WO2009041422A1 - 研磨パッド - Google Patents

研磨パッド Download PDF

Info

Publication number
WO2009041422A1
WO2009041422A1 PCT/JP2008/067165 JP2008067165W WO2009041422A1 WO 2009041422 A1 WO2009041422 A1 WO 2009041422A1 JP 2008067165 W JP2008067165 W JP 2008067165W WO 2009041422 A1 WO2009041422 A1 WO 2009041422A1
Authority
WO
WIPO (PCT)
Prior art keywords
polished
polishing
sheet
polyurethane sheet
polishing pad
Prior art date
Application number
PCT/JP2008/067165
Other languages
English (en)
French (fr)
Inventor
Yasushi Matsumura
Masataka Takagi
Original Assignee
Fujibo Holdings Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujibo Holdings Inc. filed Critical Fujibo Holdings Inc.
Priority to KR1020107005843A priority Critical patent/KR101492297B1/ko
Priority to US12/678,207 priority patent/US8557376B2/en
Priority to CN2008801059113A priority patent/CN101795817B/zh
Publication of WO2009041422A1 publication Critical patent/WO2009041422A1/ja

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249981—Plural void-containing components
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249987—With nonvoid component of specified composition
    • Y10T428/249988—Of about the same composition as, and adjacent to, the void-containing component
    • Y10T428/249989—Integrally formed skin
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249987—With nonvoid component of specified composition
    • Y10T428/249991—Synthetic resin or natural rubbers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

被研磨物のスクラッチやロールオフの発生を抑制して平坦性を向上させることができる研磨パッドを提供する。研磨パッド（１）は、被研磨物を研磨加工するための研磨面（Ｐ）を有するポリウレタンシート（２）と、研磨面（Ｐ）の反対面側に接合され弾性を有する弾性シート（３）とを備えている。ポリウレタンシート（２）は、圧縮率が弾性シート（３）より大きく設定されており、Ａ硬度が９０度以下に設定されている。また、ポリウレタンシート（２）および弾性シート（３）は、いずれも、厚みが０．２ｍｍ以上に形成されている。研磨加工時にポリウレタンシート（２）の柔軟さが発揮され、ポリウレタンシート（２）が変形しつつ研磨面（Ｐ）が被研磨物に略均等に押し付けられる。
PCT/JP2008/067165 2007-09-28 2008-09-24 研磨パッド WO2009041422A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020107005843A KR101492297B1 (ko) 2007-09-28 2008-09-24 연마 패드
US12/678,207 US8557376B2 (en) 2007-09-28 2008-09-24 Polishing pad
CN2008801059113A CN101795817B (zh) 2007-09-28 2008-09-24 研磨垫

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007253636A JP5078527B2 (ja) 2007-09-28 2007-09-28 研磨布
JP2007-253636 2007-09-28

Publications (1)

Publication Number Publication Date
WO2009041422A1 true WO2009041422A1 (ja) 2009-04-02

Family

ID=40511306

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/067165 WO2009041422A1 (ja) 2007-09-28 2008-09-24 研磨パッド

Country Status (7)

Country Link
US (1) US8557376B2 (ja)
JP (1) JP5078527B2 (ja)
KR (1) KR101492297B1 (ja)
CN (1) CN101795817B (ja)
MY (1) MY159345A (ja)
TW (1) TWI415712B (ja)
WO (1) WO2009041422A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102844152A (zh) * 2010-03-30 2012-12-26 旭硝子株式会社 玻璃基板保持用膜体及玻璃基板的研磨方法
CN107839140A (zh) * 2016-09-19 2018-03-27 简单绿能股份有限公司 具有多纹路性的发泡垫体制程

