NO329850B1 - Fremgangsmate for fremstilling av kvartsdigler - Google Patents
Fremgangsmate for fremstilling av kvartsdigler Download PDFInfo
- Publication number
- NO329850B1 NO329850B1 NO20006376A NO20006376A NO329850B1 NO 329850 B1 NO329850 B1 NO 329850B1 NO 20006376 A NO20006376 A NO 20006376A NO 20006376 A NO20006376 A NO 20006376A NO 329850 B1 NO329850 B1 NO 329850B1
- Authority
- NO
- Norway
- Prior art keywords
- granulate
- sio2
- sic
- quartz glass
- density
- Prior art date
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims description 160
- 238000000034 method Methods 0.000 title claims description 50
- 230000008569 process Effects 0.000 title description 4
- 239000010453 quartz Substances 0.000 title description 3
- 239000008187 granular material Substances 0.000 claims description 97
- 229910052906 cristobalite Inorganic materials 0.000 claims description 49
- 229910052681 coesite Inorganic materials 0.000 claims description 40
- 229910052682 stishovite Inorganic materials 0.000 claims description 40
- 229910052905 tridymite Inorganic materials 0.000 claims description 40
- 235000012239 silicon dioxide Nutrition 0.000 claims description 36
- 239000000377 silicon dioxide Substances 0.000 claims description 34
- 239000011164 primary particle Substances 0.000 claims description 26
- 239000002245 particle Substances 0.000 claims description 25
- 238000010438 heat treatment Methods 0.000 claims description 24
- 238000004017 vitrification Methods 0.000 claims description 22
- 238000004519 manufacturing process Methods 0.000 claims description 21
- 230000015572 biosynthetic process Effects 0.000 claims description 13
- 238000009826 distribution Methods 0.000 claims description 11
- 238000007669 thermal treatment Methods 0.000 claims description 11
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 6
- 239000000460 chlorine Substances 0.000 claims description 6
- 229910052801 chlorine Inorganic materials 0.000 claims description 6
- 238000005245 sintering Methods 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 238000005056 compaction Methods 0.000 claims description 4
- 238000010891 electric arc Methods 0.000 claims description 4
- 238000005496 tempering Methods 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 208000005156 Dehydration Diseases 0.000 claims description 2
- 230000018044 dehydration Effects 0.000 claims description 2
- 238000006297 dehydration reaction Methods 0.000 claims description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 2
- 235000013339 cereals Nutrition 0.000 description 62
- 239000011148 porous material Substances 0.000 description 40
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 22
- 239000007789 gas Substances 0.000 description 14
- 239000002585 base Substances 0.000 description 11
- 239000007921 spray Substances 0.000 description 10
- 230000005540 biological transmission Effects 0.000 description 9
- 238000005469 granulation Methods 0.000 description 7
- 230000003179 granulation Effects 0.000 description 7
- 238000002844 melting Methods 0.000 description 7
- 230000008018 melting Effects 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 230000007062 hydrolysis Effects 0.000 description 6
- 238000006460 hydrolysis reaction Methods 0.000 description 6
- 230000009286 beneficial effect Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 230000002776 aggregation Effects 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 239000000356 contaminant Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 238000000280 densification Methods 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 4
- 229910052744 lithium Inorganic materials 0.000 description 4
- 229910052749 magnesium Inorganic materials 0.000 description 4
