SG48975A1 - Spacer flash cell process - Google Patents

Spacer flash cell process

Info

Publication number
SG48975A1
SG48975A1 SG1996004593A SG1996004593A SG48975A1 SG 48975 A1 SG48975 A1 SG 48975A1 SG 1996004593 A SG1996004593 A SG 1996004593A SG 1996004593 A SG1996004593 A SG 1996004593A SG 48975 A1 SG48975 A1 SG 48975A1
Authority
SG
Singapore
Prior art keywords
spacer
flash cell
cell process
flash
spacer flash
Prior art date
Application number
SG1996004593A
Other languages
English (en)
Inventor
Parviz Keshtbod
Original Assignee
Cirrus Logic Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cirrus Logic Inc filed Critical Cirrus Logic Inc
Publication of SG48975A1 publication Critical patent/SG48975A1/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
    • H10B41/35—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region with a cell select transistor, e.g. NAND
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312—Gate electrodes for field effect devices
    • H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
    • H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312—Gate electrodes for field effect devices
    • H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
    • H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
    • H01L29/42324—Gate electrodes for transistors with a floating gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312—Gate electrodes for field effect devices
    • H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
    • H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
    • H01L29/42324—Gate electrodes for transistors with a floating gate
    • H01L29/42328—Gate electrodes for transistors with a floating gate with at least one additional gate other than the floating gate and the control gate, e.g. program gate, erase gate or select gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
    • H01L29/7881—Programmable transistors with only two possible levels of programmation
    • H01L29/7883—Programmable transistors with only two possible levels of programmation charging by tunnelling of carriers, e.g. Fowler-Nordheim tunnelling
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)
SG1996004593A 1993-09-30 1994-12-20 Spacer flash cell process SG48975A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/129,866 US5479368A (en) 1993-09-30 1993-09-30 Spacer flash cell device with vertically oriented floating gate

Publications (1)

Publication Number Publication Date
SG48975A1 true SG48975A1 (en) 1998-05-18

Family

ID=22441979

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996004593A SG48975A1 (en) 1993-09-30 1994-12-20 Spacer flash cell process

Country Status (8)

