KR200195131Y1 - Test sample fixing holder for semiconductor chip inspecting electron microscope - Google Patents
Test sample fixing holder for semiconductor chip inspecting electron microscope Download PDFInfo
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- KR200195131Y1 KR200195131Y1 KR2019980006409U KR19980006409U KR200195131Y1 KR 200195131 Y1 KR200195131 Y1 KR 200195131Y1 KR 2019980006409 U KR2019980006409 U KR 2019980006409U KR 19980006409 U KR19980006409 U KR 19980006409U KR 200195131 Y1 KR200195131 Y1 KR 200195131Y1
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- chip
- electron microscope
- fixing groove
- contact plate
- holder
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
본 고안은 반도체 칩 검사용 전자현미경의 시료고정홀더에 관한 것으로, 몸체(11)의 상면에 형성된 칩고정홈(13)의 전방에 일정깊이로 칩안착홈(20)이 형성되어 있고, 그 칩안착홈(20)의 내측에 수직으로 칩밀착판(14)이 삽입되어 있으며, 칩고정홈(13)의 상면 양단부에는 각각 이탈방지판(21)이 설치되어 있고, 이탈방지판(21)이 후방으로 탄지되도록 스프링(22)이 설치되어 있어서, 상기 이탈방지판(21)에 의하여 칩밀착판(14)의 이탈이 차단되도록 되어 있다.The present invention relates to a sample holding holder of the electron microscope for semiconductor chip inspection, the chip seating groove 20 is formed in a predetermined depth in front of the chip fixing groove 13 formed on the upper surface of the body 11, the chip The chip contact plate 14 is inserted vertically inside the seating groove 20, and the separation prevention plate 21 is provided at both ends of the upper surface of the chip fixing groove 13, and the separation prevention plate 21 is provided. The spring 22 is provided so as to be supported by the rear, and the separation of the chip contact plate 14 is blocked by the separation preventing plate 21.
Description
본 고안은 반도체 칩 검사용 전자현미경의 시료고정홀더에 관한 것으로, 특히 칩고정판의 이탈을 방지하도록 한 것을 특징으로 하는 반도체 칩 검사용 전자현미경의 시료고정홀더에 관한 것이다.The present invention relates to a sample holding holder of the electron microscope for semiconductor chip inspection, and more particularly to a sample holding holder of the electron microscope for semiconductor chip inspection, characterized in that the separation of the chip holding plate.
일반적으로 반도체 제조공정중 메탈공정을 마친 다음에는 이상유,무를 검사하기 위하여 칩을 절단한 다음, 절단면을 전자현미경에서 검사하게 되는데, 이와 같이 칩의 절단면을 검사하기 위하여 절단된 칩을 고정하기 위한 시료고정홀더가 도 1 및 도 2에 도시되어 있는 바, 이를 간단히 설명하면 다음과 같다.In general, after finishing the metal process in the semiconductor manufacturing process, the chip is cut to check for the presence of abnormality, nothing, and then the cut surface is inspected by an electron microscope. Thus, to fix the cut chip to check the cut surface of the chip 1 and 2, the sample fixing holder is briefly described as follows.
도 1은 종래 반도체 칩 검사용 전자현미경의 시료고정홀더를 보인 사시도이고, 도 2는 종래 반도체 칩 검사용 전자현미경의 시료고정홀더를 보인 평면도로서, 도시된 바와 같이, 직육면체의 몸체(1) 상면에 절단된 칩(2)을 삽입하기 위한 칩고정홈(3)이 일정깊이로 형성되어 있고, 그 칩고정홈(3)의 내측에는 칩(2)을 칩고정홈(3)의 일측면으로 밀착시키기 위한 칩밀착판(4)이 삽입설치되어 있으며, 상기 칩고정홈(3)의 후방으로는 몸체(1)에 관통되어 칩밀착판(4)을 밀수 있도록 2개의 가동스크류(5)가 일정간격을 두고 설치되어 있다.1 is a perspective view showing a sample fixing holder of a conventional semiconductor chip inspection electron microscope, Figure 2 is a plan view showing a sample fixing holder of a conventional semiconductor chip inspection electron microscope, as shown, the upper surface of the body 1 of the rectangular parallelepiped The chip fixing groove 3 for inserting the cut chip 2 in the groove is formed to a predetermined depth, and the chip 2 into one side of the chip fixing groove 3 inside the chip fixing groove 3. A chip contact plate 4 is inserted and installed to be in close contact with each other, and two movable screws 5 are inserted into the rear of the chip fixing groove 3 to push the chip contact plate 4 through the body 1. Installed at regular intervals.
