MX2008016275A - Esquema de recubrimiento por cvd que incluye materiales que contienen alumina y/o titanio y metodo para hacer el mismo. - Google Patents
Esquema de recubrimiento por cvd que incluye materiales que contienen alumina y/o titanio y metodo para hacer el mismo.Info
- Publication number
- MX2008016275A MX2008016275A MX2008016275A MX2008016275A MX2008016275A MX 2008016275 A MX2008016275 A MX 2008016275A MX 2008016275 A MX2008016275 A MX 2008016275A MX 2008016275 A MX2008016275 A MX 2008016275A MX 2008016275 A MX2008016275 A MX 2008016275A
- Authority
- MX
- Mexico
- Prior art keywords
- titanium
- coating layer
- coating
- aluminum
- grains
- Prior art date
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 264
- 239000011248 coating agent Substances 0.000 title claims abstract description 257
- 239000010936 titanium Substances 0.000 title claims abstract description 224
- 229910052719 titanium Inorganic materials 0.000 title claims abstract description 222
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 title claims abstract description 217
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 title claims abstract description 119
- 239000000463 material Substances 0.000 title claims description 27
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000011247 coating layer Substances 0.000 claims abstract description 314
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 97
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 93
- 239000000758 substrate Substances 0.000 claims abstract description 77
- 239000010410 layer Substances 0.000 claims description 106
- 238000005229 chemical vapour deposition Methods 0.000 claims description 77
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 claims description 66
- 239000000203 mixture Substances 0.000 claims description 54
- 238000000034 method Methods 0.000 claims description 53
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 48
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 38
- 229910052799 carbon Inorganic materials 0.000 claims description 28
- 229910052757 nitrogen Inorganic materials 0.000 claims description 28
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 22
- 229910052760 oxygen Inorganic materials 0.000 claims description 19
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 18
- 239000001301 oxygen Substances 0.000 claims description 18
- 238000000151 deposition Methods 0.000 claims description 14
- 239000000919 ceramic Substances 0.000 claims description 9
- 239000011230 binding agent Substances 0.000 claims description 8
- 150000001247 metal acetylides Chemical class 0.000 claims description 7
- 230000000737 periodic effect Effects 0.000 claims description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 5
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 5
- 239000000470 constituent Substances 0.000 claims description 4
- 229910052582 BN Inorganic materials 0.000 claims description 3
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 claims description 2
- 239000010959 steel Substances 0.000 claims description 2
- 238000005234 chemical deposition Methods 0.000 claims 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
- 238000005520 cutting process Methods 0.000 description 47
- 230000008569 process Effects 0.000 description 35
- 239000007789 gas Substances 0.000 description 31
