SG84522A1 - Semiconductor laser having co-doped distributed bragg reflectors - Google Patents

Semiconductor laser having co-doped distributed bragg reflectors

Info

Publication number
SG84522A1
SG84522A1 SG9901204A SG1999001204A SG84522A1 SG 84522 A1 SG84522 A1 SG 84522A1 SG 9901204 A SG9901204 A SG 9901204A SG 1999001204 A SG1999001204 A SG 1999001204A SG 84522 A1 SG84522 A1 SG 84522A1
Authority
SG
Singapore
Prior art keywords
semiconductor laser
distributed bragg
bragg reflectors
doped distributed
doped
Prior art date
Application number
SG9901204A
Other languages
English (en)
Inventor
Deng Hongyu
Wang Xiaozhong
Lei Chun
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of SG84522A1 publication Critical patent/SG84522A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18361—Structure of the reflectors, e.g. hybrid mirrors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/305—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
    • H01S5/3054—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure p-doping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/305—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
    • H01S5/3054—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure p-doping
    • H01S5/3063—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure p-doping using Mg

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
SG9901204A 1998-08-31 1999-03-18 Semiconductor laser having co-doped distributed bragg reflectors SG84522A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/144,355 US6301281B1 (en) 1998-08-31 1998-08-31 Semiconductor laser having co-doped distributed bragg reflectors

Publications (1)

Publication Number Publication Date
SG84522A1 true SG84522A1 (en) 2001-11-20

Family

ID=22508224

Family Applications (1)

Application Number Title Priority Date Filing Date
SG9901204A SG84522A1 (en) 1998-08-31 1999-03-18 Semiconductor laser having co-doped distributed bragg reflectors

Country Status (7)

Country Link
US (1) US6301281B1 (ko)
JP (1) JP4608040B2 (ko)
KR (1) KR100647934B1 (ko)
DE (2) DE19964244C2 (ko)
GB (1) GB2341275B (ko)
SG (1) SG84522A1 (ko)
TW (1) TW410495B (ko)

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US6560265B2 (en) * 2001-09-11 2003-05-06 Applied Optoelectronics, Inc. Method and apparatus for polarizing light in a VCSEL
JP4066654B2 (ja) * 2001-12-19 2008-03-26 富士ゼロックス株式会社 面発光型半導体レーザ装置及びその製造方法
US6850548B2 (en) 2001-12-28 2005-02-01 Finisar Corporation Assymmetric distributed Bragg reflector for vertical cavity surface emitting lasers
DE10262373B3 (de) * 2002-04-30 2013-01-17 Osram Opto Semiconductors Gmbh Strahlungsemittierendes Halbleiterbauelement mit Co-Dotierung
DE10219345B4 (de) * 2002-04-30 2011-05-19 Osram Opto Semiconductors Gmbh Strahlungsemittierendes Halbleiterbauelement mit Co-Dotierung
US6931045B1 (en) 2002-08-12 2005-08-16 Sandia Corporation Distributed Bragg reflectors with reduced optical absorption
US20060215720A1 (en) * 2005-03-24 2006-09-28 Corzine Scott W Quantum cascade laser with grating formed by a periodic variation in doping
KR101228108B1 (ko) * 2005-11-09 2013-01-31 삼성전자주식회사 펌프 빔 반사층을 갖는 외부 공진기형 면발광 레이저
JP2010114214A (ja) * 2008-11-05 2010-05-20 Fuji Xerox Co Ltd 面発光型半導体レーザ素子、面発光型半導体レーザ素子の製造方法、および光送信装置
AT511270B1 (de) 2012-05-24 2015-07-15 Avl List Gmbh Verfahren und eine Vorrichtung zur Prüfung von elektrischen Energiespeichersystemen für den Antrieb von Fahrzeugen
CN109462143A (zh) * 2018-09-30 2019-03-12 中科芯电半导体科技（北京）有限公司 一种应用于vcsel中的dbr生长方法、分布式布拉格反射镜和垂直腔面发射激光器
KR20200049026A (ko) * 2018-10-31 2020-05-08 엘지이노텍 주식회사 표면발광 레이저소자 및 이를 포함하는 발광장치

Citations (5)

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US5018157A (en) * 1990-01-30 1991-05-21 At&T Bell Laboratories Vertical cavity semiconductor lasers
EP0495301A1 (en) * 1990-12-14 1992-07-22 AT&T Corp. Method for making a semiconductor laser
US5208820A (en) * 1991-01-08 1993-05-04 Nec Corporation Optical device with low-resistive multi-level reflecting structure
US5568499A (en) * 1995-04-07 1996-10-22 Sandia Corporation Optical device with low electrical and thermal resistance bragg reflectors
GB2333895A (en) * 1998-01-31 1999-08-04 Mitel Semiconductor Ab Vertical cavity surface emitting semiconductor lasers

