NL190496C - Belichtingsstelsel voor het achtereenvolgens belichten van halfgeleiderplakken. - Google Patents
Belichtingsstelsel voor het achtereenvolgens belichten van halfgeleiderplakken.Info
- Publication number
- NL190496C NL190496C NLAANVRAGE8501935,A NL8501935A NL190496C NL 190496 C NL190496 C NL 190496C NL 8501935 A NL8501935 A NL 8501935A NL 190496 C NL190496 C NL 190496C
- Authority
- NL
- Netherlands
- Prior art keywords
- illumination system
- semiconductor wafers
- exposing semiconductor
- successively exposing
- successively
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
- H01J61/822—High-pressure mercury lamps
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Discharge Lamp (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59139777A JPS6120326A (ja) | 1984-07-07 | 1984-07-07 | 水銀灯による半導体ウエハ−材料の露光方法 |
JP13977784 | 1984-07-07 |
Publications (3)
Publication Number | Publication Date |
---|---|
NL8501935A NL8501935A (nl) | 1986-02-03 |
NL190496B NL190496B (nl) | 1993-10-18 |
NL190496C true NL190496C (nl) | 1994-03-16 |
Family
ID=15253173
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NLAANVRAGE8501935,A NL190496C (nl) | 1984-07-07 | 1985-07-05 | Belichtingsstelsel voor het achtereenvolgens belichten van halfgeleiderplakken. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4606997A (xx) |
JP (1) | JPS6120326A (xx) |
DE (1) | DE3510480C2 (xx) |
FR (1) | FR2567282B1 (xx) |
GB (1) | GB2161286B (xx) |
NL (1) | NL190496C (xx) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS622443A (ja) * | 1985-06-28 | 1987-01-08 | Ushio Inc | フオトリソグラフイ |
JP2915362B2 (ja) * | 1996-09-27 | 1999-07-05 | ウシオ電機株式会社 | ショートアーク型水銀ランプ |
EP1405331A1 (en) * | 2001-06-25 | 2004-04-07 | Koninklijke Philips Electronics N.V. | High-pressure gas discharge lamp and method of manufacturing the same |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2247176A (en) * | 1931-05-13 | 1941-06-24 | Gen Electric | Gaseous electric discharge device |
US2422280A (en) * | 1944-07-24 | 1947-06-17 | Curtis Helene Ind Inc | Fluorescent illumination |
US4040736A (en) * | 1973-09-12 | 1977-08-09 | Kasper Instruments, Inc. | Step-and-repeat projection alignment and exposure system |
US4024428A (en) * | 1975-05-19 | 1977-05-17 | Optical Associates, Incorporated | Radiation-sensitive control circuit for driving lamp at various power levels |
DE2535921A1 (de) * | 1975-08-12 | 1977-03-03 | Patra Patent Treuhand | Quecksilberdampf-hochdruckentladungslampe mit zusatz von metallhalogeniden fuer horizontale brennlage |
GB2014335B (en) * | 1978-02-14 | 1982-06-03 | Kasper Instruments | Apparatus for prolonging lamp life by minimizing power requirement levels |
JPS54108478A (en) * | 1978-02-14 | 1979-08-25 | Ushio Electric Inc | Printing or transcribing method of semiconductor and discharge lamp suitable for printing or transcription |
DE2845603C2 (de) * | 1978-10-19 | 1982-12-09 | Censor Patent- und Versuchs-Anstalt, 9490 Vaduz | Verfahren und Einrichtung zum Projektionskopieren |
US4226522A (en) * | 1978-11-17 | 1980-10-07 | Energy Conversion Devices, Inc. | Imaging device |
US4226523A (en) * | 1978-11-17 | 1980-10-07 | Energy Conversion Devices, Inc. | Imaging device |
GB2069228B (en) * | 1979-01-02 | 1983-02-23 | Gen Electric | Stabilised high intensity discharge lamp |
EP0080820A3 (en) * | 1981-11-27 | 1983-12-14 | Thorn Emi Plc | Improvements in or relating to discharge lamps |
-
1984
- 1984-07-07 JP JP59139777A patent/JPS6120326A/ja active Granted
-
1985
- 1985-02-26 US US06/705,645 patent/US4606997A/en not_active Expired - Lifetime
- 1985-02-28 FR FR858502944A patent/FR2567282B1/fr not_active Expired - Lifetime
- 1985-03-08 GB GB08506125A patent/GB2161286B/en not_active Expired
- 1985-03-22 DE DE3510480A patent/DE3510480C2/de not_active Expired - Lifetime
- 1985-07-05 NL NLAANVRAGE8501935,A patent/NL190496C/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE3510480C2 (de) | 1993-12-23 |
NL8501935A (nl) | 1986-02-03 |
GB2161286A (en) | 1986-01-08 |
DE3510480A1 (de) | 1986-01-16 |
JPS6120326A (ja) | 1986-01-29 |
JPH0260051B2 (xx) | 1990-12-14 |
FR2567282A1 (fr) | 1986-01-10 |
US4606997A (en) | 1986-08-19 |
FR2567282B1 (fr) | 1990-12-28 |
GB8506125D0 (en) | 1985-04-11 |
NL190496B (nl) | 1993-10-18 |
GB2161286B (en) | 1988-12-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
BA | A request for search or an international-type search has been filed | ||
BB | A search report has been drawn up | ||
BC | A request for examination has been filed | ||
V4 | Discontinued because of reaching the maximum lifetime of a patent |
Effective date: 20050705 |