RU2553161C2 - Способ и устройство для контроля эффективности ванны металлического электроосаждения - Google Patents

Способ и устройство для контроля эффективности ванны металлического электроосаждения Download PDF

Info

Publication number
RU2553161C2
RU2553161C2 RU2012145547/02A RU2012145547A RU2553161C2 RU 2553161 C2 RU2553161 C2 RU 2553161C2 RU 2012145547/02 A RU2012145547/02 A RU 2012145547/02A RU 2012145547 A RU2012145547 A RU 2012145547A RU 2553161 C2 RU2553161 C2 RU 2553161C2
Authority
RU
Russia
Prior art keywords
bath
samples
cathode
current
sample
Prior art date
Application number
RU2012145547/02A
Other languages
English (en)
Russian (ru)
Other versions
RU2012145547A (ru
Inventor
Фредерик ЛАГРАНЖ
Эрве МОЛЕ
Original Assignee
Снекма
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Снекма filed Critical Снекма
Publication of RU2012145547A publication Critical patent/RU2012145547A/ru
Application granted granted Critical
Publication of RU2553161C2 publication Critical patent/RU2553161C2/ru

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/10—Electrodes, e.g. composition, counter electrode
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/10—Electrodes, e.g. composition, counter electrode
    • C25D17/12—Shape or form
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/12—Process control or regulation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Automation & Control Theory (AREA)
  • Electroplating Methods And Accessories (AREA)
RU2012145547/02A 2010-03-31 2011-03-30 Способ и устройство для контроля эффективности ванны металлического электроосаждения RU2553161C2 (ru)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1052373 2010-03-31
FR1052373A FR2958300B1 (fr) 2010-03-31 2010-03-31 Dispositif pour controler des caracteristiques physiques d'un bain d'electrodeposition metallique.
PCT/FR2011/050715 WO2011121240A1 (fr) 2010-03-31 2011-03-30 Dispositif et procede pour controler l'efficacite d'un bain d'electrodeposition metallique

Publications (2)

Publication Number Publication Date
RU2012145547A RU2012145547A (ru) 2014-05-10
RU2553161C2 true RU2553161C2 (ru) 2015-06-10

Family

ID=42751439

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2012145547/02A RU2553161C2 (ru) 2010-03-31 2011-03-30 Способ и устройство для контроля эффективности ванны металлического электроосаждения

Country Status (9)

Country Link
US (1) US20130008797A1 (fr)
EP (1) EP2553148B1 (fr)
JP (1) JP5764650B2 (fr)
CN (1) CN102822393B (fr)
BR (1) BR112012024387A2 (fr)
CA (1) CA2794579A1 (fr)
FR (1) FR2958300B1 (fr)
RU (1) RU2553161C2 (fr)
WO (1) WO2011121240A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020012144A (ja) * 2018-07-17 2020-01-23 株式会社ファシリティ 電解処理装置
JP7576490B2 (ja) 2021-03-03 2024-10-31 Tdk株式会社 電子部品の製造方法、及び、電子部品の製造装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU107050A1 (ru) * 1955-10-07 1957-08-25 Б.Г. Гуткин Устройство дл определени , автоматического контрол и регулировани плотности тока в гальванической ванне
SU1108130A1 (ru) * 1983-04-15 1984-08-15 Предприятие П/Я Г-4733 Устройство дл контрол травильной способности растворов
US20040262151A1 (en) * 2003-05-26 2004-12-30 Gerd Scheying Method and device for developing an electrochemical measuring system
EP1943832A2 (fr) * 2005-10-24 2008-07-16 Nxp B.V. Appareil de reajustement de mouvement a champ vectoriel de mouvement