상기와 같이 구성되어 있는 종래 반도체 칩 검사용 전자현미경의 시료고정홀더는 칩(2)을 절단하여 절단면이 상측에 위치되도록 칩고정홈(3)에 삽입하고, 가동스크류(5)를 이용하여 칩밀착판(4)을 밀어서 칩(2)을 칩고정홈(3)의 내부 일측면에 밀착되도록 고정한 다음, 홀더(6)를 전자현미경의 검사부로 이동하여 검사를 실시하게 된다.The sample holding holder of the conventional electron microscope inspection electron microscope configured as described above is to cut the chip (2) and insert it into the chip fixing groove (3) so that the cut surface is located on the upper side, the chip using the movable screw (5) The adhesive plate 4 is pushed to fix the chip 2 to be in close contact with the inner side of the chip fixing groove 3, and then the holder 6 is moved to the inspection unit of the electron microscope to perform the inspection.
그러나, 상기와 같이 구성되어 있는 종래 반도체 칩 검사용 전자현미경의 시료고정홀더는 칩고정홈(3)이 상측으로 개방되어 있어서, 칩고정홈(3)에 삽입되어 있는 칩밀착판(4)이 쉽게 이탈되어 분실 또는 손상되는 문제점이 있었다.However, in the conventional sample holding holder of the semiconductor microscope inspection electron microscope configured as described above, the chip holding plate 4 is inserted into the chip holding groove 3 because the chip holding groove 3 is opened upward. There was a problem that it is easily separated and lost or damaged.
상기와 같은 문제점을 감안하여 안출한 본 고안의 목적은 칩고정홈의 내측에 설치된 칩밀착판의 이탈을 방지하여 칩밀착판이 분실 또는 손상되는 것을 방지하도록 하는데 적합한 반도체 칩 검사용 전자현미경의 시료고정홀더를 제공함에 있다.The object of the present invention devised in view of the above problems is to fix the sample of the semiconductor chip inspection electron microscope suitable for preventing the chip contact plate from being lost or damaged by preventing the chip contact plate from being installed inside the chip fixing groove. In providing a holder.
도 1은 종래 반도체 칩 검사용 전자현미경의 시료고정홀더를 보인 사시도.1 is a perspective view showing a sample fixing holder of a conventional electron microscope inspection electron chip.
도 2는 종래 반도체 칩 검사용 전자현미경의 시료고정홀더를 보인 평면도.Figure 2 is a plan view showing a sample holder of the conventional electron microscope inspection electron chip.
도 3은 본 고안 반도체 칩 검사용 전자현미경의 시료고정홀더를 보인 사시도.Figure 3 is a perspective view showing a sample holder of the present invention a semiconductor chip inspection electron microscope.
도 4는 본 고안 반도체 칩 검사용 전자현미경의 시료고정홀더를 보인 평면도.Figure 4 is a plan view showing a sample holder of the present invention a semiconductor chip inspection electron microscope.
* 도면의 주요부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings
11 : 몸체 13 : 칩고정홈11 body 13 chip fixing groove
14 : 칩밀착판 15 : 가동스크류14 chip contact plate 15: movable screw
20 : 칩안착홈 21 : 이탈방지판20: chip seating groove 21: departure prevention plate
22 : 스프링22: spring
상기와 같은 본 고안의 목적을 달성하기 위하여 몸체의 상면에 일정깊이의 칩고정홈이 형성되어 있고, 그 칩고정홈의 내측에 칩밀착판이 삽입되어 있으며, 칩고정홈의 후방에는 수개의 가동스크류가 설치되어 있는 반도체 칩 검사용 전자현미경의 시료고정홀더에 있어서, 상기 칩고정홈의 전방에 요입되도록 칩을 안착시키기 위한 칩안착홈을 형성하고, 상기 칩밀착판이 삽입된 칩고정홈의 상면 양단부에 각각 칩밀착판의 이탈을 차단하기 위한 이탈방지판을 설치하여서 구성되는 것을 특징으로 하는 반도체 칩 검사용 전자현미경의 시료고정홀더가 제공된다.In order to achieve the object of the present invention as described above, a chip fixing groove having a predetermined depth is formed on the upper surface of the body, and a chip contact plate is inserted inside the chip fixing groove, and several movable screws at the rear of the chip fixing groove. In the sample holding holder of the semiconductor chip inspection electron microscope is provided, the chip holding groove for mounting the chip so as to be inserted into the front of the chip fixing groove, and both ends of the upper surface of the chip fixing groove in which the chip contact plate is inserted Provided in each of the sample holding holder of the electron microscope for semiconductor chip inspection, characterized in that provided in each of the separation preventing plate for blocking the separation of the chip contact plate.
