PT3497267T - Composição aquosa acídica para galvanização eletrolítica de cobre - Google Patents
Composição aquosa acídica para galvanização eletrolítica de cobreInfo
- Publication number
- PT3497267T PT3497267T PT177488012T PT17748801T PT3497267T PT 3497267 T PT3497267 T PT 3497267T PT 177488012 T PT177488012 T PT 177488012T PT 17748801 T PT17748801 T PT 17748801T PT 3497267 T PT3497267 T PT 3497267T
- Authority
- PT
- Portugal
- Prior art keywords
- copper plating
- aqueous composition
- electrolytic copper
- acidic aqueous
- acidic
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C215/00—Compounds containing amino and hydroxy groups bound to the same carbon skeleton
- C07C215/02—Compounds containing amino and hydroxy groups bound to the same carbon skeleton having hydroxy groups and amino groups bound to acyclic carbon atoms of the same carbon skeleton
- C07C215/04—Compounds containing amino and hydroxy groups bound to the same carbon skeleton having hydroxy groups and amino groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being saturated
- C07C215/20—Compounds containing amino and hydroxy groups bound to the same carbon skeleton having hydroxy groups and amino groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being saturated the carbon skeleton being saturated and containing rings
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C215/00—Compounds containing amino and hydroxy groups bound to the same carbon skeleton
- C07C215/02—Compounds containing amino and hydroxy groups bound to the same carbon skeleton having hydroxy groups and amino groups bound to acyclic carbon atoms of the same carbon skeleton
- C07C215/22—Compounds containing amino and hydroxy groups bound to the same carbon skeleton having hydroxy groups and amino groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being unsaturated
- C07C215/24—Compounds containing amino and hydroxy groups bound to the same carbon skeleton having hydroxy groups and amino groups bound to acyclic carbon atoms of the same carbon skeleton the carbon skeleton being unsaturated and acyclic
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D215/00—Heterocyclic compounds containing quinoline or hydrogenated quinoline ring systems
- C07D215/02—Heterocyclic compounds containing quinoline or hydrogenated quinoline ring systems having no bond between the ring nitrogen atom and a non-ring member or having only hydrogen atoms or carbon atoms directly attached to the ring nitrogen atom
- C07D215/16—Heterocyclic compounds containing quinoline or hydrogenated quinoline ring systems having no bond between the ring nitrogen atom and a non-ring member or having only hydrogen atoms or carbon atoms directly attached to the ring nitrogen atom with hetero atoms or with carbon atoms having three bonds to hetero atoms with at the most one bond to halogen, e.g. ester or nitrile radicals, directly attached to ring carbon atoms
- C07D215/20—Oxygen atoms
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D215/00—Heterocyclic compounds containing quinoline or hydrogenated quinoline ring systems
- C07D215/02—Heterocyclic compounds containing quinoline or hydrogenated quinoline ring systems having no bond between the ring nitrogen atom and a non-ring member or having only hydrogen atoms or carbon atoms directly attached to the ring nitrogen atom
