TW200622542A - Fluid control device - Google Patents

Fluid control device

Info

Publication number
TW200622542A
TW200622542A TW094129983A TW94129983A TW200622542A TW 200622542 A TW200622542 A TW 200622542A TW 094129983 A TW094129983 A TW 094129983A TW 94129983 A TW94129983 A TW 94129983A TW 200622542 A TW200622542 A TW 200622542A
Authority
TW
Taiwan
Prior art keywords
fluid
control device
ultrasonic transducer
fluid control
control valve
Prior art date
Application number
TW094129983A
Other languages
English (en)
Chinese (zh)
Other versions
TWI369598B (cg-RX-API-DMAC10.html
Inventor
Takashi Yamamoto
Original Assignee
Asahi Organic Chem Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Organic Chem Ind filed Critical Asahi Organic Chem Ind
Publication of TW200622542A publication Critical patent/TW200622542A/zh
Application granted granted Critical
Publication of TWI369598B publication Critical patent/TWI369598B/zh

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/126—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0418—Apparatus for fluid treatment for etching
    • H10P72/0422—Apparatus for fluid treatment for etching for wet etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
  • Fluid-Driven Valves (AREA)
TW094129983A 2004-08-31 2005-08-31 Fluid control device TW200622542A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004253501A JP4461329B2 (ja) 2004-08-31 2004-08-31 流体制御装置

Publications (2)

Publication Number Publication Date
TW200622542A true TW200622542A (en) 2006-07-01
TWI369598B TWI369598B (cg-RX-API-DMAC10.html) 2012-08-01

Family

ID=36000116

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094129983A TW200622542A (en) 2004-08-31 2005-08-31 Fluid control device

Country Status (5)

Country Link
US (1) US7650903B2 (cg-RX-API-DMAC10.html)
JP (1) JP4461329B2 (cg-RX-API-DMAC10.html)
KR (1) KR101114598B1 (cg-RX-API-DMAC10.html)
TW (1) TW200622542A (cg-RX-API-DMAC10.html)
WO (1) WO2006025467A1 (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI413880B (zh) * 2006-07-05 2013-11-01 Hitachi Metals Ltd 用於利用多模式控制演算法來控制流體之流量的方法及設備

