RU2013156628A - Металлический наполнитель, разделяющий слои р- и n-типа, для светоизлучающих диодов, монтируемых методом перевернутого кристалла - Google Patents
Металлический наполнитель, разделяющий слои р- и n-типа, для светоизлучающих диодов, монтируемых методом перевернутого кристалла Download PDFInfo
- Publication number
- RU2013156628A RU2013156628A RU2013156628/28A RU2013156628A RU2013156628A RU 2013156628 A RU2013156628 A RU 2013156628A RU 2013156628/28 A RU2013156628/28 A RU 2013156628/28A RU 2013156628 A RU2013156628 A RU 2013156628A RU 2013156628 A RU2013156628 A RU 2013156628A
- Authority
- RU
- Russia
- Prior art keywords
- electrode
- layer
- metal layer
- conductivity
- gap
- Prior art date
Links
- 239000002184 metal Substances 0.000 title claims abstract 27
- 239000013078 crystal Substances 0.000 title claims abstract 15
- 238000000034 method Methods 0.000 title claims 3
- 239000000945 filler Substances 0.000 title 1
- 239000004065 semiconductor Substances 0.000 claims abstract 8
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/14—Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0093—Wafer bonding; Removal of the growth substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/483—Containers
- H01L33/486—Containers adapted for surface mounting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13005—Structure
- H01L2224/13008—Bump connector integrally formed with a redistribution layer on the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/1302—Disposition
- H01L2224/13022—Disposition the bump connector being at least partially embedded in the surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/13144—Gold [Au] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/14—Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
- H01L2224/1401—Structure
- H01L2224/1403—Bump connectors having different sizes, e.g. different diameters, heights or widths
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/14—Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
- H01L2224/1405—Shape
- H01L2224/14051—Bump connectors having different shapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/14—Structure, shape, material or disposition of the bump connectors prior to the connecting process of a plurality of bump connectors
- H01L2224/1451—Function
- H01L2224/14515—Bump connectors having different functions
- H01L2224/14517—Bump connectors having different functions including bump connectors providing primarily mechanical bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16227—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/17—Structure, shape, material or disposition of the bump connectors after the connecting process of a plurality of bump connectors
- H01L2224/1751—Function
- H01L2224/17515—Bump connectors having different functions
- H01L2224/17517—Bump connectors having different functions including bump connectors providing primarily mechanical support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01019—Potassium [K]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12041—LED
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12042—LASER
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0033—Processes relating to semiconductor body packages
- H01L2933/0066—Processes relating to semiconductor body packages relating to arrangements for conducting electric current to or from the semiconductor body
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Led Device Packages (AREA)
- Led Devices (AREA)
Abstract
1. Структура перевернутых кристаллов светоизлучающих диодов (СИДов), содержащая:полупроводниковые слои, включающие в себя слой первой проводимости, активный слой и слой второй проводимости, причем полупроводниковые слои имеют нижнюю поверхность, обращенную к кристаллодержателю, и верхнюю поверхность, через которую излучается свет;первый электрод напротив нижней поверхности, электрически соединенный со слоем первой проводимости;второй электрод напротив нижней поверхности, электрически соединенный со слоем второй проводимости, причем между первым электродом и вторым электродом имеется, по меньшей мере, один зазор;первый диэлектрический слой, изолирующий боковые стенки упомянутого, по меньшей мере, одного зазора; ипервый металлический слой, сформированный отдельно от первого электрода и второго электрода, причем первый участок первого металлического слоя, по меньшей мере, частично заполняет упомянутый, по меньшей мере, один зазор и электрически изолирован от второго электрода.2. Структура по п. 1, в которой первый участок первого диэлектрического слоя покрывает участок второго электрода, а второй участок первого металлического слоя сформирован лежащим поверх первого участка первого диэлектрического слоя.3. Структура по п. 2, в которой второй участок первогометаллического слоя образует первую группу столбиковых выводов, которые контактируют с контактными площадками на кристаллодержателе.4. Структура по п. 3, в которой первая группа столбиковых выводов электрически изолирована от первого электрода, второго электрода и первого участка первого металлического слоя.5. Структура по п. 1, в которой слой первой
Claims (15)
1. Структура перевернутых кристаллов светоизлучающих диодов (СИДов), содержащая:
полупроводниковые слои, включающие в себя слой первой проводимости, активный слой и слой второй проводимости, причем полупроводниковые слои имеют нижнюю поверхность, обращенную к кристаллодержателю, и верхнюю поверхность, через которую излучается свет;
первый электрод напротив нижней поверхности, электрически соединенный со слоем первой проводимости;
второй электрод напротив нижней поверхности, электрически соединенный со слоем второй проводимости, причем между первым электродом и вторым электродом имеется, по меньшей мере, один зазор;
первый диэлектрический слой, изолирующий боковые стенки упомянутого, по меньшей мере, одного зазора; и
первый металлический слой, сформированный отдельно от первого электрода и второго электрода, причем первый участок первого металлического слоя, по меньшей мере, частично заполняет упомянутый, по меньшей мере, один зазор и электрически изолирован от второго электрода.
