TW201206775A - Substrate transport carrier - Google Patents

Substrate transport carrier Download PDF

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Publication number
TW201206775A
TW201206775A TW100106869A TW100106869A TW201206775A TW 201206775 A TW201206775 A TW 201206775A TW 100106869 A TW100106869 A TW 100106869A TW 100106869 A TW100106869 A TW 100106869A TW 201206775 A TW201206775 A TW 201206775A
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TW
Taiwan
Prior art keywords
base
cover
movable wall
movable
portions
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TW100106869A
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Chinese (zh)
Inventor
John Burns
Jeffery J King
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Entegris Inc
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Publication of TW201206775A publication Critical patent/TW201206775A/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1876—Particular processes or apparatus for batch treatment of the devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67386—Closed carriers characterised by the construction of the closed carrier
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)

Abstract

A transport container for substrates such as semiconductor wafers and solar cell substrates includes a cover and a base having a plurality of side walls including movable wall portions with vertically extending hinges or hinges that provide a pivot about a vertical axis. The hinges can be resilient movable polymer portions such as living hinges and can have an unconnected upper edge and an unconnected lower edge to allow the movable wall portions to move inwardly relative to a floor of the base. The cover can include a base engagement portion configured as a cam portion that engages a cover engagement portion on the movable wall portions as the cover is inserted onto the base. As the cam portions of the cover engage the cover engagement portions, the cam portions move the wall inwardly relative to the base to align the substrates.

Description

201206775 _ 且易於損壞。 若使一蓋表面滑動地嚙合一堆疊中不對齊基板之邊緣並使該等 邊緣對齊，則可損壞基板之邊緣，特別對於極薄且易碎之太陽能 電池晶圓而言尤其如此。 一種使基板對齊之方法係採用人工方式對齊堆疊中之各基板， 並包括多數個泡沐襯塾（foam cushion)在該輸送容器中，並藉由 施加可順應抵抗橫向運動之力而將基板對齊軸向排列。然而，在 運輸期間，尤其是太陽能電池此種更易碎基板，可因施加此種力 而受到損壞。因此，亟需可在降低損壞可能性之同時達成基板之 轴向對齊的一輸送載具。 【發明内容】 一種用於半導體基板及太陽能電池基板之輸送容器包含一蓋及 一基座，該基座具有多數個側壁，該等側壁包含可移動之壁部， 該等可移動之壁部具有垂直樞轉軸線。可移動之壁部可藉由彈性 且可移動之聚合物部（例如活動鉸鏈（living hinge ))而連接至一 直立支撐結構，且可具有一不相連之上邊緣部與一不相連之下邊 緣部，以容許該等可移動之壁部相對於基座部而向内地移動。該 蓋可包含一基座嚙合部，該基座嚙合部被配置成一凸輪部，當該 蓋插入至該基座上時，該凸輪部嚙合該等可移動之壁部上之一蓋 嚙合部。當該蓋之凸輪部嚙合蓋嚙合部時，該等凸輪部相對於該 基座而向内地移動該壁，以使基板對齊。該向内地移動包括上部、 中部以及下邊緣。根據鉸鏈構造而定，該動作可為相繼的或幾乎 同時進行的。在某些實施例中，凸輪部可接著下落至一淨空位置 201206775 (clearance position )，在該淨空位置，該凸輪部不再向内地壓迫 可移動之壁。此容許可移動之壁藉由活動鉸鏈而移回至其初始位 置附近，以卸除基板上之橫向力（lateral force)並容許堆疊安置 於基板載具中而不需橫向嚙合堆疊之側面。在其他實施例中，可 移動之壁之下部可保持向内。 本發明實施例之一特點及優點係為可移動之壁，該等可移動之 壁僅藉由直接地橫向嚙合基板（包括太陽能電池）便可使一輸送 容器内堆疊之基板沿軸向對齊。當蓋與基座嚙合時，該蓋嚙合該 基座之可移動之壁，進而使該等可移動之壁向内地移動。此種向 内移動使基板堆疊達成軸向對齊，且基板損壞之機率非常小。 本發明實施例之另一特點及優點在於，可移動之壁可在基板沿 軸向對齊後釋放該等基板上之橫向壓力。在蓋使可移動之壁向内 地移動後，該蓋之嚙合部可進入基座之一淨空部，俾使該嚙合部 不再對該等可移動之壁施加向内之壓力。然後，可移動之壁藉由 活動鉸鏈而返回至其初始位置附近，藉此釋放基板上之橫向壓力。 【實施方式】 參照第1圖及第2圖，根據本發明之一實施例，一用於輸送例 如半導體基板及太陽能電池基板等基板之基板輸送容器1〇〇大體 包含一基座102以及一頂蓋103。