SG10201803747XA - Workpiece processing method - Google Patents

Workpiece processing method

Info

Publication number
SG10201803747XA
SG10201803747XA SG10201803747XA SG10201803747XA SG10201803747XA SG 10201803747X A SG10201803747X A SG 10201803747XA SG 10201803747X A SG10201803747X A SG 10201803747XA SG 10201803747X A SG10201803747X A SG 10201803747XA SG 10201803747X A SG10201803747X A SG 10201803747XA
Authority
SG
Singapore
Prior art keywords
expanding
processing method
sheet
amount
chips
Prior art date
Application number
SG10201803747XA
Other languages
English (en)
Inventor
Priewasser Karl
Kigawa Akiko
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of SG10201803747XA publication Critical patent/SG10201803747XA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B43/00—Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
    • B32B43/006—Delaminating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • B32B2457/14—Semiconductor wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
    • H01L2221/68336—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding involving stretching of the auxiliary support post dicing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
    • H01L2221/68386—Separation by peeling

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Dicing (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
SG10201803747XA 2017-05-23 2018-05-03 Workpiece processing method SG10201803747XA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017101598A JP6951124B2 (ja) 2017-05-23 2017-05-23 加工方法

Publications (1)

Publication Number Publication Date
SG10201803747XA true SG10201803747XA (en) 2018-12-28

Family

ID=64109362

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201803747XA SG10201803747XA (en) 2017-05-23 2018-05-03 Workpiece processing method

Country Status (8)

Country Link
US (1) US10475676B2 (zh)
JP (1) JP6951124B2 (zh)
KR (1) KR102437493B1 (zh)
CN (1) CN108933095B (zh)
DE (1) DE102018207498B4 (zh)
MY (1) MY190871A (zh)
SG (1) SG10201803747XA (zh)
TW (1) TWI752215B (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108155270B (zh) * 2017-12-13 2019-09-20 北京创昱科技有限公司 一种薄膜与晶片的分离装置和分离方法
US10867827B2 (en) * 2018-09-27 2020-12-15 Taiwan Semiconductor Manufacturing Company, Ltd. Alignment holder, testing apparatus and method for manufacturing a semiconductor package
JP7246244B2 (ja) * 2019-05-09 2023-03-27 株式会社ディスコ 被加工物の保護部材貼着方法
JP7438626B2 (ja) 2020-03-31 2024-02-27 株式会社ディスコ 搬送機構及びシート拡張装置
JP7511981B2 (ja) 2020-08-05 2024-07-08 株式会社ディスコ 接着用フィルム付きチップの製造方法
KR102233362B1 (ko) * 2021-01-13 2021-03-26 송익수 알루미늄 캔의 절단면 연마장치
DE102021203911A1 (de) 2021-04-20 2022-10-20 Disco Corporation Verfahren zum bearbeiten eines substrats und ein system zum bearbeiten eines substrats