이하, 상기와 같이 구성되는 본 고안 반도체 칩 검사용 전자현미경의 시료고정홀더를 첨부된 도면의 실시예를 참고하여 보다 상세히 설명하면 다음과 같다.Hereinafter, with reference to the embodiment of the accompanying drawings, the sample holder of the present invention semiconductor chip inspection electron microscope configured as described above in more detail as follows.
도 3은 본 고안 반도체 칩 검사용 전자현미경의 시료고정홀더를 보인 사시도이고, 도 4는 본 고안 반도체 칩 검사용 전자현미경의 시료고정홀더를 보인 평면도로서, 도시된 바와 같이, 본 고안 반도체 칩 검사용 전자현미경의 시료고정홀더는 직육면체의 몸체(11) 상면에 절단된 칩(12)을 삽입하기 위한 칩고정홈(13)이 일정깊이로 형성되어 있고, 그 칩고정홈(13)의 내측에는 칩(12)을 칩고정홈(13)의 일측면으로 밀착시키기 위한 칩밀착판(14)이 수직방향으로 삽입설치되어 있으며, 상기 칩고정홈(13)의 후방으로는 몸체(11)에 관통되어 칩밀착판(14)을 밀수 있도록 2개의 가동스크류(15)가 일정간격을 두고 설치되어 있다.3 is a perspective view showing a sample holder of the electron microscope for the semiconductor chip inspection of the present invention, Figure 4 is a plan view showing a sample holder of the electron microscope for the semiconductor chip inspection of the present invention, as shown, The sample fixing holder of the electron microscope has a chip fixing groove 13 for inserting the chip 12 cut into the upper surface of the body 11 of the rectangular parallelepiped to a certain depth, and inside the chip fixing groove 13. A chip contact plate 14 for inserting the chip 12 into one side of the chip fixing groove 13 is inserted in the vertical direction, and penetrates through the body 11 to the rear of the chip fixing groove 13. The two movable screws 15 are provided at regular intervals so as to push the chip contact plate 14.
그리고, 상기 칩고정홈(13)의 후방에는 몸체(11)의 내측면에 요입되도록 칩안착홈(20)이 형성되어 있고, 상기 칩고정홈(13)의 양단부에는 각각 칩밀착판(14)의 이탈을 차단하기 위한 이탈방지판(21)이 용접으로 고정설치되어 있다.In addition, a chip seating groove 20 is formed at the rear of the chip fixing groove 13 so as to be recessed in the inner surface of the body 11, and chip contact plates 14 are formed at both ends of the chip fixing groove 13, respectively. The separation prevention plate 21 for blocking the separation of the fixed is installed by welding.
또한, 상기 칩고정홈(13)의 내측에 설치된 칩밀착판(14)은 스프링(22)에 의하여 후방으로 탄지되도록 설치되어 있다.In addition, the chip contact plate 14 provided inside the chip fixing groove 13 is installed so as to be supported by the spring 22 to the rear.
상기와 같이 구성되어 있는 본 고안 반도체 칩 검사용 전자현미경의 시료고정홀더는 가동스크류(15)들을 후방으로 이동시키면 스프링(22)에 의하여 칩밀착판(14)이 후방으로 밀려서 칩고정홈(13)의 입구부가 개방된 상태가 된다. 이와 같은 상태에서 칩고정홈(13)에 절단면이 상측을 향하도록 칩(12)을 삽입한 다음, 가동스크류(15)들을 밀어서 칩밀착판(14)에 의하여 칩(12)이 밀려서 칩안착홈(20)에 안착되도록 한다. 그런 다음, 칩(12)이 고정된 홀더(23)를 전자현미경의 검사부에 위치시키고 칩(12)의 절단면을 검사하게 된다.In the sample holding holder of the inventive semiconductor chip inspection electron microscope configured as described above, when the movable screws 15 are moved to the rear, the chip contact plate 14 is pushed backward by the spring 22 to fix the chip fixing groove 13. Inlet part of) becomes an open state. In such a state, the chip 12 is inserted into the chip fixing groove 13 so that the cutting surface faces upward, and then the movable screws 15 are pushed to push the chip 12 by the chip contact plate 14 so as to push the chip seating groove. Make sure to seat on (20). Then, the holder 23 having the chip 12 fixed thereon is placed on the inspection unit of the electron microscope, and the cut surface of the chip 12 is inspected.
