FR1047995A - Method and device for performing industrial operations by means of gas discharges, preferably glow discharges - Google Patents

Method and device for performing industrial operations by means of gas discharges, preferably glow discharges

Info

Publication number
FR1047995A
FR1047995A FR1047995DA FR1047995A FR 1047995 A FR1047995 A FR 1047995A FR 1047995D A FR1047995D A FR 1047995DA FR 1047995 A FR1047995 A FR 1047995A
Authority
FR
France
Prior art keywords
discharges
industrial operations
performing industrial
gas
preferably glow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektrophysikalische Anstalt Bernhard Berghaus
Original Assignee
Elektrophysikalische Anstalt Bernhard Berghaus
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektrophysikalische Anstalt Bernhard Berghaus filed Critical Elektrophysikalische Anstalt Bernhard Berghaus
Application granted granted Critical
Publication of FR1047995A publication Critical patent/FR1047995A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
FR1047995D 1950-08-18 1951-08-17 Method and device for performing industrial operations by means of gas discharges, preferably glow discharges Expired FR1047995A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1047995X 1950-08-18

Publications (1)

Publication Number Publication Date
FR1047995A true FR1047995A (en) 1953-12-18

Family

ID=4554708

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1047995D Expired FR1047995A (en) 1950-08-18 1951-08-17 Method and device for performing industrial operations by means of gas discharges, preferably glow discharges

Country Status (5)

Country Link
BE (1) BE505312A (en)
CH (1) CH291361A (en)
DE (1) DE911873C (en)
FR (1) FR1047995A (en)
NL (1) NL163415B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0011387A1 (en) * 1978-10-30 1980-05-28 The Electricity Council Glow discharge heating devices

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3125464A (en) * 1964-03-17 Figure
BE569245A (en) * 1953-12-09
DE1184971B (en) * 1954-06-22 1965-01-07 Siemens Ag Process for the crucible-free melting of rod-shaped bodies made of the purest semiconductor material
BE539040A (en) * 1955-04-25

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0011387A1 (en) * 1978-10-30 1980-05-28 The Electricity Council Glow discharge heating devices

Also Published As

Publication number Publication date
NL163415B (en)
DE911873C (en) 1954-05-20
BE505312A (en)
CH291361A (en) 1953-06-15

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