Country Link
US (2) US5479368A (de)
EP (1) EP0721643A4 (de)
JP (1) JPH09507608A (de)
KR (1) KR100274491B1 (de)
CN (1) CN1051164C (de)
SG (1) SG48975A1 (de)
TW (1) TW285776B (de)
WO (1) WO1995009423A1 (de)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6081449A (en) * 1987-05-12 2000-06-27 Altera Corporation High-density nonvolatile memory cell
US5640031A (en) * 1993-09-30 1997-06-17 Keshtbod; Parviz Spacer flash cell process
DE69429567T2 (de) * 1993-10-15 2002-09-12 Sony Corp., Tokio/Tokyo Nichtflüchtige Halbleiteranordnung
JP3256084B2 (ja) * 1994-05-26 2002-02-12 株式会社半導体エネルギー研究所 半導体集積回路およびその作製方法
US5543339A (en) * 1994-08-29 1996-08-06 Motorola, Inc. Process for forming an electrically programmable read-only memory cell
KR0172273B1 (ko) * 1995-06-24 1999-02-01 김주용 플래쉬 메모리 셀의 제조방법
KR100217901B1 (ko) * 1996-03-11 1999-09-01 김영환 플래쉬 이이피롬 셀 및 그 제조방법
US5998263A (en) * 1996-05-16 1999-12-07 Altera Corporation High-density nonvolatile memory cell
US5780341A (en) * 1996-12-06 1998-07-14 Halo Lsi Design & Device Technology, Inc. Low voltage EEPROM/NVRAM transistors and making method
TW337607B (en) 1997-08-06 1998-08-01 Mos Electronics Taiwan Inc Process for forming a contact hole in an EEPROM with NOR construction
TW425660B (en) * 1997-12-12 2001-03-11 Mosel Vitelic Inc Method of forming uniform dielectric layer between two conductive layers in integrated circuit
US5837588A (en) * 1998-01-26 1998-11-17 Texas Instruments-Acer Incorporated Method for forming a semiconductor device with an inverse-T gate lightly-doped drain structure
US6194272B1 (en) 1998-05-19 2001-02-27 Mosel Vitelic, Inc. Split gate flash cell with extremely small cell size
JP3544308B2 (ja) * 1998-11-05 2004-07-21 富士通株式会社 不揮発性半導体記憶装置の製造方法
US6130453A (en) * 1999-01-04 2000-10-10 International Business Machines Corporation Flash memory structure with floating gate in vertical trench
US6165845A (en) * 1999-04-26 2000-12-26 Taiwan Semiconductor Manufacturing Company Method to fabricate poly tip in split-gate flash
KR20010005001A (ko) 1999-06-30 2001-01-15 김영환 플래쉬 메모리 셀의 제조 방법
US6096604A (en) * 1999-08-04 2000-08-01 Chartered Semiconductor Manufacturing Ltd Production of reversed flash memory device
US6271106B1 (en) * 1999-10-29 2001-08-07 Motorola, Inc. Method of manufacturing a semiconductor component
US6294429B1 (en) 1999-11-24 2001-09-25 International Business Machines Corporation Method of forming a point on a floating gate for electron injection
TW452973B (en) * 2000-04-18 2001-09-01 Taiwan Semiconductor Mfg Method for manufacturing floating gate of split-gate flash memory
US6355524B1 (en) 2000-08-15 2002-03-12 Mosel Vitelic, Inc. Nonvolatile memory structures and fabrication methods
US6559055B2 (en) 2000-08-15 2003-05-06 Mosel Vitelic, Inc. Dummy structures that protect circuit elements during polishing
TW466710B (en) * 2000-09-08 2001-12-01 United Microelectronics Corp Manufacturing method of Flash memory
US6479351B1 (en) 2000-11-30 2002-11-12 Atmel Corporation Method of fabricating a self-aligned non-volatile memory cell
US6624029B2 (en) 2000-11-30 2003-09-23 Atmel Corporation Method of fabricating a self-aligned non-volatile memory cell
US6358827B1 (en) 2001-01-19 2002-03-19 Taiwan Semiconductor Manufacturing Company Method of forming a squared-off, vertically oriented polysilicon spacer gate
US6821847B2 (en) 2001-10-02 2004-11-23 Mosel Vitelic, Inc. Nonvolatile memory structures and fabrication methods
CN100340000C (zh) * 2002-02-07 2007-09-26 台湾积体电路制造股份有限公司 记忆性半导体存储器
US6894328B2 (en) * 2002-08-13 2005-05-17 Newport Fab, Llc Self-aligned bipolar transistor having recessed spacers and method for fabricating same
US6734055B1 (en) * 2002-11-15 2004-05-11 Taiwan Semiconductor Manufactoring Company Multi-level (4 state/2-bit) stacked gate flash memory cell
US6831325B2 (en) * 2002-12-20 2004-12-14 Atmel Corporation Multi-level memory cell with lateral floating spacers
KR20040056839A (ko) * 2002-12-24 2004-07-01 아남반도체 주식회사 반도체 소자 제조 방법
US6972260B2 (en) * 2004-05-07 2005-12-06 Powerchip Semiconductor Corp. Method of fabricating flash memory cell
US20060054977A1 (en) * 2004-09-16 2006-03-16 Intel Corporation Charge storage memory cell
US8099783B2 (en) * 2005-05-06 2012-01-17 Atmel Corporation Security method for data protection
CN100411145C (zh) * 2005-08-19 2008-08-13 力晶半导体股份有限公司 非挥发性存储器及其制造方法与操作方法
TWI281753B (en) * 2005-12-13 2007-05-21 Powerchip Semiconductor Corp Non-volatile memory and manufacturing method and operating method thereof
TWI349339B (en) * 2007-09-03 2011-09-21 Nanya Technology Corp Non-volatile memory and fabricating method thereof
US8288815B2 (en) * 2008-12-12 2012-10-16 Macronix International Co., Ltd. Gate structure of semiconductor device having a conductive structure with a middle portion and two spacer portions
CN108492844B (zh) * 2018-03-26 2020-10-16 上海华虹宏力半导体制造有限公司 一种双分离栅闪存阵列及其编程方法

