MX2018011197A - Un elemento de pelicula delgada piezoelectrica. - Google Patents
Un elemento de pelicula delgada piezoelectrica.Info
- Publication number
- MX2018011197A MX2018011197A MX2018011197A MX2018011197A MX2018011197A MX 2018011197 A MX2018011197 A MX 2018011197A MX 2018011197 A MX2018011197 A MX 2018011197A MX 2018011197 A MX2018011197 A MX 2018011197A MX 2018011197 A MX2018011197 A MX 2018011197A
- Authority
- MX
- Mexico
- Prior art keywords
- piezoelectric thin
- thin film
- electrode
- platinum metal
- film element
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title abstract 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract 3
- 229910052451 lead zirconate titanate Inorganic materials 0.000 abstract 2
- 229910020696 PbZrxTi1−xO3 Inorganic materials 0.000 abstract 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
- H10N30/078—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition by sol-gel deposition
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14266—Sheet-like thin film type piezoelectric element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/03—Specific materials used
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/877—Conductive materials
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Ceramic Engineering (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Semiconductor Memories (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
Un elemento de película delgada piezoeléctrica que comprende un primer electrodo, un segundo electrodo y una o más películas delgadas piezoeléctricas entre las cuales el primer electrodo es un electrodo de metal de platino que tiene un tamaño de grano promedio mayor que 50 nm y en donde una película delgada piezoeléctrica adyacente al electrodo de metal de platino comprende un laminado que tiene una pluralidad de capas de película delgada piezoeléctrica en donde una capa de película delgada piezoeléctrica que entra en contacto con el electrodo de metal de platino comprende titanato de zirconato de plomo (PZT) de composición en o aproximadamente PbZrxTi1-xO3 donde 0 < x = 0.60 y tiene un grado de orientación pseudo-cúbica {100} mayor que o igual a 90%.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1604457.0A GB2548377A (en) | 2016-03-16 | 2016-03-16 | A piezoelectric thin film element |
EP16160658.7A EP3220431B1 (en) | 2016-03-16 | 2016-03-16 | A piezoelectric thin film element |
PCT/GB2017/050696 WO2017158345A1 (en) | 2016-03-16 | 2017-03-14 | A piezoelectric thin film element |
Publications (1)
Publication Number | Publication Date |
---|---|
MX2018011197A true MX2018011197A (es) | 2019-05-16 |
Family
ID=58361039
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX2018011197A MX2018011197A (es) | 2016-03-16 | 2017-03-14 | Un elemento de pelicula delgada piezoelectrica. |
Country Status (8)
Country | Link |
---|---|
US (1) | US10541360B2 (es) |
JP (1) | JP6967008B2 (es) |
CN (1) | CN108780839A (es) |
BR (1) | BR112018068168A2 (es) |
IL (1) | IL261463A (es) |
MX (1) | MX2018011197A (es) |
SG (1) | SG11201807434QA (es) |
WO (1) | WO2017158345A1 (es) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7130950B2 (ja) * | 2017-12-13 | 2022-09-06 | セイコーエプソン株式会社 | 圧電素子及び液体吐出ヘッド |
KR102137238B1 (ko) * | 2018-08-31 | 2020-07-23 | 울산대학교 산학협력단 | 화학적 용해법에 기반한 황이온 치환 기술 |
CN111029402A (zh) * | 2019-11-14 | 2020-04-17 | 天津大学 | 锆钛氧化物栅介质层柔性底栅薄膜晶体管及其制作方法 |
IT202000016861A1 (it) | 2020-07-10 | 2022-01-10 | Evoca Spa | Erogatore di bicchieri per un distributore automatico di bevande |
JP2022073090A (ja) * | 2020-10-30 | 2022-05-17 | セイコーエプソン株式会社 | 液体吐出ヘッドおよびアクチュエーター |
US20240065105A1 (en) * | 2022-08-17 | 2024-02-22 | Fujifilm Dimatix, Inc. | Process of epitaxial grown pzt film and method of making a pzt device |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH04259380A (ja) * | 1991-02-13 | 1992-09-14 | Mitsubishi Materials Corp | Pzt強誘電体薄膜の結晶配向性制御方法 |
JP2995290B2 (ja) * | 1998-02-03 | 1999-12-27 | 工業技術院長 | Pzt系強誘電体薄膜の形成方法 |
GB9909375D0 (en) * | 1999-04-24 | 1999-06-23 | Secr Defence | Improvements in or relating to sol gel processing of lead zirconate titanate thin films |
