SG117514A1 - Integrated circuit wafer packaging system and method - Google Patents

Integrated circuit wafer packaging system and method

Info

Publication number
SG117514A1
SG117514A1 SG200407625A SG200407625A SG117514A1 SG 117514 A1 SG117514 A1 SG 117514A1 SG 200407625 A SG200407625 A SG 200407625A SG 200407625 A SG200407625 A SG 200407625A SG 117514 A1 SG117514 A1 SG 117514A1
Authority
SG
Singapore
Prior art keywords
integrated circuit
packaging system
circuit wafer
wafer packaging
integrated
Prior art date
Application number
SG200407625A
Other languages
English (en)
Inventor
Ray G Brooks
Timothy W Brooks
Original Assignee
Convey Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Convey Inc filed Critical Convey Inc
Publication of SG117514A1 publication Critical patent/SG117514A1/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67353Closed carriers specially adapted for a single substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67369Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67373Closed carriers characterised by locking systems
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67386Closed carriers characterised by the construction of the closed carrier
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S206/00Special receptacle or package
    • Y10S206/832Semiconductor wafer boat

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packages (AREA)
  • Buffer Packaging (AREA)
SG200407625A 2004-06-03 2004-12-22 Integrated circuit wafer packaging system and method SG117514A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/859,720 US7578392B2 (en) 2003-06-06 2004-06-03 Integrated circuit wafer packaging system and method

Publications (1)

Publication Number Publication Date
SG117514A1 true SG117514A1 (en) 2005-12-29

Family

ID=34933336

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200407625A SG117514A1 (en) 2004-06-03 2004-12-22 Integrated circuit wafer packaging system and method

Country Status (7)

Country Link
US (1) US7578392B2 (fr)
EP (1) EP1603156A3 (fr)
JP (1) JP2005347734A (fr)
KR (1) KR20050115201A (fr)
CN (1) CN1704321A (fr)
SG (1) SG117514A1 (fr)
TW (1) TW200540079A (fr)