2. Структура по п. 1, в которой первый участок первого диэлектрического слоя покрывает участок второго электрода, а второй участок первого металлического слоя сформирован лежащим поверх первого участка первого диэлектрического слоя.
3. Структура по п. 2, в которой второй участок первого
металлического слоя образует первую группу столбиковых выводов, которые контактируют с контактными площадками на кристаллодержателе.
4. Структура по п. 3, в которой первая группа столбиковых выводов электрически изолирована от первого электрода, второго электрода и первого участка первого металлического слоя.
5. Структура по п. 1, в которой слой первой проводимости содержит слой проводимости p-типа, а слой второй проводимости содержит слой проводимости n-типа, причем участки слоя проводимости p-типа и активного слоя удалены, чтобы открыть участок слоя проводимости n-типа для осуществления электрического контакта со вторым электродом.
6. Структура по п. 1, в которой первый металлический слой представляет собой осажденный металл.
7. Структура по п. 1, в которой первый металлический слой содержит столбиковые выводы, лежащие поверх первого электрода и второго электрода.
8. Структура по п. 1, в которой структура дополнительно содержит кристаллодержатель, имеющий контактные площадки, причем первый электрод, второй электрод и участки первого металлического слоя соединены с упомянутыми контактными площадками.
9. Структура по п. 1, в которой первый участок первого металлического слоя, по меньшей мере, частично заполняющий упомянутый, по меньшей мере, один зазор, электрически соединен с первым электродом посредством второго участка первого металлического слоя, продолжающегося по краю первого
диэлектрического слоя.
10. Структура по п. 1, в которой структура дополнительно содержит кристаллодержатель, имеющий контактные площадки, причем первый электрод, второй электрод и участки первого металлического слоя соединены с упомянутыми контактными площадками,
при этом участки первого металлического слоя образуют столбиковые выводы, лежащие поверх первого электрода и второго электрода, и
при этом столбиковые выводы поверх второго электрода электрически изолированы от первого участка первого металлического слоя, по меньшей мере, частично заполняющего упомянутый, по меньшей мере, один зазор.
11. Структура по п. 10, в которой столбиковые выводы поверх первого электрода электрически соединены с первым электродом и первым участком металлического слоя.
12. Структура по п. 1, в которой первый металлический слой механически поддерживает полупроводниковые слои.
13. Структура по п. 1, в которой кристаллодержатель представляет собой пластину-кристаллодержатель, имеющую множество установленных на ней перевернутых кристаллов СИДов, причем первый металлический слой, по меньшей мере, частично механически поддерживает полупроводниковые слои, когда первый электрод, второй электрод и первый металлический слой соединены с контактными площадками пластины-кристаллодержателя во время обработки множества СИДов на уровне пластины.
