KR970705158A - 자성박막 및 그 제조방법(magnetic thin film and production method therefor) - Google Patents

자성박막 및 그 제조방법(magnetic thin film and production method therefor) Download PDF

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Publication number
KR970705158A
KR970705158A KR1019970700237A KR19970700237A KR970705158A KR 970705158 A KR970705158 A KR 970705158A KR 1019970700237 A KR1019970700237 A KR 1019970700237A KR 19970700237 A KR19970700237 A KR 19970700237A KR 970705158 A KR970705158 A KR 970705158A
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KR
South Korea
Prior art keywords
thin film
magnetic thin
iron nitride
manufacturing
iron
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Application number
KR1019970700237A
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English (en)
Inventor
미가꾸 다까하시
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미가꾸 다까하시
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Application filed by 미가꾸 다까하시 filed Critical 미가꾸 다까하시
Publication of KR970705158A publication Critical patent/KR970705158A/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/02—Incineration of waste; Incinerator constructions; Details, accessories or control therefor with pretreatment
    • F23G5/027—Incineration of waste; Incinerator constructions; Details, accessories or control therefor with pretreatment pyrolising or gasifying stage
    • F23G5/0273—Incineration of waste; Incinerator constructions; Details, accessories or control therefor with pretreatment pyrolising or gasifying stage using indirect heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/44—Details; Accessories
    • F23G5/46—Recuperation of heat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2201/00—Pretreatment
    • F23G2201/30—Pyrolysing
    • F23G2201/303—Burning pyrogases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2201/00—Pretreatment
    • F23G2201/30—Pyrolysing
    • F23G2201/304—Burning pyrosolids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2202/00—Combustion
    • F23G2202/20—Combustion to temperatures melting waste
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E20/00—Combustion technologies with mitigation potential
    • Y02E20/12—Heat utilisation in combustion or incineration of waste

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Gasification And Melting Of Waste (AREA)
  • Engine Equipment That Uses Special Cycles (AREA)
  • Incineration Of Waste (AREA)
  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)

Abstract

본 발명은 고포화자기 및 저자기유지력의 질화철박막과, 특수한 기판을 필요로 하지 않고 고속 또는 안정하게 질화철박막을 형성하는 것이 가능한 자성박막 제조방법을 제공하는 것을 목적으로 한다. 대향 타겟식 DC 스패터법을 사용한 질화철박막의 제조방법으로서 성막실에 Ar 및 Na가스를 도입하고 Ar과 N2가스 분위기중에서 철 타겟에 DC전력을 인가하여 기판상에 질화철박막을 형성하는 것을 특징으로 한다. 또, 질화철박막형성후 진공중에서 열처리하는 것을 특징으로 한다.

Description

자성박막 및 그 제조방법(MAGNETIC THIN FILM AND PRODUCTION METHOD THEREFOR)
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 성막(成膜) 직후의 질화철 박막 X선회절 패턴과 성막시의 N2가스 유량비의 관계를 나타내는 그래프.

Claims (9)