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI277592B (en) * 2005-01-06 2007-04-01 Chunghwa Picture Tubes Ltd Packing box and transport equipment
US7495462B2 (en) * 2005-03-24 2009-02-24 Memsic, Inc. Method of wafer-level packaging using low-aspect ratio through-wafer holes
JP4644035B2 (ja) * 2005-05-25 2011-03-02 ミライアル株式会社 枚葉収納容器
KR101415863B1 (ko) * 2006-02-03 2014-07-09 엔테그리스, 아이엔씨. 기판용 완충 컨테이너
US20080197036A1 (en) * 2007-02-21 2008-08-21 Quantum Corporation Protective cartridge case having shock absorbing features
US20080197032A1 (en) * 2007-02-21 2008-08-21 Quantum Corporation Protective cartridge case having zero-tension latch
EP2209726A4 (fr) * 2007-10-12 2012-08-15 Peak Plastic & Metal Prod Contenant pour plaquettes à structure de parois en quinconce
US8393471B2 (en) * 2008-04-18 2013-03-12 Texas Instruments Incorporated Packing insert for disc-shaped objects
US20090276232A1 (en) * 2008-05-02 2009-11-05 Goodnow Kenneth J Warranty monitoring and enforcement for integrated circuit
US8452566B2 (en) * 2008-05-02 2013-05-28 International Business Machines Corporation Warranty monitoring and enforcement for integrated circuit and related design structure
DE202008013468U1 (de) * 2008-10-14 2008-12-18 Christian Senning Verpackungsmaschinen Gmbh & Co. Verpackungen für dünnflächige, scheibenförmige Produkte
US20100225011A1 (en) * 2009-03-06 2010-09-09 Taiwan Semiconductor Manufacturing Company, Ltd. System and Method for Integrated Circuit Fabrication
US8109390B2 (en) 2009-08-26 2012-02-07 Texchem Advanced Products Incorporated Sdn Bhd Wafer container with overlapping wall structure
US8556079B2 (en) * 2009-08-26 2013-10-15 Texchem Advanced Products Incorporated Sdn Bhd Wafer container with adjustable inside diameter
TW201206775A (en) * 2010-03-02 2012-02-16 Entegris Inc Substrate transport carrier
US8863956B2 (en) * 2011-01-19 2014-10-21 Ray G. Brooks Packaging system for protection of IC wafers during fabrication, transport and storage
KR101238737B1 (ko) * 2011-09-26 2013-03-04 강종구 흡착기의 흡착판 보호커버
CN103035559B (zh) * 2011-09-29 2015-04-22 中芯国际集成电路制造(北京)有限公司 弹性固定轮及包含其的晶圆适配器
USD751898S1 (en) 2012-03-26 2016-03-22 Abzac Canada Inc. Cover for a container
JP6282603B2 (ja) * 2013-02-11 2018-02-21 アキレス株式会社 テープフレーム付きウエハ用トレイ
TW201509767A (zh) * 2013-03-26 2015-03-16 E Pak International Inc 封裝插入件
KR101391998B1 (ko) * 2013-04-10 2014-05-27 두희글로벌로지스틱스 (주) 물류공급방법
US10275814B2 (en) * 2013-10-11 2019-04-30 Skyworks Solutions, Inc. Systems and methods for avoiding margin stacking
CN103587836A (zh) * 2013-11-28 2014-02-19 无锡通明科技有限公司 一种蛋糕盒底座
US9677985B2 (en) * 2014-05-13 2017-06-13 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus and method for inspecting filtering cartridge
US10153187B2 (en) * 2014-11-11 2018-12-11 Applied Materials, Inc. Methods and apparatus for transferring a substrate
JP6421552B2 (ja) * 2014-11-12 2018-11-14 株式会社Sumco シリコンウェーハの製造方法
TW201632899A (zh) * 2015-03-11 2016-09-16 All Ring Tech Co Ltd 電子元件分類料盒防落料受損方法及裝置
KR101670840B1 (ko) 2015-05-22 2016-10-31 주식회사 엠테크놀리지 웨이퍼 보관 용기
USD821658S1 (en) 2015-07-31 2018-06-26 Purina Animal Nutrition Llc Animal feed tub cover
US10029836B2 (en) 2015-07-31 2018-07-24 Purina Animal Nutrition Llc Animal feed covers and systems and methods for their production and use
USD824602S1 (en) * 2015-07-31 2018-07-31 Purina Animal Nutrition Llc Animal feed tub and cover
JP6545601B2 (ja) * 2015-10-23 2019-07-17 アキレス株式会社 セパレータ
CN105501635B (zh) * 2016-01-07 2017-07-07 安庆市兴龙印业有限责任公司 一种易碎品防护式安全包装盒
US20170239013A1 (en) * 2016-02-24 2017-08-24 General Electric Company Patient reference assembly for an electromagnetic navigation system
US9911634B2 (en) 2016-06-27 2018-03-06 Globalfoundries Inc. Self-contained metrology wafer carrier systems
WO2018112291A1 (fr) * 2016-12-15 2018-06-21 Whirlpool Corporation Activation de matériau getter sous vide
EP3579265B1 (fr) * 2017-02-06 2020-08-19 Achilles Corporation Récipient de logement de substrats
DE102017102992A1 (de) * 2017-02-15 2018-08-16 Sig Technology Ag Ein mit einer Verpackungsanlage assoziierter Graph
USD878156S1 (en) * 2017-10-24 2020-03-17 Blue Ab Beverage bottle
JP6952627B2 (ja) * 2018-03-09 2021-10-20 株式会社ジェーイーエル 基板収納容器のロック解除機構
USD906765S1 (en) * 2018-07-02 2021-01-05 Blue Ab Bottle
CN109292280B (zh) * 2018-09-11 2021-01-26 京东方科技集团股份有限公司 用于装载薄膜的盒和装载薄膜的方法
DE102020123853A1 (de) * 2019-09-20 2021-03-25 Tyco Electronics France Sas Befestigungsvorrichtung
ES2968179T3 (es) * 2019-10-07 2024-05-08 Pink Gmbh Thermosysteme Instalación y procedimiento para unir conjuntos electrónicos
CN111864052B (zh) * 2019-10-18 2024-05-28 辽宁省交通高等专科学校 一种压电式力传感器晶组成型装置及封装方法
USD967309S1 (en) * 2019-12-09 2022-10-18 Shield Mfg., Inc. Bean bag hockey puck
CN114078730A (zh) 2020-08-12 2022-02-22 大立钰科技有限公司 可伸缩收纳机构以及供该可伸缩收纳机构容置的收纳盒
CN215069905U (zh) * 2021-06-25 2021-12-07 北京通美晶体技术股份有限公司 通气式圆盒
KR102595526B1 (ko) * 2021-09-07 2023-10-30 주식회사 삼에스코리아 웨이퍼 이송 박스
KR102595523B1 (ko) * 2021-09-07 2023-10-30 주식회사 삼에스코리아 웨이퍼 이송 박스
CN117157742A (zh) * 2022-03-30 2023-12-01 阿基里斯株式会社 半导体晶圆搬运容器
DE102023200477A1 (de) 2023-01-23 2024-07-25 Robert Bosch Gesellschaft mit beschränkter Haftung Waferverpackung und Verfahren zu ihrer Herstellung
CN116946535B (zh) * 2023-09-21 2023-11-24 兴化市顺杰高温合金制品有限公司 一种热敏电阻器的外包装结构