基座102具有一支撐結構，該支 撐結構被配置成四個扇形體（quadrant) 104。各該扇形體104可 包含各種類型之基板支撐物。基座102具有多數個向上延伸之側 壁106，該等側壁106將在下文中予以進一步論述。 6 201206775 • 基座1〇2可包含—或多個孔1G'8,該一或多個孔108延伸貫穿基 座102。孔1〇8可具有各種幾何構形。此使基座ι〇2可介接各種構 形之自動化設備。在一個實施例中，一活塞可穿過孔_其令之 :或：個並接觸其中之基板堆疊。然後，可利用該活塞逐漸升高 該堆疊，俾可自該堆疊依序地移除基板。 在第1圖及第8圖所示之一實施例中’基座1〇2包含側壁、 靜止之壁108以及八個可移動之側壁部11〇，兩兩設置於基座 之每-側面上。多數個侧壁刚可分別包含一可移動之壁部ιι〇, 可移動之㈣110藉由多數個活動鉸鏈114與—對靜止之壁m 連接。在可移動之壁部HO之—底部116處，可移動之璧部11〇 與基座102並未連接，且可移動之壁部11〇與該基座之底面 119之間存在一間隙U8’藉此可移動之壁部11〇可相對於基座ι〇2 而橫向地移動。可移動之壁部U〇界定一堆疊容置區119。每一側 壁106皆於可移動之壁之每一端上包含一蓋導引部12〇，其中在蓋 導引部120之間具有一蓋喃合部122。 第3圖至第6圖綠示基座102與蓋1〇3之交互作用。圖中基板 僅以為太陽能電池123示意。蓋1〇3包含一基座嚙合部，該基座 嚙合部被設計成一凸輪部124，凸輪部124包含一楔形表面126 以及一平面128。如第3A圖所示，當蓋1〇3下落至基座1〇2上時， 凸輪部124在蓋導引部120導引下唾合蓋嗜合部122。楔形表面 126嚙合可移動之壁部110，進而使可移動之壁開始向内地移動。 因可移動之壁部110之上邊緣129及下邊緣131皆與基座1〇2不 連接，故可移動之壁部110相對於保持靜止之基座1〇2之底面119 * % I . 201206775 向内地移動。此種相對向内移動使得可移動之壁部110嚙备容器 中之太陽能電池或其他基板之堆疊127,以促使所有基板正確地對 齊0 楔形表面126沿可移動之壁部u〇滑動，直至平面128嚙合蓋 嚙合部122為止（如第4圖及第5圆所示）。由於基座1〇2保持靜止， 菖平面128接觸封蓋嚙合部122時，可移動之壁部u〇相對基座 向内地移動以使基板對齊。隨著蓋1〇3之基座嚙合部124繼續向 下移動，其可進入基座丨〇2之一淨空區塊134。可移動之壁部 之蓋嚙合部122可於鄰近淨空區塊134之132處向内地逐漸縮減， 俾使蓋103不再將可移動之壁部11〇向内地壓迫入基板堆疊中。 j ’如帛3C圖所示’可移動之壁部11〇可在其被蓋1〇3嚙合之 則贊回至其㈣位置處或其初始位置附近。藉由此過程，雄叠内 =基板得以對齊，但壓靠該等基板之周向力已不復存在，並進而 消除由於該周向力而損壞基板之可能性。在另一實施例中，可移 2110可在運輸期間保持與基板堆疊相喃合以增大對基 板之橫向運動之抗力。 第8圖及第9 ®繪示根據本發明各種實施例之可移動之壁部 T第8圖繪示—可移動之壁部⑽藉由如前述圖式所示之一對 鏈114而與基座丨〇2連接。顯而易見地，該等活動欽 鏈主要提供多數個垂直轉動軸線al、a2，㈣亦容㈣繞一水平 ^線a3進行—最小巾⑽的轉動。料活祕鏈限制 動之壁部之運動。 實施例，可移動之壁部 第8圖綠示—可移動之壁部110.1之另一 8 201206775 110.1具有一對彈性鉸鏈部140及多數個蓋嚙合部122。該等彈性 鉸鏈140被設計成指狀（finger)並提供一轉動軸線a4。該可移動 之壁部的移動方式可如前述實施例所述。 參照第7圖，可將多數個輸送容器100配置成相互堆疊。容器 100可包含一周邊，該周邊具有多數個缺口（ notch) 140，缺口 140 藉由容納一相鄰容器之部分周邊142而進行堆疊。如第7圖所示， 容器100可相互成某一角度地進行堆疊，或可相互對齊地進行堆 疊。使容器100相互成某一角度進行堆疊會提供如下優點：無須 移動上方之容器便能觀察到與一容器相關聯之帶色資訊插塞 (colored information plug) 144° 儘管該等圖式繪示一正方形基板之容器，然而本發明亦可同樣 地適用於多數個圓形基板；此種容器被稱為硬幣堆疊晶圓容器 (coin stack wafer container) ° 基座及頂蓋可以傳統方式注射成型（injection molded )。鉸鏈可 由較薄之材料形成，或可由一不同聚合物藉由共注射成型 (coinjection )技術附著至靜止之壁及可移動之壁而形成。其他材 料亦可適用，例如紙漿（pulp )。 在不背離本發明任一實質屬性之精神下，本發明亦可實施具有 其他具體形式。因此，所例示之實施例應在所有方面皆被視為例 示性的而非限制性的，應參照隨附申請專利範圍而非參照上述說 明來標示本發明之範圍。 201206775 【圖k簡單說明】 第la圖係為根據本發明一實施例之一基板輸送容器之一基座之 立體圖； 第1 b圖係為根據本發明一實施例之一基板輸送容器之一頂蓋之 立體圖； 第2圖係為根據本發明一實施例之一基板輸送容器之立體圖； 第3圖係為根據本發明一實施例之一基板輸送容器之局部剖面 圖，其中蓋已與基座分離； 第4圖係為根據本發明一實施例之一基板輸送容器之局部剖面 圖，其中該基板輸送容器之蓋已嚙合基座； 第5圖係為根據本發明一實施例之一基板輸送容器之局部剖面 圖，其中該基板輸送容器之蓋之凸輪部嚙合可移動之壁之中部； 第6圖係為根據本發明一實施例之一基板輸送容器之局部剖面 圖，其中該基板輸送容器之蓋之凸輪部嚙合可移動之壁之下部； 第7圖係為根據本發明一實施例之一對基板輸送容器處於一堆 疊配置時之立體圖； 第8圖係為一可移動之壁部之詳細立體圖，該可移動之壁部具 有二活動鉸鏈設置於壁之相對側面上；以及 第9圖係為一可移動之壁部之詳細立體圖，該可移動之壁部僅 於壁部之一個側面上具有彈性鉸鏈。 201206775 【主要元件符號說明】 100 :輸送容器 102 :基座 103 :蓋 104 :扇形體 106 :側壁 108 :孔 110 :可移動之側壁部/ 可移動之壁部 110.1 :可移動之壁部 112 :靜止之壁 114 :活動欽鍵 118 :間隙 119 :底面/堆疊容置區 120 :蓋導引部 122 :蓋嚙合部 123 :太陽能電池 124 :凸輪部 126 :楔形表面 127 :堆疊 128 :平面 129 :上邊緣 131 :下邊緣 13 4 :淨空區塊 140 :缺口 /彈性鉸鏈 /彈性鉸鏈部 142 :周邊 144 ··帶色資訊插塞 al :垂直轉動軸線 a2 :垂直轉動軸線 a3 :水平軸線 a4 :轉動軸線 201206775 發明專利說明电 (本說明書格式、順序’請勿任意更動，※記號部分請勿填寫 ※申請案號：100106869 、'' ※申請曰：100年3月2曰 ※【卩匸分類：今二 υ (2006.01) 一、 發明名稱：（中文/英文） (2〇〇6*〇1) 基板輸送載具/201206775 _ and easy to damage. If a cover surface is slidably engaged with an edge of a stack that does not align the edges of the substrate and aligns the edges, the