KR102036202B1 - Support for inspection of semiconductor chips - Google Patents

Abstract

The present invention relates to a four corner-fixed support for a semiconductor chip using a pivoting lever. The support comprises: an insert body which has a quadrangular center space portion vertically penetrated, two first side space portions connected to two front and rear sides facing each other among the sides of the center space portion, and two second side space portions connected to two left and right sides facing each other among the sides of the center space portion; a pocket disposed in the center space portion and each of the first side space portions of the insert body and having a semiconductor chip seating portion; two levers disposed in each of the second side space portions of the insert body, wherein opposite ends facing each other are hinged to be vertically rotated in the second side space portions of the insert body, and the opposite ends support four corners of a semiconductor chip seated on the seating portion of the pocket; an opener disposed on a lower side of the insert body, pushing the pocket upwardly such that each lever is rotated upward with respect to hinge portions, and thus releasing support for the semiconductor chip; and lever return means guiding each lever to be returned to the original position by being rotated downward with respect to the hinge portions when the opener lowers. Thus, when the semiconductor chip is inspected, the pair of levers capable of fixing or releasing the semiconductor chip can be easily opened or support the semiconductor chip in a one-step manner.

Description

SUPPORT FOR INSPECTION OF SEMICONDUCTOR CHIPS}

The present invention relates to a support for fixing a semiconductor chip during the inspection of the semiconductor chip and to release the fixing to the semiconductor chip when the inspection is completed, and in particular, each lever is rotated up and down by the lifting operation of the opener, and the fork of each lever The present invention relates to a four-corner fixed support of a semiconductor chip having a one-step fixing structure that allows the four corners of the semiconductor chip to be supported or released.

As a technique for fixing a semiconductor chip during semiconductor chip inspection,

Republic of Korea Patent Registration No. 10-0227121 (registered on July 30, 1999, hereinafter referred to as 'Document 1') `` Support for semiconductor device inspection having a back opening portion '' is proposed,

Document 1 has a support body for fixing a semiconductor element with a support surface in contact with the upper surface of the package body, an opening for allowing the bottom of the semiconductor chip to open and a protrusion for supporting a lead of the semiconductor element, and detachably connected to the support body. And a connecting pin having an inner pin which is electrically connected to the lead of the semiconductor element and an inner pin which is integrally formed with the inner pin and protrudes to the outside through the supporting body to be electrically connected to the external element. The present invention relates to a support for inspecting a semiconductor device, which enables the semiconductor device to be supported when inspecting a semiconductor package device having a backside open.

As another technology, Korean Utility Model Registration No. 20-0195131 (registered on June 27, 2000, hereinafter referred to as 'Document 2') `` Sample Holder for Electron Microscope for Semiconductor Chip Inspection '' is proposed.

In Document 2, a chip seating groove is formed at a predetermined depth in front of the chip fixing groove formed on the upper surface of the body, and a chip contact plate is inserted vertically inside the chip seating groove, and is separated from both ends of the top surface of the chip fixing groove. The prevention plate is provided, and the spring is installed so that the separation prevention plate is supported by the rear, and the separation of the chip contact plate is blocked by the separation prevention plate, so that the sample of the semiconductor chip inspection electron microscope for preventing the separation of the chip fixing plate. It is a technology regarding a fixed holder.

As another technology, Republic of Korea Patent Registration No. 10-1457962 (2014.10.29. Registered, referred to as 'Document 3' below) `` Insert socket for semiconductor device inspection '' is presented,

Document 3 uses a latch member composed of a first latch and a second latch to firmly squeeze a semiconductor element seated on a unicarrier and to add a shock absorbing member that absorbs the impact of the unicarrier, thereby providing a normal The present invention relates to an insert socket for inspecting a semiconductor device capable of performing an accurate test by allowing a test to be performed and preventing it from being separated during an inspection or movement.

Document 1. Republic of Korea Patent Registration No. 10-0227121 (registered July 30, 1999) Document 2. Korea Utility Model Registration No. 20-0195131 (Registered on June 27, 2000) Document 3. Korea Patent Registration No. 10-1457962 (2014.10.29.Registration)

According to the present invention, a pair of levers are opened when the semiconductor chip is inserted, and each lever that has been opened after the inserted semiconductor chip is seated is lowered to allow the fork of each lever to support four corners of the semiconductor chip. And a four corner fixed support of a semiconductor chip using a rotation lever so that a rotation operation for supporting a semiconductor chip can be performed in a one-step manner by an opener.