Family Cites Families (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4122544A (en) * 1976-12-27 1978-10-24 Texas Instruments Incorporated Electrically alterable floating gate semiconductor memory device with series enhancement transistor
US4203158A (en) * 1978-02-24 1980-05-13 Intel Corporation Electrically programmable and erasable MOS floating gate memory device employing tunneling and method of fabricating same
JPS5519851A (en) * 1978-07-31 1980-02-12 Hitachi Ltd Manufacture of non-volatile memories
US4300212A (en) * 1979-01-24 1981-11-10 Xicor, Inc. Nonvolatile static random access memory devices
US4332077A (en) * 1979-08-10 1982-06-01 Rca Corporation Method of making electrically programmable control gate injected floating gate solid state memory transistor
JPS56120166A (en) * 1980-02-27 1981-09-21 Hitachi Ltd Semiconductor ic device and manufacture thereof
IT1209227B (it) * 1980-06-04 1989-07-16 Sgs Microelettronica Spa Cella di memoria non volatile a 'gate' flottante elettricamente alterabile.
US4366555A (en) * 1980-08-01 1982-12-28 National Semiconductor Corporation Electrically erasable programmable read only memory
JPS6059750B2 (ja) * 1980-12-29 1985-12-26 富士通株式会社 不揮発性半導体記憶装置
JPS57112078A (en) * 1980-12-29 1982-07-12 Fujitsu Ltd Manufacture of electrically rewritable fixed memory
US4822750A (en) * 1983-08-29 1989-04-18 Seeq Technology, Inc. MOS floating gate memory cell containing tunneling diffusion region in contact with drain and extending under edges of field oxide
IT1213218B (it) * 1984-09-25 1989-12-14 Ates Componenti Elettron Processo per la fabbricazione di una cella di memoria non volatile con area di ossido sottile di dimensioni molto piccole, e cella ottenuta con il processo suddetto.
US4754320A (en) * 1985-02-25 1988-06-28 Kabushiki Kaisha Toshiba EEPROM with sidewall control gate
US4599706A (en) * 1985-05-14 1986-07-08 Xicor, Inc. Nonvolatile electrically alterable memory
JPS6365675A (ja) * 1986-09-05 1988-03-24 Nec Corp 半導体集積回路の製造方法
US4794565A (en) * 1986-09-15 1988-12-27 The Regents Of The University Of California Electrically programmable memory device employing source side injection
US4814286A (en) * 1987-02-02 1989-03-21 Intel Corporation EEPROM cell with integral select transistor
JPH0712062B2 (ja) * 1987-09-09 1995-02-08 三菱電機株式会社 半導体記憶装置の製造方法
US4853895A (en) * 1987-11-30 1989-08-01 Texas Instruments Incorporated EEPROM including programming electrode extending through the control gate electrode
US5143860A (en) * 1987-12-23 1992-09-01 Texas Instruments Incorporated High density EPROM fabricaiton method having sidewall floating gates
US4964143A (en) * 1988-03-02 1990-10-16 Advanced Micro Devices, Inc. EPROM element employing self-aligning process
US5095344A (en) * 1988-06-08 1992-03-10 Eliyahou Harari Highly compact eprom and flash eeprom devices
US4912676A (en) * 1988-08-09 1990-03-27 Texas Instruments, Incorporated Erasable programmable memory
US5270562A (en) * 1989-09-07 1993-12-14 Sgs-Thomson Microelectronics S.A. Locking device with a never-programmable floating gate cell
US5045488A (en) * 1990-01-22 1991-09-03 Silicon Storage Technology, Inc. Method of manufacturing a single transistor non-volatile, electrically alterable semiconductor memory device
US5067108A (en) * 1990-01-22 1991-11-19 Silicon Storage Technology, Inc. Single transistor non-volatile electrically alterable semiconductor memory device with a re-crystallized floating gate
US5029130A (en) * 1990-01-22 1991-07-02 Silicon Storage Technology, Inc. Single transistor non-valatile electrically alterable semiconductor memory device
US5019879A (en) * 1990-03-15 1991-05-28 Chiu Te Long Electrically-flash-erasable and electrically-programmable memory storage devices with self aligned tunnel dielectric area
US5063172A (en) * 1990-06-28 1991-11-05 National Semiconductor Corporation Manufacture of a split-gate EPROM cell using polysilicon spacers
US5108939A (en) * 1990-10-16 1992-04-28 National Semiconductor Corp. Method of making a non-volatile memory cell utilizing polycrystalline silicon spacer tunnel region
US5235544A (en) * 1990-11-09 1993-08-10 John Caywood Flash EPROM cell and method for operating same
JP2714999B2 (ja) * 1990-11-28 1998-02-16 シャープ株式会社 アナログ／デジタル変換器
US5220531A (en) * 1991-01-02 1993-06-15 Information Storage Devices, Inc. Source follower storage cell and improved method and apparatus for iterative write for integrated circuit analog signal recording and playback
ATE168215T1 (de) * 1991-04-09 1998-07-15 Silicon Storage Tech Inc Elektrisch aenderbare einzel-transistor- halbleiterfestwertspeicheranordnung
US5240870A (en) * 1991-04-18 1993-08-31 National Semiconductor Corporation Stacked gate process flow for cross-point EPROM with internal access transistor
US5241507A (en) * 1991-05-03 1993-08-31 Hyundai Electronics America One transistor cell flash memory assay with over-erase protection
JP2877556B2 (ja) * 1991-06-03 1999-03-31 シャープ株式会社 不揮発性半導体装置及びその製造方法
US5338952A (en) * 1991-06-07 1994-08-16 Sharp Kabushiki Kaisha Non-volatile memory
FR2677481B1 (fr) * 1991-06-07 1993-08-20 Commissariat Energie Atomique Procede de fabrication d'une cellule de memoire non volatile et cellule de memoire obtenue.
JP2859487B2 (ja) * 1991-07-01 1999-02-17 シャープ株式会社 不揮発性メモリ及びその製造方法
US5284784A (en) * 1991-10-02 1994-02-08 National Semiconductor Corporation Buried bit-line source-side injection flash memory cell
US5293328A (en) * 1992-01-15 1994-03-08 National Semiconductor Corporation Electrically reprogrammable EPROM cell with merged transistor and optiumum area
US5414286A (en) * 1992-03-19 1995-05-09 Sharp Kabushiki Kaisha Nonvolatile memory, method of fabricating the same, and method of reading information from the same