edges of the substrate can be damaged, particularly for very thin and fragile solar cell wafers. A method of aligning substrates is to manually align the substrates in the stack, and includes a plurality of foam cushions in the transport container, and align the substrates by applying a force that resists lateral movement. Arranged in the axial direction. However, during transport, especially a more fragile substrate such as a solar cell, it can be damaged by the application of such force. Therefore, there is a need for a transport vehicle that achieves axial alignment of the substrate while reducing the likelihood of damage. SUMMARY OF THE INVENTION A transport container for a semiconductor substrate and a solar cell substrate includes a cover and a base, the base having a plurality of sidewalls, the sidewalls including a movable wall portion, the movable wall portions having Vertical pivot axis. The movable wall portion may be coupled to the upright support structure by a resilient and movable polymer portion (eg, a living hinge) and may have a discontinuous upper edge portion and a non-connected lower edge portion The portion allows the movable wall portion to move inward relative to the base portion. The cover may include a base engaging portion configured as a cam portion that engages a cover engaging portion of the movable wall portion when the cover is inserted into the base. When the cam portion of the cover engages the cover engaging portion, the cam portions move the wall inwardly relative to the base to align the substrates. The inward movement includes an upper portion, a middle portion, and a lower edge. Depending on the hinge configuration, the action can be sequential or nearly simultaneous. In some embodiments, the cam portion can then drop to a clearance position 201206775 (clearance position) where the cam portion no longer presses the movable wall inwardly. This allows the movable wall to be moved back to its original position by the living hinge to remove lateral forces on the substrate and allow the stack to be placed in the substrate carrier without laterally engaging the sides of the stack. In other embodiments, the lower portion of the movable wall can remain inward. One feature and advantage of one embodiment of the present invention is a movable wall that axially aligns the substrates stacked within a transport container only by directly laterally engaging the substrate (including the solar cells). When the cover is engaged with the base, the cover engages the movable wall of the base to move the movable walls inwardly. This inward movement causes the substrate stack to achieve axial alignment and the probability of substrate damage is very small. Another feature and advantage of embodiments of the present invention is that the movable wall releases the lateral pressure on the substrates after the substrates are aligned in the axial direction. After the cover moves the movable wall inwardly, the engagement portion of the cover can enter a clearance portion of the base such that the engagement portion no longer applies an inward pressure to the movable wall. The movable wall is then returned to its