Furthermore, the present invention is for inspecting a small semiconductor chip having a length of 3 mm or less in each of the semiconductor chips, and forming a seating portion of a pocket having approximately 3.03 mm on each side for accurate seating when the small semiconductor chip is inserted and settled. However, in order to solve this problem, each guide is arranged at the center of the four sides of the seating part, and an empty space is formed between the guides, that is, the corner area. Therefore, by removing the interference element on each corner of the semiconductor chip when entering the chip, the four corner fixed support of the semiconductor chip using the pivoting lever is used to secure the four corners of the semiconductor chip stably after fixing. The purpose is to provide.

In addition, the present invention moves the semiconductor chip adsorbed by vacuum adsorption to the upper side of the seating portion of the pocket, and then enters the seating portion of the pocket due to the fall due to the adsorption release. It is an object of the present invention to provide a four corner fixed support of a semiconductor chip using a rotation lever to reduce the entry distance of the semiconductor chip to enter and to facilitate the insertion and discharge of the semiconductor chip.

In order to solve the above problems, the four corner fixed support of the semiconductor chip using the rotation lever according to the present invention,

A rectangular center space part formed to penetrate up and down, two first side space parts connected to two front and rear sides facing each other among each side of the center space part, and each side of the center space part. An insert body having two second side space portions connected to two left and right sides facing each other;

A pocket disposed in a center space portion and each first side space portion of the insert body and having a semiconductor chip seating portion;

Disposed in each of the second side space portions of the insert body, each of the opposite ends facing each other in the second side space portion of the insert body is hinged up and down, and the opposite ends are seated on the seating portion of the pocket Two levers supporting four corners of the semiconductor chip;

An opener disposed at a lower side of the insert body and configured to release the support for the semiconductor chip by pushing the pocket upward so that each lever is pivoted upward based on a hinge portion; And

Lever return means for inducing each of the levers to be rotated downward based on a hinge portion and returned to its original position when the opener is lowered;

Characterized in that consisting of.

The four corner fixed support of the semiconductor chip using the rotation lever according to the present invention,

A pair of levers for holding or releasing the semiconductor chip during the semiconductor chip inspection can be easily opened or supported in a one-step manner, greatly reducing the semiconductor chip inspection process time and reducing the movement of the semiconductor chip during the semiconductor chip inspection. Limiting is the biggest effect that can greatly improve inspection performance.

1 is a three-dimensional configuration diagram showing a four corner fixed support of a semiconductor chip using a rotation lever according to the present invention,
Figure 2 is a three-dimensional configuration for showing a state in which the insert body, the pocket, the lever and the like coupled to each other,
3 is an exploded three-dimensional configuration diagram for showing the insert body, pocket, lever, lever return means, pocket return means, etc.
4 is a plan view showing a four corner fixed support of a semiconductor chip using a rotation lever according to the present invention;
5 is a cross-sectional configuration of FIG.
6 is a planar configuration diagram showing a state in which a lever is opened in a four corner fixed support of a semiconductor chip using a rotation lever according to the present invention;
7 is a cross-sectional view of FIG. 6.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Prior to this, terms or words used in the present specification and claims should not be construed as being limited to the common or dictionary meanings, and the inventors should properly explain the concept of terms in order to best explain their own invention. Based on the principle that can be defined, it should be interpreted as meaning and concept corresponding to the technical idea of the present invention. Therefore, the embodiments described in the specification and the configuration shown in the drawings are only the most preferred embodiment of the present invention and do not represent all of the technical idea of the present invention, various equivalents that may be substituted for them at the time of the present application It should be understood that there may be water and variations.

The direction of the pocket side is defined as the upper side or the upper side, and the opener side as the lower side or the lower side, based on FIG. 5, and the upper side of the first first side space portion of the two first side space portions, The direction is specified as the front side or the front side or the lower side of the first side space part, or the front side, and the left side of the second side space part of the two second side space parts based on FIG. The direction of the left side or the left side and the right side 2nd side space part side is specified as the right side or the right side.

Before description, [a] of FIG. 2 is a three-dimensional block diagram of a support body, and [b] of FIG. 2 is a three-dimensional block diagram of a support body seen from the bottom surface.