US6623865B1 (en) * | 2000-03-04 | 2003-09-23 | Energenius, Inc. | Lead zirconate titanate dielectric thin film composites on metallic foils |
US6682772B1 (en) | 2000-04-24 | 2004-01-27 | Ramtron International Corporation | High temperature deposition of Pt/TiOx for bottom electrodes |
US7023036B2 (en) | 2001-10-02 | 2006-04-04 | Matsushita Electric Industrial Co., Ltd. | Ferroelectric element and actuator using the same, and ink jet head and ink jet recording device |
US6620237B2 (en) | 2001-11-15 | 2003-09-16 | Spectra, Inc. | Oriented piezoelectric film |
JP4122430B2 (ja) * | 2003-03-26 | 2008-07-23 | 独立行政法人産業技術総合研究所 | 強誘電体膜 |
CN1283129C (zh) * | 2003-05-01 | 2006-11-01 | 清华大学 | 基于夹固振膜结构的微声学器件及其制作方法 |
US7193756B2 (en) * | 2003-11-26 | 2007-03-20 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric element, method for fabricating the same, inkjet head, method for fabricating the same, and inkjet recording apparatus |
JP4192794B2 (ja) | 2004-01-26 | 2008-12-10 | セイコーエプソン株式会社 | 圧電素子、圧電アクチュエーター、インクジェット式記録ヘッド、インクジェットプリンター、表面弾性波素子、周波数フィルタ、発振器、電子回路、薄膜圧電共振器、及び電子機器 |
JP4224708B2 (ja) | 2004-05-17 | 2009-02-18 | セイコーエプソン株式会社 | 圧電素子、圧電アクチュエーター、インクジェット式記録ヘッド、インクジェットプリンター、表面弾性波素子、周波数フィルタ、発振器、電子回路、薄膜圧電共振器、および電子機器 |
JP4605349B2 (ja) | 2004-07-15 | 2011-01-05 | セイコーエプソン株式会社 | 圧電素子、圧電アクチュエーター、圧電ポンプ、インクジェット式記録ヘッド、インクジェットプリンター、表面弾性波素子、周波数フィルタ、発振器、電子回路、薄膜圧電共振器、および電子機器 |
CN1779926A (zh) * | 2005-10-13 | 2006-05-31 | 苏州科技学院 | 控制锆钛酸铅铁电薄膜择优取向的方法 |
JP4492821B2 (ja) | 2007-03-13 | 2010-06-30 | セイコーエプソン株式会社 | 圧電素子 |
US20080224571A1 (en) | 2007-03-15 | 2008-09-18 | Seiko Epson Corporation | Piezoelectric element, liquid jet head and printer |
US8188639B2 (en) | 2008-06-27 | 2012-05-29 | Panasonic Corporation | Piezoelectric element and method for manufacturing the same |
JP4438892B1 (ja) * | 2009-02-03 | 2010-03-24 | 富士フイルム株式会社 | 圧電体とその製造方法、圧電素子、及び液体吐出装置 |
JP5510663B2 (ja) | 2009-09-30 | 2014-06-04 | セイコーエプソン株式会社 | 液滴噴射ヘッド、液滴噴射装置および圧電素子 |
CN101717272B (zh) * | 2009-11-13 | 2012-11-28 | 西安交通大学 | 具有(100)晶粒择优取向的锆钛酸铅厚膜的制备方法 |
JP5660288B2 (ja) * | 2010-01-05 | 2015-01-28 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置及び圧電素子並びに液体噴射ヘッドの製造方法 |
JP5541452B2 (ja) * | 2010-03-18 | 2014-07-09 | セイコーエプソン株式会社 | 液滴噴射ヘッドおよびその製造方法、ならびに液滴噴射装置 |
JP5613910B2 (ja) | 2011-05-17 | 2014-10-29 | 三菱マテリアル株式会社 | Pzt強誘電体薄膜の製造方法 |
JP5828293B2 (ja) | 2011-05-17 | 2015-12-02 | 三菱マテリアル株式会社 | Pzt強誘電体薄膜の製造方法 |
US9331605B2 (en) * | 2011-05-23 | 2016-05-03 | Konica Minolta, Inc. | Lower electrode for piezoelectric element, and piezoelectric element provided with lower electrode |
JP5808262B2 (ja) * | 2012-01-23 | 2015-11-10 | 株式会社サイオクス | 圧電体素子及び圧電体デバイス |
WO2013164955A1 (ja) | 2012-05-01 | 2013-11-07 | コニカミノルタ株式会社 | 圧電素子 |
JP6156068B2 (ja) * | 2013-03-14 | 2017-07-05 | 株式会社リコー | 圧電体薄膜素子及びインクジェット記録ヘッド、並びにインクジェット式画像形成装置 |
JP5943870B2 (ja) * | 2013-04-01 | 2016-07-05 | 富士フイルム株式会社 | 圧電体膜 |
JP2015079935A (ja) * | 2013-09-11 | 2015-04-23 | 株式会社リコー | 圧電アクチュエータ及び液滴吐出ヘッド、並びに画像形成装置 |
JP6478139B2 (ja) * | 2014-03-18 | 2019-03-06 | 株式会社リコー | 液滴吐出ヘッドの製造方法 |
-
2017
- 2017-03-14 CN CN201780016688.4A patent/CN108780839A/zh active Pending
- 2017-03-14 WO PCT/GB2017/050696 patent/WO2017158345A1/en active Application Filing
- 2017-03-14 MX MX2018011197A patent/MX2018011197A/es unknown
- 2017-03-14 JP JP2018548361A patent/JP6967008B2/ja active Active
- 2017-03-14 BR BR112018068168-7A patent/BR112018068168A2/pt not_active IP Right Cessation
- 2017-03-14 US US16/085,378 patent/US10541360B2/en not_active Expired - Fee Related
- 2017-03-14 SG SG11201807434QA patent/SG11201807434QA/en unknown
-
2018
- 2018-08-29 IL IL261463A patent/IL261463A/en unknown
Also Published As
Publication number | Publication date |
---|---|
JP6967008B2 (ja) | 2021-11-17 |
CN108780839A (zh) | 2018-11-09 |
WO2017158345A1 (en) | 2017-09-21 |
US20190074428A1 (en) | 2019-03-07 |
US10541360B2 (en) | 2020-01-21 |
IL261463A (en) | 2018-11-29 |
JP2019508901A (ja) | 2019-03-28 |
BR112018068168A2 (pt) | 2019-02-12 |
SG11201807434QA (en) | 2018-09-27 |
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