14. Способ формирования структуры перевернутых кристаллов
светоизлучающих диодов (СИДов), заключающийся в том, что:
формируют полупроводниковые слои, включающие в себя слой первой проводимости, активный слой и слой второй проводимости, причем полупроводниковые слои имеют нижнюю поверхность, обращенную к кристаллодержателю, и верхнюю поверхность, через которую излучается свет;
травят участки слоя первой проводимости и активного слоя, открывая участок слоя второй проводимости;
формируют первый электрод напротив нижней поверхности, электрически соединенный со слоем первой проводимости;
формируют второй электрод напротив нижней поверхности, электрически соединенный со слоем второй проводимости, причем между первым электродом и вторым электродом имеется, по меньшей мере, один зазор;
формируют первый диэлектрический слой, изолирующий боковые стенки упомянутого, по меньшей мере, одного зазора; и
формируют первый металлический слой, формируемый отдельно от первого электрода и второго электрода, причем первый участок первого металлического слоя, по меньшей мере, частично заполняет упомянутый, по меньшей мере, один зазор и электрически изолирован от второго электрода.
15. Способ по п. 14, в котором первый участок первого диэлектрического слоя покрывает участок второго электрода, а второй участок первого металлического слоя формируют лежащим поверх первого участка первого диэлектрического слоя.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161489280P | 2011-05-24 | 2011-05-24 | |
US61/489,280 | 2011-05-24 | ||
PCT/IB2012/052062 WO2012160455A1 (en) | 2011-05-24 | 2012-04-25 | P-n separation metal fill for flip chip leds |
Publications (2)
Publication Number | Publication Date |
---|---|
RU2013156628A true RU2013156628A (ru) | 2015-06-27 |
RU2597071C2 RU2597071C2 (ru) | 2016-09-10 |
Family
ID=46148910
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
RU2013156628/28A RU2597071C2 (ru) | 2011-05-24 | 2012-04-25 | МЕТАЛЛИЧЕСКИЙ НАПОЛНИТЕЛЬ, РАЗДЕЛЯЮЩИЙ СЛОИ р- И n-ТИПА, ДЛЯ СВЕТОИЗЛУЧАЮЩИХ ДИОДОВ, МОНТИРУЕМЫХ МЕТОДОМ ПЕРЕВЕРНУТОГО КРИСТАЛЛА |
Country Status (9)
Country | Link |
---|---|
US (3) | US9219209B2 (ru) |
EP (1) | EP2715813B1 (ru) |
JP (1) | JP5990574B2 (ru) |
KR (1) | KR101932996B1 (ru) |
CN (1) | CN103548162B (ru) |
BR (1) | BR112013029686A2 (ru) |
RU (1) | RU2597071C2 (ru) |
TW (1) | TWI569469B (ru) |
WO (1) | WO2012160455A1 (ru) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8816383B2 (en) * | 2012-07-06 | 2014-08-26 | Invensas Corporation | High performance light emitting diode with vias |
DE102014102292A1 (de) * | 2014-02-21 | 2015-08-27 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines optoelektronischen Bauelements |
CN105591006A (zh) * | 2014-10-20 | 2016-05-18 | 展晶科技(深圳)有限公司 | 覆晶式led封装体 |
US10158164B2 (en) | 2015-10-30 | 2018-12-18 | Essential Products, Inc. | Handheld mobile device with hidden antenna formed of metal injection molded substrate |
US9896777B2 (en) | 2015-10-30 | 2018-02-20 | Essential Products, Inc. | Methods of manufacturing structures having concealed components |
US10741486B2 (en) | 2016-03-06 | 2020-08-11 | Intel Corporation | Electronic components having three-dimensional capacitors in a metallization stack |
