GB1279146A - Plasma generating apparatus - Google Patents

Plasma generating apparatus

Info

Publication number
GB1279146A
GB1279146A GB41239/69A GB4123969A GB1279146A GB 1279146 A GB1279146 A GB 1279146A GB 41239/69 A GB41239/69 A GB 41239/69A GB 4123969 A GB4123969 A GB 4123969A GB 1279146 A GB1279146 A GB 1279146A
Authority
GB
United Kingdom
Prior art keywords
electrodes
chambers
aug
bolts
pairs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB41239/69A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Plasma Corp
Original Assignee
International Plasma Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Plasma Corp filed Critical International Plasma Corp
Publication of GB1279146A publication Critical patent/GB1279146A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S422/00—Chemical apparatus and process disinfecting, deodorizing, preserving, or sterilizing
    • Y10S422/906—Plasma or ion generation means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)

Abstract

1279146 Discharge tubes; discharge lamps INTERNATIONAL PLASMA CORP 19 Aug 1969 [19 Aug 1968] 41239/69 Heading H1D A plasma generating apparatus in which gas is ionized by a radio-frequency field within a chamber for reaction with material placed therein for processing or analysis comprises one or more chambers 12 which are readily insertable between electrodes 22 into an operable position in which gas supply and exhaust conduits 18 and 20 are readily connectible to ancillary apparatus. The chambers 12 have removable covers 16 to enable boats carrying material to be inserted and are mounted in pairs between pairs of electrodes 22 each comprising a conductive plate 24 with a layer 26 of dielectric, e.g. plastics, material. The outer electrodes 22 are secured by bolts 76 to posts 50, and the inner electrodes are secured by bolts 72 to leaf springs 66 carried by a block 60 adjustably positioned by nuts 64 on a threaded rod 58 supported between insulators 56. The gas supply and exhaust conduits 18 and 20 are located half way along each chamber and are connected to supply and exhaust manifolds 82 and 86. The former is preferably made of glass and the latter communicates through an opening 88 with a pump for reducing the pressure in the chambers to a value of one or two mm. Hg.
GB41239/69A 1968-08-19 1969-08-19 Plasma generating apparatus Expired GB1279146A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US75368268A 1968-08-19 1968-08-19

Publications (1)

Publication Number Publication Date
GB1279146A true GB1279146A (en) 1972-06-28

Family

ID=25031698

Family Applications (1)

Application Number Title Priority Date Filing Date
GB41239/69A Expired GB1279146A (en) 1968-08-19 1969-08-19 Plasma generating apparatus

Country Status (3)

Country Link
US (1) US3573192A (en)
DE (1) DE1941342C2 (en)
GB (1) GB1279146A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3899682A (en) * 1969-06-04 1975-08-12 Purification Sciences Inc Corona reactor method and apparatus
JPS50267U (en) * 1973-04-27 1975-01-06
US4362632A (en) * 1974-08-02 1982-12-07 Lfe Corporation Gas discharge apparatus
US5534232A (en) * 1994-08-11 1996-07-09 Wisconsin Alumini Research Foundation Apparatus for reactions in dense-medium plasmas
US5604038A (en) * 1994-11-18 1997-02-18 Wisconsin Alumni Research Foundation Polymeric thin layer materials
CN110872689B (en) * 2018-08-30 2024-05-28 上海祖强能源有限公司 Evaporation boat dismounting tool and evaporation equipment

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2800622A (en) * 1955-12-07 1957-07-23 Kurt S Lion Electric system and method
GB915771A (en) * 1959-01-12 1963-01-16 Ici Ltd Method of conducting gaseous chemical reactions
US3090737A (en) * 1960-02-24 1963-05-21 Rca Corp Plasma heating apparatus and process

Also Published As

Publication number Publication date
DE1941342A1 (en) 1970-02-26
US3573192A (en) 1971-03-30
DE1941342C2 (en) 1982-02-25

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PE20 Patent expired after termination of 20 years