- 229910003074 TiCl4 Inorganic materials 0.000 description 18
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 18
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 12
- 230000008021 deposition Effects 0.000 description 10
- 150000004767 nitrides Chemical class 0.000 description 6
- 238000005299 abrasion Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 239000010941 cobalt Substances 0.000 description 5
- 229910017052 cobalt Inorganic materials 0.000 description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- 239000000654 additive Substances 0.000 description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 238000011282 treatment Methods 0.000 description 4
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 4
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910009043 WC-Co Inorganic materials 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 229910052735 hafnium Inorganic materials 0.000 description 2
- -1 hafnium nitride Chemical class 0.000 description 2
- 229910000449 hafnium oxide Inorganic materials 0.000 description 2
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 238000005554 pickling Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000002203 pretreatment Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000010408 sweeping Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910003564 SiAlON Inorganic materials 0.000 description 1
- 229910010037 TiAlN Inorganic materials 0.000 description 1
- 229910033181 TiB2 Inorganic materials 0.000 description 1
- WDEBGAIWHWRDCF-UHFFFAOYSA-N [C].[N].[Ti] Chemical compound [C].[N].[Ti] WDEBGAIWHWRDCF-UHFFFAOYSA-N 0.000 description 1
- QXZUUHYBWMWJHK-UHFFFAOYSA-N [Co].[Ni] Chemical compound [Co].[Ni] QXZUUHYBWMWJHK-UHFFFAOYSA-N 0.000 description 1
- CQBLUJRVOKGWCF-UHFFFAOYSA-N [O].[AlH3] Chemical compound [O].[AlH3] CQBLUJRVOKGWCF-UHFFFAOYSA-N 0.000 description 1
- 239000010426 asphalt Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- JPNWDVUTVSTKMV-UHFFFAOYSA-N cobalt tungsten Chemical compound [Co].[W] JPNWDVUTVSTKMV-UHFFFAOYSA-N 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 150000003608 titanium Chemical class 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/36—Carbonitrides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
- Y10T428/252—Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/472,921 US8080312B2 (en) | 2006-06-22 | 2006-06-22 | CVD coating scheme including alumina and/or titanium-containing materials and method of making the same |
| PCT/US2007/013773 WO2007149265A2 (en) | 2006-06-22 | 2007-06-12 | Cvd coating scheme including alumina and/or titanium-containing materials and method of making the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| MX2008016275A true MX2008016275A (es) | 2009-01-15 |
Family
ID=38833971
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MX2008016275A MX2008016275A (es) | 2006-06-22 | 2007-06-12 | Esquema de recubrimiento por cvd que incluye materiales que contienen alumina y/o titanio y metodo para hacer el mismo. |
Country Status (10)
| Country | Link |
|---|---|
| US (2) | US8080312B2 (https=) |
| EP (2) | EP2677059A2 (https=) |
| JP (1) | JP2009541075A (https=) |
| KR (1) | KR20090026154A (https=) |
| CN (2) | CN101473063B (https=) |
| BR (1) | BRPI0712145A2 (https=) |
| CA (1) | CA2659588A1 (https=) |
| MX (1) | MX2008016275A (https=) |
| RU (1) | RU2446231C2 (https=) |
