WO2011109537A3 - Substrate transport carrier - Google Patents

Substrate transport carrier Download PDF

Info

Publication number
WO2011109537A3
WO2011109537A3 PCT/US2011/026892 US2011026892W WO2011109537A3 WO 2011109537 A3 WO2011109537 A3 WO 2011109537A3 US 2011026892 W US2011026892 W US 2011026892W WO 2011109537 A3 WO2011109537 A3 WO 2011109537A3
Authority
WO
WIPO (PCT)
Prior art keywords
cover
base
portions
hinges
cam
Prior art date
Application number
PCT/US2011/026892
Other languages
French (fr)
Other versions
WO2011109537A2 (en
Inventor
John Burns
Jeffrey J. King
Original Assignee
Entegris, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris, Inc. filed Critical Entegris, Inc.
Priority to US13/582,709 priority Critical patent/US20130056485A1/en
Publication of WO2011109537A2 publication Critical patent/WO2011109537A2/en
Publication of WO2011109537A3 publication Critical patent/WO2011109537A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1876—Particular processes or apparatus for batch treatment of the devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67386—Closed carriers characterised by the construction of the closed carrier
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)

Abstract

A transport container for substrates such as semiconductor wafers and solar cell substrates includes a cover and a base having a plurality of side walls including movable wall portions with vertically extending hinges or hinges that provide a pivot about a vertical axis. The hinges can be resilient movable polymer portions such as living hinges and can have an unconnected upper edge and an unconnected lower edge to allow the movable wall portions to move inwardly relative to a floor of the base. The cover can include a base engagement portion configured as a cam portion that engages a cover engagement portion on the movable wall portions as the cover is inserted onto the base. As the cam portions of the cover engage the cover engagement portions, the cam portions move the wall inwardly relative to the base to align the substrates.
PCT/US2011/026892 2010-03-02 2011-03-02 Substrate transport carrier WO2011109537A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US13/582,709 US20130056485A1 (en) 2010-03-02 2011-03-02 Substrate transport carrier

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US30974710P 2010-03-02 2010-03-02
US61/309,747 2010-03-02

Publications (2)

Publication Number Publication Date
WO2011109537A2 WO2011109537A2 (en) 2011-09-09
WO2011109537A3 true WO2011109537A3 (en) 2012-03-01

Family

ID=44542826

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2011/026892 WO2011109537A2 (en) 2010-03-02 2011-03-02 Substrate transport carrier

Country Status (3)

Country Link
US (1) US20130056485A1 (en)
TW (1) TW201206775A (en)
WO (1) WO2011109537A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD800055S1 (en) * 2015-06-11 2017-10-17 Elie Rothschild Solar panel attachment base
US10242897B2 (en) 2015-12-14 2019-03-26 Solarcity Corporation Micro-environment container for photovoltaic cells
US20240047249A1 (en) * 2022-08-02 2024-02-08 Visera Technologies Company Ltd. Transfer system for wafer cassettes

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5452795A (en) * 1994-11-07 1995-09-26 Gallagher; Gary M. Actuated rotary retainer for silicone wafer box
US6237771B1 (en) * 1999-12-28 2001-05-29 Noor Ul Haq Wafer shipping container
US20050269241A1 (en) * 2003-06-06 2005-12-08 Brooks Ray G Integrated circuit wafer packaging system and method
US20070187286A1 (en) * 2006-02-16 2007-08-16 Pylant James D Wafer storage container and apparatus
US20090095650A1 (en) * 2007-10-12 2009-04-16 Peak Plastic And Metal Products (Int'l) Ltd. Wafer container with staggered wall structure

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060266754A1 (en) * 2005-05-31 2006-11-30 Carmona Michael B Expandable and contractible food storage container

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5452795A (en) * 1994-11-07 1995-09-26 Gallagher; Gary M. Actuated rotary retainer for silicone wafer box
US6237771B1 (en) * 1999-12-28 2001-05-29 Noor Ul Haq Wafer shipping container
US20050269241A1 (en) * 2003-06-06 2005-12-08 Brooks Ray G Integrated circuit wafer packaging system and method
US20070187286A1 (en) * 2006-02-16 2007-08-16 Pylant James D Wafer storage container and apparatus
US20090095650A1 (en) * 2007-10-12 2009-04-16 Peak Plastic And Metal Products (Int'l) Ltd. Wafer container with staggered wall structure

Also Published As

Publication number Publication date
US20130056485A1 (en) 2013-03-07
WO2011109537A2 (en) 2011-09-09
TW201206775A (en) 2012-02-16

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