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JPS5688388A (en) * 1979-12-19 1981-07-17 Matsushita Electric Ind Co Ltd Semiconductor laser device
US5115442A (en) * 1990-04-13 1992-05-19 At&T Bell Laboratories Top-emitting surface emitting laser structures
US5226055A (en) * 1991-09-30 1993-07-06 At&T Bell Laboratories Devices having repetitive layers
US5170407A (en) * 1991-10-11 1992-12-08 At&T Bell Laboratories Elimination of heterojunction band discontinuities
US5212703A (en) * 1992-02-18 1993-05-18 Eastman Kodak Company Surface emitting lasers with low resistance bragg reflectors
US5212701A (en) * 1992-03-25 1993-05-18 At&T Bell Laboratories Semiconductor surface emitting laser having enhanced optical confinement
US5351257A (en) * 1993-03-08 1994-09-27 Motorola, Inc. VCSEL with vertical offset operating region providing a lateral waveguide and current limiting and method of fabrication
JP3668979B2 (ja) * 1993-08-31 2005-07-06 ソニー株式会社 光電子集積回路装置の製造方法
US5513202A (en) * 1994-02-25 1996-04-30 Matsushita Electric Industrial Co., Ltd. Vertical-cavity surface-emitting semiconductor laser
JPH07249581A (ja) * 1994-03-09 1995-09-26 Fujitsu Ltd Ｉｉｉ −ｖ族化合物半導体結晶成長法
DE19523181A1 (de) * 1994-07-05 1996-01-11 Motorola Inc Verfahren zum P-Dotieren einer Licht emittierenden Vorrichtung
US5530715A (en) * 1994-11-29 1996-06-25 Motorola, Inc. Vertical cavity surface emitting laser having continuous grading
KR100271674B1 (ko) * 1994-12-28 2000-12-01 나까니시 히로유끼 반도체 레이저 소자
JP3645343B2 (ja) * 1994-12-28 2005-05-11 三井化学株式会社 半導体レーザ素子
US5574744A (en) * 1995-02-03 1996-11-12 Motorola Optical coupler
US5557627A (en) * 1995-05-19 1996-09-17 Sandia Corporation Visible-wavelength semiconductor lasers and arrays
US5724376A (en) 1995-11-30 1998-03-03 Hewlett-Packard Company Transparent substrate vertical cavity surface emitting lasers fabricated by semiconductor wafer bonding
US5706306A (en) * 1996-03-15 1998-01-06 Motorola VCSEL with distributed Bragg reflectors for visible light
JPH09260770A (ja) * 1996-03-22 1997-10-03 Nippon Telegr & Teleph Corp <Ntt> 面発光レーザ
JPH10173294A (ja) * 1996-10-07 1998-06-26 Canon Inc 窒素を含む化合物半導体多層膜ミラー及びそれを用いた面型発光デバイス
EP0865124B1 (en) * 1997-03-12 2003-01-22 BRITISH TELECOMMUNICATIONS public limited company Mirrors for VCSEL
JPH10261839A (ja) * 1997-03-19 1998-09-29 Nippon Telegr & Teleph Corp <Ntt> 半導体薄膜及びその製造方法
JP3245545B2 (ja) * 1997-05-07 2002-01-15 シャープ株式会社 Ｉｉｉ−ｖ族化合物半導体発光素子
DE19723677A1 (de) * 1997-06-05 1998-12-10 Siemens Ag Optoelektronisches Halbleiterbauelement

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5018157A (en) * 1990-01-30 1991-05-21 At&T Bell Laboratories Vertical cavity semiconductor lasers
EP0495301A1 (en) * 1990-12-14 1992-07-22 AT&T Corp. Method for making a semiconductor laser
US5208820A (en) * 1991-01-08 1993-05-04 Nec Corporation Optical device with low-resistive multi-level reflecting structure
US5568499A (en) * 1995-04-07 1996-10-22 Sandia Corporation Optical device with low electrical and thermal resistance bragg reflectors
GB2333895A (en) * 1998-01-31 1999-08-04 Mitel Semiconductor Ab Vertical cavity surface emitting semiconductor lasers

Also Published As

Publication number Publication date
TW410495B (en) 2000-11-01
KR100647934B1 (ko) 2006-11-17
DE19964244C2 (de) 2002-05-16
GB2341275A (en) 2000-03-08
GB9920420D0 (en) 1999-11-03
US6301281B1 (en) 2001-10-09
GB2341275B (en) 2003-08-13
JP4608040B2 (ja) 2011-01-05
JP2000077772A (ja) 2000-03-14
DE19919382C2 (de) 2002-04-25
KR20000017638A (ko) 2000-03-25
DE19919382A1 (de) 2000-03-09

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