SG11202001297YA - Overhead transport vehicle, overhead transport system, and control method for overhead transport vehicle - Google Patents

Overhead transport vehicle, overhead transport system, and control method for overhead transport vehicle

Info

Publication number
SG11202001297YA
SG11202001297YA SG11202001297YA SG11202001297YA SG11202001297YA SG 11202001297Y A SG11202001297Y A SG 11202001297YA SG 11202001297Y A SG11202001297Y A SG 11202001297YA SG 11202001297Y A SG11202001297Y A SG 11202001297YA SG 11202001297Y A SG11202001297Y A SG 11202001297YA
Authority
SG
Singapore
Prior art keywords
overhead transport
transport vehicle
control method
overhead
vehicle
Prior art date
Application number
SG11202001297YA
Other languages
English (en)
Inventor
Eiji Wada
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of SG11202001297YA publication Critical patent/SG11202001297YA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
    • B65G47/244—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles by turning them about an axis substantially perpendicular to the conveying plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/60—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type
    • B65G47/61—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type for articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/02—Control or detection
    • B65G2203/0208—Control or detection relating to the transported articles
    • B65G2203/0233—Position of the article
SG11202001297YA 2017-08-16 2018-07-06 Overhead transport vehicle, overhead transport system, and control method for overhead transport vehicle SG11202001297YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017157189 2017-08-16
PCT/JP2018/025688 WO2019035286A1 (ja) 2017-08-16 2018-07-06 天井搬送車、搬送システム、及び天井搬送車の制御方法

Publications (1)

Publication Number Publication Date
SG11202001297YA true SG11202001297YA (en) 2020-03-30

Family

ID=65362314

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202001297YA SG11202001297YA (en) 2017-08-16 2018-07-06 Overhead transport vehicle, overhead transport system, and control method for overhead transport vehicle

Country Status (9)

Country Link
US (1) US11069549B2 (zh)
EP (1) EP3670389B1 (zh)
JP (1) JP6849074B2 (zh)
KR (1) KR102386052B1 (zh)
CN (1) CN111032535B (zh)
IL (1) IL272565B (zh)
SG (1) SG11202001297YA (zh)
TW (1) TWI751368B (zh)
WO (1) WO2019035286A1 (zh)

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US20210237972A1 (en) * 2018-04-24 2021-08-05 Rutgers, The State University Of New Jersey Low profile transfer mechanism for controlled environment
JP7063277B2 (ja) * 2019-01-10 2022-05-09 株式会社ダイフク 天井搬送車
WO2020195240A1 (ja) * 2019-03-22 2020-10-01 村田機械株式会社 搬送車システム
CN115175842B (zh) * 2020-04-27 2024-05-03 村田机械株式会社 高架输送车以及高架输送系统
CN113998403B (zh) * 2020-07-28 2022-09-23 长鑫存储技术有限公司 转运系统及转运方法
JP7283500B2 (ja) * 2021-06-07 2023-05-30 株式会社ダイフク 物品搬送設備
JP2023069914A (ja) 2021-11-08 2023-05-18 株式会社ダイフク 物品搬送装置
JP2023074704A (ja) 2021-11-18 2023-05-30 株式会社ダイフク 物品搬送装置
WO2023188769A1 (ja) * 2022-03-29 2023-10-05 村田機械株式会社 搬送システム
CN116534668A (zh) * 2022-12-02 2023-08-04 苏州正齐半导体设备有限公司 用于更换卷盘的系统及其方法

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US6481558B1 (en) * 1998-12-18 2002-11-19 Asyst Technologies, Inc. Integrated load port-conveyor transfer system
JP2001171970A (ja) * 1999-12-20 2001-06-26 Tsubakimoto Chain Co 天井走行搬送車におけるワーク旋回方法
JP4702693B2 (ja) 2004-02-12 2011-06-15 ムラテックオートメーション株式会社 搬送台車及び搬送装置
JP4915051B2 (ja) 2005-03-28 2012-04-11 ムラテックオートメーション株式会社 自動搬送システム
JP2006298566A (ja) * 2005-04-20 2006-11-02 Murata Mach Ltd 天井走行車とそのシステム
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JP6330714B2 (ja) * 2015-04-09 2018-05-30 株式会社ダイフク 物品搬送設備及び物品搬送設備の保守作業方法
JP6493538B2 (ja) * 2015-08-14 2019-04-03 村田機械株式会社 搬送車システム
CN205132683U (zh) * 2015-10-15 2016-04-06 杭州爱科科技有限公司 用于提供卷材张力的机构
JP2017120510A (ja) * 2015-12-28 2017-07-06 株式会社ダイフク 物品搬送設備
CN205920055U (zh) * 2016-07-16 2017-02-01 深圳市兴禾自动化有限公司 一种治具旋转驱动及卡紧限位装置
JP6586936B2 (ja) * 2016-09-21 2019-10-09 株式会社ダイフク 物品搬送設備
JP6140351B1 (ja) 2016-10-31 2017-05-31 ファナック株式会社 複数の機械と相互通信を行う機械システム

Also Published As

Publication number Publication date
US11069549B2 (en) 2021-07-20
KR20200027996A (ko) 2020-03-13
CN111032535B (zh) 2022-02-25
IL272565B (en) 2021-04-29
JPWO2019035286A1 (ja) 2020-08-06
EP3670389B1 (en) 2024-05-15
TW201910243A (zh) 2019-03-16
KR102386052B1 (ko) 2022-04-14
CN111032535A (zh) 2020-04-17
US20200251366A1 (en) 2020-08-06
TWI751368B (zh) 2022-01-01
EP3670389A1 (en) 2020-06-24
IL272565A (en) 2020-03-31
EP3670389A4 (en) 2021-04-14
WO2019035286A1 (ja) 2019-02-21
JP6849074B2 (ja) 2021-03-24

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