GB992666A - - Google Patents
Info
- Publication number
- GB992666A GB992666A GB11179/62A GB1117962A GB992666A GB 992666 A GB992666 A GB 992666A GB 11179/62 A GB11179/62 A GB 11179/62A GB 1117962 A GB1117962 A GB 1117962A GB 992666 A GB992666 A GB 992666A
- Authority
- GB
- United Kingdom
- Prior art keywords
- insulator
- chamber
- electrode
- discharge
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
- H01J37/32027—DC powered
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32577—Electrical connecting means
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Toxicology (AREA)
- General Health & Medical Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Drying Of Semiconductors (AREA)
- Gas-Filled Discharge Tubes (AREA)
- Lasers (AREA)
Abstract
992,666. Glow discharge apparatus. ELEKTROPHYSIKALISCHE ANSTALT BERNARD BERGHAUS. March 23, 1962, [March 30, 1961], No. 11179/62. Heading H1D. A device for the performance of technical, e.g. chemical or metallurgical processes under the action of an electrical gas discharge in particular a glow discharge, comprises a discharge chamber, Fig. 4, and at least one current lead-in provided with an energized inner lead insulated by an insulator, wherein means are provided in order to produce in the gas space between the junction point between current lead-in and insulator and/or between current lead-in and insulator on one hand and the discharge chamber on the other hand, a zone of sufficiently low field intensity so that no gas discharge can be set up within this zone irrespective of the values of electrode distance and pressure. As shown, enclosing chambers 26, 25 are provided between these respective parts. The device works on D.C., Figs. 1-3, 5 or on D.C. or A.C., Fig. 4. For D.C. working, the chamber is the cathode. The insulator has a further electrode at cathode potential inserted therein at the cover. In Fig. 5 (not shown) the chamber is double-walled, the inner wall being supported from the outer wall by insulators. The inner and outer walls may be at slightly different potentials or at equal potentials; in the latter case the spacing insulators may be replaced by conductive members. The additional electrode in the insulator can be connected to the inner or outer wall of the chamber. For chemical processes gas may be supplied through an electrode lead-in nozzle. The screening electrode may in all cases carry a negative potential so as to function as a control grid.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH380661A CH404010A (en) | 1961-03-30 | 1961-03-30 | Method and device for carrying out technical processes under the influence of an electric glow discharge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB992666A true GB992666A (en) | 1965-05-19 |
Family
ID=4263839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB11179/62A Expired GB992666A (en) | 1961-03-30 | 1962-03-23 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3180816A (en) |
| CH (1) | CH404010A (en) |
| DE (1) | DE1294135B (en) |
| GB (1) | GB992666A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE441562B (en) * | 1977-03-28 | 1985-10-14 | Mitsubishi Electric Corp | DEVICE FOR HEATING MEDIUM GLASS DISCHARGE |
| CN106133190B (en) * | 2014-03-20 | 2018-11-09 | 丰田自动车株式会社 | Plasma CVD equipment |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE722131C (en) * | 1937-08-15 | 1942-07-01 | Bernhard Berghaus | Arrangement and method for metallizing objects by means of cathode sputtering |
| DE967138C (en) * | 1938-03-25 | 1957-10-10 | Bernhard Berghaus | Current feedthrough for vacuum annealing and melting furnaces |
| US2583898A (en) * | 1948-06-21 | 1952-01-29 | Lester H Smith | Vapor phase electrochemical process |
| NL160988A (en) * | 1950-05-08 | |||
| US2583899A (en) * | 1950-11-29 | 1952-01-29 | Lester H Smith | Electrochemical process |
| NL83318C (en) * | 1953-02-17 | |||
| BE538618A (en) * | 1954-05-11 |
-
1961
- 1961-03-30 CH CH380661A patent/CH404010A/en unknown
-
1962
- 1962-03-21 DE DEE22583A patent/DE1294135B/en active Pending
- 1962-03-23 GB GB11179/62A patent/GB992666A/en not_active Expired
- 1962-03-27 US US182792A patent/US3180816A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE1294135B (en) | 1969-04-30 |
| CH404010A (en) | 1965-12-15 |
| US3180816A (en) | 1965-04-27 |
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