As shown in Figures 1 to 7, the four corner fixed support of the semiconductor chip using the rotation lever according to the present invention,

The insert body 10, the pocket 20, the lever 30, the opener 40, and the lever return means 50 are large.

Looking at each configuration,

Insert body (10)

As shown in FIGS. 1 to 5,

Square center space portion 11 formed to penetrate up and down,

Two first side space portions 12 connected to two front and rear sides facing each other among the sides of the center space portion 11, and

Two second side space portions 13 connected to two left and right sides facing each other among the sides of the center space portion 11.

It consists of a rectangular plate-like structure comprising a.

At this time, the shape formed by the center space portion 11 and the first side space portion 12 and the second side space portion 13 connected to each other forms an approximately cross-shaped space structure when viewed from the top. .

As shown in FIG. 1, the insert body 10 further includes a circular guide hole 14 formed to penetrate up and down in two diagonal corners or both of four corner regions thereof.

The pocket 20

As shown in Figures 3 to 5,

The mounting portion 21 disposed in the center space portion 11 and the first side space portion 12 of the insert body 10 and on which the semiconductor chip 1 is seated.

It is made, including.

Here, as shown in FIG. 3, the pocket 20 is formed to protrude upward in an area where end portions of the levers 30 facing each other are positioned in an area around an upper end of the seating portion 21. It is further provided with a pair of supports 22 which are in contact with the opposite ends of 30.

In this case, each of the supports 22 preferably has a height H corresponding to the semiconductor chip 1 seated on the seating portion 21.

As a result, the semiconductor chip 1 seated on the seating part 21 is positioned between the respective supports 22 and is limited to the movement of the left and right by the respective supports 22.

And as shown in Figure 3, the pocket 20 has a pair of left and right guides 23 having an inclined slope 231 downward on the surface facing each other and standing upward on the upper end of each support 22 This is provided to facilitate entry and exit of the semiconductor chip 1 for mounting the semiconductor chip 1 on the seating portion 21.

And, as shown in Figure 3, the pocket 20 has a pair of front and rear guides having a slope 241 inclined downward on the surface facing each other and standing in the area facing back and forth from the upper peripheral region of the seating portion 21 A 24 is further provided to facilitate the entry and exit of the semiconductor chip 1 for mounting the semiconductor chip 1 on the seating part 21 together with the left and right guides 23.

In addition, the pocket 20 is further provided with a pair of lifting guide block 25 is formed integrally with each of the front and rear guides 24 to have a size of occupying the first side space portion 12.

3 and 5, the pocket 20 is further provided with a center hole 26 is formed to penetrate up and down in the center of the seating portion 21 to enter the inspection equipment. At this time, the center hole 26 has a space structure of a size smaller than that of the semiconductor chip 1 corresponding to the size of the seating portion 21, and thus, the semiconductor chip 1 is seated on the seating portion 21. In this case, it is possible to prevent the semiconductor chip 1 from falling into the center hole 26.

Lever 30 is

As shown in Figures 3 to 5,

For the inspection of the semiconductor chip 1 seated on the seating portion 21 of the pocket 20 to support the semiconductor chip 1 and to release the support when the inspection is complete,

It is disposed in each of the second side space portion 13 of the insert body 10, each of the opposite ends facing each other in the second side space portion 13 of the insert body 10 is hinged to be rotated up and down Ends facing each other are configured to support four corners of the semiconductor chip 1 seated on the seating portion 21 of the pocket 20, and a pair is provided.

Hereinafter, the ends facing each other in the levers 30 are referred to as 'forks', and reference numerals are designated as '31'.

As shown in FIG. 3, the levers 30 are formed to be open at end portions facing each other, that is, the stop portions of the forks 31, and the left and right guides are rotated when the levers 30 are vertically rotated. Corresponding guide 32 for entering and exiting 23 is provided in order to be able to pivot up and down in a constant orbit while limiting the movement of the levers 30 back and forth.

Opener 40

As shown in FIG. 1 and FIG. 5,

Is disposed on the lower side of the insert body 10, by pushing the pocket 20 upwards so that each lever 30 is rotated upward based on the hinge portion to release the support for the semiconductor chip (1) In that,

Opener body 41 having a size corresponding to the insert body 10,

A guide pin 42 formed on an upper surface of the opener body 41 and formed at a position corresponding to the guide hole 14 of the insert body 10 so as to slide up and down in the guide hole 14;

Pocket pushing block 43 to push the pocket 20 when the opener 40 is raised

It is made, including.