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100714985B1 (ko) 2002-07-19 2007-05-09 엔테그리스, 아이엔씨. 액체 유동 제어기와 정밀 분배 장치 및 시스템
JP2006070946A (ja) * 2004-08-31 2006-03-16 Asahi Organic Chem Ind Co Ltd 調節弁
JP2007058352A (ja) * 2005-08-22 2007-03-08 Asahi Organic Chem Ind Co Ltd 流体制御装置
JP2007058337A (ja) * 2005-08-22 2007-03-08 Asahi Organic Chem Ind Co Ltd 流体制御装置
US20070204914A1 (en) * 2006-03-01 2007-09-06 Asahi Organic Chemicals Industry Co., Ltd. Fluid mixing system
US20070204913A1 (en) * 2006-03-01 2007-09-06 Asahi Organic Chemicals Industry Co., Ltd. Fluid mixing system
JP4877602B2 (ja) * 2007-02-15 2012-02-15 横河電機株式会社 渦流量計
US8265794B2 (en) * 2007-10-01 2012-09-11 Westlock Controls Corporation Knowledge based valve control method
US8201580B2 (en) 2008-01-14 2012-06-19 Sti Srl High flow capacity positioner
US20090212248A1 (en) * 2008-02-27 2009-08-27 Eugeniusz Kozak Solenoid-actuated diaphragm valve
JP5132589B2 (ja) * 2009-01-20 2013-01-30 株式会社Ｌｉｘｉｌ パイロット式流量制御バルブ
JP5887188B2 (ja) * 2012-04-12 2016-03-16 株式会社堀場エステック 流体制御用機器
JP5969869B2 (ja) * 2012-09-14 2016-08-17 株式会社堀場エステック 流量制御装置及び流量制御装置用プログラム
JP5995657B2 (ja) * 2012-10-24 2016-09-21 旭有機材株式会社 超音波流量計製造方法及びこれにより製造した超音波流量計並びに超音波流量計を備える流体制御装置
JP2014085254A (ja) * 2012-10-24 2014-05-12 Asahi Organic Chemicals Industry Co Ltd 超音波流量計及びこれを備える流体制御装置
JP2014095575A (ja) * 2012-11-08 2014-05-22 Asahi Organic Chemicals Industry Co Ltd 超音波流量計製造方法、超音波流量計及び超音波流量計を備える流体制御装置
JP6093206B2 (ja) * 2013-03-07 2017-03-08 サーパス工業株式会社 流量調整装置
CN205026183U (zh) 2014-03-18 2016-02-10 费希尔控制国际公司 电动气动变换器、开关阀及闭锁式电动气动变换器
WO2015148988A1 (en) * 2014-03-28 2015-10-01 Bray Internatal, Inc. Pressure independent control valve for small diameter flow, energy use and/or transfer
FR3021363B1 (fr) * 2014-05-21 2019-05-03 Safran Aircraft Engines Dispositif de regulation de debit ameliore ayant une masse reduite
WO2016057797A1 (en) 2014-10-08 2016-04-14 Air Products And Chemicals, Inc. Low pressure fluctuation flow control apparatus and method
CH711558A1 (en) 2015-09-22 2017-03-31 Belimo Holding Ag Electronic pressure flow regulator.
JP6651323B2 (ja) * 2015-10-02 2020-02-19 サーパス工業株式会社 流量調整装置
CN109073437B (zh) * 2016-04-28 2021-03-19 卡姆鲁普股份有限公司 水表平台
JP6751609B2 (ja) * 2016-07-05 2020-09-09 サーパス工業株式会社 流量調整装置
CN118190081A (zh) * 2016-07-21 2024-06-14 罗斯蒙特公司 具有减小的过程侵入的涡旋流量计
US10539251B2 (en) * 2017-06-30 2020-01-21 Fisher Controls International Llc Integrated transducer
MX2020007983A (es) * 2018-02-01 2020-10-16 Reliance Worldwide Corp Tubo de flujo para alojar un medidor de flujo y una valvula de cierre.
WO2019152041A1 (en) 2018-02-01 2019-08-08 Reliance Worldwide Corporation Sensor mount
CN110735930A (zh) * 2018-07-18 2020-01-31 北京七星华创流量计有限公司 气体流量调节装置及质量流量控制器
CN108953273B (zh) * 2018-09-17 2024-02-23 杜商精机（嘉兴）有限公司 一种机器人专用液压控制阀
CN112664655B (zh) * 2019-10-15 2022-09-20 宝山钢铁股份有限公司 一种高可靠性的冷轧机精细冷却喷射阀
EP3910294B1 (de) * 2020-05-11 2024-01-31 Siemens Schweiz AG Bestimmung des mischungsverhältnisses insbesondere eines wasser-/glykol-gemischs mittels ultraschall sowie eine darauf basierende wärmestrommessung
CN113431919B (zh) * 2021-07-19 2023-07-28 高砂电气(苏州)有限公司 便于微量调节的比例调节阀
US12704394B2 (en) 2022-02-07 2026-08-11 Alarm.Com Incorporated Ultrasonic flow sensor
GB2627258A (en) * 2023-02-17 2024-08-21 Parker Hannifin Emea Sarl Proportional vacuum valve apparatus
CN118347547B (zh) * 2024-04-23 2025-01-10 刘虎平 一种压力传感器及其流量零点修正装置