| WO (1) | WO2007149265A2 (https=) |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE528929C2 (sv) * | 2005-04-18 | 2007-03-20 | Sandvik Intellectual Property | Skär belagt med ett skiktsystem och metod att framställa detta |
| CN101395335B (zh) * | 2006-01-26 | 2013-04-17 | 犹他大学研究基金会 | 多晶磨料复合切削工具 |
| IL182344A (en) † | 2007-04-01 | 2011-07-31 | Iscar Ltd | Cutting with a ceramic coating |
| US20100255337A1 (en) * | 2008-11-24 | 2010-10-07 | Langhorn Jason B | Multilayer Coatings |
| KR101104493B1 (ko) | 2009-06-17 | 2012-01-12 | 한국야금 주식회사 | 절삭공구 또는 내마모성 공구용 표면 피복 박막 |
| DE102009046667B4 (de) * | 2009-11-12 | 2016-01-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Beschichtete Körper aus Metall, Hartmetal, Cermet oder Keramik sowie Verfahren zur Beschichtung derartiger Körper |
| JP5429693B2 (ja) * | 2010-04-14 | 2014-02-26 | 三菱マテリアル株式会社 | 硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆切削工具 |
| JP5499862B2 (ja) * | 2010-04-14 | 2014-05-21 | 三菱マテリアル株式会社 | 硬質被覆層がすぐれた耐チッピング性と耐摩耗性を発揮する表面被覆切削工具 |
| JP5499861B2 (ja) * | 2010-04-14 | 2014-05-21 | 三菱マテリアル株式会社 | 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具 |
| CN102373412A (zh) * | 2010-08-20 | 2012-03-14 | 鸿富锦精密工业（深圳）有限公司 | 真空镀膜件及其制造方法 |
| JP5682500B2 (ja) * | 2010-09-27 | 2015-03-11 | 三菱マテリアル株式会社 | 硬質被覆層がすぐれた耐チッピング性と耐摩耗性を発揮する表面被覆切削工具 |
| JP5682501B2 (ja) * | 2010-09-29 | 2015-03-11 | 三菱マテリアル株式会社 | 硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆切削工具 |
| US8734070B2 (en) | 2010-10-20 | 2014-05-27 | Kennametal Inc. | Toolholder with externally-mounted dynamic absorber |
| JP5742572B2 (ja) * | 2011-02-09 | 2015-07-01 | 三菱マテリアル株式会社 | 硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆切削工具 |
| US8409734B2 (en) | 2011-03-04 | 2013-04-02 | Kennametal Inc. | Coated substrates and methods of making same |
| US8524360B2 (en) * | 2011-08-29 | 2013-09-03 | Kennametal Inc. | Cutting insert with a titanium oxycarbonitride coating and method for making the same |
| CN103173761B (zh) * | 2011-12-23 | 2015-08-19 | 株洲钻石切削刀具股份有限公司 | 改善涂层结构的切削刀具及其制备方法 |
| US8866203B2 (en) * | 2012-07-05 | 2014-10-21 | Huey-Jean Lin | Method for forming compound epitaxial layer by chemical bonding and epitaxy product made by the same method |
| WO2014101517A1 (zh) * | 2012-12-26 | 2014-07-03 | Wu Shanghua | 一种采用物理气相沉积工艺在氮化硅切削刀具表面制备Al2O3涂层及其复合涂层的方法 |
| US9428967B2 (en) | 2013-03-01 | 2016-08-30 | Baker Hughes Incorporated | Polycrystalline compact tables for cutting elements and methods of fabrication |
| DE112014001562B4 (de) | 2013-03-21 | 2019-08-08 | Kennametal Inc. | Beschichtungen für Schneidwerkzeuge |
| DE112014001520B4 (de) | 2013-03-21 | 2023-06-15 | Kennametal Inc. | Beschichtungen für Schneidwerkzeuge |
| US9371580B2 (en) * | 2013-03-21 | 2016-06-21 | Kennametal Inc. | Coated body wherein the coating scheme includes a coating layer of TiAl2O3 and method of making the same |
| DE102013104254A1 (de) * | 2013-04-26 | 2014-10-30 | Walter Ag | Werkzeug mit CVD-Beschichtung |
| US9224594B2 (en) | 2013-11-18 | 2015-12-29 | Intermolecular, Inc. | Surface preparation with remote plasma |
| EP3000913B1 (en) * | 2014-09-26 | 2020-07-29 | Walter Ag | Coated cutting tool insert with MT-CVD TiCN on TiAI(C,N) |
| US9719175B2 (en) | 2014-09-30 | 2017-08-01 | Kennametal Inc. | Multilayer structured coatings for cutting tools |
| WO2016068231A1 (ja) * | 2014-10-29 | 2016-05-06 | 住友電気工業株式会社 | 複合ダイヤモンド体および複合ダイヤモンド工具 |
