GB970174A - Current lead-in for discharge chambers - Google Patents

Current lead-in for discharge chambers

Info

Publication number
GB970174A
GB970174A GB11180/62A GB1118062A GB970174A GB 970174 A GB970174 A GB 970174A GB 11180/62 A GB11180/62 A GB 11180/62A GB 1118062 A GB1118062 A GB 1118062A GB 970174 A GB970174 A GB 970174A
Authority
GB
United Kingdom
Prior art keywords
zone
lead
insulator
pressure
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB11180/62A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektrophysikalische Anstalt Bernhard Berghaus
Original Assignee
Elektrophysikalische Anstalt Bernhard Berghaus
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektrophysikalische Anstalt Bernhard Berghaus filed Critical Elektrophysikalische Anstalt Bernhard Berghaus
Publication of GB970174A publication Critical patent/GB970174A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B17/00—Insulators or insulating bodies characterised by their form
    • H01B17/26—Lead-in insulators; Lead-through insulators
    • H01B17/30—Sealing
    • H01B17/303—Sealing of leads to lead-through insulators
    • H01B17/306—Sealing of leads to lead-through insulators by embedding in material other than glass or ceramics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/20—Seals between parts of vessels
    • H01J5/22—Vacuum-tight joints between parts of vessel
    • H01J5/30—Vacuum-tight joints between parts of vessel using packing-material, e.g. sealing-liquid or elastic insert
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0033—Vacuum connection techniques applicable to discharge tubes and lamps
    • H01J2893/0046—Lamp base with closure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Discharge Lamp (AREA)

Abstract

970,174. Discharge apparatus. ELEKTROPHYSIKALISCHE ANSTALT BERNHARD BERGHAUS. March 23, 1962 [March 30, 1961], No. 11180/62. Heading H1D. A glow-discharge chamber has an energized lead 1 and an insulator 6 for insulating the lead from the wall 5 of the chamber, wherein means are provided for creating a zone 9 of higher pressure than the mean pressure in the chamber, the zone being located in front of the junction between metal and insulator, the local pressure being high enough to prevent the occurrence of a glow-discharge within the zone. The insulator is surrounded by a metal sleeve 10 to form the zone 9, and gas is preferably continuously fed through a bore 7 in the lead 1 into the zone through openings 8, a ring 11 being provided around the lead so that the flow resistance out of the zone through a gap 12 is sufficient to maintain an increased pressure in the zone. Alternatively, the jet of gas is directed on to the surface of the insulator, Fig. 2 (not shown), to create a zone of pressure at its surface.
GB11180/62A 1961-03-30 1962-03-23 Current lead-in for discharge chambers Expired GB970174A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH380761A CH394404A (en) 1961-03-30 1961-03-30 Discharge vessel with current feedthrough

Publications (1)

Publication Number Publication Date
GB970174A true GB970174A (en) 1964-09-16

Family

ID=4263865

Family Applications (1)

Application Number Title Priority Date Filing Date
GB11180/62A Expired GB970174A (en) 1961-03-30 1962-03-23 Current lead-in for discharge chambers

Country Status (4)

Country Link
US (1) US3213182A (en)
CH (1) CH394404A (en)
DE (1) DE1440661B2 (en)
GB (1) GB970174A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3473072A (en) * 1967-03-01 1969-10-14 Nikolai Dmitrievich Ivano Mount for electric vacuum devices
US3809794A (en) * 1971-09-07 1974-05-07 Aluminum Co Of America Fluid sheathed electrode lead for use in corrosive environment
US5059757A (en) * 1989-11-24 1991-10-22 Abar Ipsen Industries, Inc. Gas shrouded electrode for a plasma carburizing furnace

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2160660A (en) * 1937-09-23 1939-05-30 Gen Electric High potential terminal
NL197081A (en) * 1954-05-11
US2809228A (en) * 1955-09-26 1957-10-08 Gen Electric High voltage bushing ground sleeve

Also Published As

Publication number Publication date
DE1440661B2 (en) 1971-07-29
CH394404A (en) 1965-06-30
DE1440661A1 (en) 1969-10-02
US3213182A (en) 1965-10-19

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