Also Published As

Publication number Publication date
EP0721643A1 (de) 1996-07-17
KR960705368A (ko) 1996-10-09
CN1051164C (zh) 2000-04-05
US5479368A (en) 1995-12-26
US5476801A (en) 1995-12-19
WO1995009423A1 (en) 1995-04-06
TW285776B (de) 1996-09-11
KR100274491B1 (ko) 2001-01-15
EP0721643A4 (de) 1997-01-22
JPH09507608A (ja) 1997-07-29
CN1134196A (zh) 1996-10-23

Similar Documents

Publication Publication Date Title
SG48975A1 (en) Spacer flash cell process
IL117721A (en) Spacer flash cell process
TW441662U (en) Cell material structure
IL125126A (en) Electroconversion cell
EP0701436A4 (de) Verfahren
ZA926416B (en) Electrochemical process
GB9306409D0 (en) Process
GB9305902D0 (en) Process
GB9309458D0 (en) Process
DE69415308D1 (de) Zellendichtungsmittel
EP0752867A4 (de) Selektive zellproliferation
GB9122169D0 (en) Electrochemical process
GB9302331D0 (en) Process
GB9307245D0 (en) Process
GB9303770D0 (en) Process
GB9300309D0 (en) Process
GB2258245B (en) Electrochemical desenstization process
GB9403248D0 (en) Spacer for structural elements
AU7134894A (en) Electrochemical process
GB9302302D0 (en) Process
ZA941205B (en) Advanced solar cell
GB9306945D0 (en) Cell modification
GB9211557D0 (en) Electrochemical process
GB9318528D0 (en) Cell line
GB9213256D0 (en) Cell