TW200640561A - Purification of nitrogen trifluoride - Google Patents

Purification of nitrogen trifluoride

Info

Publication number
TW200640561A
TW200640561A TW095111790A TW95111790A TW200640561A TW 200640561 A TW200640561 A TW 200640561A TW 095111790 A TW095111790 A TW 095111790A TW 95111790 A TW95111790 A TW 95111790A TW 200640561 A TW200640561 A TW 200640561A
Authority
TW
Taiwan
Prior art keywords
purification
nitrogen trifluoride
impurities
adsorption
sieve
Prior art date
Application number
TW095111790A
Other languages
English (en)
Inventor
Rajiv R Singh
David F Orlowski
Matthew H Luly
Martin R Paonessa
Original Assignee
Honeywell Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Int Inc filed Critical Honeywell Int Inc
Publication of TW200640561A publication Critical patent/TW200640561A/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
    • C01B21/0832—Binary compounds of nitrogen with halogens
    • C01B21/0835—Nitrogen trifluoride
    • C01B21/0837—Purification
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
TW095111790A 2005-04-07 2006-04-03 Purification of nitrogen trifluoride TW200640561A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/100,684 US7384618B2 (en) 2005-04-07 2005-04-07 Purification of nitrogen trifluoride

Publications (1)

Publication Number Publication Date
TW200640561A true TW200640561A (en) 2006-12-01

Family

ID=36578833

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095111790A TW200640561A (en) 2005-04-07 2006-04-03 Purification of nitrogen trifluoride

Country Status (9)

Country Link
US (1) US7384618B2 (zh)
EP (1) EP1866241A1 (zh)
JP (1) JP2008537720A (zh)
KR (1) KR20070116258A (zh)
CN (1) CN101189185A (zh)
RU (1) RU2007140787A (zh)
TW (1) TW200640561A (zh)
WO (1) WO2006110270A1 (zh)
ZA (1) ZA200708536B (zh)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2392981T3 (es) * 2004-07-08 2012-12-17 Hyosung Corporation Procedimiento para refinar gas de trifluoruro de nitrógeno usando zeolita intercambiada iónicamente con un metal alcalinotérreo
JP2008505831A (ja) * 2004-07-08 2008-02-28 ヒョスン・コーポレーション アルカリ土類金属でイオン交換および含浸されたゼオライトを用いた三フッ化窒素ガスの精製方法
KR100703875B1 (ko) * 2005-09-07 2007-04-04 주식회사 소디프신소재 삼불화질소의 정제방법
CN101913578A (zh) * 2010-08-30 2010-12-15 天津市泰源工业气体有限公司 一种吸附法去除三氟化氮中的杂质制备高纯三氟化氮的技术
US8163262B1 (en) 2011-01-04 2012-04-24 Omotowa Bamidele A Method for production of nitrogen trifluoride from trimethylsilylamines
DE112013000924B4 (de) 2012-02-10 2021-07-29 Orion Engineered Seals, Llc Labyrinthdichtung
KR101514801B1 (ko) * 2013-06-25 2015-04-24 (주)파인텍 과불화화합물의 분리 및 재활용시스템
US9302214B2 (en) * 2014-08-22 2016-04-05 Air Products And Chemicals, Inc. Purification of nitrogen trifluoride by pressure swing absorption
KR101717369B1 (ko) * 2015-08-20 2017-03-17 오씨아이 주식회사 불화 온실 가스의 정제 방법
CN114288812A (zh) * 2021-11-30 2022-04-08 浙江大学 一种分离含氟电子特气的方法
CN114307517B (zh) * 2021-12-31 2022-10-11 天津大学浙江绍兴研究院 惰性气体保护的高纯全氟碳电子特气吸附纯化方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3125425A (en) 1964-03-17 Separation of gaseous fluosides
US4091081A (en) 1977-04-19 1978-05-23 Air Products And Chemicals, Inc. Preparation of nitrogen trifluoride
JPH0798648B2 (ja) 1990-01-10 1995-10-25 セントラル硝子株式会社 Ｎｆ３ガスの精製方法
US5069690A (en) 1991-02-21 1991-12-03 Air Products And Chemicals, Inc. Process for kinetic gas-solid chromatographic separations
US5759237A (en) * 1996-06-14 1998-06-02 L'air Liquide Societe Anonyme Pour L'etude Et, L'exploitation Des Procedes Georges Claude Process and system for selective abatement of reactive gases and recovery of perfluorocompound gases
JP2953513B2 (ja) 1997-02-11 1999-09-27 エアー．プロダクツ．アンド．ケミカルス．インコーポレーテッド 三フッ化窒素含有混合物から水と亜酸化窒素を除去する方法
US6458249B2 (en) * 1997-11-10 2002-10-01 E. I. Du Pont De Nemours And Company Process for purifying perfluorinated products
ID30297A (id) 2000-05-17 2001-11-22 Asahi Glass Co Ltd Metode untuk mengolah suatu gas
JP2002035527A (ja) 2000-07-26 2002-02-05 Japan Atom Energy Res Inst ガス分離装置
JP2002068717A (ja) * 2000-08-31 2002-03-08 Nippon Sanso Corp 三フッ化窒素の精製方法
RU2206499C1 (ru) * 2002-02-26 2003-06-20 Игумнов Сергей Михайлович Способ очистки газообразного трифторида азота
US7074378B2 (en) * 2004-01-23 2006-07-11 Air Products And Chemicals, Inc. Process for the purification of NF3

Also Published As

Publication number Publication date
EP1866241A1 (en) 2007-12-19
ZA200708536B (en) 2009-01-28
US20060228285A1 (en) 2006-10-12
WO2006110270A1 (en) 2006-10-19
CN101189185A (zh) 2008-05-28
JP2008537720A (ja) 2008-09-25
KR20070116258A (ko) 2007-12-07
RU2007140787A (ru) 2009-05-20
US7384618B2 (en) 2008-06-10

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