SE315340B - - Google Patents
Info
- Publication number
- SE315340B SE315340B SE15686/66A SE1568666A SE315340B SE 315340 B SE315340 B SE 315340B SE 15686/66 A SE15686/66 A SE 15686/66A SE 1568666 A SE1568666 A SE 1568666A SE 315340 B SE315340 B SE 315340B
- Authority
- SE
- Sweden
- Prior art keywords
- cathode
- aperture
- width
- equal
- source
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J17/00—Gas-filled discharge tubes with solid cathode
- H01J17/02—Details
- H01J17/04—Electrodes; Screens
- H01J17/06—Cathodes
- H01J17/066—Cold cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2893/00—Discharge tubes and lamps
- H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
- H01J2893/0065—Electrode systems
- H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- ing And Chemical Polishing (AREA)
Abstract
1,170,435. Electron beam apparatus. UNITED AIRCRAFT CORP. 16 Nov., 1966 [17 Nov., 1965], No. 51397/66. Heading H1D. A glow discharge hollow cathode electron beam source has a beam outlet aperture of width at least equal to the length of the cathode fall region which may be, for example, approximately 1 cm. long in the case of a cathode operating in helium at a pressure of 500 microns and at 2000 volts. In operation a stable beam is produced having a cross-sectional area at the half power point of the beam at least equal to the cross-sectional area of the aperture. In the annular source shown where the cathode is consitituted by a rear wall 7 and side walls 9, 10 the beam outlet aperture is indicated at 16. Side extensions may reduce the aperture, but the width must be greater than 0.7 of the width of the unreduced aperture as well as being at least equal to the length of the cathode fall region. The cathode is supported by pins 26 within a shield 28. A workpiece 18 may serve as anode. The source shown may be inverted, e.g. for working inside a pipe. The source may also be cylindrical.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US508302A US3383541A (en) | 1965-11-17 | 1965-11-17 | Glow discharge cathode having a large electron beam emitting aperture |
Publications (1)
Publication Number | Publication Date |
---|---|
SE315340B true SE315340B (en) | 1969-09-29 |
Family
ID=24022185
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE15686/66A SE315340B (en) | 1965-11-17 | 1966-11-16 |
Country Status (5)
Country | Link |
---|---|
US (1) | US3383541A (en) |
DE (1) | DE1589005B1 (en) |
FR (1) | FR1499093A (en) |
GB (1) | GB1170435A (en) |
SE (1) | SE315340B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3466487A (en) * | 1967-06-16 | 1969-09-09 | United Aircraft Corp | Device for moving a beam of charged particles |
GB1275261A (en) * | 1968-06-04 | 1972-05-24 | Atomic Energy Authority Uk | Improvements in or relating to non thermionic cathode slow discharge devices |
US4461970A (en) * | 1981-11-25 | 1984-07-24 | General Electric Company | Shielded hollow cathode electrode for fluorescent lamp |
US5686789A (en) * | 1995-03-14 | 1997-11-11 | Osram Sylvania Inc. | Discharge device having cathode with micro hollow array |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE896533C (en) * | 1939-04-12 | 1953-11-12 | Aeg | Device for generating a beam of positive ions or electrons |
BE627165A (en) * | 1962-01-15 | |||
US3262003A (en) * | 1962-05-25 | 1966-07-19 | Martin Marietta Corp | Perforated hollow cathode discharge device |
-
1965
- 1965-11-17 US US508302A patent/US3383541A/en not_active Expired - Lifetime
-
1966
- 1966-11-16 GB GB51397/66A patent/GB1170435A/en not_active Expired
- 1966-11-16 SE SE15686/66A patent/SE315340B/xx unknown
- 1966-11-17 FR FR83926A patent/FR1499093A/en not_active Expired
- 1966-11-17 DE DE19661589005 patent/DE1589005B1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
US3383541A (en) | 1968-05-14 |
GB1170435A (en) | 1969-11-12 |
DE1589005B1 (en) | 1970-02-26 |
FR1499093A (en) | 1967-10-20 |
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