06810673.1A patent/EP1927605B1/en active Active
-
2008
- 2008-02-28 IL IL189816A patent/IL189816A/en active IP Right Grant
- 2008-06-26 HK HK08107090.6A patent/HK1112012A1/zh unknown
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI504735B (zh) * | 2012-09-28 | 2015-10-21 | Fujibo Holdings Inc | 研磨墊 |
TWI805850B (zh) * | 2018-09-28 | 2023-06-21 | 日商富士紡控股股份有限公司 | 研磨墊及研磨加工物之製造方法 |
TWI828771B (zh) * | 2018-09-28 | 2024-01-11 | 日商富士紡控股股份有限公司 | 研磨墊及研磨加工物的製造方法 |
Also Published As
Publication number | Publication date |
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EP1927605A1 (en) | 2008-06-04 |
JP5193595B2 (ja) | 2013-05-08 |
US9321142B2 (en) | 2016-04-26 |
HK1112012A1 (zh) | 2008-08-22 |
CN101268111B (zh) | 2012-07-18 |
US20090298392A1 (en) | 2009-12-03 |
CN101268111A (zh) | 2008-09-17 |
TWI403387B (zh) | 2013-08-01 |
JPWO2007034980A1 (ja) | 2009-04-02 |
EP1927605B1 (en) | 2016-06-22 |
KR101290490B1 (ko) | 2013-07-26 |
IL189816A (en) | 2013-04-30 |
KR20080058327A (ko) | 2008-06-25 |
IL189816A0 (en) | 2008-11-03 |
EP1927605A4 (en) | 2010-11-24 |
WO2007034980A1 (ja) | 2007-03-29 |
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