GB2014335B - Apparatus for prolonging lamp life by minimizing power requirement levels - Google Patents

Apparatus for prolonging lamp life by minimizing power requirement levels

Info

Publication number
GB2014335B
GB2014335B GB7904316A GB7904316A GB2014335B GB 2014335 B GB2014335 B GB 2014335B GB 7904316 A GB7904316 A GB 7904316A GB 7904316 A GB7904316 A GB 7904316A GB 2014335 B GB2014335 B GB 2014335B
Authority
GB
United Kingdom
Prior art keywords
power requirement
lamp life
minimizing power
requirement levels
prolonging lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7904316A
Other versions
GB2014335A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kasper Instruments Inc
Original Assignee
Kasper Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kasper Instruments Inc filed Critical Kasper Instruments Inc
Publication of GB2014335A publication Critical patent/GB2014335A/en
Application granted granted Critical
Publication of GB2014335B publication Critical patent/GB2014335B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
GB7904316A 1978-02-14 1979-02-07 Apparatus for prolonging lamp life by minimizing power requirement levels Expired GB2014335B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US87769678A 1978-02-14 1978-02-14

Publications (2)

Publication Number Publication Date
GB2014335A GB2014335A (en) 1979-08-22
GB2014335B true GB2014335B (en) 1982-06-03

Family

ID=25370525

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7904316A Expired GB2014335B (en) 1978-02-14 1979-02-07 Apparatus for prolonging lamp life by minimizing power requirement levels

Country Status (3)

Country Link
JP (1) JPS54120971A (en)
DE (1) DE2904725A1 (en)
GB (1) GB2014335B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4381447A (en) * 1980-09-19 1983-04-26 Brandt, Inc. Method and apparatus for evaluating and sorting sheets in a high speed manner
US4605301A (en) * 1984-07-07 1986-08-12 Ushio Denki Kabushiki Kaisha Exposure method of semiconductor wafer by mercury-vapor lamp
JPS6120326A (en) * 1984-07-07 1986-01-29 Ushio Inc Method for exposing material of semiconductor wafer by mercury lamp
JPS6120325A (en) * 1984-07-07 1986-01-29 Ushio Inc Method for exposing material of semiconductor wafer by mercury lamp
JPS6120322A (en) * 1984-07-07 1986-01-29 Ushio Inc Method for exposing material of semiconductor wafer by mercury lamp
JPS61189636A (en) * 1985-02-19 1986-08-23 Ushio Inc Exposure method for semiconductor wafer with xenon-mercury vapor discharge lamp
DE3733256A1 (en) * 1987-10-01 1989-04-20 Quick Rotan Elektromotoren SENSOR DEVICE
DE19851863B3 (en) * 1998-11-10 2004-08-19 Cgk Computer Gesellschaft Konstanz Mbh Illumination intensity regulation device for form illumination device used for automatic scanning and sorting uses measured illumination intensity for controlling power amplifier supplying illumination lamp
CN114450641A (en) * 2019-09-30 2022-05-06 Asml控股股份有限公司 Alignment sensor with modulated light source

Also Published As

Publication number Publication date
JPS54120971A (en) 1979-09-19
DE2904725A1 (en) 1979-08-16
GB2014335A (en) 1979-08-22

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee