KR100703875B1 - 삼불화질소의 정제방법 - Google Patents
삼불화질소의 정제방법 Download PDFInfo
- Publication number
- KR100703875B1 KR100703875B1 KR1020050083015A KR20050083015A KR100703875B1 KR 100703875 B1 KR100703875 B1 KR 100703875B1 KR 1020050083015 A KR1020050083015 A KR 1020050083015A KR 20050083015 A KR20050083015 A KR 20050083015A KR 100703875 B1 KR100703875 B1 KR 100703875B1
- Authority
- KR
- South Korea
- Prior art keywords
- nitrogen trifluoride
- carbon tetrafluoride
- ppm
- trifluoride
- boiled
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
- C01B21/0832—Binary compounds of nitrogen with halogens
- C01B21/0835—Nitrogen trifluoride
- C01B21/0837—Purification
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Separation By Low-Temperature Treatments (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
Claims (6)
- 35 내지 45 atm의 압력조건 및 -38 내지 -50℃의 온도조건 하에서, 사불화탄소(CF4)를 함유하는 액상의 삼불화질소(NF3)를 그 액상을 보지(保持)하면서 비등시켜 상기 삼불화질소 중에 함유되어 있는 사불화탄소를 탈기제거하는 것을 포함하는, 삼불화질소의 정제방법.
- 삭제
- 제 1 항에 있어서,비등되는 액상 삼불화질소에 불활성 가스를 공급하는 것을 특징으로 하는 방법.
- 제 1 항에 있어서,비등된 기상 사불화탄소를 충전부 또는 트레이(tray)에서 포집하여 배출하는 것을 특징으로 하는 방법.
- 제 1 항에 있어서,정제되지 않은 액상의 삼불화질소 중에 함유되어 있는 사불화탄소의 양이 10 내지 100 ppm인 것을 특징으로 하는 방법.
- 제 1 항에 있어서,정제 후 삼불화질소 중의 사불화탄소의 양이 10 ppm 미만인 것을 특징으로 하는 방법.
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050083015A KR100703875B1 (ko) | 2005-09-07 | 2005-09-07 | 삼불화질소의 정제방법 |
PCT/KR2006/003450 WO2007029940A1 (en) | 2005-09-07 | 2006-08-31 | Method for purifying nitrogen trifluoride |
US12/064,468 US7569122B2 (en) | 2005-09-07 | 2006-08-31 | Method for purifying nitrogen trifluoride |
CN2006800322066A CN101258104B (zh) | 2005-09-07 | 2006-08-31 | 用于纯化三氟化氮的方法 |
JP2008529913A JP4199305B1 (ja) | 2005-09-07 | 2006-08-31 | 三フッ化窒素の精製方法 |
TW095132860A TWI344939B (en) | 2005-09-07 | 2006-09-06 | Method for purifying nitrogen trifluoride |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050083015A KR100703875B1 (ko) | 2005-09-07 | 2005-09-07 | 삼불화질소의 정제방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20070028734A KR20070028734A (ko) | 2007-03-13 |
KR100703875B1 true KR100703875B1 (ko) | 2007-04-04 |
Family
ID=37836028
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020050083015A KR100703875B1 (ko) | 2005-09-07 | 2005-09-07 | 삼불화질소의 정제방법 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7569122B2 (ko) |
JP (1) | JP4199305B1 (ko) |
KR (1) | KR100703875B1 (ko) |
CN (1) | CN101258104B (ko) |
TW (1) | TWI344939B (ko) |
WO (1) | WO2007029940A1 (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130341178A1 (en) * | 2012-06-21 | 2013-12-26 | Air Products And Chemicals Inc. | Method and Apparatus for Removing Contaminants from Nitrogen Trifluoride |
US9302214B2 (en) | 2014-08-22 | 2016-04-05 | Air Products And Chemicals, Inc. | Purification of nitrogen trifluoride by pressure swing absorption |
RU2744357C1 (ru) * | 2020-07-14 | 2021-03-05 | Федеральное государственное бюджетное учреждение науки «Федеральный исследовательский центр «Институт катализа им. Г.К. Борескова Сибирского отделения Российской академии наук» (Институт катализа СО РАН, ИК СО РАН) | Способ очистки трифторида азота от примеси тетрафторида углерода |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5069887A (en) | 1990-01-10 | 1991-12-03 | Central Glass Company, Limited | Method of refining nitrogen trifluoride gas |
JPH0570112A (ja) * | 1991-02-21 | 1993-03-23 | Air Prod And Chem Inc | Nf3とcf4の混合物から精製nf3の回収法 |
KR20010031951A (ko) * | 1997-11-10 | 2001-04-16 | 메리 이. 보울러 | 과불화 생성물을 정제하는 방법 |
KR20030070836A (ko) * | 2002-02-26 | 2003-09-02 | 자크리토에 악치오네르노에 오브쉐스트보 나우치노-프로이즈보드스트베노에 오비에디네니에 "핌-인베스트" | 기체상태의 삼불화질소 정제 방법 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0755807B2 (ja) * | 1987-11-04 | 1995-06-14 | 三井東圧化学株式会社 | 三弗化窒素の製造方法 |
US7384618B2 (en) * | 2005-04-07 | 2008-06-10 | Honeywell International Inc. | Purification of nitrogen trifluoride |
-
2005
- 2005-09-07 KR KR1020050083015A patent/KR100703875B1/ko active IP Right Grant
-
2006
- 2006-08-31 WO PCT/KR2006/003450 patent/WO2007029940A1/en active Application Filing
- 2006-08-31 JP JP2008529913A patent/JP4199305B1/ja active Active
- 2006-08-31 CN CN2006800322066A patent/CN101258104B/zh active Active
- 2006-08-31 US US12/064,468 patent/US7569122B2/en active Active
- 2006-09-06 TW TW095132860A patent/TWI344939B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5069887A (en) | 1990-01-10 | 1991-12-03 | Central Glass Company, Limited | Method of refining nitrogen trifluoride gas |
JPH0570112A (ja) * | 1991-02-21 | 1993-03-23 | Air Prod And Chem Inc | Nf3とcf4の混合物から精製nf3の回収法 |
KR20010031951A (ko) * | 1997-11-10 | 2001-04-16 | 메리 이. 보울러 | 과불화 생성물을 정제하는 방법 |
KR20030070836A (ko) * | 2002-02-26 | 2003-09-02 | 자크리토에 악치오네르노에 오브쉐스트보 나우치노-프로이즈보드스트베노에 오비에디네니에 "핌-인베스트" | 기체상태의 삼불화질소 정제 방법 |
Also Published As
Publication number | Publication date |
---|---|
CN101258104B (zh) | 2011-09-14 |
TWI344939B (en) | 2011-07-11 |
US20090142248A1 (en) | 2009-06-04 |
TW200720184A (en) | 2007-06-01 |
CN101258104A (zh) | 2008-09-03 |
WO2007029940A1 (en) | 2007-03-15 |
KR20070028734A (ko) | 2007-03-13 |
JP2009506977A (ja) | 2009-02-19 |
US7569122B2 (en) | 2009-08-04 |
JP4199305B1 (ja) | 2008-12-17 |
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