- 229910052748 manganese Inorganic materials 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000001698 pyrogenic effect Effects 0.000 description 4
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 4
- 229910052708 sodium Inorganic materials 0.000 description 4
- 239000011734 sodium Substances 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 229910052726 zirconium Inorganic materials 0.000 description 4
- 238000004220 aggregation Methods 0.000 description 3
- 229910052791 calcium Inorganic materials 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 229910052700 potassium Inorganic materials 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 150000003377 silicon compounds Chemical class 0.000 description 3
- 238000003980 solgel method Methods 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- 150000001805 chlorine compounds Chemical class 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000003795 desorption Methods 0.000 description 2
- 238000004031 devitrification Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000003344 environmental pollutant Substances 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
- 229910021331 inorganic silicon compound Inorganic materials 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 231100000719 pollutant Toxicity 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000005550 wet granulation Methods 0.000 description 2
- 238000004438 BET method Methods 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 229910004028 SiCU Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000004115 Sodium Silicate Substances 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000007900 aqueous suspension Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000005660 chlorination reaction Methods 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052602 gypsum Inorganic materials 0.000 description 1
- 239000010440 gypsum Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 235000019353 potassium silicate Nutrition 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000002510 pyrogen Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010802 sludge Substances 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
- C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/002—Crucibles or containers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/02—Pure silica glass, e.g. pure fused quartz
- C03B2201/03—Impurity concentration specified
- C03B2201/04—Hydroxyl ion (OH)
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/02—Pure silica glass, e.g. pure fused quartz
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
- C03C2201/20—Doped silica-based glasses containing non-metals other than boron or halide
- C03C2201/23—Doped silica-based glasses containing non-metals other than boron or halide containing hydroxyl groups
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/80—Glass compositions containing bubbles or microbubbles, e.g. opaque quartz glass
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S65/00—Glass manufacturing
- Y10S65/04—Electric heat
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
- Y10T428/131—Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19962449A DE19962449C2 (de) | 1999-12-22 | 1999-12-22 | Quarzglastiegel und Verfahren für seine Herstellung |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| NO20006376D0 NO20006376D0 (no) | 2000-12-14 |
| NO20006376L NO20006376L (no) | 2001-06-25 |
| NO329850B1 true NO329850B1 (no) | 2011-01-10 |
Family
ID=7934122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO20006376A NO329850B1 (no) | 1999-12-22 | 2000-12-14 | Fremgangsmate for fremstilling av kvartsdigler |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US6672107B2 (ko) |
| EP (1) | EP1159227B1 (ko) |
| JP (1) | JP4746240B2 (ko) |
| KR (1) | KR100716483B1 (ko) |
| CN (1) | CN1204068C (ko) |
| DE (1) | DE19962449C2 (ko) |
