NL1028342A1 - Keramisch glas met lage thermisch expansie. - Google Patents

Keramisch glas met lage thermisch expansie.

Info

Publication number
NL1028342A1
NL1028342A1 NL1028342A NL1028342A NL1028342A1 NL 1028342 A1 NL1028342 A1 NL 1028342A1 NL 1028342 A NL1028342 A NL 1028342A NL 1028342 A NL1028342 A NL 1028342A NL 1028342 A1 NL1028342 A1 NL 1028342A1
Authority
NL
Netherlands
Prior art keywords
thermal expansion
low thermal
ceramic glass
ceramic
glass
Prior art date
Application number
NL1028342A
Other languages
English (en)
Other versions
NL1028342C2 (nl
Inventor
Ina Mitra
Jochen Alkemper
Original Assignee
Schott Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott Ag filed Critical Schott Ag
Publication of NL1028342A1 publication Critical patent/NL1028342A1/nl
Application granted granted Critical
Publication of NL1028342C2 publication Critical patent/NL1028342C2/nl

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
    • C03C10/0018—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and monovalent metal oxide as main constituents
    • C03C10/0027—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and monovalent metal oxide as main constituents containing SiO2, Al2O3, Li2O as main constituents
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
    • C03C10/0036—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C03C15/02—Surface treatment of glass, not in the form of fibres or filaments, by etching for making a smooth surface
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/005—Other surface treatment of glass not in the form of fibres or filaments by irradiation by atoms
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/067—Construction details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Glass Compositions (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
NL1028342A 2004-02-20 2005-02-18 Keramisch glas met lage thermische expansie. NL1028342C2 (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004008824 2004-02-20
DE102004008824A DE102004008824B4 (de) 2004-02-20 2004-02-20 Glaskeramik mit geringer Wärmeausdehnung sowie deren Verwendung

Publications (2)

Publication Number Publication Date
NL1028342A1 true NL1028342A1 (nl) 2005-08-23
NL1028342C2 NL1028342C2 (nl) 2007-07-17

Family

ID=34832984

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1028342A NL1028342C2 (nl) 2004-02-20 2005-02-18 Keramisch glas met lage thermische expansie.

Country Status (5)

Country Link
US (1) US7220690B2 (nl)
JP (1) JP4504835B2 (nl)
CN (1) CN1657462B (nl)
DE (1) DE102004008824B4 (nl)
NL (1) NL1028342C2 (nl)

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JP4933863B2 (ja) * 2005-10-25 2012-05-16 株式会社オハラ 結晶化ガラスおよび結晶化ガラスの製造方法
US7875565B1 (en) * 2006-05-31 2011-01-25 Corning Incorporated Transparent glass-ceramic armor
JP4977406B2 (ja) * 2006-06-06 2012-07-18 株式会社オハラ 結晶化ガラス及び結晶化ガラスの製造方法
JP5227557B2 (ja) * 2006-09-14 2013-07-03 カール・ツァイス・エスエムティー・ゲーエムベーハー 半導体リソグラフィー用のミラーアレンジメントを製造する方法
JP5070006B2 (ja) * 2007-11-02 2012-11-07 株式会社オハラ 結晶化ガラス
JP2010135732A (ja) * 2008-08-01 2010-06-17 Asahi Glass Co Ltd Ｅｕｖマスクブランクス用基板
DE102008040964B4 (de) * 2008-08-04 2010-07-15 Carl Zeiss Smt Ag Entfernen reflektierender Schichten von EUV-Spiegeln
DE102008039042B4 (de) 2008-08-21 2011-04-14 Schott Ag Substrat für einen Spiegelträger mit reduziertem Gewicht sowie Spiegel mit gewichtsreduziertem Spiegelträger
JP2012181220A (ja) * 2009-07-02 2012-09-20 Asahi Glass Co Ltd ＡｒＦリソグラフィ用ミラー、およびＡｒＦリソグラフィ用光学部材
CN102725673B (zh) * 2009-08-07 2016-03-09 卡尔蔡司Smt有限责任公司 具有至少两镜面的反射镜的制造方法、用于微光刻的投射曝光装置的反射镜及投射曝光装置
DE102010002188B4 (de) * 2010-02-22 2018-11-08 Schott Ag Transparente LAS-Glaskeramik hergestellt mit alternativen umweltfreundlichen Läutermitteln
EP2364957A1 (en) * 2010-02-26 2011-09-14 Corning Incorporated Glass ceramics with bulk scattering properties and methods of making them
DE102010028488A1 (de) * 2010-05-03 2011-11-03 Carl Zeiss Smt Gmbh Substrate für Spiegel für die EUV-Lithographie und deren Herstellung
CN102385143B (zh) * 2011-10-18 2013-06-19 北京空间机电研究所 一种微晶低温镜头及其相机
DE102012201075A1 (de) * 2012-01-25 2013-07-25 Carl Zeiss Smt Gmbh Optische Anordnung, EUV-Lithographieanlage und Verfahren zum Konfigurieren einer optischen Anordnung
KR101807838B1 (ko) * 2012-03-28 2017-12-12 호야 가부시키가이샤 마스크 블랭크용 기판, 다층 반사막 부착 기판, 투과형 마스크 블랭크, 반사형 마스크 블랭크, 투과형 마스크, 반사형 마스크 및 반도체 장치의 제조 방법
US9822983B2 (en) 2012-05-31 2017-11-21 Bsh Home Appliances Corporation Self-cleaning household appliance having a range door with a full glass inner surface
KR101570968B1 (ko) * 2012-11-20 2015-11-23 코닝정밀소재 주식회사 유기 발광소자용 기판, 그 제조방법 및 이를 구비하는 유기 발광소자
JP5712336B2 (ja) * 2012-12-28 2015-05-07 Hoya株式会社 マスクブランク用基板、多層反射膜付き基板、反射型マスクブランク、反射型マスク、マスクブランク用基板の製造方法及び多層反射膜付き基板の製造方法並びに半導体装置の製造方法
TWI522729B (zh) 2013-08-30 2016-02-21 Hoya Corp Method for manufacturing a reflective mask substrate, a reflective mask substrate, a reflection type mask, and a semiconductor device
JP2015110508A (ja) * 2013-10-31 2015-06-18 株式会社オハラ 結晶化ガラス
SG10201805220TA (en) 2013-12-22 2018-08-30 Applied Materials Inc Glass ceramic for ultraviolet lithography and method of manufacturing thereof
CN106029594B (zh) * 2014-02-21 2022-06-24 肖特股份有限公司 高均匀性玻璃陶瓷部件
JP5767357B1 (ja) * 2014-03-26 2015-08-19 Hoya株式会社 マスクブランク用基板、マスクブランク及び転写用マスク、並びにそれらの製造方法
JP2014144915A (ja) * 2014-04-28 2014-08-14 Ohara Inc 結晶化ガラス
DE102016209359A1 (de) * 2016-05-31 2017-11-30 Carl Zeiss Smt Gmbh EUV-Kollektor
CN109803937B (zh) 2016-10-12 2022-12-06 康宁公司 玻璃陶瓷
DE102018111144A1 (de) 2017-05-26 2018-11-29 Schott Ag Präzisionskomponente
KR102373824B1 (ko) * 2017-09-06 2022-03-15 삼성전자주식회사 조리장치 및 그 제조방법
TW202248162A (zh) 2021-03-16 2022-12-16 德商首德公司 具有特定熱膨脹特性的玻璃陶瓷
KR20230158021A (ko) 2021-03-16 2023-11-17 쇼오트 아게 특정 열 팽창 거동을 갖는 정밀 부품
DE102022118025A1 (de) 2022-07-19 2024-01-25 Schott Ag Heiß-Füge-Prozess zur Herstellung von komplexen Leichtgewichtsstrukturen
DE102022123616A1 (de) 2022-09-15 2024-03-21 Schott Ag Glaskeramik mit spezifischem thermischen Ausdehnungsverhalten