original position by the living hinge, thereby releasing the lateral pressure on the substrate. Embodiments Referring to FIGS. 1 and 2, a substrate transfer container 1 for transporting a substrate such as a semiconductor substrate or a solar cell substrate generally includes a susceptor 102 and a top according to an embodiment of the present invention. Cover 103. The base 102 has a support structure that is configured as four quadrants 104. Each of the segments 104 can include various types of substrate supports. The base 102 has a plurality of upwardly extending side walls 106 which will be further discussed below. 6 201206775 • The pedestal 1 〇 2 may include - or a plurality of holes 1G'8 extending through the base 102. The holes 1〇8 can have various geometric configurations. This allows the pedestal ι 2 to interface with automated devices of various configurations. In one embodiment, a piston can pass through the apertures to: or: and contact the stack of substrates therein. The stack can then be used to gradually lift the stack, and the substrate can be sequentially removed from the stack. In one embodiment shown in Figures 1 and 8, the pedestal 1 〇 2 includes a side wall, a stationary wall 108, and eight movable side wall portions 11 两 which are disposed on each side of the base. . Most of the side walls can each comprise a movable wall portion ιι, and the movable (four) 110 is connected to the stationary wall m by a plurality of living hinges 114. At the bottom 116 of the movable wall portion HO, the movable jaw portion 11 is not connected to the base 102, and a gap U8' exists between the movable wall portion 11〇 and the bottom surface 119 of the base. Thereby, the movable wall portion 11 is laterally movable relative to the base ι2. The movable wall portion U defines a stacking accommodating area 119. Each of the side walls 106 includes a cover guide 12A at each end of the movable wall, wherein a cover merging portion 122 is provided between the cover guides 120. Figures 3 through 6 illustrate the interaction of the green base 102 with the cover 1〇3. The substrate in the figure is only indicated by the solar cell 123. The cover 1〇3 includes a base engaging portion which is designed as a cam portion 124 which includes a wedge-shaped surface 126 and a flat surface 128. As shown in FIG. 3A, when the cover 1〇3 is dropped onto the base 1〇2, the cam portion 124 guides the lower cover fitting portion 122 under the cover guiding portion 120. The wedge surface 126 engages the movable wall portion 110, thereby causing the movable wall to begin to move inwardly. Since the upper edge 129 and the lower edge 131 of the movable wall portion 110 are not connected to the base 1〇2, the movable wall portion 110 is opposite to the bottom surface of the base 1〇2 that is stationary 119*%I. 201206775 Move inward. This relative inward movement causes the movable wall portion 110 to engage the stack 127 of solar cells or other substrates in the container to cause all of the substrates to properly align 0. The wedge surface 126 slides along the movable wall portion u until the plane 128 engages the lid engaging portion 122 (as shown in Figs. 4 