CH291360A - Process for carrying out technical processes by means of electrical glow discharge and device for carrying out the process. - Google Patents

Process for carrying out technical processes by means of electrical glow discharge and device for carrying out the process.

Info

Publication number
CH291360A
CH291360A CH291360DA CH291360A CH 291360 A CH291360 A CH 291360A CH 291360D A CH291360D A CH 291360DA CH 291360 A CH291360 A CH 291360A
Authority
CH
Switzerland
Prior art keywords
carrying
glow discharge
technical processes
electrical glow
out technical
Prior art date
Application number
Other languages
German (de)
Inventor
Berghaus Elektrophysi Bernhard
Original Assignee
Berghaus Elektrophysik Anst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berghaus Elektrophysik Anst filed Critical Berghaus Elektrophysik Anst
Publication of CH291360A publication Critical patent/CH291360A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
CH291360D 1950-08-03 1950-08-03 Process for carrying out technical processes by means of electrical glow discharge and device for carrying out the process. CH291360A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH291360T 1950-08-03

Publications (1)

Publication Number Publication Date
CH291360A true CH291360A (en) 1953-06-15

Family

ID=32315181

Family Applications (1)

Application Number Title Priority Date Filing Date
CH291360D CH291360A (en) 1950-08-03 1950-08-03 Process for carrying out technical processes by means of electrical glow discharge and device for carrying out the process.

Country Status (5)

Country Link
CH (1) CH291360A (en)
DE (1) DE904491C (en)
FR (1) FR1053916A (en)
GB (1) GB759694A (en)
NL (2) NL163085B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1135112B (en) * 1956-04-10 1962-08-23 Hoerder Huettenunion Ag Glow discharge vessel with alternating current supply for high-current discharges for the treatment of bodies placed in the vessel
DE976529C (en) * 1953-02-17 1963-10-24 Berghaus Elektrophysik Anst Arrangement for the implementation of technical processes by means of glow discharge
DE1204047B (en) * 1957-04-10 1965-10-28 Berghaus Elektrophysik Anst Process for the diffusion treatment of bodies
DE1226394B (en) * 1959-09-15 1966-10-06 To A Kako Kabushiki Kaisha Rapid nitriding process

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH342980A (en) * 1950-11-09 1959-12-15 Berghaus Elektrophysik Anst Process for the diffusion treatment of pipes made of iron and steel or their alloys
US3411938A (en) * 1964-08-07 1968-11-19 Sperry Rand Corp Copper substrate cleaning and vapor coating method
CH545859A (en) * 1970-09-08 1974-02-15
CH551496A (en) * 1970-09-21 1974-07-15 Berghaus Bernhard Elektrophysi PROCESS FOR STRENGTHENING THE SURFACE OF WORKPIECES MADE OF IRON AND STEEL.
FR2379615A1 (en) * 1977-02-08 1978-09-01 Vide & Traitement Sa THERMOCHEMICAL TREATMENT PROCESS OF METALS
DE3010314C2 (en) * 1980-03-18 1982-01-07 Beerwald, Hans, Dr.Rer.Nat., 5370 Kall Process for the internal coating of electrically non-conductive pipes by means of gas discharges
FR2501727A1 (en) * 1981-03-13 1982-09-17 Vide Traitement PROCESS FOR THE THERMOCHEMICAL TREATMENT OF METALS BY ION BOMBING
GB2100023B (en) * 1981-06-05 1985-01-09 Aizenshtein Anatoly Gdalievich Method of control of chemico-thermal treatment of workpieces in glow discharge and a device for carrying out the same
FI63783C (en) * 1981-09-30 1983-08-10 Kymin Oy Kymmene Ab FOERFARANDE FOER NITRERING VID LAOGT TRYCK MED HJAELP AV GLIMURLADDNING
FR2518354A1 (en) * 1981-12-16 1983-06-17 Atelier Electro Thermie Const PROCESS FOR GENERATING PLASMA AND DEVICE FOR IMPLEMENTING SAID METHOD
GB8625912D0 (en) * 1986-10-29 1986-12-03 Electricity Council Thermochemical treatment
DE4238993C1 (en) * 1992-01-20 1993-07-01 Leybold Durferrit Gmbh, 5000 Koeln, De
EP1612290A1 (en) * 2004-07-02 2006-01-04 METAPLAS IONON Oberflächenveredelungstechnik GmbH Process and apparatus for gaseous nitriding of a workpiece and workpiece.

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE976529C (en) * 1953-02-17 1963-10-24 Berghaus Elektrophysik Anst Arrangement for the implementation of technical processes by means of glow discharge
DE1135112B (en) * 1956-04-10 1962-08-23 Hoerder Huettenunion Ag Glow discharge vessel with alternating current supply for high-current discharges for the treatment of bodies placed in the vessel
DE1204047B (en) * 1957-04-10 1965-10-28 Berghaus Elektrophysik Anst Process for the diffusion treatment of bodies
DE1226394B (en) * 1959-09-15 1966-10-06 To A Kako Kabushiki Kaisha Rapid nitriding process

Also Published As

Publication number Publication date
NL163085B (en)
NL91406C (en)
FR1053916A (en) 1954-02-05
GB759694A (en) 1956-10-24
DE904491C (en) 1954-02-18

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