MY128330A - Coriolis mass flow controller - Google Patents

Coriolis mass flow controller

Info

Publication number
MY128330A
MY128330A MYPI99005327A MYPI9905327A MY128330A MY 128330 A MY128330 A MY 128330A MY PI99005327 A MYPI99005327 A MY PI99005327A MY PI9905327 A MYPI9905327 A MY PI9905327A MY 128330 A MY128330 A MY 128330A
Authority
MY
Malaysia
Prior art keywords
flow sensor
sensor tube
coriolis mass
mass flow
flow controller
Prior art date
Application number
MYPI99005327A
Other languages
English (en)
Inventor
Michael J Barger
Joseph C Dille
Jeffrey L Whiteley
Timothy W Scott
Original Assignee
Emerson Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/326,949 external-priority patent/US6513392B1/en
Priority claimed from US09/430,881 external-priority patent/US6526839B1/en
Application filed by Emerson Electric Co filed Critical Emerson Electric Co
Publication of MY128330A publication Critical patent/MY128330A/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78Direct mass flowmeters
    • G01F1/80Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84Coriolis or gyroscopic mass flowmeters
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00Control of flow
    • G05D7/06Control of flow characterised by the use of electric means
    • G05D7/0617Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78Direct mass flowmeters
    • G01F1/80Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84Coriolis or gyroscopic mass flowmeters
    • G01F1/8404Coriolis or gyroscopic mass flowmeters details of flowmeter manufacturing methods
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78Direct mass flowmeters
    • G01F1/80Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84Coriolis or gyroscopic mass flowmeters
    • G01F1/8409Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8422Coriolis or gyroscopic mass flowmeters constructional details exciters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78Direct mass flowmeters
    • G01F1/80Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84Coriolis or gyroscopic mass flowmeters
    • G01F1/8409Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8427Coriolis or gyroscopic mass flowmeters constructional details detectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78Direct mass flowmeters
    • G01F1/80Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84Coriolis or gyroscopic mass flowmeters
    • G01F1/8409Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/8436Coriolis or gyroscopic mass flowmeters constructional details signal processing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78Direct mass flowmeters
    • G01F1/80Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84Coriolis or gyroscopic mass flowmeters
    • G01F1/8409Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/844Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
    • G01F1/8445Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters micromachined flowmeters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78Direct mass flowmeters
    • G01F1/80Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84Coriolis or gyroscopic mass flowmeters
    • G01F1/845Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits
    • G01F1/8468Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits
    • G01F1/8472Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits having curved measuring conduits, i.e. whereby the measuring conduits' curved center line lies within a plane

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Signal Processing (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
MYPI99005327A 1998-12-08 1999-12-08 Coriolis mass flow controller MY128330A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11150498P 1998-12-08 1998-12-08
US09/326,949 US6513392B1 (en) 1998-12-08 1999-06-07 Coriolis mass flow controller
US09/430,881 US6526839B1 (en) 1998-12-08 1999-11-01 Coriolis mass flow controller and capacitive pick off sensor

Publications (1)

Publication Number Publication Date
MY128330A true MY128330A (en) 2007-01-31

Family

ID=46149828

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI99005327A MY128330A (en) 1998-12-08 1999-12-08 Coriolis mass flow controller

Country Status (14)

Country Link
EP (4) EP2088403A3 (fr)
JP (3) JP4165732B2 (fr)
KR (6) KR100880286B1 (fr)
CN (1) CN100443861C (fr)
AR (3) AR021594A1 (fr)
AU (1) AU771345B2 (fr)
BR (1) BR9915802B1 (fr)
CA (4) CA2354697C (fr)
HK (5) HK1087174A1 (fr)
ID (1) ID29450A (fr)
MX (1) MXPA01005768A (fr)
MY (1) MY128330A (fr)
PL (1) PL198415B1 (fr)
WO (1) WO2000034748A2 (fr)