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DE1902432B2 (de) * 1967-07-01 1976-10-14 Jenaer Glaswerk Schott & Gen., 6500 Mainz Transparente glaskeramiken mit einem thermischen ausdehnungskoeffizienten von 0 + 1,5 mal 10 hoch -7 /grad c der im bereich von -30 bis + 70 grad c wenig temperaturabhaengig ist
US4192688A (en) * 1972-07-07 1980-03-11 Owens-Illinois, Inc. Product and process for forming same
FR2564823B1 (fr) * 1984-05-23 1991-08-23 Schott Glaswerke Materiau vitroceramique ayant un comportement specifique en dilatation thermique
IL84383A (en) 1987-11-06 1994-08-26 Kyro Oy Apparatus for cutting glass blanks
FR2657079B1 (fr) * 1990-01-12 1993-04-09 Corning France Verres precurseurs de vitroceramiques, procede de conversion de ces verres en vitroceramiques a dilation tres faible ou nulle et vitroceramiques obtenues.
US5508235A (en) * 1994-07-06 1996-04-16 Schott Glass Technologies, Inc. Cladding glass ceramic for use in high powered lasers
JP2668057B2 (ja) * 1994-09-13 1997-10-27 株式会社オハラ 低膨張透明ガラスセラミックス
JP3219705B2 (ja) * 1996-11-14 2001-10-15 株式会社オハラ 磁気情報記憶媒体用ガラスセラミックス基板
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DE19939787C2 (de) * 1999-08-21 2003-11-27 Schott Glas Transparente, mit Vanadiumoxid-Zusatz dunkel einfärbbare Glaskeramik mit Hochquarz-Mischkristallen als vorherrschende Kristallphase, Verfahren zu ihrer Herstellung und ihre Verwendung
JP2001150452A (ja) * 1999-11-25 2001-06-05 Ohara Inc 樹脂成形用型及びその製造方法
DE10110225C2 (de) * 2001-03-02 2003-07-17 Schott Glas Glaskeramisches Trägermaterial, Verfahren zu seiner Herstellung und seine Verwendung
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US20030125184A1 (en) * 2001-12-21 2003-07-03 Schott Glas Glass ceramic product with variably adjustable zero crossing of the CTE-T curve

Also Published As

Publication number Publication date
CN1657462A (zh) 2005-08-24
JP4504835B2 (ja) 2010-07-14
NL1028342C2 (nl) 2007-07-17
DE102004008824A1 (de) 2005-09-08
CN1657462B (zh) 2011-04-13
DE102004008824B4 (de) 2006-05-04
US20050197242A1 (en) 2005-09-08
US7220690B2 (en) 2007-05-22
JP2005231994A (ja) 2005-09-02

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RD2N Patents in respect of which a decision has been taken or a report has been made (novelty report)

Effective date: 20070313

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