CH291361A - Method and device for carrying out technical processes using gas discharges. - Google Patents

Method and device for carrying out technical processes using gas discharges.

Info

Publication number
CH291361A
CH291361A CH291361DA CH291361A CH 291361 A CH291361 A CH 291361A CH 291361D A CH291361D A CH 291361DA CH 291361 A CH291361 A CH 291361A
Authority
CH
Switzerland
Prior art keywords
carrying
gas discharges
out technical
technical processes
processes
Prior art date
Application number
Other languages
German (de)
Inventor
Berghaus Elektrophysi Bernhard
Original Assignee
Berghaus Elektrophysik Anst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berghaus Elektrophysik Anst filed Critical Berghaus Elektrophysik Anst
Publication of CH291361A publication Critical patent/CH291361A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
CH291361D 1950-08-18 1950-08-18 Method and device for carrying out technical processes using gas discharges. CH291361A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1047995X 1950-08-18

Publications (1)

Publication Number Publication Date
CH291361A true CH291361A (en) 1953-06-15

Family

ID=4554708

Family Applications (1)

Application Number Title Priority Date Filing Date
CH291361D CH291361A (en) 1950-08-18 1950-08-18 Method and device for carrying out technical processes using gas discharges.

Country Status (5)

Country Link
BE (1) BE505312A (en)
CH (1) CH291361A (en)
DE (1) DE911873C (en)
FR (1) FR1047995A (en)
NL (1) NL163415B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1058806B (en) * 1953-12-09 1959-06-04 Berghaus Elektrophysik Anst Process for achieving an electrical glow discharge of high current strength in a discharge vessel for the purpose of carrying out technical processes
US3125464A (en) * 1964-03-17 Figure
DE1184971B (en) * 1954-06-22 1965-01-07 Siemens Ag Process for the crucible-free melting of rod-shaped bodies made of the purest semiconductor material

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE539040A (en) * 1955-04-25
GB2033704B (en) * 1978-10-30 1982-09-29 Electricity Council Electron discharge heating device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3125464A (en) * 1964-03-17 Figure
DE1058806B (en) * 1953-12-09 1959-06-04 Berghaus Elektrophysik Anst Process for achieving an electrical glow discharge of high current strength in a discharge vessel for the purpose of carrying out technical processes
DE1184971B (en) * 1954-06-22 1965-01-07 Siemens Ag Process for the crucible-free melting of rod-shaped bodies made of the purest semiconductor material

Also Published As

Publication number Publication date
BE505312A (en)
DE911873C (en) 1954-05-20
FR1047995A (en) 1953-12-18
NL163415B (en)

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