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01160442U (fr) * 1988-04-25 1989-11-07
JP2789685B2 (ja) * 1989-06-30 1998-08-20 井関農機株式会社 育苗用播種機
US5317789A (en) * 1990-06-12 1994-06-07 Davida Levy Magnetic jewelry closures with safety features
JP3093068B2 (ja) * 1992-12-25 2000-10-03 三菱マテリアル株式会社 ウェーハケース
JPH08236605A (ja) * 1995-02-28 1996-09-13 Komatsu Electron Metals Co Ltd 半導体ウェハ収納ケース
US5553711A (en) 1995-07-03 1996-09-10 Taiwan Semiconductor Manufacturing Company Storage container for integrated circuit semiconductor wafers
US5836454A (en) * 1996-01-17 1998-11-17 Micron Technology, Inc. Lead frame casing
US5724748A (en) 1996-07-24 1998-03-10 Brooks; Ray G. Apparatus for packaging contaminant-sensitive articles and resulting package
JPH11135607A (ja) * 1997-10-24 1999-05-21 Lintec Corp 半導体ウェハ用緩衝シート
EP1206399B1 (fr) 1999-07-23 2010-03-17 Ray G. Brooks Systeme de protection pour plaquettes de circuit integre (ci)
JP2001085507A (ja) * 1999-09-13 2001-03-30 Sony Corp 基板収納容器及び基板ハンドリング方法
US20030213716A1 (en) 2002-05-17 2003-11-20 Brian Cleaver Wafer shipping and storage container
US6988620B2 (en) * 2002-09-06 2006-01-24 E.Pak International, Inc. Container with an adjustable inside dimension that restricts movement of items within the container
US6988621B2 (en) * 2003-06-17 2006-01-24 Illinois Tool Works Inc. Reduced movement wafer box
AU2006223081C1 (en) 2005-03-14 2012-12-06 Huntleigh Technology Limited Patient transfer system with associated frames and lift carts

Also Published As

Publication number Publication date
TW200540079A (en) 2005-12-16
KR20050115201A (ko) 2005-12-07
US7578392B2 (en) 2009-08-25
EP1603156A3 (fr) 2006-03-08
US20080185315A9 (en) 2008-08-07
JP2005347734A (ja) 2005-12-15
EP1603156A2 (fr) 2005-12-07
US20050269241A1 (en) 2005-12-08
CN1704321A (zh) 2005-12-07

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