SG10201405040PA - A local plasma confinement and pressure control arrangement and methods thereof - Google Patents

A local plasma confinement and pressure control arrangement and methods thereof

Info

Publication number
SG10201405040PA
SG10201405040PA SG10201405040PA SG10201405040PA SG10201405040PA SG 10201405040P A SG10201405040P A SG 10201405040PA SG 10201405040P A SG10201405040P A SG 10201405040PA SG 10201405040P A SG10201405040P A SG 10201405040PA SG 10201405040P A SG10201405040P A SG 10201405040PA
Authority
SG
Singapore
Prior art keywords
methods
pressure control
control arrangement
plasma confinement
local plasma
Prior art date
Application number
SG10201405040PA
Inventor
Rajinder Dhindsa
Mike Kellog
Babak Kadkodyan
Andrew Bailey
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp filed Critical Lam Res Corp
Publication of SG10201405040PA publication Critical patent/SG10201405040PA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H01J37/32642—Focus rings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
SG10201405040PA 2009-08-31 2010-08-31 A local plasma confinement and pressure control arrangement and methods thereof SG10201405040PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US23865609P 2009-08-31 2009-08-31
US23866509P 2009-08-31 2009-08-31

Publications (1)

Publication Number Publication Date
SG10201405040PA true SG10201405040PA (en) 2014-10-30

Family

ID=43628709

Family Applications (4)

Application Number Title Priority Date Filing Date
SG2012008314A SG178288A1 (en) 2009-08-31 2010-08-31 A multi-peripheral ring arrangement for performing plasma confinement
SG10201405042QA SG10201405042QA (en) 2009-08-31 2010-08-31 A multi-peripheral ring arrangement for performing plasma confinement
SG10201405040PA SG10201405040PA (en) 2009-08-31 2010-08-31 A local plasma confinement and pressure control arrangement and methods thereof
SG2012008306A SG178287A1 (en) 2009-08-31 2010-08-31 A local plasma confinement and pressure control arrangement and methods thereof

Family Applications Before (2)

Application Number Title Priority Date Filing Date
SG2012008314A SG178288A1 (en) 2009-08-31 2010-08-31 A multi-peripheral ring arrangement for performing plasma confinement
SG10201405042QA SG10201405042QA (en) 2009-08-31 2010-08-31 A multi-peripheral ring arrangement for performing plasma confinement

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG2012008306A SG178287A1 (en) 2009-08-31 2010-08-31 A local plasma confinement and pressure control arrangement and methods thereof

Country Status (6)

Country Link
US (2) US20110100553A1 (en)
JP (2) JP2013503494A (en)
KR (2) KR20120068847A (en)
CN (2) CN102550130A (en)
SG (4) SG178288A1 (en)
WO (2) WO2011026126A2 (en)

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Also Published As

Publication number Publication date
KR20120068847A (en) 2012-06-27
JP5794988B2 (en) 2015-10-14
WO2011026127A3 (en) 2011-06-03
US8900398B2 (en) 2014-12-02
JP2013503494A (en) 2013-01-31
KR101723253B1 (en) 2017-04-04
SG178288A1 (en) 2012-03-29
JP2013503495A (en) 2013-01-31
WO2011026127A2 (en) 2011-03-03
WO2011026126A3 (en) 2011-06-03
US20110108524A1 (en) 2011-05-12
KR20120059515A (en) 2012-06-08
CN102550130A (en) 2012-07-04
US20110100553A1 (en) 2011-05-05
SG178287A1 (en) 2012-03-29
SG10201405042QA (en) 2014-10-30
CN102484940B (en) 2015-11-25
CN102484940A (en) 2012-05-30
WO2011026126A2 (en) 2011-03-03

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