US11024611B1 (en) * | 2017-06-09 | 2021-06-01 | Goertek, Inc. | Micro-LED array transfer method, manufacturing method and display device |
US11183616B2 (en) * | 2018-09-26 | 2021-11-23 | Lumileds Llc | Phosphor converter structures for thin film packages and method of manufacture |
CN112968094B (zh) * | 2020-07-13 | 2022-03-01 | 重庆康佳光电技术研究院有限公司 | 一种倒装led芯片及其制备方法、显示面板 |
CN114284413B (zh) * | 2021-12-30 | 2023-04-11 | 江苏第三代半导体研究院有限公司 | 半导体器件的电极制作方法及半导体器件 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2720635B2 (ja) * | 1991-06-27 | 1998-03-04 | 日本電気株式会社 | 半導体発光素子の製造方法 |
JP4457427B2 (ja) * | 1999-03-18 | 2010-04-28 | ソニー株式会社 | 半導体発光装置とその製造方法 |
US6885035B2 (en) * | 1999-12-22 | 2005-04-26 | Lumileds Lighting U.S., Llc | Multi-chip semiconductor LED assembly |
US6486499B1 (en) * | 1999-12-22 | 2002-11-26 | Lumileds Lighting U.S., Llc | III-nitride light-emitting device with increased light generating capability |
US6957899B2 (en) * | 2002-10-24 | 2005-10-25 | Hongxing Jiang | Light emitting diodes for high AC voltage operation and general lighting |
US20040211972A1 (en) | 2003-04-22 | 2004-10-28 | Gelcore, Llc | Flip-chip light emitting diode |
RU2231171C1 (ru) * | 2003-04-30 | 2004-06-20 | Закрытое акционерное общество "Инновационная фирма "ТЕТИС" | Светоизлучающий диод |
US7179670B2 (en) * | 2004-03-05 | 2007-02-20 | Gelcore, Llc | Flip-chip light emitting diode device without sub-mount |
US7285801B2 (en) * | 2004-04-02 | 2007-10-23 | Lumination, Llc | LED with series-connected monolithically integrated mesas |
WO2006035664A1 (ja) * | 2004-09-27 | 2006-04-06 | Matsushita Electric Industrial Co., Ltd. | 半導体発光素子、その製造方法及びその実装方法、並びに発光装置 |
US7736945B2 (en) | 2005-06-09 | 2010-06-15 | Philips Lumileds Lighting Company, Llc | LED assembly having maximum metal support for laser lift-off of growth substrate |
TWI294694B (en) * | 2005-06-14 | 2008-03-11 | Ind Tech Res Inst | Led wafer-level chip scale packaging |
JP5162909B2 (ja) * | 2006-04-03 | 2013-03-13 | 豊田合成株式会社 | 半導体発光素子 |
KR100752719B1 (ko) * | 2006-08-16 | 2007-08-29 | 삼성전기주식회사 | 플립칩용 질화물계 발광다이오드 |
US7714348B2 (en) * | 2006-10-06 | 2010-05-11 | Ac-Led Lighting, L.L.C. | AC/DC light emitting diodes with integrated protection mechanism |
CN101958391B (zh) * | 2007-08-03 | 2013-06-26 | 松下电器产业株式会社 | 发光装置 |
US9634191B2 (en) * | 2007-11-14 | 2017-04-25 | Cree, Inc. | Wire bond free wafer level LED |
US20090173956A1 (en) * | 2007-12-14 | 2009-07-09 | Philips Lumileds Lighting Company, Llc | Contact for a semiconductor light emitting device |
TW201010122A (en) * | 2008-08-21 | 2010-03-01 | Univ Nat Central | Flip-chip light-emitting diode having the epitaxy strengthening layer, and fabrication method thereof |
KR101497953B1 (ko) * | 2008-10-01 | 2015-03-05 | 삼성전자 주식회사 | 광추출 효율이 향상된 발광 소자, 이를 포함하는 발광 장치, 상기 발광 소자 및 발광 장치의 제조 방법 |
US7875984B2 (en) * | 2009-03-04 | 2011-01-25 | Koninklijke Philips Electronics N.V. | Complaint bonding structures for semiconductor devices |
JP2011071339A (ja) * | 2009-09-25 | 2011-04-07 | Toyoda Gosei Co Ltd | 発光素子 |
KR101007137B1 (ko) * | 2010-03-08 | 2011-01-10 | 엘지이노텍 주식회사 | 발광 소자, 발광 소자 제조방법 및 발광 소자 패키지 |
