SG99327A1 - Sheet removing apparatus and method - Google Patents

Sheet removing apparatus and method

Info

Publication number
SG99327A1
SG99327A1 SG200100098A SG200100098A SG99327A1 SG 99327 A1 SG99327 A1 SG 99327A1 SG 200100098 A SG200100098 A SG 200100098A SG 200100098 A SG200100098 A SG 200100098A SG 99327 A1 SG99327 A1 SG 99327A1
Authority
SG
Singapore
Prior art keywords
removing apparatus
sheet removing
sheet
Prior art date
Application number
SG200100098A
Other languages
English (en)
Inventor
Tsujimoto Masaki
Kobayashi Kenji
Kawasaki Kimihiko
Original Assignee
Lintec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lintec Corp filed Critical Lintec Corp
Publication of SG99327A1 publication Critical patent/SG99327A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1168—Gripping and pulling work apart during delaminating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1168—Gripping and pulling work apart during delaminating
    • Y10T156/1179—Gripping and pulling work apart during delaminating with poking during delaminating [e.g., jabbing, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/1978—Delaminating bending means
    • Y10T156/1983—Poking delaminating means

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Separation, Sorting, Adjustment, Or Bending Of Sheets To Be Conveyed (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
  • Dicing (AREA)
SG200100098A 2000-02-24 2001-01-05 Sheet removing apparatus and method SG99327A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000047647A JP4166920B2 (ja) 2000-02-24 2000-02-24 シート剥離装置および方法

Publications (1)

Publication Number Publication Date
SG99327A1 true SG99327A1 (en) 2003-10-27

Family

ID=18569866

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200100098A SG99327A1 (en) 2000-02-24 2001-01-05 Sheet removing apparatus and method

Country Status (7)

Country Link
US (1) US6616799B2 (zh)
EP (1) EP1128415B8 (zh)
JP (1) JP4166920B2 (zh)
KR (1) KR100560014B1 (zh)
DE (1) DE60142499D1 (zh)
SG (1) SG99327A1 (zh)
TW (1) TW588417B (zh)

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JP3441696B2 (ja) * 1999-04-22 2003-09-02 日本サーボ株式会社 チップマウンター用チップフィーダ
JP4502547B2 (ja) * 2000-08-07 2010-07-14 日東電工株式会社 半導体ウエハの保護テープ除去方法およびその装置
JP4266106B2 (ja) * 2001-09-27 2009-05-20 株式会社東芝 粘着性テープの剥離装置、粘着性テープの剥離方法、半導体チップのピックアップ装置、半導体チップのピックアップ方法及び半導体装置の製造方法
JP4494753B2 (ja) * 2003-10-27 2010-06-30 リンテック株式会社 シート剥離装置及び剥離方法
JP4538242B2 (ja) * 2004-01-23 2010-09-08 株式会社東芝 剥離装置及び剥離方法
JP4485248B2 (ja) * 2004-04-28 2010-06-16 リンテック株式会社 剥離装置及び剥離方法
TW200539296A (en) * 2004-04-28 2005-12-01 Lintec Corp Sheet peeling apparatus and peeling method
JP2011140232A (ja) * 2004-07-06 2011-07-21 Fujifilm Corp 感光性積層体の製造装置及び製造方法
JP4326418B2 (ja) * 2004-07-16 2009-09-09 株式会社東京精密 フィルム剥離方法およびフィルム剥離装置
JP4771729B2 (ja) * 2005-04-04 2011-09-14 長野オートメーション株式会社 保護フィルム剥取り方法と保護フィルム剥取り装置
JP4795743B2 (ja) * 2005-05-19 2011-10-19 リンテック株式会社 貼付装置
KR20070009865A (ko) * 2005-07-14 2007-01-19 삼성전자주식회사 보호시트 제거 장치 및 방법
JP2007036111A (ja) 2005-07-29 2007-02-08 Tokyo Seimitsu Co Ltd フィルム剥離方法およびフィルム剥離装置
JP2007109927A (ja) * 2005-10-14 2007-04-26 Tokyo Seimitsu Co Ltd 表面保護フィルム剥離方法および表面保護フィルム剥離装置
JP4953764B2 (ja) * 2005-11-29 2012-06-13 株式会社東京精密 剥離テープ貼付方法および剥離テープ貼付装置
TWI335899B (en) * 2006-11-03 2011-01-11 Kodak Graphic Comm Canada Co Methods and apparatus for peeling a flexible sheet from a substrate
WO2008112660A1 (en) * 2007-03-09 2008-09-18 Nexus Biosystems, Inc. Device and method for removing a peelable seal
JP4824622B2 (ja) * 2007-05-10 2011-11-30 リンテック株式会社 シート剥離装置及び剥離方法
JP4728281B2 (ja) * 2007-05-21 2011-07-20 リンテック株式会社 シート剥離装置及び剥離方法
JP4839284B2 (ja) * 2007-09-03 2011-12-21 日立設備エンジニアリング株式会社 半導体ウエハ等の板状部材の保護シート剥離用接着テープの取り付け方法及び保護シート剥離方法
JP4724742B2 (ja) * 2008-01-09 2011-07-13 日東電工株式会社 光学表示装置の製造システムおよび光学表示装置の製造方法
DE102008000461B3 (de) 2008-02-29 2009-07-30 Foliotec Gmbh Verfahren und Vorrichtung zum Abziehen einer Folie von einem plattenartigen Trägern oder einer Folie
JP5235111B2 (ja) * 2008-07-24 2013-07-10 リンテック株式会社 シート剥離装置及び剥離方法
JP5442288B2 (ja) * 2009-03-27 2014-03-12 日東電工株式会社 保護テープ剥離方法およびこれを用いた保護テープ剥離装置
JP4740381B2 (ja) * 2010-03-12 2011-08-03 リンテック株式会社 シート剥離装置及び剥離方法
JP5607557B2 (ja) * 2011-02-21 2014-10-15 リンテック株式会社 シート保持装置及びシート貼付装置
JP5981229B2 (ja) * 2012-06-01 2016-08-31 リンテック株式会社 シート剥離装置及び剥離方法
KR101989484B1 (ko) * 2012-07-09 2019-06-17 삼성디스플레이 주식회사 디라미네이션 장치 및 이를 포함하는 인라인 열전사 시스템
JP5778116B2 (ja) * 2012-11-05 2015-09-16 日東電工株式会社 粘着シート貼付け方法および粘着シート貼付け装置
KR102069851B1 (ko) * 2013-03-26 2020-01-28 삼성디스플레이 주식회사 디라미네이션 장치 및 이를 포함하는 인라인 열전사 시스템
KR101969092B1 (ko) * 2013-04-10 2019-04-16 삼성디스플레이 주식회사 디라미네이션 장치 및 이를 포함하는 인라인 열전사 시스템
TWI555071B (zh) * 2014-05-07 2016-10-21 鴻積科機股份有限公司 使黏著物能夠轉換至另一膠膜的撕膜裝置
KR101701565B1 (ko) * 2014-08-14 2017-02-01 주식회사 엘지화학 패널로부터 편광 필름을 박리하기 위한 박리바, 이를 이용한 박리 장치 및 박리 방법
KR102200652B1 (ko) * 2018-10-11 2021-01-11 주식회사 쿠온솔루션 웨이퍼 박리 시스템에 사용되는 테이프 분리 장치 및 방법
JP7488148B2 (ja) 2020-08-03 2024-05-21 株式会社ディスコ 剥離装置
DE102022134515A1 (de) 2022-12-22 2024-06-27 Advanced Engineering Industrie Automation GmbH Vorrichtung und Verfahren zum Abziehen von Schutzfolien von plattenförmigen Gegenständen

