TW200500185A - Substrate-processing table and device - Google Patents

Substrate-processing table and device

Info

Publication number
TW200500185A
TW200500185A TW093104227A TW93104227A TW200500185A TW 200500185 A TW200500185 A TW 200500185A TW 093104227 A TW093104227 A TW 093104227A TW 93104227 A TW93104227 A TW 93104227A TW 200500185 A TW200500185 A TW 200500185A
Authority
TW
Taiwan
Prior art keywords
substrate
sub
processing table
adsorption holes
metallic plate
Prior art date
Application number
TW093104227A
Other languages
English (en)
Inventor
Masanobu Soyama
Original Assignee
Mitsuboshi Diamond Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Ind Co Ltd filed Critical Mitsuboshi Diamond Ind Co Ltd
Publication of TW200500185A publication Critical patent/TW200500185A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06—Work-clamping means
    • B23Q3/08—Work-clamping means other than mechanically-actuated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/07—Cutting armoured, multi-layered, coated or laminated, glass products
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Jigs For Machine Tools (AREA)
TW093104227A 2003-02-21 2004-02-20 Substrate-processing table and device TW200500185A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003044077 2003-02-21

Publications (1)

Publication Number Publication Date
TW200500185A true TW200500185A (en) 2005-01-01

Family

ID=32905444

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093104227A TW200500185A (en) 2003-02-21 2004-02-20 Substrate-processing table and device

Country Status (7)

Country Link
US (1) US20070063402A1 (zh)
EP (1) EP1598163A1 (zh)
JP (1) JPWO2004073946A1 (zh)
KR (1) KR20050102097A (zh)
CN (1) CN1750917A (zh)
TW (1) TW200500185A (zh)
WO (1) WO2004073946A1 (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI451523B (zh) * 2009-03-30 2014-09-01 Mitsuboshi Diamond Ind Co Ltd Substrate fixing device
TWI463593B (zh) * 2012-01-18 2014-12-01 Himax Tech Ltd 對位系統
TWI774911B (zh) * 2018-02-21 2022-08-21 日商三星鑽石工業股份有限公司 裂斷裝置、裂斷方法、及裂斷板