JP5356312B2 (ja) * | 2010-05-24 | 2013-12-04 | 株式会社東芝 | 半導体発光装置 |
-
2012
- 2012-04-25 RU RU2013156628/28A patent/RU2597071C2/ru active
- 2012-04-25 BR BR112013029686A patent/BR112013029686A2/pt not_active IP Right Cessation
- 2012-04-25 CN CN201280024680.XA patent/CN103548162B/zh active Active
- 2012-04-25 US US14/112,279 patent/US9219209B2/en active Active
- 2012-04-25 JP JP2014511976A patent/JP5990574B2/ja active Active
- 2012-04-25 KR KR1020137033889A patent/KR101932996B1/ko active IP Right Grant
- 2012-04-25 WO PCT/IB2012/052062 patent/WO2012160455A1/en active Application Filing
- 2012-04-25 EP EP12723243.7A patent/EP2715813B1/en active Active
- 2012-05-23 TW TW101118425A patent/TWI569469B/zh active
-
2015
- 2015-12-21 US US14/977,565 patent/US9722161B2/en active Active
-
2017
- 2017-07-29 US US15/663,715 patent/US10170675B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
TW201301564A (zh) | 2013-01-01 |
CN103548162B (zh) | 2016-11-09 |
US20160126436A1 (en) | 2016-05-05 |
US9722161B2 (en) | 2017-08-01 |
TWI569469B (zh) | 2017-02-01 |
US10170675B2 (en) | 2019-01-01 |
KR101932996B1 (ko) | 2018-12-27 |
CN103548162A (zh) | 2014-01-29 |
WO2012160455A1 (en) | 2012-11-29 |
JP2014515557A (ja) | 2014-06-30 |
JP5990574B2 (ja) | 2016-09-14 |
EP2715813B1 (en) | 2019-07-24 |
US9219209B2 (en) | 2015-12-22 |
BR112013029686A2 (pt) | 2017-01-17 |
KR20140030264A (ko) | 2014-03-11 |
EP2715813A1 (en) | 2014-04-09 |
RU2597071C2 (ru) | 2016-09-10 |
US20140061714A1 (en) | 2014-03-06 |
US20170373235A1 (en) | 2017-12-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
RU2013156628A (ru) | Металлический наполнитель, разделяющий слои р- и n-типа, для светоизлучающих диодов, монтируемых методом перевернутого кристалла | |
TWI466320B (zh) | 發光二極體晶片 | |
JP2014515557A5 (ru) | ||
KR101647000B1 (ko) | 발광 다이오드 | |
JP5932851B2 (ja) | Led構造体及びその形成方法 | |
TW200701493A (en) | Chip-scale methods for packaging light emitting devices and chip-scale packaged light emitting devices | |
JP2012060115A5 (ru) | ||
JP2014508426A5 (ru) | ||
KR101658838B1 (ko) | 발광 소자 및 그 제조방법 | |
RU2011101371A (ru) | Светоизлучающее устройство, выполненное с возможностью приведения в действие переменным током | |
US8450765B2 (en) | Light emitting diode chip and method for manufacturing the same | |
TW200638557A (en) | Lateral current blocking light emitting diode and method for manufacturing the same | |
TWM517423U (zh) | 發光二極體 | |
KR20140006485A (ko) | 멀티셀 어레이를 갖는 반도체 발광장치 및 그 제조 방법 | |
KR20090010623A (ko) | 발광다이오드 소자 | |
TW201240146A (en) | Light-emitting semiconductor chip | |
KR100673640B1 (ko) | 수직구조 질화갈륨계 발광다이오드 소자 | |
JP2015513384A (ja) | 水平型パワーled素子及びその製造方法 | |
JP2013012744A (ja) | 半導体発光素子パッケージ | |
KR20110085726A (ko) | 반도체 발광소자 및 이를 제조하는 방법 | |
KR20110138839A (ko) | 수직구조 발광다이오드 및 이의 제조방법 | |
JP2013140978A (ja) | 半導体発光素子及びledモジュール | |
CN103094274A (zh) | 半导体发光装置 | |
KR20110043110A (ko) | 발광 소자 및 그 제조방법 | |
US10043850B2 (en) | HV-LED module having 3D light-emitting structure and manufacturing method thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC41 | Official registration of the transfer of exclusive right |
Effective date: 20190823 |
|
PD4A | Correction of name of patent owner |