- C07D215/16—Heterocyclic compounds containing quinoline or hydrogenated quinoline ring systems having no bond between the ring nitrogen atom and a non-ring member or having only hydrogen atoms or carbon atoms directly attached to the ring nitrogen atom with hetero atoms or with carbon atoms having three bonds to hetero atoms with at the most one bond to halogen, e.g. ester or nitrile radicals, directly attached to ring carbon atoms
- C07D215/20—Oxygen atoms
- C07D215/24—Oxygen atoms attached in position 8
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/18—Electroplating using modulated, pulsed or reversing current
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/12—Semiconductors
- C25D7/123—Semiconductors first coated with a seed layer or a conductive layer
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Electroplating Methods And Accessories (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP16184200 | 2016-08-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| PT3497267T true PT3497267T (pt) | 2020-07-28 |
Family
ID=56686705
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PT177488012T PT3497267T (pt) | 2016-08-15 | 2017-08-10 | Composição aquosa acídica para galvanização eletrolítica de cobre |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US11035051B2 (pt) |
| EP (1) | EP3497267B1 (pt) |
| JP (2) | JP7064115B2 (pt) |
| KR (1) | KR102381803B1 (pt) |
| CN (1) | CN109790638B (pt) |
| PT (1) | PT3497267T (pt) |
| TW (1) | TWI636162B (pt) |
| WO (1) | WO2018033461A1 (pt) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110678582B (zh) | 2017-06-01 | 2021-10-29 | 三菱综合材料株式会社 | 高纯度电解铜的制造方法 |
| WO2020203724A1 (ja) * | 2019-03-29 | 2020-10-08 | 株式会社村田製作所 | 樹脂多層基板、および樹脂多層基板の製造方法 |
| KR102349377B1 (ko) | 2019-12-19 | 2022-01-12 | 일진머티리얼즈 주식회사 | 표면처리 동박, 이의 제조방법, 이를 포함한 동박적층판, 및 이를 포함한 프린트 배선판 |
| EP3901331A1 (en) | 2020-04-23 | 2021-10-27 | ATOTECH Deutschland GmbH | Acidic aqueous composition for electrolytically depositing a copper deposit |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4009087A (en) | 1974-11-21 | 1977-02-22 | M&T Chemicals Inc. | Electrodeposition of copper |
| CH629542A5 (de) | 1976-09-01 | 1982-04-30 | Inoue Japax Res | Verfahren und vorrichtung zur galvanischen materialablagerung. |
| US4374709A (en) | 1980-05-01 | 1983-02-22 | Occidental Chemical Corporation | Process for plating polymeric substrates |
| US4385967A (en) | 1981-10-07 | 1983-05-31 | Chemcut Corporation | Electroplating apparatus and method |
| DE3624481A1 (de) | 1986-07-19 | 1988-01-28 | Schering Ag | Anordnung zur elektrolytischen behandlung von plattenfoermigen gegenstaenden |
| DE4032864A1 (de) | 1990-10-13 | 1992-04-16 | Schering Ag | Saures bad zur galvanischen abscheidung von kupferueberzuegen und verfahren unter verwendung dieser kombination |
| DE4225961C5 (de) | 1992-08-06 | 2011-01-27 | Atotech Deutschland Gmbh | Vorrichtung zur Galvanisierung, insbesondere Verkupferung, flacher platten- oder bogenförmiger Gegenstände |
| DE4344387C2 (de) | 1993-12-24 | 1996-09-05 | Atotech Deutschland Gmbh | Verfahren zur elektrolytischen Abscheidung von Kupfer und Anordnung zur Durchführung des Verfahrens |
| DE19545231A1 (de) | 1995-11-21 | 1997-05-22 | Atotech Deutschland Gmbh | Verfahren zur elektrolytischen Abscheidung von Metallschichten |