and 5). Since the susceptor 1 〇 2 remains stationary and the 菖 plane 128 contacts the cover engaging portion 122, the movable wall portion u 移动 moves inwardly relative to the base to align the substrates. As the base engaging portion 124 of the cover 1 继续 3 continues to move downward, it can enter a clearance block 134 of the base 丨〇 2 . The cover engaging portion 122 of the movable wall portion can be tapered inwardly adjacent the flushing block 134 132 so that the cover 103 no longer presses the movable wall portion 11 inwardly into the substrate stack. j ' as shown in Fig. 3C', the movable wall portion 11 can be brought back to its (4) position or its initial position when it is engaged by the cover 1〇3. By this process, the substrate is aligned, but the circumferential forces pressed against the substrates no longer exist, and the possibility of damage to the substrate due to the circumferential force is eliminated. In another embodiment, the shiftable 2110 can remain comminuted with the substrate stack during transport to increase resistance to lateral motion of the substrate. 8 and 9E illustrate a movable wall portion T according to various embodiments of the present invention. FIG. 8 is a view showing a movable wall portion (10) by a pair of chains 114 as shown in the foregoing drawings. Seat 2 connection. Obviously, the activity chain mainly provides a plurality of vertical rotation axes a1, a2, and (4) also allows (4) to rotate around a horizontal line a3 - the minimum towel (10). The live chain limits the movement of the wall. Embodiment, movable wall portion Fig. 8 is a green view - the other of the movable wall portion 110.1. 8 201206775 110.1 has a pair of elastic hinge portions 140 and a plurality of cover engaging portions 122. The resilient hinges 140 are designed to finger and provide an axis of rotation a4. The manner in which the movable wall portion can be moved can be as described in the foregoing embodiments. Referring to Fig. 7, a plurality of transport containers 100 can be configured to be stacked one on another. The container 100 can include a perimeter having a plurality of notches 140 that are stacked by receiving a portion of the perimeter 142 of an adjacent container. As shown in Fig. 7, the containers 100 may be stacked at an angle to each other or may be stacked in alignment with each other. Having the containers 100 stacked at an angle to one another provides the advantage that a colored information plug associated with a container can be observed without having to move the container above 144° although the drawings depict one a container of a square substrate, however, the present invention is equally applicable to a plurality of circular substrates; such a container is referred to as a coin stack wafer container. The base and the top cover can be injection molded in a conventional manner (injection) Molded). The hinge may be formed from a thinner material or may be formed by a co-injection technique attached to a stationary wall and a movable wall by a different polymer. Other materials may also be used, such as pulp. The invention may be embodied in other specific forms without departing