| NO (1) | NO329850B1 (ko) |
| TW (1) | TWI229055B (ko) |
| WO (1) | WO2001046077A1 (ko) |
Families Citing this family (74)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10158521B4 (de) * | 2001-11-29 | 2005-06-02 | Wacker-Chemie Gmbh | In Teilbereichen oder vollständig verglaster SiO2-Formkörper und Verfahren zu seiner Herstellung |
| JP3983054B2 (ja) * | 2002-01-17 | 2007-09-26 | 信越石英株式会社 | シリコン単結晶引上げ用石英ガラスるつぼ及びその製造方法 |
| DE10217946A1 (de) * | 2002-04-22 | 2003-11-13 | Heraeus Quarzglas | Quarzglastiegel und Verfahren zur Herstellung desselben |
| JP3970692B2 (ja) * | 2002-05-31 | 2007-09-05 | 信越化学工業株式会社 | プリフォーム製造方法 |
| DE10225773B4 (de) * | 2002-06-10 | 2005-03-31 | Heraeus Tenevo Ag | Jacketrohr aus synthetisch hergestelltem Quarzglas |
| JP4086283B2 (ja) * | 2002-07-31 | 2008-05-14 | 信越石英株式会社 | シリコン単結晶引上げ用石英ガラスルツボおよびその製造方法 |
| JP4300334B2 (ja) * | 2002-08-15 | 2009-07-22 | ジャパンスーパークォーツ株式会社 | 石英ガラスルツボの再生方法 |
| DE10243953B4 (de) * | 2002-09-21 | 2005-11-17 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren für die Herstellung eines Bauteils aus opakem Quarzglas |
| JP4444559B2 (ja) * | 2002-10-09 | 2010-03-31 | ジャパンスーパークォーツ株式会社 | 石英ガラスルツボの強化方法とシリコン単結晶の引き上げ方法 |
| KR100710049B1 (ko) * | 2002-12-27 | 2007-04-20 | 주식회사 실트론 | 실리콘 단결정 성장 장치의 석영 도가니 |
| JP4453954B2 (ja) * | 2003-02-28 | 2010-04-21 | 信越石英株式会社 | シリコン単結晶引上げ用石英ガラスルツボの製造方法および該製造方法で製造された石英ガラスルツボ |
| JP4330363B2 (ja) * | 2003-03-28 | 2009-09-16 | ジャパンスーパークォーツ株式会社 | 石英ガラスルツボ |
| JP4339003B2 (ja) * | 2003-04-02 | 2009-10-07 | ジャパンスーパークォーツ株式会社 | 石英ガラスルツボの製造方法 |
| DE10327496A1 (de) * | 2003-06-17 | 2005-01-20 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur Herstellung eines Quarzglasbauteils mit hoher thermischer Stabilität |
| WO2005054139A1 (de) * | 2003-12-08 | 2005-06-16 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur herstellung von laseraktivem quarzglas und verwendung desselben |
| US7563512B2 (en) * | 2004-08-23 | 2009-07-21 | Heraeus Quarzglas Gmbh & Co. Kg | Component with a reflector layer and method for producing the same |
| US20060135342A1 (en) * | 2004-12-21 | 2006-06-22 | Anderson James G | Method of making alkali metal silicate glass, feedstock, and glass article formed therefrom |
| US7837955B2 (en) * | 2006-03-08 | 2010-11-23 | Unimin Corporation | Continuous reactor system for anoxic purification |
| DE102006014689A1 (de) | 2006-03-28 | 2007-10-11 | Heraeus Noblelight Gmbh | Infrarot Bestrahlungseinheit |
| CN101511744B (zh) * | 2006-09-11 | 2012-11-14 | 东曹株式会社 | 熔融石英玻璃及其制造方法 |
| DE102006043738B4 (de) * | 2006-09-13 | 2008-10-16 | Heraeus Quarzglas Gmbh & Co. Kg | Bauteil aus Quarzglas zum Einsatz bei der Halbleiterfertigung und Verfahren zur Herstellung desselben |
| FR2912397B1 (fr) * | 2007-02-14 | 2009-05-08 | Commissariat Energie Atomique | Installation d'affinage de silicium. |
| KR101331180B1 (ko) * | 2007-07-27 | 2013-11-20 | 쟈판 스파 쿼츠 가부시키가이샤 | 석영 유리 도가니 제조 방법 및 제조 장치 |
| GB0717849D0 (en) * | 2007-09-13 | 2007-10-24 | Vibraglaz Uk Ltd | Finishing medium and process |
| US8715037B2 (en) | 2007-09-13 | 2014-05-06 | Vibraglaz (Uk) Limited | Materials processing medium and method |
| CN100523315C (zh) * | 2007-09-28 | 2009-08-05 | 中国科学院物理研究所 | 分体式钽坩埚及其制造方法 |
| JP5121923B2 (ja) * | 2008-03-31 | 2013-01-16 | ジャパンスーパークォーツ株式会社 | 石英ガラスルツボとその製造方法 |
| TWI410534B (zh) * | 2008-07-10 | 2013-10-01 | Japan Super Quartz Corp | 石英玻璃坩堝及使用其之矽單晶拉提方法 |
| JP5106340B2 (ja) * | 2008-09-30 | 2012-12-26 | 信越石英株式会社 | シリカ容器及びその製造方法 |
| JP5069663B2 (ja) * | 2008-10-31 | 2012-11-07 | ジャパンスーパークォーツ株式会社 | 多層構造を有する石英ガラスルツボ |
| JP5167073B2 (ja) * | 2008-11-05 | 2013-03-21 | 信越石英株式会社 | シリカ容器及びその製造方法 |
| DE102008056084B4 (de) * | 2008-11-06 | 2012-05-03 | Heraeus Quarzglas Gmbh & Co. Kg | Zylinderförmiges Halbzeug zur Herstellung einer optischen Faser sowie Verfahren für die Herstellung der Faser oder einer Vorform dafür |