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JP5544131B2 (ja) * 2009-09-03 2014-07-09 富士紡ホールディングス株式会社 研磨パッド
JP5371661B2 (ja) * 2009-09-28 2013-12-18 富士紡ホールディングス株式会社 研磨パッド
JP5501722B2 (ja) * 2009-09-30 2014-05-28 富士紡ホールディングス株式会社 研磨パッドおよび研磨パッドの製造方法
JP5501719B2 (ja) * 2009-09-30 2014-05-28 富士紡ホールディングス株式会社 シート状研磨部材
JP5587636B2 (ja) * 2010-03-01 2014-09-10 富士紡ホールディングス株式会社 研磨パッド
JP5502542B2 (ja) * 2010-03-25 2014-05-28 富士紡ホールディングス株式会社 研磨パッド
JP5608398B2 (ja) * 2010-03-26 2014-10-15 富士紡ホールディングス株式会社 研磨パッド
JP5479189B2 (ja) * 2010-03-31 2014-04-23 富士紡ホールディングス株式会社 シート材の選択方法
TWI510328B (zh) * 2010-05-03 2015-12-01 Iv Technologies Co Ltd 基底層、包括此基底層的研磨墊及研磨方法
TWI481470B (zh) * 2010-10-13 2015-04-21 San Fang Chemical Industry Co 吸附墊片及其製造方法
CN104105575B (zh) * 2011-11-29 2017-11-14 嘉柏微电子材料股份公司 具有基层和抛光表面层的抛光垫
JP5759888B2 (ja) * 2011-12-28 2015-08-05 東洋ゴム工業株式会社 研磨パッド
JP5844189B2 (ja) * 2012-03-26 2016-01-13 富士紡ホールディングス株式会社 研磨パッド及び研磨パッドの製造方法
TW201507814A (zh) * 2013-08-16 2015-03-01 San Fang Chemical Industry Co 製造硏磨墊及硏磨裝置之方法
US20150056895A1 (en) * 2013-08-22 2015-02-26 Cabot Microelectronics Corporation Ultra high void volume polishing pad with closed pore structure
JP6399393B2 (ja) * 2014-09-26 2018-10-03 富士紡ホールディングス株式会社 研磨パッド
US9873180B2 (en) 2014-10-17 2018-01-23 Applied Materials, Inc. CMP pad construction with composite material properties using additive manufacturing processes
US11745302B2 (en) 2014-10-17 2023-09-05 Applied Materials, Inc. Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process
US10875153B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Advanced polishing pad materials and formulations
US9776361B2 (en) * 2014-10-17 2017-10-03 Applied Materials, Inc. Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles
CN107078048B (zh) 2014-10-17 2021-08-13 应用材料公司 使用加成制造工艺的具复合材料特性的cmp衬垫建构
US10124463B2 (en) * 2015-02-03 2018-11-13 Johnny Blox, Llc Sanding pad
WO2017074773A1 (en) 2015-10-30 2017-05-04 Applied Materials, Inc. An apparatus and method of forming a polishing article that has a desired zeta potential
US10593574B2 (en) 2015-11-06 2020-03-17 Applied Materials, Inc. Techniques for combining CMP process tracking data with 3D printed CMP consumables
US10391605B2 (en) 2016-01-19 2019-08-27 Applied Materials, Inc. Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process
CN106826541B (zh) * 2017-03-09 2019-03-29 佛山市金辉高科光电材料股份有限公司 一种抛光垫及其制备方法
US11471999B2 (en) 2017-07-26 2022-10-18 Applied Materials, Inc. Integrated abrasive polishing pads and manufacturing methods
WO2019032286A1 (en) 2017-08-07 2019-02-14 Applied Materials, Inc. ABRASIVE DISTRIBUTION POLISHING PADS AND METHODS OF MAKING SAME
EP3549719B1 (en) * 2018-03-20 2021-09-29 Dong Guan Golden Sun Abrasives Co., Ltd. An elastic polishing composite tool
JP7299970B2 (ja) 2018-09-04 2023-06-28 アプライド マテリアルズ インコーポレイテッド 改良型研磨パッドのための配合物
KR20200028097A (ko) * 2018-09-06 2020-03-16 에스케이실트론 주식회사 웨이퍼 연마 장치용 연마패드
KR102607586B1 (ko) * 2018-11-05 2023-11-30 삼성디스플레이 주식회사 기판 지지 장치 및 이를 이용한 기판 연마 방법
KR102173453B1 (ko) * 2019-03-29 2020-11-03 노백남 디스플레이 연마용 세정 패드 및 이의 제조방법
JP7264775B2 (ja) * 2019-09-03 2023-04-25 エヌ・ティ・ティ・アドバンステクノロジ株式会社 光コネクタ研磨用パッド
US11813712B2 (en) 2019-12-20 2023-11-14 Applied Materials, Inc. Polishing pads having selectively arranged porosity
US11806829B2 (en) 2020-06-19 2023-11-07 Applied Materials, Inc. Advanced polishing pads and related polishing pad manufacturing methods
US11878389B2 (en) 2021-02-10 2024-01-23 Applied Materials, Inc. Structures formed using an additive manufacturing process for regenerating surface texture in situ

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JP2004323679A (ja) * 2003-04-24 2004-11-18 Toyo Ink Mfg Co Ltd 両面粘着シート及び研磨布積層体
JP2006187838A (ja) * 2005-01-06 2006-07-20 Toyo Tire & Rubber Co Ltd 研磨パッド及び半導体デバイスの製造方法
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JP2006527923A (ja) * 2003-06-17 2006-12-07 キャボット マイクロエレクトロニクス コーポレイション Ｃｍｐ用多層研磨パッド材料
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102844152A (zh) * 2010-03-30 2012-12-26 旭硝子株式会社 玻璃基板保持用膜体及玻璃基板的研磨方法
CN107839140A (zh) * 2016-09-19 2018-03-27 简单绿能股份有限公司 具有多纹路性的发泡垫体制程
CN107839140B (zh) * 2016-09-19 2019-12-17 简单绿能股份有限公司 具有多纹路性的发泡垫体制程

Also Published As

Publication number Publication date
KR101492297B1 (ko) 2015-02-11
US20100210197A1 (en) 2010-08-19
CN101795817B (zh) 2012-05-30
KR20100072193A (ko) 2010-06-30
JP5078527B2 (ja) 2012-11-21
TWI415712B (zh) 2013-11-21
JP2009083014A (ja) 2009-04-23
US8557376B2 (en) 2013-10-15
MY159345A (en) 2016-12-30
CN101795817A (zh) 2010-08-04
TW200918242A (en) 2009-05-01

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