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2149344A (en) * 1935-03-22 1939-03-07 Du Pont Apparatus and process for the study of plating solutions
FR863312A (fr) * 1939-02-20 1941-03-29 Procédé et appareil pour le dépôt électrolytique d'alliages d'étain
SU127339A1 (ru) * 1953-04-02 1959-11-30 М.А. Гинцбург Линейный ускоритель элементарных частиц и ионов
US3132080A (en) * 1960-10-26 1964-05-05 Thompson Ramo Wooldridge Inc Electroplating method and apparatus
US3470082A (en) * 1965-09-22 1969-09-30 Louis W Raymond Electroplating method and system
DE2537256C3 (de) * 1975-08-21 1979-05-17 Siemens Ag, 1000 Berlin Und 8000 Muenchen Vorrichtung zum galvanischen Abscheiden von Aluminium
JPS5954568U (ja) * 1982-09-30 1984-04-10 富士通株式会社 電着めつき装置
US4721551A (en) * 1986-11-06 1988-01-26 The Regents Of The University Of California Iridium treatment of neuro-stimulating electrodes
JPS63138246A (ja) * 1986-11-29 1988-06-10 Oki Electric Ind Co Ltd メツキ液撹拌状態試験方法
GB8821005D0 (en) * 1988-09-07 1988-10-05 Johnson Matthey Plc Improvements in plating
JPH0737680B2 (ja) * 1990-07-09 1995-04-26 株式会社アルメックス 給電方法
JPH04114566A (ja) * 1990-09-04 1992-04-15 Sharp Corp テレビドアホン装置
JPH04114566U (ja) * 1991-03-20 1992-10-08 アイシン精機株式会社 メツキ処理装置
JPH0741998A (ja) * 1993-07-29 1995-02-10 Kawasaki Steel Corp 鉄系電気めっき方法
US7153410B2 (en) * 2000-08-30 2006-12-26 Micron Technology, Inc. Methods and apparatus for electrochemical-mechanical processing of microelectronic workpieces
US6582570B2 (en) * 2001-02-06 2003-06-24 Danny Wu Electroplating apparatus for wheel disk
US20040168925A1 (en) * 2002-10-09 2004-09-02 Uziel Landau Electrochemical system for analyzing performance and properties of electrolytic solutions
JP2004149872A (ja) * 2002-10-31 2004-05-27 Renesas Technology Corp メッキ処理装置およびメッキ処理方法
DE102004056158B3 (de) * 2004-11-17 2006-03-30 Siemens Ag Verfahren zum Überwachen eines elektrochemischen Behandlungsprozesses und für dieses Verfahren geeignete Elektrodenanordnung
US20060289299A1 (en) * 2005-06-22 2006-12-28 3M Innovative Properties Company Multi-channel current probe
JP2007262433A (ja) * 2006-03-27 2007-10-11 Teikoku Ion Kk クロムめっき用ハイブリッド電極、それを用いたクロムメッキ方法及びクロムめっき装置
JP5110269B2 (ja) * 2007-08-09 2012-12-26 上村工業株式会社 電気銅めっき方法
JP4942580B2 (ja) * 2007-08-20 2012-05-30 株式会社荏原製作所 アノードホルダ用通電ベルトおよびアノードホルダ
JP5293276B2 (ja) * 2008-03-11 2013-09-18 上村工業株式会社 連続電気銅めっき方法
US8062496B2 (en) * 2008-04-18 2011-11-22 Integran Technologies Inc. Electroplating method and apparatus
US8366884B2 (en) * 2008-04-30 2013-02-05 Alcatel Lucent Plating apparatus with direct electrolyte distribution system
US7776741B2 (en) * 2008-08-18 2010-08-17 Novellus Systems, Inc. Process for through silicon via filing

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU107050A1 (ru) * 1955-10-07 1957-08-25 Б.Г. Гуткин Устройство дл определени , автоматического контрол и регулировани плотности тока в гальванической ванне
SU1108130A1 (ru) * 1983-04-15 1984-08-15 Предприятие П/Я Г-4733 Устройство дл контрол травильной способности растворов
US20040262151A1 (en) * 2003-05-26 2004-12-30 Gerd Scheying Method and device for developing an electrochemical measuring system
EP1943832A2 (fr) * 2005-10-24 2008-07-16 Nxp B.V. Appareil de reajustement de mouvement a champ vectoriel de mouvement

Also Published As

Publication number Publication date
WO2011121240A1 (fr) 2011-10-06
CA2794579A1 (fr) 2011-10-06
US20130008797A1 (en) 2013-01-10
JP5764650B2 (ja) 2015-08-19
BR112012024387A2 (pt) 2016-05-24
RU2012145547A (ru) 2014-05-10
EP2553148A1 (fr) 2013-02-06
CN102822393A (zh) 2012-12-12
FR2958300B1 (fr) 2012-05-04
JP2013524011A (ja) 2013-06-17
EP2553148B1 (fr) 2014-01-08
CN102822393B (zh) 2015-06-10
FR2958300A1 (fr) 2011-10-07

Similar Documents

Publication Publication Date Title
KR101513333B1 (ko) 금속 코팅 검사 방법 및 상기 금속 코팅의 증착을 실행하는 증착 전해질의 분석 제어 방법
RU2553161C2 (ru) Способ и устройство для контроля эффективности ванны металлического электроосаждения
US5268087A (en) Electroplating test cell
JP2013524011A5 (fr)
US20040020772A1 (en) Method and system for measuring active animal glue concentration in industrial electrolytes
US5425870A (en) Multipurpose electrolytic meter
US7022212B2 (en) Micro structured electrode and method for monitoring wafer electroplating baths
JP6011874B2 (ja) めっき液に含まれる抑制剤の評価方法
KR102373893B1 (ko) 도금 장치 및 도금 시스템
AU655096B2 (en) Electrode and method for measuring levelling power
JP2006317197A (ja) めっき液中の添加剤の分析方法、分析装置及びそれを備えためっき装置
JP5365296B2 (ja) 湿式めっき方法及び湿式めっき装置
CN113755937B (zh) 电镀铂槽液的维护方法
Tan et al. Characterising nonuniform electrodeposition and electrodissolution using the novel wire beam electrode method
JPH0572167A (ja) 電解液組成の管理方法
RU178301U1 (ru) Устройство независимого управления электрохимическими потенциалами для контроля адгезии покрытия методом катодной поляризации
Tan A novel experimental cell for the determination of the throwing power of an electroplating system
Dibari Evaluation of a simple, thin-film ductility tester & review of the ductility of nickel sulfamate deposits
EP0466387A1 (fr) Cellule test d'électroplacage perfectionné
RU2078852C1 (ru) Способ формирования самообжигающегося анода алюминиевого электролизера
SU881599A1 (ru) Устройство дл определени рассеивающей способности электролита
JP2004226198A (ja) 表面積測定方法および表面積測定装置、並びにメッキ方法
Braund Throwing Power of Plating Solutions with Particular Reference to Certain Zinc Plating Solutions
CN106959331A (zh) 化学镀溶液活性的量化方法，测定化学镀溶液活性的方法和设备
JP2007077504A (ja) 表面積測定方法および表面積測定装置、並びにメッキ方法

Legal Events

Date Code Title Description
PD4A Correction of name of patent owner