| JP5118007B2 (ja) * | 2008-12-11 | 2013-01-16 | 信越石英株式会社 | シリカ容器及びその製造方法 |
| JP5108803B2 (ja) * | 2009-02-16 | 2012-12-26 | 信越石英株式会社 | シリカ容器の製造方法 |
| TWI448592B (zh) * | 2009-09-07 | 2014-08-11 | Japan Super Quartz Corp | 石英玻璃坩堝之製造方法 |
| KR101048586B1 (ko) * | 2009-10-06 | 2011-07-12 | 주식회사 엘지실트론 | 고강도 석영 도가니 및 그 제조방법 |
| JP4951057B2 (ja) * | 2009-12-10 | 2012-06-13 | 信越石英株式会社 | シリカ容器及びその製造方法 |
| EP2410081B1 (en) * | 2009-12-14 | 2014-11-19 | Japan Super Quartz Corporation | Method for manufacturing a silica glass crucible |
| DE102010008162B4 (de) * | 2010-02-16 | 2017-03-16 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren für die Herstellung von Quarzglas für einen Quarzglastiegel |
| DE102010021696A1 (de) * | 2010-05-27 | 2011-12-01 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren für die Herstellung eines Quarzglastiegels mit transparenter Innenschicht aus synthetisch erzeugten Quarzglas |
| DE102010045934B4 (de) * | 2010-09-21 | 2012-04-05 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren für die Herstellung eines Quarzglastiegels mit transparenter Innenschicht aus synthetisch erzeugtem Quarzglas |
| WO2012056037A1 (de) * | 2010-10-28 | 2012-05-03 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur herstellung synthetischer quarzglaskörnung |
| JP5685894B2 (ja) * | 2010-11-05 | 2015-03-18 | 信越半導体株式会社 | 石英ガラスルツボ及びその製造方法、並びにシリコン単結晶の製造方法 |
| JP5605902B2 (ja) * | 2010-12-01 | 2014-10-15 | 株式会社Ｓｕｍｃｏ | シリカガラスルツボの製造方法、シリカガラスルツボ |
| JP5467418B2 (ja) * | 2010-12-01 | 2014-04-09 | 株式会社Ｓｕｍｃｏ | 造粒シリカ粉の製造方法、シリカガラスルツボの製造方法 |
| JP5500689B2 (ja) * | 2010-12-03 | 2014-05-21 | 株式会社Ｓｕｍｃｏ | シリカガラスルツボ |
| CN102031488A (zh) * | 2010-12-23 | 2011-04-27 | 福建福晶科技股份有限公司 | 一种提高膜层损伤阈值的坩埚 |
| CN102167500B (zh) * | 2011-01-10 | 2013-01-09 | 圣戈班石英（锦州）有限公司 | 一种不透明石英实验室器皿的制备方法 |
| CN102351407B (zh) * | 2011-08-25 | 2014-02-05 | 江苏阳山硅材料科技有限公司 | 一种熔铝石英坩埚的制作方法 |
| US8713966B2 (en) * | 2011-11-30 | 2014-05-06 | Corning Incorporated | Refractory vessels and methods for forming same |
| DE102012006914B4 (de) | 2012-04-05 | 2018-01-18 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur Herstellung synthetischer Quarzglaskörnung |
| US20140083360A1 (en) * | 2012-09-26 | 2014-03-27 | Applied Materials, Inc. | Process chamber having more uniform gas flow |
| SG10201709699RA (en) * | 2013-05-23 | 2017-12-28 | Applied Materials Inc | A coated liner assembly for a semiconductor processing chamber |
| EP3088572B1 (en) * | 2013-12-28 | 2019-05-15 | SUMCO Corporation | Quartz glass crucible and manufacturing method therefor |
| WO2015099001A1 (ja) * | 2013-12-28 | 2015-07-02 | 株式会社Sumco | 石英ガラスルツボ及びその歪み測定装置 |
| EP3000790B2 (de) * | 2014-09-29 | 2023-07-26 | Heraeus Quarzglas GmbH & Co. KG | Verfahren für die Herstellung von Bauteilen aus synthetischem Quarzglas aus SiO2-Granulat |
| CN107735371B (zh) * | 2015-07-15 | 2021-03-02 | 贺利氏石英美国有限责任公司 | 用于将不透明的熔凝石英与透明的熔凝石英连接的工艺 |
| JP6881777B2 (ja) | 2015-12-18 | 2021-06-02 | ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー | 合成石英ガラス粒の調製 |
| WO2017103112A1 (de) * | 2015-12-18 | 2017-06-22 | Heraeus Quarzglas Gmbh & Co. Kg | Herstellung eines quarzglaskörpers in einem hängenden blechtiegel |
| EP3390304B1 (de) | 2015-12-18 | 2023-09-13 | Heraeus Quarzglas GmbH & Co. KG | Sprühgranulieren von siliziumdioxid bei der herstellung von quarzglas |
| US11952303B2 (en) | 2015-12-18 | 2024-04-09 | Heraeus Quarzglas Gmbh & Co. Kg | Increase in silicon content in the preparation of quartz glass |
| TWI728018B (zh) * | 2015-12-18 | 2021-05-21 | 德商何瑞斯廓格拉斯公司 | 自二氧化矽粉末製備石英玻璃體 |
| KR20180095622A (ko) | 2015-12-18 | 2018-08-27 | 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 | 내화성 금속으로 제조된 용융 도가니에서 실리카 유리 제품의 제조 |
| KR20180094087A (ko) | 2015-12-18 | 2018-08-22 | 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 | 실리카 과립으로부터 실리카 유리 제품의 제조 |