from the spirit and scope of the invention. The exemplified embodiments are, therefore, to be considered as illustrative and not restrictive 201206775 BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a base of a substrate transport container according to an embodiment of the present invention; FIG. 1b is a top view of a substrate transport container according to an embodiment of the present invention; 2 is a perspective view of a substrate transport container according to an embodiment of the present invention; and FIG. 3 is a partial cross-sectional view of a substrate transport container according to an embodiment of the present invention, wherein the cover has a base 4 is a partial cross-sectional view of a substrate transport container according to an embodiment of the present invention, wherein the cover of the substrate transport container has been engaged with the pedestal; FIG. 5 is a substrate transport according to an embodiment of the present invention. a partial cross-sectional view of the container, wherein the cam portion of the cover of the substrate transport container engages the middle of the movable wall; FIG. 6 is a partial cross-sectional view of the substrate transport container according to an embodiment of the present invention, wherein the substrate transport container The cam portion of the cover engages the lower portion of the movable wall; FIG. 7 is a perspective view of the substrate transport container in a stacked configuration according to one embodiment of the present invention; Is a detailed perspective view of a movable wall portion having two living hinges disposed on opposite sides of the wall; and FIG. 9 is a detailed perspective view of a movable wall portion, the movable The wall has an elastic hinge only on one side of the wall. 201206775 [Description of main component symbols] 100: transport container 102: base 103: cover 104: segment 106: side wall 108: hole 110: movable side wall portion / movable wall portion 110.1: movable wall portion 112: Static wall 114: active key 118: gap 119: bottom surface/stack accommodating area 120: cover guide 122: cover engaging portion 123: solar cell 124: cam portion 126: wedge surface 127: stack 128: plane 129: Upper edge 131: lower edge 13 4 : clearance block 140: notch/elastic hinge/elastic hinge portion 142: perimeter 144 · color information plug a: vertical axis of rotation a2: vertical axis of rotation a3: horizontal axis a4: rotation Axis 201206775 Invention patent description Electricity (This manual's format, order 'Do not change any more, please do not fill in the ※ part number ※Application number: 100106869, '' ※Application曰: 100 years March 2曰※【卩匸 Classification: Today二υ (2006.01) I. Name of the invention: (Chinese / English) (2〇〇6*〇1) Substrate transport vehicle /

