GB1170435A - Glow Discharge Hollow Cathode - Google Patents

Glow Discharge Hollow Cathode

Info

Publication number
GB1170435A
GB1170435A GB51397/66A GB5139766A GB1170435A GB 1170435 A GB1170435 A GB 1170435A GB 51397/66 A GB51397/66 A GB 51397/66A GB 5139766 A GB5139766 A GB 5139766A GB 1170435 A GB1170435 A GB 1170435A
Authority
GB
United Kingdom
Prior art keywords
cathode
aperture
width
equal
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB51397/66A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RTX Corp
Original Assignee
United Aircraft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Aircraft Corp filed Critical United Aircraft Corp
Publication of GB1170435A publication Critical patent/GB1170435A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H01J17/06—Cathodes
    • H01J17/066—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

1,170,435. Electron beam apparatus. UNITED AIRCRAFT CORP. 16 Nov., 1966 [17 Nov., 1965], No. 51397/66. Heading H1D. A glow discharge hollow cathode electron beam source has a beam outlet aperture of width at least equal to the length of the cathode fall region which may be, for example, approximately 1 cm. long in the case of a cathode operating in helium at a pressure of 500 microns and at 2000 volts. In operation a stable beam is produced having a cross-sectional area at the half power point of the beam at least equal to the cross-sectional area of the aperture. In the annular source shown where the cathode is consitituted by a rear wall 7 and side walls 9, 10 the beam outlet aperture is indicated at 16. Side extensions may reduce the aperture, but the width must be greater than 0.7 of the width of the unreduced aperture as well as being at least equal to the length of the cathode fall region. The cathode is supported by pins 26 within a shield 28. A workpiece 18 may serve as anode. The source shown may be inverted, e.g. for working inside a pipe. The source may also be cylindrical.
GB51397/66A 1965-11-17 1966-11-16 Glow Discharge Hollow Cathode Expired GB1170435A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US508302A US3383541A (en) 1965-11-17 1965-11-17 Glow discharge cathode having a large electron beam emitting aperture

Publications (1)

Publication Number Publication Date
GB1170435A true GB1170435A (en) 1969-11-12

Family

ID=24022185

Family Applications (1)

Application Number Title Priority Date Filing Date
GB51397/66A Expired GB1170435A (en) 1965-11-17 1966-11-16 Glow Discharge Hollow Cathode

Country Status (5)

Country Link
US (1) US3383541A (en)
DE (1) DE1589005B1 (en)
FR (1) FR1499093A (en)
GB (1) GB1170435A (en)
SE (1) SE315340B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3466487A (en) * 1967-06-16 1969-09-09 United Aircraft Corp Device for moving a beam of charged particles
GB1275261A (en) * 1968-06-04 1972-05-24 Atomic Energy Authority Uk Improvements in or relating to non thermionic cathode slow discharge devices
US4461970A (en) * 1981-11-25 1984-07-24 General Electric Company Shielded hollow cathode electrode for fluorescent lamp
US5686789A (en) 1995-03-14 1997-11-11 Osram Sylvania Inc. Discharge device having cathode with micro hollow array

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE896533C (en) * 1939-04-12 1953-11-12 Aeg Device for generating a beam of positive ions or electrons
BE627165A (en) * 1962-01-15
US3262003A (en) * 1962-05-25 1966-07-19 Martin Marietta Corp Perforated hollow cathode discharge device

Also Published As

Publication number Publication date
DE1589005B1 (en) 1970-02-26
US3383541A (en) 1968-05-14
FR1499093A (en) 1967-10-20
SE315340B (en) 1969-09-29

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