GB1217037A - Improvements in glow discharge cathodes - Google Patents
Improvements in glow discharge cathodesInfo
- Publication number
- GB1217037A GB1217037A GB05329/68A GB1532968A GB1217037A GB 1217037 A GB1217037 A GB 1217037A GB 05329/68 A GB05329/68 A GB 05329/68A GB 1532968 A GB1532968 A GB 1532968A GB 1217037 A GB1217037 A GB 1217037A
- Authority
- GB
- United Kingdom
- Prior art keywords
- mask
- electron beam
- glow discharge
- electron
- gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/15—External mechanical adjustment of electron or ion optical components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
Abstract
1,217,037. Electron beam apparatus. UNITED AIRCRAFT CORP. 29 March, 1968 [16 June, 1967], No. 15329/68. Heading H1D. A cold cathode glow discharge electron gun has a non-dissipative mask 17 and a cathode 10, wherein an electron beam is produced through an aperture 18 in the mask and the mask is moved relative to the emitting surface of the mask so as to produce relative motion of the electron beam. The gun structure may be annular as shown and the electron beam focused to weld a workpiece 15, alternatively the structure may be linear (Fig. 2, not shown). The mask may be provided with a plurality of apertures circumferentially distributed for producing a plurality of electron beams.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US64667767A | 1967-06-16 | 1967-06-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1217037A true GB1217037A (en) | 1970-12-23 |
Family
ID=24594020
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB05329/68A Expired GB1217037A (en) | 1967-06-16 | 1968-03-29 | Improvements in glow discharge cathodes |
Country Status (4)
Country | Link |
---|---|
US (1) | US3466487A (en) |
DE (1) | DE1764063B1 (en) |
FR (1) | FR1557568A (en) |
GB (1) | GB1217037A (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1275261A (en) * | 1968-06-04 | 1972-05-24 | Atomic Energy Authority Uk | Improvements in or relating to non thermionic cathode slow discharge devices |
FR2039566A5 (en) * | 1969-03-31 | 1971-01-15 | Soudure Autogene Elect | |
JPS5523746Y2 (en) * | 1976-02-05 | 1980-06-06 | ||
FR2346094A1 (en) * | 1976-03-29 | 1977-10-28 | Sciaky Sa | Portable electron beam welding pistol - where rotating deflection coils produce circular seam for welding tube into plate |
NL7906958A (en) * | 1979-09-19 | 1981-03-23 | Philips Nv | METAL WIRE CATHOD FOR ELECTRON RADIUS. |
GB8601421D0 (en) * | 1986-01-21 | 1986-02-26 | Welding Inst | Charged particle beam generator |
JPH02295040A (en) * | 1989-05-10 | 1990-12-05 | Hitachi Ltd | Focusing ion beam device |
CN107078004B (en) * | 2014-11-07 | 2019-10-15 | 应用材料公司 | For having the device and method of big width flexible base board using electron beam treatment |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1997986A (en) * | 1930-06-24 | 1935-04-16 | Earl R Thomas | Electric circuit controlling apparatus |
US3381157A (en) * | 1964-12-10 | 1968-04-30 | United Aircraft Corp | Annular hollow cathode discharge apparatus |
US3383541A (en) * | 1965-11-17 | 1968-05-14 | United Aircraft Corp | Glow discharge cathode having a large electron beam emitting aperture |
-
1967
- 1967-06-16 US US646677A patent/US3466487A/en not_active Expired - Lifetime
-
1968
- 1968-03-28 DE DE19681764063 patent/DE1764063B1/en active Pending
- 1968-03-29 FR FR1557568D patent/FR1557568A/fr not_active Expired
- 1968-03-29 GB GB05329/68A patent/GB1217037A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE1764063B1 (en) | 1970-09-16 |
FR1557568A (en) | 1969-02-14 |
US3466487A (en) | 1969-09-09 |
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