At this time, the pocket pushing block 43 is formed in a shape corresponding to the lower surface of the pocket 20, the center space portion 11 and each of the first side space portion 12 of the insert body (10) It has a rectangular block shape that can enter into the center space portion 11 and each of the first side space portion 12 in a form occupying.

In addition, the center of the upper surface of the pocket pushing block 43, the corresponding center hole 431 is formed so as to penetrate up and down to correspond to the center hole 26 of the pocket 20, the inspection equipment, etc., the corresponding center hole ( Pass through 431 enters the center hole (26).

In addition, when the pocket pushing block 43 pushes the pocket 20 by the pocket pushing block 43, the forks 31 of the levers 30 supporting the semiconductor chips 1 It is desirable to have a height that can be out of the semiconductor chip 1, so as to eliminate the interference with the fork 31 when removing the semiconductor chip 1 from the seating portion (21).

1 and 5, the opener 40 is further provided with a pair of lever pushing blocks 44 which push the end sides of the levers 30 facing each other when raised.

At this time, each lever pushing block 44 is pushed to the lever 30 by the lever pushing block 44, the fork 31 of each lever 30 is the left and right guides 23 It is preferable to have a height that can be spaced apart from the, which is more easy when the semiconductor chip 1 is introduced or removed from the seating portion 21 by increasing the upward rotation angle of each lever 30 This is to make it possible.

The lever return means 50

As shown in FIG. 3,

When the opener 40 is lowered, the lever 30 is rotated downward based on the hinge portion to guide the return to the original position,

A first recess 51 formed to be recessed downward at opposite ends of the levers 30 facing each other;

A second recess 52 formed to be recessed in an inner wall of each of the second side spaces 13, and

A torsion spring 53 inserted into a hinge of each lever 30 and both ends of which are inserted into and supported in each of the first recess 51 and the second recess 52.

It is made, including.

As a result, both ends of the torsion spring 53 are compressed when the opener 40 is raised, and both ends of the torsion spring 53, which are compressed when the opener 40 is lowered, are released, thereby restoring the levers by the restoring force thereof. 30) rotates to its original position and returns to support the semiconductor chip 1.

On the other hand, the four corner fixed support of the semiconductor chip using the rotation lever according to the present invention further includes a pocket return means 60,

The pocket return means 60

As shown in FIG. 3,

When the opener 40 is lowered to guide the return to the original position by lowering the pocket 20,

A pair of return pins 61 inserted into the insert body 10 and the pocket 20 so as to cross each first side space portion 12 of the insert body 10,

A pair of long holes 62 formed vertically long in a hole into which the respective return pins 61 are inserted in the pocket 20;

A pair of return recesses 63 formed in the side walls of the first side spaces 12 of the insert body 10,

A pair of supporting portions 64 connected to the pockets 20 and inserted into the return recesses 63 and disposed on a lower side of each return recess 63;

A pair of fitting protrusions 65 protruding downward from the inner upper surface of each of the return recesses 63, and

A pair of return springs 66 disposed in the respective return recesses 63, the upper ends of which are fitted to the respective fitting protrusions 65, and the lower ends of which are supported by the supporting members 64.

It is made, including.

In this case, it is preferable that protrusions to which the lower end of the return spring 66 is fitted are formed in each of the supporting parts 64.

Therefore, when the opener 40 is raised, the pockets 20 are raised together, so that the respective return springs 66 supported by the supporting members 64 are compressed, and the lowering of the opener 40 is compressed. Each of the return springs 66 has been restored, and the pocket 20 is returned to its original position by the restoring elastic force.

Looking at the operating state of the four corner fixed support of the semiconductor chip using the rotation lever according to the present invention having the above configuration,

As shown in FIG. 7, the opener 40 is raised by an external elevating device, etc. At this time, the pocket 20 is also raised.

As shown in FIG. 6, each of the levers 30 is rotated upward by the upward movement of the pocket 20, that is, the upward movement of the forks 31 of the levers 30. Space for entry and exit of 1) is secured.

At this time, the semiconductor chip 1 enters the seating part 21 of the pocket 20, and the semiconductor chip 1 entering is guided by the left and right guides 23 and the front and rear guides 24 of the pocket 20. And is seated on the seating portion 21.