| US9650712B2 (en) | 2014-12-08 | 2017-05-16 | Kennametal Inc. | Inter-anchored multilayer refractory coatings |
| US9650714B2 (en) | 2014-12-08 | 2017-05-16 | Kennametal Inc. | Nanocomposite refractory coatings and applications thereof |
| US10100405B2 (en) | 2015-04-20 | 2018-10-16 | Kennametal Inc. | CVD coated cutting insert and method of making the same |
| US9890084B2 (en) * | 2015-10-01 | 2018-02-13 | Kennametal Inc. | Hybrid nanocomposite coatings and applications thereof |
| CN107058982B (zh) * | 2017-01-23 | 2018-06-19 | 江苏菲沃泰纳米科技有限公司 | 一种具有多层结构防液涂层的制备方法 |
| WO2019181790A1 (ja) * | 2018-03-20 | 2019-09-26 | 京セラ株式会社 | インサート及びこれを備えた切削工具 |
| EP3814547B1 (en) * | 2018-06-28 | 2024-11-13 | AB Sandvik Coromant | Coated cutting tool |
Family Cites Families (52)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH593346A5 (https=) | 1974-02-07 | 1977-11-30 | Ciba Geigy Ag | |
| US4196233A (en) | 1974-02-07 | 1980-04-01 | Ciba-Geigy Corporation | Process for coating inorganic substrates with carbides, nitrides and/or carbonitrides |
| DE3071096D1 (en) | 1979-07-20 | 1985-10-24 | Toray Industries | Process for selectively separating water-soluble valuable materials from an aqueous solution containing same |
| US4714660A (en) | 1985-12-23 | 1987-12-22 | Fansteel Inc. | Hard coatings with multiphase microstructures |
| US4842710A (en) * | 1987-03-23 | 1989-06-27 | Siemens Aktiengesellschaft | Method of making mixed nitride films with at least two metals |
| CA1327277C (en) | 1989-03-17 | 1994-03-01 | William A. Bryant | Multilayer coated cemented carbide cutting insert |
| US4984940A (en) | 1989-03-17 | 1991-01-15 | Kennametal Inc. | Multilayer coated cemented carbide cutting insert |
| SE464818B (sv) * | 1989-06-16 | 1991-06-17 | Sandvik Ab | Belagt skaer foer skaerande bearbetning |
| WO1991004353A1 (fr) | 1989-09-22 | 1991-04-04 | Showa Denko Kabushiki Kaisha | Procede de synthese de diamant depose en phase vapeur sur un substrat traite par voie electrochimique |
| WO1991005075A1 (en) * | 1989-09-29 | 1991-04-18 | Sumitomo Electric Industries, Ltd. | Surface-coated hard member for cutting and abrasion-resistant tools |
| US5436071A (en) | 1990-01-31 | 1995-07-25 | Mitsubishi Materials Corporation | Cermet cutting tool and process for producing the same |
| US5330853A (en) | 1991-03-16 | 1994-07-19 | Leybold Ag | Multilayer Ti-Al-N coating for tools |
| SE9101469D0 (sv) | 1991-05-15 | 1991-05-15 | Sandvik Ab | Etsmetod |
| US5547767A (en) * | 1991-10-14 | 1996-08-20 | Commissariat A L'energie Atomique | Multilayer material, anti-erosion and anti-abrasion coating incorporating said multilayer material and process for producing said multilayer material |
| SE501527C2 (sv) | 1992-12-18 | 1995-03-06 | Sandvik Ab | Sätt och alster vid beläggning av ett skärande verktyg med ett aluminiumoxidskikt |
| EP0653499B1 (en) | 1993-05-31 | 2002-07-24 | Sumitomo Electric Industries, Ltd. | Coated cutting tool and method for producing the same |
| US5585176A (en) | 1993-11-30 | 1996-12-17 | Kennametal Inc. | Diamond coated tools and wear parts |
| SE514737C2 (sv) * | 1994-03-22 | 2001-04-09 | Sandvik Ab | Belagt skärverktyg av hårdmetall |
| US5920760A (en) | 1994-05-31 | 1999-07-06 | Mitsubishi Materials Corporation | Coated hard alloy blade member |
| US5545490A (en) | 1994-06-21 | 1996-08-13 | Mitsubishi Materials Corporation | Surface coated cutting tool |