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4573489A (en) * 1984-03-06 1986-03-04 Murphy Management, Inc. Dump valve
JPH0639294Y2 (ja) * 1987-04-10 1994-10-12 関西日本電気株式会社 マスフロ−コントロ−ラ
JPH01134213A (ja) * 1987-11-19 1989-05-26 Tokico Ltd 流量計
US4872638A (en) * 1988-01-29 1989-10-10 Semitool, Inc. Slow acting fluid valve
JPH05240370A (ja) 1992-02-26 1993-09-17 Motoyama Seisakusho:Kk アクチュエータ
JPH0639294A (ja) 1992-05-04 1994-02-15 W R Grace & Co 触媒式コンバーターのためのコア要素
JP3010912B2 (ja) 1992-06-11 2000-02-21 シーケーディ株式会社 空気圧制御による制御弁開閉速度及び流量調節装置
JPH0683456A (ja) * 1992-09-03 1994-03-25 M C Electron Kk マスフローコントローラ
US5549137A (en) 1993-08-25 1996-08-27 Rosemount Inc. Valve positioner with pressure feedback, dynamic correction and diagnostics
JPH09303609A (ja) * 1996-05-21 1997-11-28 Toshiba Corp 流量制御弁及びこれを用いた流量制御システム
JPH10122923A (ja) * 1996-10-15 1998-05-15 Tokyo Keiso Co Ltd 超音波流量計
JPH11161342A (ja) 1997-11-28 1999-06-18 Ckd Corp 純水流量の制御装置
JP3467438B2 (ja) * 1999-09-29 2003-11-17 アドバンス電気工業株式会社 背圧制御弁
JP4256999B2 (ja) 1999-10-27 2009-04-22 株式会社堀場エステック 液体流量制御機器
US6578435B2 (en) 1999-11-23 2003-06-17 Nt International, Inc. Chemically inert flow control with non-contaminating body
JP2001153239A (ja) 1999-11-26 2001-06-08 Asahi Organic Chem Ind Co Ltd ダイヤフラムバルブ
US6539968B1 (en) * 2000-09-20 2003-04-01 Fugasity Corporation Fluid flow controller and method of operation
JP3995543B2 (ja) 2002-07-03 2007-10-24 旭有機材工業株式会社 流体制御弁
JP2004164033A (ja) 2002-11-08 2004-06-10 Asahi Organic Chem Ind Co Ltd 流量制御装置
JP2004240590A (ja) 2003-02-04 2004-08-26 Hitachi Metals Ltd 質量流量制御器
JP2004302914A (ja) 2003-03-31 2004-10-28 Advanced Energy Japan Kk 一次側圧力のセンサを具えたマスフローコントローラ
JP3583123B1 (ja) * 2004-01-06 2004-10-27 株式会社東京フローメータ研究所 流量制御弁及び流量制御装置
US20060000509A1 (en) * 2004-07-01 2006-01-05 Pozniak Peter M Fluid flow control device and system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI413880B (zh) * 2006-07-05 2013-11-01 Hitachi Metals Ltd 用於利用多模式控制演算法來控制流體之流量的方法及設備

Also Published As

Publication number Publication date
JP2006072574A (ja) 2006-03-16
WO2006025467A1 (ja) 2006-03-09
KR20070044071A (ko) 2007-04-26
US20080294293A1 (en) 2008-11-27
JP4461329B2 (ja) 2010-05-12
KR101114598B1 (ko) 2012-03-05
US7650903B2 (en) 2010-01-26
TWI369598B (cg-RX-API-DMAC10.html) 2012-08-01

Similar Documents

Publication Publication Date Title
JP2006072574A5 (cg-RX-API-DMAC10.html)
SG145614A1 (en) System and method for flow monitoring and control
TW200611095A (en) A fluid control device
WO2003023330A3 (en) Clamp-on gas flowmeter
ATE392936T1 (de) Filterarmatur mit strömungszähler
EP1959242A3 (en) Flowmeter and flow control device
WO2006025467A1 (ja) 流体制御装置
WO2009111777A2 (en) Pipe with integrated process monitoring
CN104500904B (zh) 高压充液管路一体化集成有源消声器
TW354371B (en) A module valve manifold, a valve module and an integral valve manifold/differential pressure transducer/differential pressure transmitter
GB2426835A (en) System and method for controlling pressure in remote zones
US8459127B2 (en) Flowmeter body with a groove in a flowmeter outlet surface
CN206235367U (zh) 一种便携式弹簧流量计
CA2229962A1 (en) An interface apparatus for adapting a gas flow valve to a gas meter
ATE315716T1 (de) Druckimpulsgenerator für bohrlochmessung während des bohrens
RU2389057C2 (ru) Технологическое соединение для диагностики технологического процесса
WO2005031369A3 (de) Ultraschallsensor und verfahren zur messung von strömungsgeschwindigkeiten
JP2006072460A5 (cg-RX-API-DMAC10.html)
JP2003278191A (ja) 減圧逆流防止装置
CN210856009U (zh) 一种防漏气乙炔发生装置
CN204403664U (zh) 高压充液管路一体化集成有源消声器
CN203772812U (zh) 气相色谱仪用气压调压阀
MX2021008648A (es) Medidores de gas ultrasonicos y tubos de flujos relacionados.
JP4549136B2 (ja) 流体制御装置
JP2008088679A5 (cg-RX-API-DMAC10.html)

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees