CH404010A - Method and device for carrying out technical processes under the influence of an electric glow discharge - Google Patents

Method and device for carrying out technical processes under the influence of an electric glow discharge

Info

Publication number
CH404010A
CH404010A CH380661A CH380661A CH404010A CH 404010 A CH404010 A CH 404010A CH 380661 A CH380661 A CH 380661A CH 380661 A CH380661 A CH 380661A CH 404010 A CH404010 A CH 404010A
Authority
CH
Switzerland
Prior art keywords
influence
carrying
glow discharge
processes under
out technical
Prior art date
Application number
CH380661A
Other languages
German (de)
Inventor
Rordorf Horst
Original Assignee
Berghaus Elektrophysik Anst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berghaus Elektrophysik Anst filed Critical Berghaus Elektrophysik Anst
Priority to CH380661A priority Critical patent/CH404010A/en
Priority to DEE22583A priority patent/DE1294135B/en
Priority to GB11179/62A priority patent/GB992666A/en
Priority to US182792A priority patent/US3180816A/en
Publication of CH404010A publication Critical patent/CH404010A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H01J37/32027—DC powered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32577—Electrical connecting means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Lasers (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Drying Of Semiconductors (AREA)
CH380661A 1961-03-30 1961-03-30 Method and device for carrying out technical processes under the influence of an electric glow discharge CH404010A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CH380661A CH404010A (en) 1961-03-30 1961-03-30 Method and device for carrying out technical processes under the influence of an electric glow discharge
DEE22583A DE1294135B (en) 1961-03-30 1962-03-21 Implementation through the wall of a vessel in which a powerful glow discharge is operated
GB11179/62A GB992666A (en) 1961-03-30 1962-03-23
US182792A US3180816A (en) 1961-03-30 1962-03-27 Discharge chamber with current lead-in

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH380661A CH404010A (en) 1961-03-30 1961-03-30 Method and device for carrying out technical processes under the influence of an electric glow discharge

Publications (1)

Publication Number Publication Date
CH404010A true CH404010A (en) 1965-12-15

Family

ID=4263839

Family Applications (1)

Application Number Title Priority Date Filing Date
CH380661A CH404010A (en) 1961-03-30 1961-03-30 Method and device for carrying out technical processes under the influence of an electric glow discharge

Country Status (4)

Country Link
US (1) US3180816A (en)
CH (1) CH404010A (en)
DE (1) DE1294135B (en)
GB (1) GB992666A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE441562B (en) * 1977-03-28 1985-10-14 Mitsubishi Electric Corp DEVICE FOR HEATING MEDIUM GLASS DISCHARGE
CN106133190B (en) * 2014-03-20 2018-11-09 丰田自动车株式会社 Plasma CVD equipment

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE722131C (en) * 1937-08-15 1942-07-01 Bernhard Berghaus Arrangement and method for metallizing objects by means of cathode sputtering
DE967138C (en) * 1938-03-25 1957-10-10 Bernhard Berghaus Current feedthrough for vacuum annealing and melting furnaces
US2583898A (en) * 1948-06-21 1952-01-29 Lester H Smith Vapor phase electrochemical process
NL160988A (en) * 1950-05-08
US2583899A (en) * 1950-11-29 1952-01-29 Lester H Smith Electrochemical process
BE526527A (en) * 1953-02-17
NL197081A (en) * 1954-05-11

Also Published As

Publication number Publication date
GB992666A (en) 1965-05-19
DE1294135B (en) 1969-04-30
US3180816A (en) 1965-04-27

Similar Documents

Publication Publication Date Title
CH458301A (en) Method and device for the production of hydrogen
CH357377A (en) Process and device for carrying out reactions under the influence of an electrical gas discharge
AT246830B (en) Method and device for constant monitoring of the value of the insulation of an electrical network against earth
CH407699A (en) Method and device for the production of foils
CH470202A (en) Method and device for carrying out electrochemical processes
CH400509A (en) Method and device for the production of honeycomb beams
CH366824A (en) Method and device for the distribution of solids
CH407361A (en) Method for operating an electrical discharge machine and electrical discharge machine for carrying out the process
CH418394A (en) Method and device for analog-digital conversion
CH432713A (en) Method and device for the production of crimped continuous and staple fibers
CH395257A (en) Method and device for influencing the strength of an alternating electrical current
AT255041B (en) Method and device for the production of flat glass
AT254421B (en) Method and device for the production of flat glass
CH404010A (en) Method and device for carrying out technical processes under the influence of an electric glow discharge
AT251788B (en) Method and device for the production of flat glass
CH435765A (en) Process for the production of alkaline earth metals and apparatus for carrying out the process
AT264030B (en) Method and device for the production of flat glass
CH415883A (en) Method and device for generating electricity
DD42684A5 (en) Method and device for the production of small electrical parts
AT259150B (en) Method and device for the production of flat glass
CH291361A (en) Method and device for carrying out technical processes using gas discharges.
AT240807B (en) Method and device for the production of dimensionally stable and crease-resistant fabrics
CH449595A (en) Method and device for the production of polyphosphoric acid
CH355537A (en) Method for carrying out technical processes in an electric glow discharge and discharge vessel therefor
AT256215B (en) Method and device for the production of a sheathed, oil-filled electrical cable