| US5700551A (en) * | 1994-09-16 | 1997-12-23 | Sumitomo Electric Industries, Ltd. | Layered film made of ultrafine particles and a hard composite material for tools possessing the film |
| DE69526301T2 (de) | 1994-10-28 | 2002-12-05 | Sumitomo Electric Industries, Ltd. | Mehrschichtiges Material |
| EP0727509B1 (en) | 1995-02-17 | 2001-12-12 | Seco Tools Ab | Multilayered alumina coated cemented carbide body |
| US5600551A (en) * | 1995-08-02 | 1997-02-04 | Schenck-Accurate, Inc. | Isolated power/voltage multiplier apparatus and method |
| US5879823A (en) * | 1995-12-12 | 1999-03-09 | Kennametal Inc. | Coated cutting tool |
| JPH10310494A (ja) | 1996-05-31 | 1998-11-24 | Ngk Spark Plug Co Ltd | ダイヤモンド被覆膜付き超硬部材の製造方法 |
| JP2974284B2 (ja) * | 1996-11-19 | 1999-11-10 | 日立ツール株式会社 | 被覆超硬工具の製造法 |
| SE518151C2 (sv) * | 1997-12-10 | 2002-09-03 | Sandvik Ab | Multiskiktbelagt skärverktyg |
| SE518134C2 (sv) | 1997-12-10 | 2002-09-03 | Sandvik Ab | Multiskiktbelagt skärverktyg |
| JP3031907B2 (ja) | 1998-03-16 | 2000-04-10 | 日立ツール株式会社 | 多層膜被覆部材 |
| US20010016273A1 (en) | 1998-05-08 | 2001-08-23 | Krishnan Narasimhan | Multilayer cvd coated article and process for producing same |
| GB2337274B (en) | 1998-05-12 | 2001-10-17 | Notetry Ltd | Method and apparatus for agitating the contents of a container |
| US6284356B1 (en) * | 1998-07-29 | 2001-09-04 | Toshiba Tungaloy Co., Ltd. | Aluminum oxide-coated tool member |
| US6251508B1 (en) * | 1998-12-09 | 2001-06-26 | Seco Tools Ab | Grade for cast iron |
| SE516017C2 (sv) * | 1999-02-05 | 2001-11-12 | Sandvik Ab | Hårdmetallskär belagt med slitstark beläggning |
| WO2000052225A1 (en) | 1999-03-02 | 2000-09-08 | Kennametal Inc. | A tool having a multilayer coating comprising multiple mtcvd layers |
| JP2001107237A (ja) * | 1999-10-12 | 2001-04-17 | Toshiba Tungaloy Co Ltd | 表面被覆焼結合金部材 |
| DE19962056A1 (de) * | 1999-12-22 | 2001-07-12 | Walter Ag | Schneidwerkzeug mit mehrlagiger, verschleissfester Beschichtung |
| US6472060B1 (en) * | 2000-01-19 | 2002-10-29 | Seco Tools Ab | Coated body with nanocrystalline CVD coating for enhanced edge toughness and reduced friction |
| SE519339C2 (sv) | 2000-11-22 | 2003-02-18 | Sandvik Ab | Skärverktyg belagt med aluminiumoxid och sätt att tillverka detsamma |
| AT5008U1 (de) * | 2001-02-09 | 2002-02-25 | Plansee Tizit Ag | Hartmetallverschleissteil mit mischoxidschicht |
| US6689450B2 (en) | 2001-03-27 | 2004-02-10 | Seco Tools Ab | Enhanced Al2O3-Ti(C,N) multi-coating deposited at low temperature |
| EP1311712A2 (de) | 2001-03-27 | 2003-05-21 | Widia GmbH | Verfahren zur erhöhung der druckspannung oder zur erniedrigung der zugeigenspannung einer schicht |
| SE522735C2 (sv) | 2001-05-30 | 2004-03-02 | Sandvik Ab | Aluminiumoxidbelagt skärverktyg |
| EP1323847A3 (en) | 2001-12-28 | 2005-09-14 | Seco Tools Ab | Coated cemented carbide body and method for use |
| SE526604C2 (sv) * | 2002-03-22 | 2005-10-18 | Seco Tools Ab | Belagt skärverktyg för svarvning i stål |
| SE525581C2 (sv) * | 2002-05-08 | 2005-03-15 | Seco Tools Ab | Skär belagt med aluminiumoxid framställt med CVD |
| SE526603C3 (sv) * | 2003-01-24 | 2005-11-16 | Sandvik Intellectual Property | Belagt hårdmetallskär |
| SE527346C2 (sv) | 2003-04-24 | 2006-02-14 | Seco Tools Ab | Skär med beläggning av skikt av MTCVD-Ti (C,N) med styrd kornstorlek och morfologi och metod för att belägga skäret |