| TW201731782A (zh) * | 2015-12-18 | 2017-09-16 | 何瑞斯廓格拉斯公司 | 在多腔式爐中製備石英玻璃體 |
| US10676388B2 (en) | 2015-12-18 | 2020-06-09 | Heraeus Quarzglas Gmbh & Co. Kg | Glass fibers and pre-forms made of homogeneous quartz glass |
| EP3390306A2 (de) * | 2015-12-18 | 2018-10-24 | Heraeus Quarzglas GmbH & Co. KG | Herstellung eines quarzglaskörpers in einem hängenden sintertiegel |
| JP7044454B2 (ja) | 2015-12-18 | 2022-03-30 | ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー | 石英ガラス調製時の中間体としての炭素ドープ二酸化ケイ素造粒体の調製 |
| KR20180095616A (ko) | 2015-12-18 | 2018-08-27 | 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 | 용융 가열로에서 이슬점 조절을 이용한 실리카 유리체의 제조 |
| JP6881776B2 (ja) | 2015-12-18 | 2021-06-02 | ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー | 不透明石英ガラス体の調製 |
| US10858759B2 (en) | 2016-02-26 | 2020-12-08 | A.L.M.T. Corp. | Molybdenum crucible |
| DE102017127624A1 (de) * | 2017-11-22 | 2019-05-23 | Schott Ag | Beschichtetes Glas- oder Glaskeramik-Substrat, Beschichtung umfassend geschlossene Poren sowie Verfahren zur Beschichtung eines Substrats |
| JP7141844B2 (ja) | 2018-04-06 | 2022-09-26 | 信越石英株式会社 | 石英ガラスるつぼの製造方法 |
| JP7341017B2 (ja) * | 2019-09-30 | 2023-09-08 | 信越石英株式会社 | 熱反射部材及び熱反射層付きガラス部材の製造方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4632686A (en) * | 1986-02-24 | 1986-12-30 | Gte Products Corporation | Method of manufacturing quartz glass crucibles with low bubble content |
| US4935046A (en) * | 1987-12-03 | 1990-06-19 | Shin-Etsu Handotai Company, Limited | Manufacture of a quartz glass vessel for the growth of single crystal semiconductor |
| JPH029783A (ja) * | 1988-06-28 | 1990-01-12 | Shin Etsu Chem Co Ltd | 石英ガラスるつぼ |
| JPH0319031A (ja) * | 1989-06-16 | 1991-01-28 | Fujitsu Ltd | 推論処理方式 |
| JP2933404B2 (ja) * | 1990-06-25 | 1999-08-16 | 信越石英 株式会社 | シリコン単結晶引き上げ用石英ガラスルツボとその製造方法 |
| JPH0463543A (ja) * | 1990-07-02 | 1992-02-28 | Morinaga & Co Ltd | シロップ漬けカットパインの製造法 |
| JP2684449B2 (ja) * | 1990-10-31 | 1997-12-03 | 信越石英株式会社 | シリコン単結晶引上げ用石英ガラスルツボの製造方法 |
| DE4338807C1 (de) * | 1993-11-12 | 1995-01-26 | Heraeus Quarzglas | Formkörper mit hohem Gehalt an Siliziumdioxid und Verfahren zur Herstellung solcher Formkörper |
| US5772714A (en) * | 1995-01-25 | 1998-06-30 | Shin-Etsu Quartz Products Co., Ltd. | Process for producing opaque silica glass |
| JP3764776B2 (ja) * | 1996-03-18 | 2006-04-12 | 信越石英株式会社 | 単結晶引き上げ用石英ガラスるつぼ及びその製造方法 |
-
1999
- 1999-12-22 DE DE19962449A patent/DE19962449C2/de not_active Expired - Lifetime
-
2000
- 2000-12-14 JP JP2001546592A patent/JP4746240B2/ja not_active Expired - Fee Related
- 2000-12-14 CN CNB008040680A patent/CN1204068C/zh not_active Expired - Lifetime
- 2000-12-14 EP EP00990741A patent/EP1159227B1/de not_active Expired - Lifetime
- 2000-12-14 US US09/913,632 patent/US6672107B2/en not_active Expired - Lifetime
- 2000-12-14 NO NO20006376A patent/NO329850B1/no not_active IP Right Cessation
- 2000-12-14 KR KR1020017010674A patent/KR100716483B1/ko not_active IP Right Cessation
- 2000-12-14 WO PCT/EP2000/012686 patent/WO2001046077A1/de active IP Right Grant
- 2000-12-22 TW TW089127760A patent/TWI229055B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JP4746240B2 (ja) | 2011-08-10 |
| EP1159227B1 (de) | 2005-08-17 |
| TWI229055B (en) | 2005-03-11 |
| EP1159227A1 (de) | 2001-12-05 |
| US6672107B2 (en) | 2004-01-06 |
| US20030041623A1 (en) | 2003-03-06 |
| NO20006376D0 (no) | 2000-12-14 |
| KR100716483B1 (ko) | 2007-05-10 |
| CN1204068C (zh) | 2005-06-01 |
| CN1341080A (zh) | 2002-03-20 |
| NO20006376L (no) | 2001-06-25 |
| JP2003517990A (ja) | 2003-06-03 |
| KR20010102319A (ko) | 2001-11-15 |
| WO2001046077A1 (de) | 2001-06-28 |
| DE19962449C2 (de) | 2003-09-25 |
| DE19962449A1 (de) | 2001-07-12 |
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