SG178287A1 - A local plasma confinement and pressure control arrangement and methods thereof - Google Patents

A local plasma confinement and pressure control arrangement and methods thereof Download PDF

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Publication number
SG178287A1
SG178287A1 SG2012008306A SG2012008306A SG178287A1 SG 178287 A1 SG178287 A1 SG 178287A1 SG 2012008306 A SG2012008306 A SG 2012008306A SG 2012008306 A SG2012008306 A SG 2012008306A SG 178287 A1 SG178287 A1 SG 178287A1
Authority
SG
Singapore
Prior art keywords
ring
slots
conductive control
plasma
arrangement
Prior art date
Application number
SG2012008306A
Other languages
English (en)
Inventor
Rajinder Dhindsa
Mike Kellog
Babak Kadkodyan
Andrew Bailey
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp filed Critical Lam Res Corp
Publication of SG178287A1 publication Critical patent/SG178287A1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H01J37/32642—Focus rings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
SG2012008306A 2009-08-31 2010-08-31 A local plasma confinement and pressure control arrangement and methods thereof SG178287A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US23866509P 2009-08-31 2009-08-31
US23865609P 2009-08-31 2009-08-31
PCT/US2010/047376 WO2011026127A2 (en) 2009-08-31 2010-08-31 A local plasma confinement and pressure control arrangement and methods thereof

Publications (1)

Publication Number Publication Date
SG178287A1 true SG178287A1 (en) 2012-03-29

Family

ID=43628709

Family Applications (4)

Application Number Title Priority Date Filing Date
SG2012008306A SG178287A1 (en) 2009-08-31 2010-08-31 A local plasma confinement and pressure control arrangement and methods thereof
SG10201405040PA SG10201405040PA (en) 2009-08-31 2010-08-31 A local plasma confinement and pressure control arrangement and methods thereof
SG10201405042QA SG10201405042QA (en) 2009-08-31 2010-08-31 A multi-peripheral ring arrangement for performing plasma confinement
SG2012008314A SG178288A1 (en) 2009-08-31 2010-08-31 A multi-peripheral ring arrangement for performing plasma confinement

Family Applications After (3)

Application Number Title Priority Date Filing Date
SG10201405040PA SG10201405040PA (en) 2009-08-31 2010-08-31 A local plasma confinement and pressure control arrangement and methods thereof
SG10201405042QA SG10201405042QA (en) 2009-08-31 2010-08-31 A multi-peripheral ring arrangement for performing plasma confinement
SG2012008314A SG178288A1 (en) 2009-08-31 2010-08-31 A multi-peripheral ring arrangement for performing plasma confinement

Country Status (6)

Country Link
US (2) US20110100553A1 (zh)
JP (2) JP5794988B2 (zh)
KR (2) KR101723253B1 (zh)
CN (2) CN102484940B (zh)
SG (4) SG178287A1 (zh)
WO (2) WO2011026127A2 (zh)

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Also Published As

Publication number Publication date
SG10201405040PA (en) 2014-10-30
WO2011026126A2 (en) 2011-03-03
JP2013503495A (ja) 2013-01-31
US20110108524A1 (en) 2011-05-12
JP5794988B2 (ja) 2015-10-14
CN102550130A (zh) 2012-07-04
SG10201405042QA (en) 2014-10-30
CN102484940B (zh) 2015-11-25
KR20120068847A (ko) 2012-06-27
SG178288A1 (en) 2012-03-29
CN102484940A (zh) 2012-05-30
US8900398B2 (en) 2014-12-02
WO2011026126A3 (en) 2011-06-03
KR101723253B1 (ko) 2017-04-04
JP2013503494A (ja) 2013-01-31
WO2011026127A2 (en) 2011-03-03
WO2011026127A3 (en) 2011-06-03
KR20120059515A (ko) 2012-06-08
US20110100553A1 (en) 2011-05-05

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