SE315340B - - Google Patents

Info

Publication number
SE315340B
SE315340B SE15686/66A SE1568666A SE315340B SE 315340 B SE315340 B SE 315340B SE 15686/66 A SE15686/66 A SE 15686/66A SE 1568666 A SE1568666 A SE 1568666A SE 315340 B SE315340 B SE 315340B
Authority
SE
Sweden
Prior art keywords
cathode
aperture
width
equal
source
Prior art date
Application number
SE15686/66A
Other languages
English (en)
Inventor
F Ferreira
Original Assignee
United Aircraft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Aircraft Corp filed Critical United Aircraft Corp
Publication of SE315340B publication Critical patent/SE315340B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H01J17/06—Cathodes
    • H01J17/066—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • ing And Chemical Polishing (AREA)
SE15686/66A 1965-11-17 1966-11-16 SE315340B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US508302A US3383541A (en) 1965-11-17 1965-11-17 Glow discharge cathode having a large electron beam emitting aperture

Publications (1)

Publication Number Publication Date
SE315340B true SE315340B (de) 1969-09-29

Family

ID=24022185

Family Applications (1)

Application Number Title Priority Date Filing Date
SE15686/66A SE315340B (de) 1965-11-17 1966-11-16

Country Status (5)

Country Link
US (1) US3383541A (de)
DE (1) DE1589005B1 (de)
FR (1) FR1499093A (de)
GB (1) GB1170435A (de)
SE (1) SE315340B (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3466487A (en) * 1967-06-16 1969-09-09 United Aircraft Corp Device for moving a beam of charged particles
GB1275261A (en) * 1968-06-04 1972-05-24 Atomic Energy Authority Uk Improvements in or relating to non thermionic cathode slow discharge devices
US4461970A (en) * 1981-11-25 1984-07-24 General Electric Company Shielded hollow cathode electrode for fluorescent lamp
US5686789A (en) * 1995-03-14 1997-11-11 Osram Sylvania Inc. Discharge device having cathode with micro hollow array

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE896533C (de) * 1939-04-12 1953-11-12 Aeg Einrichtung zur Erzeugung eines Strahles von positiven Ionen oder von Elektronen
NL287527A (de) * 1962-01-15
US3262003A (en) * 1962-05-25 1966-07-19 Martin Marietta Corp Perforated hollow cathode discharge device

Also Published As

Publication number Publication date
DE1589005B1 (de) 1970-02-26
FR1499093A (fr) 1967-10-20
GB1170435A (en) 1969-11-12
US3383541A (en) 1968-05-14

Similar Documents

Publication Publication Date Title
GB1424658A (en) Hollow cathode gas discharge device
GB1054743A (de)
GB1003959A (en) Crossed-field electron discharge tube apparatus
ES380556A1 (es) Un metodo de fabricar un tubo de rayos catodicos.
GB961962A (en) High frequency tube apparatus
GB1170435A (en) Glow Discharge Hollow Cathode
GB913956A (en) Improvements in and relating to ion sources
GB1217037A (en) Improvements in glow discharge cathodes
GB1004978A (en) High frequency electron discharge apparatus
GB971770A (en) Ion source
GB1516389A (en) Field emission gun
GB1019848A (en) Improvements relating to plasma arc torch assemblies
GB1061453A (en) Hollow gas arc discharge
GB995681A (en) Improvements in or relating to discharge tubes
GB1171175A (en) Glow Discharge Cathode for producing a Beam of Electrons
GB1338217A (en) Lasers
GB966501A (en) Improvements in or relating to hydrogen thyratrons
GB1158986A (en) Insulator Shielded Cathode.
GB979090A (en) Process of formation and acceleration of plasma and a gun for its application
GB970174A (en) Current lead-in for discharge chambers
JPS5515962A (en) Ozonizer
GB1266280A (de)
GB731454A (en) Improvements relating to electron emissive devices
GB1008557A (en) Cold-cathode trigger-tube
GB992666A (de)