SG11201807434QA - A piezoelectric thin film element - Google Patents

A piezoelectric thin film element

Info

Publication number
SG11201807434QA
SG11201807434QA SG11201807434QA SG11201807434QA SG11201807434QA SG 11201807434Q A SG11201807434Q A SG 11201807434QA SG 11201807434Q A SG11201807434Q A SG 11201807434QA SG 11201807434Q A SG11201807434Q A SG 11201807434QA SG 11201807434Q A SG11201807434Q A SG 11201807434QA
Authority
SG
Singapore
Prior art keywords
piezoelectric thin
thin film
international
oxr
cambridge
Prior art date
Application number
SG11201807434QA
Inventor
Peter Mardilovich
Song-Won Ko
Susan Trolier-Mckinstry
Trent Borman
Original Assignee
Xaar Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB1604457.0A external-priority patent/GB2548377A/en
Priority claimed from EP16160658.7A external-priority patent/EP3220431B1/en
Application filed by Xaar Technology Ltd filed Critical Xaar Technology Ltd
Publication of SG11201807434QA publication Critical patent/SG11201807434QA/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
    • H10N30/078—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition by sol-gel deposition
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14266—Sheet-like thin film type piezoelectric element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Semiconductor Memories (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

WO 17 / 15 83 45 Al (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (10) International Publication Number (43) International Publication Date WO 2017/158345 Al 21 September 2017 (21.09.2017) WIPO I PCT (51) International Patent Classification: HO1L 41/187 (2006.01) H01L 41/08 (2006.01) HO1L 41/318 (2013.01) (21) International Application Number: PCT/GB2017/050696 (22) International Filing Date: 14 March 2017 (14.03.2017) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 16160658.7 16 March 2016 (16.03.2016) EP 1604457.0 16 March 2016 (16.03.2016) GB (71) Applicant: XAAR TECHNOLOGY LIMITED [GB/GB]; 316 Science Park, Cambridge CB4 OXR (GB). (72) Inventors: MARDILOVICH, Peter; c/o Xaar Technology Limited, 316 Science Park, Cambridge CB4 OXR (GB). KO, Song-Won; c/o Xaar Technology Limited, 316 Sci- ence Park, Cambridge CB4 OXR (GB). TRO- LIER-MCKINSTRY, Susan; The Pennsylvania State University, N-227 Millennium Science Complex, Univer- sity Park, Philadelphia, Pennsylvania 16802 (US). BOR- MAN, Trent; c/o Xaar Technology Limited, 316 Science Park, Cambridge CB4 OXR (GB). (74) Agent: TLIP LTD; Leeds Innovation Centre, 103 Claren- don Road, Leeds Yorkshire LS2 9DF (GB). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3)) (54) Title: A PIEZOELECTRIC THIN FILM ELEMENT 111111111111110111011111111111010111110111011111111111110111111111111111111111110111111 20 \ 24 22 25 -S--- 23 FIG. 6 (57) : A piezoelectric thin film element comprising a first electrode, a second electrode and one or more piezoelectric thin films there between wherein the first electrode is a platinum metal electrode having an average grain size greater than 50 nm and wherein a piezoelectric thin film adjacent the platinum metal electrode comprises a laminate having a plurality of piezoelectric thin film layers wherein a piezoelectric thin film layer contacting the platinum metal electrode comprises lead zirconate titanate (PZT) of composition at or about PbZr,,Tii-.03 where 0 < x < 0.60 and has a degree of pseudo cubic {100} orientation greater than or equal to 90%.
SG11201807434QA 2016-03-16 2017-03-14 A piezoelectric thin film element SG11201807434QA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1604457.0A GB2548377A (en) 2016-03-16 2016-03-16 A piezoelectric thin film element
EP16160658.7A EP3220431B1 (en) 2016-03-16 2016-03-16 A piezoelectric thin film element
PCT/GB2017/050696 WO2017158345A1 (en) 2016-03-16 2017-03-14 A piezoelectric thin film element

Publications (1)

Publication Number Publication Date
SG11201807434QA true SG11201807434QA (en) 2018-09-27

Family

ID=58361039

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201807434QA SG11201807434QA (en) 2016-03-16 2017-03-14 A piezoelectric thin film element

Country Status (8)

Country Link
US (1) US10541360B2 (en)
JP (1) JP6967008B2 (en)
CN (1) CN108780839A (en)
BR (1) BR112018068168A2 (en)
IL (1) IL261463A (en)
MX (1) MX2018011197A (en)
SG (1) SG11201807434QA (en)
WO (1) WO2017158345A1 (en)

Families Citing this family (6)

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JP7130950B2 (en) * 2017-12-13 2022-09-06 セイコーエプソン株式会社 Piezoelectric element and liquid ejection head
KR102137238B1 (en) * 2018-08-31 2020-07-23 울산대학교 산학협력단 Sulfur substitution technique based on chemical solution method
CN111029402A (en) * 2019-11-14 2020-04-17 天津大学 Flexible bottom gate thin film transistor of zirconium-titanium oxide gate dielectric layer and manufacturing method thereof
IT202000016861A1 (en) 2020-07-10 2022-01-10 Evoca Spa GLASS DISPENSER FOR A DRINK VENDING MACHINE
JP2022073090A (en) * 2020-10-30 2022-05-17 セイコーエプソン株式会社 Liquid discharge head and actuator
US20240065105A1 (en) * 2022-08-17 2024-02-22 Fujifilm Dimatix, Inc. Process of epitaxial grown pzt film and method of making a pzt device

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Also Published As

Publication number Publication date
WO2017158345A1 (en) 2017-09-21
IL261463A (en) 2018-11-29
JP2019508901A (en) 2019-03-28
MX2018011197A (en) 2019-05-16
US20190074428A1 (en) 2019-03-07
BR112018068168A2 (en) 2019-02-12
US10541360B2 (en) 2020-01-21
CN108780839A (en) 2018-11-09
JP6967008B2 (en) 2021-11-17

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