이상에서 상세히 설명한 바와 같이, 본 고안 반도체 칩 검사용 전자현미경의 시료고정홀더는 칩고정홈의 전방에 일정깊이로 칩안착홈을 형성하고, 칩고정홈의 상면 양단부에는 각각 이탈방지판을 설치하며, 이탈방지판이 후방으로 탄지되도록 스프링을 설치하여, 상기 이탈방지판에 의하여 칩고정홈에 수직방향으로 설치된 칩밀착판의 이탈이 차단되도록 함으로서, 종래와 같이 칩밀착판의 분실 또는 훼손을 방지하는 효과가 있다.As described in detail above, the sample holding holder of the present invention semiconductor chip inspection electron microscope to form a chip seating groove in a predetermined depth in front of the chip fixing groove, and to install the separation prevention plate on both ends of the upper surface of the chip fixing groove To prevent the loss or damage of the chip contact plate as in the prior art, by installing a spring so that the release prevention plate is supported in the rear, the separation of the chip contact plate installed in the vertical direction in the chip fixing groove by the departure prevention plate. It works.
Claims (2)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019980006409U KR200195131Y1 (en) | 1998-04-22 | 1998-04-22 | Test sample fixing holder for semiconductor chip inspecting electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019980006409U KR200195131Y1 (en) | 1998-04-22 | 1998-04-22 | Test sample fixing holder for semiconductor chip inspecting electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR19990039944U KR19990039944U (en) | 1999-11-25 |
| KR200195131Y1 true KR200195131Y1 (en) | 2000-09-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019980006409U KR200195131Y1 (en) | 1998-04-22 | 1998-04-22 | Test sample fixing holder for semiconductor chip inspecting electron microscope |
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| KR (1) | KR200195131Y1 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101974172B1 (en) | 2018-06-01 | 2019-04-30 | (주) 나노에이스 | Displacement type support for inspection of semiconductor chips of different sizes |
| KR102036202B1 (en) | 2018-10-26 | 2019-10-24 | (주) 나노에이스 | Support for inspection of semiconductor chips |
| KR102047252B1 (en) | 2018-12-06 | 2019-11-21 | (주) 나노에이스 | Support for inspection of semiconductor chips |
| KR102060083B1 (en) | 2019-06-27 | 2019-12-27 | (주) 나노에이스 | Support for inspection of semiconductor chips |
| KR20200046974A (en) | 2018-10-26 | 2020-05-07 | (주) 나노에이스 | Support for inspection of semiconductor chips |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100447447B1 (en) * | 2002-01-31 | 2004-09-07 | 최한주 | Sample holder for wafer test |
| KR100719711B1 (en) * | 2005-12-28 | 2007-05-17 | 동부일렉트로닉스 주식회사 | An apparatus for fixing sample of scanning electron microscope |
-
1998
- 1998-04-22 KR KR2019980006409U patent/KR200195131Y1/en not_active IP Right Cessation
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101974172B1 (en) | 2018-06-01 | 2019-04-30 | (주) 나노에이스 | Displacement type support for inspection of semiconductor chips of different sizes |
| KR102036202B1 (en) | 2018-10-26 | 2019-10-24 | (주) 나노에이스 | Support for inspection of semiconductor chips |
| KR20200046974A (en) | 2018-10-26 | 2020-05-07 | (주) 나노에이스 | Support for inspection of semiconductor chips |
| KR102047252B1 (en) | 2018-12-06 | 2019-11-21 | (주) 나노에이스 | Support for inspection of semiconductor chips |
| KR102060083B1 (en) | 2019-06-27 | 2019-12-27 | (주) 나노에이스 | Support for inspection of semiconductor chips |
Also Published As
| Publication number | Publication date |
|---|---|
| KR19990039944U (en) | 1999-11-25 |
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