| US7592077B2 (en) | 2003-06-17 | 2009-09-22 | Kennametal Inc. | Coated cutting tool with brazed-in superhard blank |
| JP4205546B2 (ja) * | 2003-09-16 | 2009-01-07 | 株式会社神戸製鋼所 | 耐摩耗性、耐熱性および基材との密着性に優れた積層皮膜の製造方法 |
| US7455918B2 (en) * | 2004-03-12 | 2008-11-25 | Kennametal Inc. | Alumina coating, coated product and method of making the same |
-
2006
- 2006-06-22 US US11/472,921 patent/US8080312B2/en active Active
-
2007
- 2007-06-12 WO PCT/US2007/013773 patent/WO2007149265A2/en not_active Ceased
- 2007-06-12 RU RU2009101926/02A patent/RU2446231C2/ru not_active IP Right Cessation
- 2007-06-12 BR BRPI0712145-8A patent/BRPI0712145A2/pt not_active IP Right Cessation
- 2007-06-12 MX MX2008016275A patent/MX2008016275A/es unknown
- 2007-06-12 JP JP2009516513A patent/JP2009541075A/ja active Pending
- 2007-06-12 CN CN2007800229235A patent/CN101473063B/zh active Active
- 2007-06-12 KR KR1020087030882A patent/KR20090026154A/ko not_active Ceased
- 2007-06-12 CN CN2012101014267A patent/CN102634771A/zh active Pending
- 2007-06-12 EP EP20130176008 patent/EP2677059A2/en not_active Withdrawn
- 2007-06-12 CA CA 2659588 patent/CA2659588A1/en not_active Abandoned
- 2007-06-12 EP EP07809480A patent/EP2047010A4/en not_active Withdrawn
-
2008
- 2008-06-12 US US12/137,633 patent/US8221838B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CA2659588A1 (en) | 2007-12-27 |
| CN101473063A (zh) | 2009-07-01 |
| RU2009101926A (ru) | 2010-07-27 |
| EP2047010A4 (en) | 2012-07-18 |
| JP2009541075A (ja) | 2009-11-26 |
| US8080312B2 (en) | 2011-12-20 |
| WO2007149265A2 (en) | 2007-12-27 |
| US8221838B2 (en) | 2012-07-17 |
| US20080260947A1 (en) | 2008-10-23 |
| EP2677059A2 (en) | 2013-12-25 |
| BRPI0712145A2 (pt) | 2012-01-24 |
| EP2047010A2 (en) | 2009-04-15 |
| CN102634771A (zh) | 2012-08-15 |
| RU2446231C2 (ru) | 2012-03-27 |
| US20070298232A1 (en) | 2007-12-27 |
| WO2007149265A3 (en) | 2008-02-21 |
| CN101473063B (zh) | 2012-11-28 |
| KR20090026154A (ko) | 2009-03-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8221838B2 (en) | Method of making a CVD coating scheme including alumina and/or titanium-containing materials | |
| US7785665B2 (en) | Alumina coating, coated product and method of making the same | |
| US7993742B2 (en) | Alumina layer with enhanced texture | |
| US5137774A (en) | Multi-oxide coated carbide body and method of producing the same | |
| US5800868A (en) | Method for making a coated cutting tool | |
| CN101652502B (zh) | 具有陶瓷涂层的切削刀片 | |
| US8293359B2 (en) | Multilayer CVD-coating and tool with such a coating | |
| US11459660B2 (en) | Articles consisting of metal, hard metal, cermet or ceramic and coated with a hard material, and method for producing such articles | |
| EP1905870A2 (en) | Alumina layer with enhanced texture | |
| CN110431254A (zh) | 涂层切削工具 | |
| US9371580B2 (en) | Coated body wherein the coating scheme includes a coating layer of TiAl2O3 and method of making the same | |
| CN102653146B (zh) | 涂覆的基体及其制造方法 | |
| IL149884A (en) | Oxide coated cutting tool | |
| Kübel | New developments in chemically vapour-deposited coatings from an industrial point of view | |
| US6413628B1 (en) | Titanium carbonitride coated cemented carbide and cutting inserts made from the same | |
| HK1016524A1 (en) | A cutting tool insert and a method of making the same | |
| HK1016524B (en) | A cutting tool insert and a method of making the same |