SUBSTRATE TRANSPORT CARRIER 二、 中文發明摘要： 〇 一種用於基板之輸送容器，諸如半導體晶圓及太陽能電池等基 板，該輸送容器包含一蓋及一基座，該基座具有多數個侧壁，該 等側壁包含多數個可移動之壁部，該等可移動之壁部具有垂直延 伸之较鍵或圍繞一垂直轴線極轉之欽鍵。該等欽鏈可為彈性且可 移動之I合物部（例如活動绞鍵）’並可具有一不相連之上邊緣斑 一不相連之下邊緣’以容許該等可移動之壁部相對於該基座之一 底面而向内地移動。該蓋可包含一基座嚙合部，該基座嚙合部被 〇 配置成一凸輪部，當該蓋插入至該基座上時，該凸輪部嚙合該等 可移動之壁部上之一蓋唾合部。當該蓋之凸輪部喃合蓋响合部 時，該等凸輪部相對於該基座而向内地移動該壁，以使基板對齊。 三、 英文發明摘要： A transport container for substrates such as semiconductor wafers and solar cell substrates includes a cover and a base having a plurality of side walls including movable wall portions with vertically extending hinges or hinges that provide a pivot about a vertical axis. The hinges can be resilient movable 1SUBSTRATE TRANSPORT CARRIER 2. Abstract: A substrate for a substrate, such as a semiconductor wafer and a solar cell, the container includes a cover and a base, the base having a plurality of side walls, the base The equal side wall includes a plurality of movable wall portions having a key that extends vertically or a key that rotates about a vertical axis. The chains may be elastic and movable I-components (eg, movable hinges)' and may have a non-contiguous upper edge spot and a non-connected lower edge' to allow the movable wall portions to be opposed to The bottom surface of one of the bases moves inward. The cover may include a base engaging portion configured by the cymbal to be a cam portion, and the cam portion engages one of the movable wall portions when the cover is inserted into the base unit. When the cam portion of the cover tampers with the cover portion, the cam portions move the wall inwardly relative to the base to align the substrates. In the case of a semiconductor wafers and solar cell substrates including a cover and a base having a plurality of side walls including movable wall portions with vertically extending hinges or hinges that provide a pivot about a vertical axis. The hinges can be resilient movable 1

Claims (1)

201206775 冑之壁部界^，該等可移動、之壁部具有-頂邊緣及-底邊 緣’該底邊_由-_而與該基座之—底面隔開； 使該等可移動之壁部喷合多數個連接至該頂蓋之凸輪 部，以使該等可移動之壁部被向内地推動； 安置該頂蓋至該基座上。 7. —種基板容器，包含： 一基座部’其係具有—底面及—可移動之側壁部，該可 移動之側壁部定位於該底面上方，且該底面與該可移動之側 壁部之間具有—間隙，該可移動之側壁料撓性地連接至一 靜止之壁部，該可移動之壁部具有一頂邊緣及—底邊緣，藉 此在該可移動之壁部移動時，該頂邊緣與該底邊緣二 水平地移動。 8. =請求項7所述之基板容器，更包含―頂蓋，該頂蓋係可喃 口及基座部，該頂蓋具有多數個構件，該等構件喷合該可移 動之壁上之一表面，以水平地移動該壁部。 13 201206775 八 式 圖201206775 壁 部 wall boundary ^, the movable wall portion has a top edge and a bottom edge 'the bottom edge _ is separated from the bottom surface of the base by -_; making the movable wall A plurality of portions are coupled to the cam portion of the top cover to urge the movable wall portions inwardly; the top cover is placed on the base. 7. A substrate container comprising: a base portion having a bottom surface and a movable side wall portion, the movable side wall portion being positioned above the bottom surface, and the bottom surface and the movable side wall portion Between the gaps, the movable side wall material is flexibly connected to a stationary wall portion, the movable wall portion having a top edge and a bottom edge, whereby when the movable wall portion moves, The top edge moves horizontally with the bottom edge. 8. The substrate container of claim 7, further comprising a top cover, the top cover being a mouthpiece and a base portion, the top cover having a plurality of members, the members being sprayed onto the movable wall a surface to move the wall horizontally. 13 201206775 Eight-style diagram 1414
TW100106869A 2010-03-02 2011-03-02 Substrate transport carrier TW201206775A (en)

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