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4775438A (en) * 1983-03-24 1988-10-04 Nitto Electric Industrial Co., Ltd. Process for peeling protective film off a thin article
US5891298A (en) * 1995-08-31 1999-04-06 Nitto Denko Corporation Method and apparatus for peeling protective adhesive tape from semiconductor wafer

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US4285759A (en) * 1979-11-19 1981-08-25 E. I. Du Pont De Nemours And Company Apparatus for stripping a cover sheet
DE3532553C1 (de) * 1985-09-12 1987-03-12 Loehr & Herrmann Gmbh Verfahren und Vorrichtung zum Abziehen der Schutzfolie von einer mit belichtetem Fotoresist beschichteten Leiterplatte
US4752346A (en) * 1987-07-06 1988-06-21 Hoechst Celanese Corporation Apparatus and method for separating adherent films
JPH0691153B2 (ja) * 1987-11-28 1994-11-14 日東電工株式会社 保護フイルムの剥離方法
JPH0682750B2 (ja) * 1989-08-30 1994-10-19 日東電工株式会社 ウエハ保護シートの剥離方法
JPH04336428A (ja) * 1991-05-13 1992-11-24 Nitto Denko Corp ウエハのテープ貼合わせ剥離装置
DE4127724A1 (de) * 1991-08-22 1993-02-25 Hoechst Ag Vorrichtung zum trennen und abziehen einer auf einem traegermaterial auflaminierten folie
JP3156419B2 (ja) * 1993-02-15 2001-04-16 松下電器産業株式会社 異方性導電フィルム保護用セパレータの剥離方法
JP3234702B2 (ja) * 1994-01-12 2001-12-04 富士写真フイルム株式会社 感光層積層装置
JP4204658B2 (ja) 1997-11-28 2009-01-07 リンテック株式会社 シート剥離装置および方法
US6149758A (en) 1997-06-20 2000-11-21 Lintec Corporation Sheet removing apparatus and method
JP4204653B2 (ja) 1997-06-20 2009-01-07 リンテック株式会社 シート剥離装置および方法
JP3560823B2 (ja) * 1998-08-18 2004-09-02 リンテック株式会社 ウェハ転写装置
US6500291B1 (en) * 1998-09-11 2002-12-31 Hitachi Chemical Co. Ltd. Device and method for lamination
US6500298B1 (en) * 2000-01-14 2002-12-31 Kevin P. Wright Stripping machine and method
KR100383265B1 (ko) * 2001-01-17 2003-05-09 삼성전자주식회사 웨이퍼 보호 테이프 제거용 반도체 제조장치

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4775438A (en) * 1983-03-24 1988-10-04 Nitto Electric Industrial Co., Ltd. Process for peeling protective film off a thin article
US5891298A (en) * 1995-08-31 1999-04-06 Nitto Denko Corporation Method and apparatus for peeling protective adhesive tape from semiconductor wafer

Also Published As

Publication number Publication date
EP1128415A2 (en) 2001-08-29
US6616799B2 (en) 2003-09-09
KR20010085494A (ko) 2001-09-07
EP1128415B8 (en) 2011-01-12
KR100560014B1 (ko) 2006-03-15
DE60142499D1 (de) 2010-08-19
JP2001233542A (ja) 2001-08-28
US20010017189A1 (en) 2001-08-30
EP1128415B1 (en) 2010-07-07
EP1128415A3 (en) 2006-05-31
TW588417B (en) 2004-05-21
JP4166920B2 (ja) 2008-10-15

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