After the opener 40 is lowered, the pocket 20 is lowered by the pocket return means 60,

As shown in FIGS. 4 and 5, the levers 30 are pivoted downward by the lever return means 50 to support four corners of the semiconductor chip 1 seated on the seating portion 21. do.

The supported semiconductor chip 1 is inspected by an inspection device that enters through the corresponding center hole 431 of the opener 40 and the center hole 26 of the pocket 20.

In the above description of the present invention, the four-corner fixed support of the semiconductor chip using the rotation lever has a specific shape and structure with reference to the accompanying drawings, but the present invention can be variously modified and changed by those skilled in the art. However, such modifications and variations should be construed as falling within the protection scope of the present invention.

1: semiconductor chip
10: Insert body
11: Center space department
12: first side space part
13: 2nd side space part
14: guide hole
20: pocket
21: seating part
22: Support
23: left and right guide
231: Slope
24: Front and rear guide
241: Slope
25: lifting guide block
26: Center Hall
30: lever
31: fork
32: Response Guide
40: opener
41: opener body
42: guide pin
43: pocket pushing block
431: Response Center Hall
44: lever pushing block
50: lever return means
51: first recess
52: second recess
53: torsion spring
60: pocket return means
61: return pin
62: longevity
63: return recess
64: supporting part
65: fitting
66: return spring

Claims (7)

Square center space portion 11 formed to penetrate up and down, two first side space portion 12 connected to the front and rear sides facing each other of each side of the center space portion 11, and the An insert body (10) having two second side space portions (13) connected to two left and right sides facing each other among each side of the center space portion (11);
A pocket 20 disposed in the center space portion 11 and the first side space portion 12 of the insert body 10 and having a semiconductor chip 1 seating portion 21;
It is disposed in each of the second side space portion 13 of the insert body 10, each of the opposite ends facing each other in the second side space portion 13 of the insert body 10 is hinged to be rotated up and down Two levers 30 having end portions facing each other to support four corners of the semiconductor chip 1 seated on the seating portion 21 of the pocket 20;
Is disposed on the lower side of the insert body 10, by pushing the pocket 20 upwards so that each lever 30 is rotated upward based on the hinge portion to release the support for the semiconductor chip (1) Opener 40; And
Lever return means (50) for inducing each lever (30) to rotate downward based on a hinge portion and return to its original position when the opener (40) descends;
Consisting of
The pocket 20 is formed to protrude upward in an area where the end portions facing each other of the levers 30 are positioned in an area around the upper end of the seating portion 21 so as to face the ends of the levers 30 facing each other. Four corners of the semiconductor chip using the rotation lever, characterized in that a pair of supports 22 having a height (H) corresponding to the semiconductor chip 1 seated on the seating portion 21 is provided. Fixed support.
The method of claim 1,
Four corner fixed support of a semiconductor chip using a rotation lever, characterized in that it further comprises a pocket return means for inducing the return to the original position by lowering the pocket 20 when the opener 40 is lowered.
delete The method of claim 1,
The pocket 20 is provided with a pair of left and right guides 23 having a slope 231 inclined downward on a surface facing each other and standing upward on the upper end of each support 22,
Each lever 30 is provided with openings (단부 口) at the end facing each other is provided with a corresponding guide 32 for each of the left and right guides 23 to come in and out when the lever 30 is rotated up and down A four corner fixed support of a semiconductor chip using a rotating lever.
The method of claim 4, wherein
The pocket 20 has a pair of front and rear guides 24 having a slope 241 inclined downward on a surface facing each other and erected in an area facing back and forth in an area around an upper end of the seating part 21, and the seating part (21) The four corner fixed support of the semiconductor chip using the rotation lever, characterized in that the center hole for entrance to the inspection equipment is formed to penetrate up and down in the center.
The method according to claim 4 or 5,
The insert body 10 is provided with a guide hole 14 which is formed to penetrate up and down in two corner areas or both of the diagonal of the four corner areas thereof,
The opener 40 includes a guide pin 42 inserted into the guide hole 14 to slide up and down, and a pocket pushing block 43 that pushes the pocket 20 when the opener 40 is raised. A four corner fixed support of a semiconductor chip using a rotating lever, characterized in that.
The method of claim 6,
The opener 40 is provided with a pair of lever pushing blocks 44 which push the end sides of the levers 30 facing each other when raised, and the four corners of the semiconductor chip using the rotation lever. Fixed support.

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