JP6908322B2 - 圧電素子 - Google Patents

圧電素子 Download PDF

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Publication number
JP6908322B2
JP6908322B2 JP2016173537A JP2016173537A JP6908322B2 JP 6908322 B2 JP6908322 B2 JP 6908322B2 JP 2016173537 A JP2016173537 A JP 2016173537A JP 2016173537 A JP2016173537 A JP 2016173537A JP 6908322 B2 JP6908322 B2 JP 6908322B2
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Prior art keywords
thin film
piezoelectric
piezoelectric thin
piezoelectric element
film
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JP2016173537A
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Japanese (ja)
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JP2018041788A5 (es
JP2018041788A (ja
Inventor
王義 山崎
王義 山崎
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New Japan Radio Co Ltd
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New Japan Radio Co Ltd
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  • Piezo-Electric Transducers For Audible Bands (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2016173537A 2016-09-06 2016-09-06 圧電素子 Active JP6908322B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016173537A JP6908322B2 (ja) 2016-09-06 2016-09-06 圧電素子

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JP2016173537A JP6908322B2 (ja) 2016-09-06 2016-09-06 圧電素子

Publications (3)

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JP2018041788A JP2018041788A (ja) 2018-03-15
JP2018041788A5 JP2018041788A5 (es) 2019-09-12
JP6908322B2 true JP6908322B2 (ja) 2021-07-21

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JP2016173537A Active JP6908322B2 (ja) 2016-09-06 2016-09-06 圧電素子

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JP (1) JP6908322B2 (es)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7293655B2 (ja) * 2019-01-10 2023-06-20 ブラザー工業株式会社 圧電アクチュエータ
JP7156558B2 (ja) * 2019-12-25 2022-10-19 株式会社デンソー 圧電素子、圧電装置、および圧電素子の製造方法
JP7359169B2 (ja) * 2020-11-03 2023-10-11 株式会社デンソー 圧電素子、圧電装置、および圧電素子の製造方法
WO2022097578A1 (ja) * 2020-11-03 2022-05-12 株式会社デンソー 圧電素子、圧電装置、および圧電素子の製造方法
JP2022119126A (ja) * 2021-02-03 2022-08-16 株式会社デンソー 圧電素子、圧電装置、および圧電素子の製造方法
CN113596690B (zh) * 2021-08-13 2023-03-14 中北大学 新型压电式mems麦克风的结构及装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001077438A (ja) * 1999-09-07 2001-03-23 Matsushita Electric Ind Co Ltd 圧電素子、インクジェット式記録ヘッド、およびこれらの製造方法
JP2009170631A (ja) * 2008-01-16 2009-07-30 Panasonic Corp 圧電素子とその製造方法およびこれを用いた圧電応用デバイス
CN104602170B (zh) * 2008-06-30 2019-08-13 密歇根大学董事会 压电mems麦克风

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JP2018041788A (ja) 2018-03-15

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