GB1153787A - Method and apparatus for Glow Cleaning - Google Patents

Method and apparatus for Glow Cleaning

Info

Publication number
GB1153787A
GB1153787A GB3860066A GB3860066A GB1153787A GB 1153787 A GB1153787 A GB 1153787A GB 3860066 A GB3860066 A GB 3860066A GB 3860066 A GB3860066 A GB 3860066A GB 1153787 A GB1153787 A GB 1153787A
Authority
GB
United Kingdom
Prior art keywords
substrate
enclosure
gas
conductive
reactive gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3860066A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Libbey Owens Ford Glass Co
Original Assignee
Libbey Owens Ford Glass Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Libbey Owens Ford Glass Co filed Critical Libbey Owens Ford Glass Co
Publication of GB1153787A publication Critical patent/GB1153787A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents

Abstract

1,153,787. Discharge apparatus. LIBBEYOWENS-FORD-GLASS CO. 30 Aug., 1966 [1 Sept., 1965], No. 38600/66. Heading H1D. Contaminents are removed from the surface of a substrate 15 by a reactive gas which is ionized and the ions accelerated by a confined electric field to strike the surface and remove impurities by bombardment and by chemical action. The known use of an inert gas is referred to. The substrate 15 is passed through vacuum seals 17, 18 of an enclosure 10 connected to a pump 16. Reactive gas enters the enclosure through apertures 44, 45 in tubular electrodes 47, 48 connected to a negative supply 40 and insulated by non-conductive annular spacers 57, 58 from gas supply pipes 55, 56. A positive static charge builds up on the surface of the substrate if the latter is non-conductive. If conductive, the substrate is earthed. The electrostatic field and ionized gas are confined by a chamber 22 formed by two closed-ended channels 23, 24, e.g. of aluminium. The reactive gas is preferably a reducing agent, e.g. hydrogen or a gaseous halide or a fluorocarbon. A plurality of electrodes may be employed on each side of the substrate 15 and may extend transversely thereto. The enclosure 10 may be modified, e.g. by providing a door, to permit material of other than strip shape to be treated.
GB3860066A 1965-09-01 1966-08-30 Method and apparatus for Glow Cleaning Expired GB1153787A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US48441765A 1965-09-01 1965-09-01

Publications (1)

Publication Number Publication Date
GB1153787A true GB1153787A (en) 1969-05-29

Family

ID=23924090

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3860066A Expired GB1153787A (en) 1965-09-01 1966-08-30 Method and apparatus for Glow Cleaning

Country Status (4)

Country Link
BE (1) BE686205A (en)
DE (1) DE1542589A1 (en)
GB (1) GB1153787A (en)
SE (1) SE320250B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2144669A (en) * 1982-12-07 1985-03-13 Standard Telephones Cables Ltd Cleaning electrical contacts
US4749589A (en) * 1984-12-13 1988-06-07 Stc Plc Method of surface treatment
EP0341835A1 (en) * 1988-04-13 1989-11-15 Electro-Plasma, Inc. Method of oxide removal from metallic powder
FR2774400A1 (en) * 1998-02-04 1999-08-06 Physiques Et Chimiques Treatment of a metal surface for chemical degreasing, chemical pickling or passivation

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19907911C2 (en) * 1999-02-24 2003-02-27 Mag Maschinen Und Appbau Ag Gr Device and method for the treatment of electrically conductive continuous material
DE102005025101B3 (en) * 2005-05-27 2006-07-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Device for cleaning interior of vacuum chamber, used e.g. for physical or chemical vapor deposition, comprising carrier with electrode(s) connected to D.C. source, for electrostatically fixing contaminants

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2144669A (en) * 1982-12-07 1985-03-13 Standard Telephones Cables Ltd Cleaning electrical contacts
US4749589A (en) * 1984-12-13 1988-06-07 Stc Plc Method of surface treatment
EP0341835A1 (en) * 1988-04-13 1989-11-15 Electro-Plasma, Inc. Method of oxide removal from metallic powder
FR2774400A1 (en) * 1998-02-04 1999-08-06 Physiques Et Chimiques Treatment of a metal surface for chemical degreasing, chemical pickling or passivation

Also Published As

Publication number Publication date
DE1542589A1 (en) 1970-06-18
SE320250B (en) 1970-02-02
BE686205A (en) 1967-02-28

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