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY118036A (en) * 1996-01-22 2004-08-30 Lintec Corp Wafer dicing/bonding sheet and process for producing semiconductor device
US6235387B1 (en) * 1998-03-30 2001-05-22 3M Innovative Properties Company Semiconductor wafer processing tapes
JP3408805B2 (ja) 2000-09-13 2003-05-19 浜松ホトニクス株式会社 切断起点領域形成方法及び加工対象物切断方法
US6589809B1 (en) * 2001-07-16 2003-07-08 Micron Technology, Inc. Method for attaching semiconductor components to a substrate using local UV curing of dicing tape
US6908784B1 (en) * 2002-03-06 2005-06-21 Micron Technology, Inc. Method for fabricating encapsulated semiconductor components
TWI225279B (en) * 2002-03-11 2004-12-11 Hitachi Ltd Semiconductor device and its manufacturing method
ES2285634T3 (es) 2002-03-12 2007-11-16 Hamamatsu Photonics K. K. Metodo para dividir un siustrato.
KR100468748B1 (ko) * 2002-07-12 2005-01-29 삼성전자주식회사 프리컷 다이싱 테이프와 범용 다이싱 테이프를 웨이퍼에 마운팅할 수 있는 다이싱 테이프 부착 장비 및 이를포함하는 인라인 시스템
JP2004311576A (ja) * 2003-04-03 2004-11-04 Toshiba Corp 半導体装置の製造方法
JP4599631B2 (ja) * 2003-05-12 2010-12-15 株式会社東京精密 板状部材の分割方法及び分割装置
MY138566A (en) * 2004-03-15 2009-06-30 Hitachi Chemical Co Ltd Dicing/die bonding sheet
JP4684569B2 (ja) * 2004-03-31 2011-05-18 株式会社ディスコ テープ拡張装置
JP4705418B2 (ja) * 2005-06-29 2011-06-22 株式会社ディスコ ウェーハの加工方法
JP2007123658A (ja) 2005-10-31 2007-05-17 Disco Abrasive Syst Ltd 粘着テープの拡張装置
JP2007250598A (ja) * 2006-03-14 2007-09-27 Renesas Technology Corp 半導体装置の製造方法
JP2008153597A (ja) * 2006-12-20 2008-07-03 Hitachi Setsubi Eng Co Ltd 半導体ウエハのダイシングテープ貼り付け方法及び装置
JP5354149B2 (ja) 2008-04-08 2013-11-27 株式会社東京精密 エキスパンド方法
JP2009290052A (ja) * 2008-05-30 2009-12-10 Disco Abrasive Syst Ltd ウエーハの分割方法
JP2011077482A (ja) 2009-10-02 2011-04-14 Disco Abrasive Syst Ltd テープ拡張装置
JP5975763B2 (ja) * 2012-07-05 2016-08-23 株式会社ディスコ ウエーハの加工方法
JP5980600B2 (ja) * 2012-07-12 2016-08-31 株式会社ディスコ テープ拡張装置
JP6180120B2 (ja) * 2013-01-24 2017-08-16 株式会社ディスコ 拡張装置および拡張方法
JP2014204089A (ja) * 2013-04-09 2014-10-27 株式会社ディスコ ウェーハ搬送機構及びウェーハの加工方法
US20140339673A1 (en) * 2013-05-14 2014-11-20 Texas Instruments Incorporated Wafer processing
JP2016092207A (ja) * 2014-11-05 2016-05-23 株式会社ディスコ フレームユニットの製造方法
WO2016107630A1 (en) * 2014-12-29 2016-07-07 Karl Heinz Priewasser Protective sheeting for use in processing a semiconductor-sized wafer and semiconductor-sized wafer processing method
JP2016171214A (ja) * 2015-03-12 2016-09-23 株式会社ディスコ 単結晶基板の加工方法
DE102016211044B4 (de) * 2016-06-21 2024-02-15 Disco Corporation Verfahren zum Bearbeiten eines Wafers und Waferbearbeitungssystem
DE102017200631B4 (de) * 2017-01-17 2022-12-29 Disco Corporation Verfahren zum Bearbeiten eines Substrats
DE102017201154A1 (de) * 2017-01-25 2018-07-26 Disco Corporation Verfahren zum Bearbeiten eines Wafers und Waferbearbeitungssystem

Also Published As

Publication number Publication date
DE102018207498A1 (de) 2018-11-29
TW201901855A (zh) 2019-01-01
MY190871A (en) 2022-05-13
JP6951124B2 (ja) 2021-10-20
KR102437493B1 (ko) 2022-08-26
CN108933095A (zh) 2018-12-04
US10475676B2 (en) 2019-11-12
KR20180128345A (ko) 2018-12-03
CN108933095B (zh) 2024-02-20
JP2018198242A (ja) 2018-12-13
US20180342408A1 (en) 2018-11-29
DE102018207498B4 (de) 2021-02-04
TWI752215B (zh) 2022-01-11

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