TW200506401A - Method of inspecting substrate - Google Patents

Method of inspecting substrate

Info

Publication number
TW200506401A
TW200506401A TW093116271A TW93116271A TW200506401A TW 200506401 A TW200506401 A TW 200506401A TW 093116271 A TW093116271 A TW 093116271A TW 93116271 A TW93116271 A TW 93116271A TW 200506401 A TW200506401 A TW 200506401A
Authority
TW
Taiwan
Prior art keywords
array region
pixel electrodes
common terminal
inspecting substrate
circuit formed
Prior art date
Application number
TW093116271A
Other languages
English (en)
Inventor
Masaki Miyatake
Mitsuhiro Yamamoto
Original Assignee
Toshiba Matsushita Display Tec
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Matsushita Display Tec filed Critical Toshiba Matsushita Display Tec
Publication of TW200506401A publication Critical patent/TW200506401A/zh

Links

Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136254—Checking; Testing

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Liquid Crystal (AREA)
  • Mathematical Physics (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
TW093116271A 2003-06-06 2004-06-04 Method of inspecting substrate TW200506401A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003162204 2003-06-06

Publications (1)

Publication Number Publication Date
TW200506401A true TW200506401A (en) 2005-02-16

Family

ID=33508658

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093116271A TW200506401A (en) 2003-06-06 2004-06-04 Method of inspecting substrate

Country Status (6)

Country Link
US (1) US20060103416A1 (zh)
JP (1) JPWO2004109375A1 (zh)
KR (1) KR20060024398A (zh)
CN (1) CN1802591A (zh)
TW (1) TW200506401A (zh)
WO (1) WO2004109375A1 (zh)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060020651A (ko) * 2003-06-04 2006-03-06 도시바 마쯔시따 디스플레이 테크놀로지 컴퍼니, 리미티드 어레이 기판의 검사 방법
WO2004109377A1 (ja) * 2003-06-06 2004-12-16 Toshiba Matsushita Display Technology Co., Ltd. アレイ基板およびアレイ基板の検査方法
WO2005085939A1 (ja) * 2004-03-03 2005-09-15 Toshiba Matsushita Display Technology Co., Ltd. アレイ基板の検査方法
US7256606B2 (en) * 2004-08-03 2007-08-14 Applied Materials, Inc. Method for testing pixels for LCD TFT displays
KR100780759B1 (ko) * 2005-01-24 2007-11-30 삼성전자주식회사 박막 트랜지스터 어레이 검사장치
DE102006015714B4 (de) 2006-04-04 2019-09-05 Applied Materials Gmbh Lichtunterstütztes Testen eines optoelektronischen Moduls
TWI400450B (zh) * 2009-09-30 2013-07-01 Chunghwa Picture Tubes Ltd 測試裝置
WO2011155044A1 (ja) * 2010-06-10 2011-12-15 株式会社島津製作所 Ｔｆｔアレイ検査の電子線走査方法およびｔｆｔアレイ検査装置
CN103513477B (zh) * 2012-06-26 2018-03-09 富泰华工业（深圳）有限公司 液晶显示器及其检测方法
JP2017003484A (ja) * 2015-06-12 2017-01-05 株式会社ジャパンディスプレイ 表示装置の検査装置、表示装置用マザー基板の検査方法、及び、表示装置
CN106057110B (zh) * 2016-08-04 2019-04-05 武汉华星光电技术有限公司 阵列测试电路及阵列测试方法
CN107479226A (zh) * 2017-09-27 2017-12-15 武汉华星光电技术有限公司 便携式缺陷检测仪
JP7438813B2 (ja) * 2020-03-27 2024-02-27 株式会社ジャパンディスプレイ アレイ基板の検査方法及び表示装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6348473A (ja) * 1986-08-19 1988-03-01 Matsushita Electric Ind Co Ltd 欠陥画素検査装置
JPH0821604B2 (ja) * 1987-10-30 1996-03-04 松下電器産業株式会社 欠陥画素の検査方法
JPH01134498A (ja) * 1987-11-20 1989-05-26 Matsushita Electric Ind Co Ltd Ｌｃｄアレイ基板検査方法
JPH073446B2 (ja) * 1988-05-18 1995-01-18 松下電器産業株式会社 スイッチング素子を有したアクティブ基板の欠陥検査装置および欠陥検査方法
JP2897939B2 (ja) * 1991-07-05 1999-05-31 株式会社アドバンテスト アクティブマトリックスアレイ検査装置
US5268638A (en) * 1991-07-15 1993-12-07 Siemens Aktiengesellschaft Method for particle beam testing of substrates for liquid crystal displays "LCD"
DE4206766A1 (de) * 1991-11-21 1993-09-09 Basf Ag Schlagzaeh modifizierte thermoplastische formmasse
JP2834935B2 (ja) * 1992-06-11 1998-12-14 シャープ株式会社 アクティブマトリクス型表示素子及びその製造方法
EP0640864B1 (en) * 1993-08-25 2001-12-12 Kabushiki Kaisha Toshiba Liquid crystal display apparatus and fabrication method thereof
JPH08122814A (ja) * 1994-10-18 1996-05-17 Matsushita Electric Ind Co Ltd 薄膜電子装置
JPH11101986A (ja) * 1997-09-26 1999-04-13 Sanyo Electric Co Ltd 表示装置及び表示装置用大基板
JP3481465B2 (ja) * 1998-07-14 2003-12-22 シャープ株式会社 アクティブマトリクス基板の集合基板
KR100324914B1 (ko) * 1998-09-25 2002-02-28 니시무로 타이죠 기판의 검사방법
JP2000267598A (ja) * 1999-03-18 2000-09-29 Toshiba Corp アレイ基板および液晶表示装置
JP2001013187A (ja) * 1999-06-30 2001-01-19 Toshiba Corp マトリクスアレイ装置及びマトリクスアレイ装置用基板
JP2003050380A (ja) * 2001-08-07 2003-02-21 Toshiba Corp アレイ基板の検査方法
US6933527B2 (en) * 2001-12-28 2005-08-23 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and semiconductor device production system

Also Published As

Publication number Publication date
WO2004109375A1 (ja) 2004-12-16
US20060103416A1 (en) 2006-05-18
JPWO2004109375A1 (ja) 2006-07-20
KR20060024398A (ko) 2006-03-16
CN1802591A (zh) 2006-07-12

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