  1. 대향 타겟식 DC스패터법을 사용하여 N2가스와의 반응성 스패터에 의해 기판상에 형성된 질화철박막으로 이루어지는 것을 특징으로 하는 자성박막.
  2. 대향 타겟식 DC스패터법으로 기판에 철(-Fe) 박막과 질화 철박막을 교호로 적층한 것을 특징으로 하는 자성박막.
  3. 대향 타겟식 DC 스패터법을 사용한 질화철박막의 제조방법에 있어서, 성막실에 Ar 및 N2가스를 도입하고 Ar 과 N2가스 분위기 중에서 철타겟에 DC전력을 인가하여 기판상에 질화철박막을 형성하는 것을 특징으로 하는 자성박막 제조방법.
  4. 제 3항에 있어서, 전가스 유량에 대한 상기 N2가스의 유량은 8∼25%인 것을 특징으로 하는 자성박막 제조방법.
  5. 제 3항 또는 제 4항에 있어서, 질화철박막의 형성시의 전자온도는 0.01∼1eV, 전자밀도는 1 ×109∼1 ×1010cm-3인 것을 특징으로 하는 자성박막 제조방법.
  6. 제 3항 내지 제 5항 중 어느 한 항에 있어서, 상기 기판은 하지층으로서 철(-Fe) 박막(001)면을 형성한 것을 특징으로 하는 자성박막 제조방법.
  7. 제 3항 내지 제 6항 중 어느 한 항에 있어서, 질화철박막 형성후, 진공중에서 열처리를 하는 것을 특징으로 하는 자성박막 제조방법.
  8. 제 7항에 있어서, 상기 열처리의 조건은 100∼180℃에서 1∼3시간으로 하는 것을 특징으로 하는 자성박막 제조방법.
  9. 제 3항 내지 제 8항 중 어느 한 항에 있어서, 상기 질화철박막은″결정상(Fe16N2)을 포함하는 것을 특징으로 하는 자성박막 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019970700237A 1995-04-28 1994-07-18 자성박막 및 그 제조방법(magnetic thin film and production method therefor) KR970705158A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP10519195 1995-04-28
JP7239940A JPH0914625A (ja) 1995-04-28 1995-09-19 廃棄物熱処理装置
PCT/JP1996/001173 WO1996034231A1 (fr) 1995-04-28 1996-04-26 Appareil de traitement thermique des dechets

Publications (1)

Publication Number Publication Date
KR970705158A true KR970705158A (ko) 1997-09-06

Family

ID=26445528

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970700237A KR970705158A (ko) 1995-04-28 1994-07-18 자성박막 및 그 제조방법(magnetic thin film and production method therefor)

Country Status (4)

Country Link
EP (1) EP0825382A4 (ko)
JP (1) JPH0914625A (ko)
KR (1) KR970705158A (ko)
WO (1) WO1996034231A1 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
HU225373B1 (en) * 1998-04-17 2006-10-28 Allan Dr Inovius Method and apparatus for the prevention of global warming, through elimination of hazardous exhaust gases of waste and/or fuel burners
US6269645B1 (en) 1998-05-14 2001-08-07 Yyl Corporation Power plant
JP3525077B2 (ja) * 1999-07-06 2004-05-10 株式会社プランテック 直結型焼却灰溶融設備及びその運転制御方法
JP5819221B2 (ja) * 2012-02-29 2015-11-18 ヤンマー株式会社 船用燃料供給システム
KR102553286B1 (ko) * 2022-09-23 2023-07-07 (주)아크론에코 초음파열분해장치

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2119973A (en) * 1936-01-16 1938-06-07 Strelka Leo Combined distillator and carbonizer
FR2264078A1 (fr) * 1974-03-11 1975-10-10 Robert Jean Pierre Procede et appareillage pour le traitement de residus contenant des substances organiques
US4124353A (en) * 1975-06-27 1978-11-07 Rhone-Poulenc Industries Method and apparatus for carrying out a reaction between streams of fluid
JPS5265983A (en) * 1975-11-29 1977-05-31 Akio Hashizume Incinerator of city garbage and such
US4172431A (en) * 1977-08-15 1979-10-30 Parkinson Cowan Gwb Limited Industrial boilers
JPS56165817A (en) 1980-05-26 1981-12-19 Hitachi Plant Eng & Constr Co Ltd Thermal decomposition apparatus for waste
AU1273883A (en) * 1982-04-28 1983-11-03 Airco Inc. Compact combustion apparatus
CH680656A5 (en) * 1990-07-13 1992-10-15 Niklaus Seiler Continuous melting of solid or viscous waste - by controlled preheating and fractionating, melting and cooling to form inert prod.
DE4106136C1 (en) * 1991-02-27 1992-08-27 Forschungszentrum Juelich Gmbh, 5170 Juelich, De Converting granular ion-exchange resins into combustible gas - where resin in reactor passes by gravity through drying zone and then through low-temp. carbonisation zone

Also Published As

Publication number Publication date
EP0825382A4 (en) 1999-11-10
EP0825382A1 (en) 1998-02-25
WO1996034231A1 (fr) 1996-10-31
JPH0914625A (ja) 1997-01-17

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