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US6526839B1 (en) * 1998-12-08 2003-03-04 Emerson Electric Co. Coriolis mass flow controller and capacitive pick off sensor
US6748813B1 (en) 1998-12-08 2004-06-15 Emerson Electric Company Coriolis mass flow controller
US6513392B1 (en) 1998-12-08 2003-02-04 Emerson Electric Co. Coriolis mass flow controller
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CA2720501C (fr) * 2000-08-18 2015-09-22 Emerson Electric Co. Controleur de debit massique a effet de coriolis
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US20030098069A1 (en) 2001-11-26 2003-05-29 Sund Wesley E. High purity fluid delivery system
AU2006279675B2 (en) 2005-08-18 2010-12-16 Micro Motion, Inc. Meter electronics and methods for processing sensor signals for a multi-phase flow material in a flowmeter
EP1949044B1 (fr) * 2005-10-06 2014-05-21 Micro Motion, Inc. Ensemble aimant
CA2626245C (fr) * 2005-10-18 2013-05-14 Micro Motion, Inc. Dispositif electronique de mesure et procedes de determination d'une difference de phase entre un premier signal de detection et un second signal de detection d'un debitmetre
KR101042337B1 (ko) * 2008-09-30 2011-06-17 주식회사 엘지생활건강 화장품 용기
US7930115B2 (en) 2008-10-15 2011-04-19 Honeywell International Inc. Low-power flow meter and related method
AU2009352333B2 (en) 2009-09-14 2013-06-13 Micro Motion, Inc. Corrosion-resistant coating for a vibratory flowmeter and method for forming the coating
EP2888562A1 (fr) * 2012-08-21 2015-07-01 Micro Motion, Inc. Débitmètre de coriolis et procédé ayant un zéro de dispositif de mesure amélioré
DE102013113689B4 (de) 2013-12-09 2018-02-01 Endress + Hauser Flowtec Ag Dichte-Meßgerät
US9989391B2 (en) 2013-12-20 2018-06-05 Endress + Hauser Flowtec Ag Coil
DE102013114731A1 (de) 2013-12-20 2015-06-25 Endress+Hauser Flowtec Ag Spule
JP2018091810A (ja) * 2016-12-07 2018-06-14 アイシン精機株式会社 静電センサ
CN106768115B (zh) * 2017-01-23 2023-04-18 成都安迪生精测科技有限公司 一种高真空质量流量计
DE102017121157A1 (de) 2017-08-09 2019-02-14 Endress+Hauser Flowtec Ag Spule sowie Meßwandler mit einer solchen Spule
DE102017131199A1 (de) 2017-12-22 2019-06-27 Endress + Hauser Flowtec Ag Coriolis-Massendurchfluß-Meßgerät
WO2020126282A1 (fr) 2018-12-20 2020-06-25 Endress+Hauser Flowtec Ag Débitmètre massique à effet coriolis
DE102018133117A1 (de) 2018-12-20 2020-06-25 Endress+Hauser Flowtec Ag Coriolis-Massendurchfluß-Meßgerät
US20220099543A1 (en) 2018-12-20 2022-03-31 Endress+Hauser Flowtec Ag Coriolis mass flow meter
CN113196016B (zh) 2018-12-21 2024-06-21 恩德斯+豪斯流量技术股份有限公司 具有磁场探测器的科里奥利质量流量计
JP2020140711A (ja) * 2019-02-26 2020-09-03 株式会社フジキン マスフローコントローラ、流体制御装置、半導体製造装置および半導体製造方法
WO2021049105A1 (fr) * 2019-09-12 2021-03-18 株式会社堀場エステック Débitmètre de coriolis, procédé de mesure de débit et programme pour débitmètre de coriolis
DE102019133610A1 (de) 2019-12-09 2021-06-10 Endress + Hauser Flowtec Ag Vibronisches Meßsystem zum Messen eines Massestroms eines fluiden Meßstoff
DE102020127382A1 (de) 2020-10-16 2022-04-21 Endress+Hauser Flowtec Ag Verfahren zum Überprüfen eines vibronischen Meßsystems
DE102020134707A1 (de) * 2020-12-22 2022-06-23 Endress+Hauser Flowtec Ag Coriolis-Massedurchflussmessgerät und Verfahren zum Bestimmen von Einflussgrößen auf dessen totalen Nullpunktfehler, Verfahren zum Ermitteln des totalen Nullpunktfehlers und Betriebsverfahren dafür
DE102022112523A1 (de) 2022-05-18 2023-11-23 Endress+Hauser Flowtec Ag Vibronisches Meßsystem
DE102022116111A1 (de) 2022-06-28 2023-12-28 Endress+Hauser Flowtec Ag Vibronisches Meßsystem

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Also Published As

Publication number Publication date
KR20020000757A (ko) 2002-01-05
JP4680282B2 (ja) 2011-05-11
CA2684010A1 (fr) 2000-06-15
JP4165732B2 (ja) 2008-10-15
HK1116862A1 (en) 2009-01-02
PL198415B1 (pl) 2008-06-30
EP2088403A3 (fr) 2018-01-31
KR20070114849A (ko) 2007-12-04
AR021594A1 (es) 2002-07-31
AU2477200A (en) 2000-06-26
CA2684010C (fr) 2012-10-23
CN1329714A (zh) 2002-01-02
CA2354697C (fr) 2010-07-13
KR100880286B1 (ko) 2009-01-28
EP1137914B1 (fr) 2017-04-26
EP1137914A2 (fr) 2001-10-04
KR100883622B1 (ko) 2009-02-13
EP2088403A2 (fr) 2009-08-12
BR9915802B1 (pt) 2011-12-13
EP2071297A3 (fr) 2009-12-09
JP2002531859A (ja) 2002-09-24
HK1134338A1 (en) 2010-04-23
CA2683770A1 (fr) 2000-06-15
KR20070067737A (ko) 2007-06-28
HK1134347A1 (en) 2010-04-23
KR100846692B1 (ko) 2008-07-16
CA2684135C (fr) 2013-05-21
CN100443861C (zh) 2008-12-17
EP2131161A1 (fr) 2009-12-09
HK1044985A1 (en) 2002-11-08
BR9915802A (pt) 2001-08-21
KR20060116260A (ko) 2006-11-14
ID29450A (id) 2001-08-30
AU771345B2 (en) 2004-03-18
WO2000034748A3 (fr) 2000-11-16
CA2354697A1 (fr) 2000-06-15
WO2000034748A9 (fr) 2001-05-25
JP2008256710A (ja) 2008-10-23
KR20080014142A (ko) 2008-02-13
WO2000034748A2 (fr) 2000-06-15
KR20080015503A (ko) 2008-02-19
JP2008268227A (ja) 2008-11-06
AR054774A2 (es) 2007-07-18
EP2071297A2 (fr) 2009-06-17
KR100678430B1 (ko) 2007-02-05
AR054775A2 (es) 2007-07-18
MXPA01005768A (es) 2004-01-29
CA2684135A1 (fr) 2000-06-15
CA2683770C (fr) 2013-08-13
KR100880285B1 (ko) 2009-01-28
HK1087174A1 (en) 2006-10-06
HK1044985B (zh) 2009-08-07

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