JP2018041788A5 - - Google Patents
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- Publication number
- JP2018041788A5 JP2018041788A5 JP2016173537A JP2016173537A JP2018041788A5 JP 2018041788 A5 JP2018041788 A5 JP 2018041788A5 JP 2016173537 A JP2016173537 A JP 2016173537A JP 2016173537 A JP2016173537 A JP 2016173537A JP 2018041788 A5 JP2018041788 A5 JP 2018041788A5
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- thin film
- piezoelectric element
- stacked
- during
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims 2
- 239000010408 film Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016173537A JP6908322B2 (ja) | 2016-09-06 | 2016-09-06 | 圧電素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016173537A JP6908322B2 (ja) | 2016-09-06 | 2016-09-06 | 圧電素子 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018041788A JP2018041788A (ja) | 2018-03-15 |
| JP2018041788A5 true JP2018041788A5 (es) | 2019-09-12 |
| JP6908322B2 JP6908322B2 (ja) | 2021-07-21 |
Family
ID=61626328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016173537A Active JP6908322B2 (ja) | 2016-09-06 | 2016-09-06 | 圧電素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6908322B2 (es) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7293655B2 (ja) * | 2019-01-10 | 2023-06-20 | ブラザー工業株式会社 | 圧電アクチュエータ |
| JP7156558B2 (ja) * | 2019-12-25 | 2022-10-19 | 株式会社デンソー | 圧電素子、圧電装置、および圧電素子の製造方法 |
| JP7359169B2 (ja) * | 2020-11-03 | 2023-10-11 | 株式会社デンソー | 圧電素子、圧電装置、および圧電素子の製造方法 |
| WO2022097578A1 (ja) * | 2020-11-03 | 2022-05-12 | 株式会社デンソー | 圧電素子、圧電装置、および圧電素子の製造方法 |
| JP2022119126A (ja) * | 2021-02-03 | 2022-08-16 | 株式会社デンソー | 圧電素子、圧電装置、および圧電素子の製造方法 |
| CN113596690B (zh) * | 2021-08-13 | 2023-03-14 | 中北大学 | 新型压电式mems麦克风的结构及装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001077438A (ja) * | 1999-09-07 | 2001-03-23 | Matsushita Electric Ind Co Ltd | 圧電素子、インクジェット式記録ヘッド、およびこれらの製造方法 |
| JP2009170631A (ja) * | 2008-01-16 | 2009-07-30 | Panasonic Corp | 圧電素子とその製造方法およびこれを用いた圧電応用デバイス |
| US8531088B2 (en) * | 2008-06-30 | 2013-09-10 | The Regents Of The University Of Michigan | Piezoelectric MEMS microphone |
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2016
- 2016-09-06 JP JP2016173537A patent/JP6908322B2/ja active Active