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5318324B2 (ja) * 2005-12-06 2013-10-16 東京応化工業株式会社 サポートプレートの貼り合わせ方法
JP5246583B2 (ja) * 2008-02-29 2013-07-24 旭硝子株式会社 ガラス基板吸着テーブル、及びガラス基板加工方法
JP5185380B2 (ja) * 2008-06-18 2013-04-17 三星ダイヤモンド工業株式会社 基板加工システム
JP5284726B2 (ja) * 2008-08-29 2013-09-11 三星ダイヤモンド工業株式会社 脆性材料ブレーク装置
JP5284725B2 (ja) * 2008-08-29 2013-09-11 三星ダイヤモンド工業株式会社 脆性材料ブレーク装置
CN102004293B (zh) * 2009-09-02 2014-04-23 鸿富锦精密工业（深圳）有限公司 光学元件取放装置及取放多个光学元件的方法
JP5574723B2 (ja) * 2010-01-27 2014-08-20 京セラ株式会社 基板分割装置
JP5129826B2 (ja) * 2010-02-05 2013-01-30 三星ダイヤモンド工業株式会社 脆性材料基板のブレイク方法
CN102179881A (zh) * 2011-04-01 2011-09-14 石金精密科技（深圳）有限公司 平面薄板吸附固定系统
CN102335972A (zh) * 2011-10-24 2012-02-01 无锡绿波新能源设备有限公司 真空吸盘
JP5296897B1 (ja) * 2012-03-14 2013-09-25 ファナック株式会社 ワーククランプ治具を用いたワーク加工方法およびワーククランプ治具
JP5918003B2 (ja) * 2012-04-27 2016-05-18 Ｔｏｗａ株式会社 個片化装置用真空吸着シート及びそれを用いた固定治具の製造方法
JP5961064B2 (ja) * 2012-07-31 2016-08-02 三星ダイヤモンド工業株式会社 吸着テーブルの製造方法並びに吸着テーブル
CN105164072A (zh) * 2012-11-28 2015-12-16 康宁股份有限公司 衬垫、形成划刻痕迹的方法以及切割玻璃板的方法
CN102962735B (zh) * 2012-11-30 2015-08-26 烟台鑫海矿山机械有限公司 一种橡胶板打磨装置
KR101488783B1 (ko) * 2013-06-10 2015-02-06 파스텍(주) 레이저 패터닝 장치
KR101522001B1 (ko) * 2013-07-12 2015-05-21 금성연마공업 주식회사 연삭숫돌의 흡인 고정 절단장치
US9227261B2 (en) * 2013-08-06 2016-01-05 Globalfoundries Inc. Vacuum carriers for substrate bonding
CN103909430B (zh) * 2014-03-14 2016-03-02 上海幸福摩托车有限公司 变量机油泵泵体加工所用的夹紧装置
JP6287548B2 (ja) * 2014-04-28 2018-03-07 三星ダイヤモンド工業株式会社 脆性材料基板の端材分離方法及び端材分離装置
KR20150124201A (ko) * 2014-04-28 2015-11-05 삼성전자주식회사 반도체 패키지의 진공 흡착 장치 및 방법
JP6256178B2 (ja) * 2014-04-28 2018-01-10 三星ダイヤモンド工業株式会社 脆性材料基板のブレイク装置
CN103979786B (zh) * 2014-05-16 2015-12-09 深圳市华星光电技术有限公司 单板玻璃基板的切割方法
CN104843488B (zh) * 2015-04-10 2017-12-29 京东方科技集团股份有限公司 一种输出装置和切割裂片系统
KR102091756B1 (ko) * 2015-11-04 2020-03-20 한화정밀기계 주식회사 반도체 기판 진공 흡착 장치
CN105690186A (zh) * 2016-01-29 2016-06-22 宇龙计算机通信科技(深圳)有限公司 拉丝装置及拉丝方法
CN105643234A (zh) * 2016-04-11 2016-06-08 群光电子(苏州)有限公司 自动动态调整光学组装机传感器支架吸附载具
CN107718332B (zh) * 2017-10-23 2021-02-02 安徽中晶光技术股份有限公司 一种用于晶体线切割的通用装夹工装
JP2019111622A (ja) 2017-12-25 2019-07-11 三星ダイヤモンド工業株式会社 真空吸着方法及び真空吸着装置
CN108214965B (zh) * 2018-02-08 2024-03-12 常熟市创新陶瓷有限公司 大功率水泵轴叶轮定位平台的加工夹具及加工方法
CN108312090A (zh) * 2018-04-03 2018-07-24 深圳市石金科技股份有限公司 一种真空石墨夹具
CN109437536B (zh) * 2018-11-30 2021-01-15 武汉华星光电技术有限公司 切割裂片装置及切割裂片方法
WO2021134255A1 (zh) * 2019-12-30 2021-07-08 重庆康佳光电技术研究院有限公司 一种巨量转移装置及方法
CN111530971A (zh) * 2020-04-16 2020-08-14 何明琼 一种大型金属板体复位用板体固定支撑装置
CN111809731A (zh) * 2020-07-03 2020-10-23 徐亚楠 一种快速紧固安装的建筑钢结构

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63256326A (ja) * 1987-04-15 1988-10-24 Hitachi Ltd 真空チヤツクおよびその製造方法
JPH02130103A (ja) * 1988-11-11 1990-05-18 Toshiba Corp ダイシング用治具
JPH02139148A (ja) * 1988-11-14 1990-05-29 Nippon Seiko Kk 真空吸着テーブル
JP3043536B2 (ja) * 1993-03-26 2000-05-22 三星ダイヤモンド工業株式会社 ブレイキングテーブル
JP2002217276A (ja) * 2001-01-17 2002-08-02 Ushio Inc ステージ装置
JP4169565B2 (ja) * 2002-10-11 2008-10-22 三星ダイヤモンド工業株式会社 脆性材料基板のブレーク方法及びその装置並びに加工装置
JP3095230U (ja) * 2003-01-14 2003-07-25 三星ダイヤモンド工業株式会社 脆性材料基板の分断テーブル

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI451523B (zh) * 2009-03-30 2014-09-01 Mitsuboshi Diamond Ind Co Ltd Substrate fixing device
TWI463593B (zh) * 2012-01-18 2014-12-01 Himax Tech Ltd 對位系統
TWI774911B (zh) * 2018-02-21 2022-08-21 日商三星鑽石工業股份有限公司 裂斷裝置、裂斷方法、及裂斷板

Also Published As

Publication number Publication date
JPWO2004073946A1 (ja) 2006-06-01
WO2004073946A1 (ja) 2004-09-02
EP1598163A1 (en) 2005-11-23
US20070063402A1 (en) 2007-03-22
KR20050102097A (ko) 2005-10-25
CN1750917A (zh) 2006-03-22

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