| JP4132247B2 (ja) | 1998-07-09 | 2008-08-13 | 株式会社大和化成研究所 | 電気・電子回路部品 |
| KR100366631B1 (ko) * | 2000-09-27 | 2003-01-09 | 삼성전자 주식회사 | 폴리비닐피롤리돈을 포함하는 구리도금 전해액 및 이를이용한 반도체 소자의 구리배선용 전기도금방법 |
| JP3748846B2 (ja) | 2002-10-16 | 2006-02-22 | 福田金属箔粉工業株式会社 | 電気・電子回路部品の接続端子として用いられる複合合金金属球及びその製造方法 |
| US20050173254A1 (en) * | 2004-02-05 | 2005-08-11 | George Bokisa | Nickel cobalt boron ternary alloys |
| JP4242310B2 (ja) | 2004-03-12 | 2009-03-25 | 株式会社関東学院大学表面工学研究所 | 硫酸銅めっき用添加剤及びそれを用いた硫酸銅めっき方法 |
| US7291253B2 (en) | 2004-05-04 | 2007-11-06 | Eci Technology, Inc. | Detection of an unstable additive breakdown product in a plating bath |
| CN101362719B (zh) * | 2007-08-06 | 2012-04-18 | 北京师范大学 | 喹啉类衍生物以及包含其的组合物 |
| DE502008003271D1 (de) | 2008-04-28 | 2011-06-01 | Autotech Deutschland Gmbh | Wässriges saures Bad und Verfahren zum elektrolytischen Abschneiden von Kupfer |
| EP2305856A1 (en) * | 2009-09-28 | 2011-04-06 | ATOTECH Deutschland GmbH | Process for applying a metal coating to a non-conductive substrate |
| US8268157B2 (en) * | 2010-03-15 | 2012-09-18 | Rohm And Haas Electronic Materials Llc | Plating bath and method |
| EP2537962A1 (en) | 2011-06-22 | 2012-12-26 | Atotech Deutschland GmbH | Method for copper plating |
| JP5622678B2 (ja) * | 2011-07-14 | 2014-11-12 | 石原ケミカル株式会社 | イミダゾール環結合型オキシアルキレン化合物を含有するメッキ浴 |
| CN102250101A (zh) * | 2011-08-08 | 2011-11-23 | 福州大学 | 二-α-喹啉-低聚乙二醇酞菁锌及其制备方法 |
| CN102952070A (zh) * | 2011-08-19 | 2013-03-06 | 中国中化股份有限公司 | 一种含有三氟甲基取代的喹啉环的醚类化合物及其用途 |
| JP6030848B2 (ja) * | 2012-05-07 | 2016-11-24 | 上村工業株式会社 | 無電解銅めっき浴及び無電解銅めっき方法 |
| EP2735627A1 (en) | 2012-11-26 | 2014-05-28 | ATOTECH Deutschland GmbH | Copper plating bath composition |
| US9598787B2 (en) | 2013-03-14 | 2017-03-21 | Rohm And Haas Electronic Materials Llc | Method of filling through-holes |
| CN103572334B (zh) * | 2013-11-20 | 2016-06-22 | 东莞市富默克化工有限公司 | 一种pcb通孔盲孔电镀铜溶液及其制备方法和电镀方法 |
-
2017
- 2017-08-10 EP EP17748801.2A patent/EP3497267B1/en active Active
- 2017-08-10 WO PCT/EP2017/070286 patent/WO2018033461A1/en unknown
- 2017-08-10 PT PT177488012T patent/PT3497267T/pt unknown
- 2017-08-10 CN CN201780046791.3A patent/CN109790638B/zh active Active
- 2017-08-10 KR KR1020197006220A patent/KR102381803B1/ko active IP Right Grant
- 2017-08-10 US US16/323,582 patent/US11035051B2/en active Active
- 2017-08-10 JP JP2019508227A patent/JP7064115B2/ja active Active
- 2017-08-15 TW TW106127532A patent/TWI636162B/zh active
-
2021
- 2021-05-10 US US17/315,810 patent/US20210262105A1/en active Pending
- 2021-08-24 JP JP2021136185A patent/JP7223083B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR102381803B1 (ko) | 2022-04-01 |
| US20210262105A1 (en) | 2021-08-26 |
| EP3497267B1 (en) | 2020-04-29 |
| CN109790638B (zh) | 2021-06-18 |
| WO2018033461A1 (en) | 2018-02-22 |
| US11035051B2 (en) | 2021-06-15 |
| KR20190039545A (ko) | 2019-04-12 |
| CN109790638A (zh) | 2019-05-21 |
| JP2019525006A (ja) | 2019-09-05 |
| US20190203369A1 (en) | 2019-07-04 |
| EP3497267A1 (en) | 2019-06-19 |
| JP7064115B2 (ja) | 2022-05-10 |
| JP7223083B2 (ja) | 2023-02-15 |
| JP2021185271A (ja) | 2021-12-09 |
| TW201812105A (zh) | 2018-04-01 |
| TWI636162B (zh) | 2018-09-21 |
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