KR970053292A - 반도체웨이퍼 공급장치 - Google Patents

반도체웨이퍼 공급장치 Download PDF

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Publication number
KR970053292A
KR970053292A KR1019950049284A KR19950049284A KR970053292A KR 970053292 A KR970053292 A KR 970053292A KR 1019950049284 A KR1019950049284 A KR 1019950049284A KR 19950049284 A KR19950049284 A KR 19950049284A KR 970053292 A KR970053292 A KR 970053292A
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KR
South Korea
Prior art keywords
semiconductor wafer
stopper member
wafer
supply apparatus
eccentric cam
Prior art date
Application number
KR1019950049284A
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English (en)
Other versions
KR0165350B1 (ko
Inventor
문창렬
Original Assignee
김광호
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자주식회사 filed Critical 김광호
Priority to KR1019950049284A priority Critical patent/KR0165350B1/ko
Priority to US08/680,871 priority patent/US5669752A/en
Publication of KR970053292A publication Critical patent/KR970053292A/ko
Application granted granted Critical
Publication of KR0165350B1 publication Critical patent/KR0165350B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/136—Associated with semiconductor wafer handling including wafer orienting means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

본 발명은 본 반도체웨이퍼를 소정위치로 공급하기 위한 반도체웨이퍼 공급장치에 관한 것이다.
본 발명의 반도체웨이퍼 공급장치, 이송되는 반도체웨이퍼를 소정의 위치에서 정지시키기 위한 구조가 개선되어, 공급될 반도체웨이퍼의 규격이 변경되더라도 스토퍼를 일일이 작업자가 교체해줄 필요가 없게 되므로, 작업의 전자동화가 가능하며 반도체웨이퍼 취급환경을 청결하게 유지할 수 있다.

Description

반도체웨이퍼 공급장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제3도는 본 발명에 따른 반도체웨이퍼 공급장치의 일 예의 개략적 평면도.
제4도는 제3도에 도시된 장치의 Ⅳ-Ⅳ선 단면도.

Claims (3)

  1. 반도체웨이퍼를 수평이송시키는 웨이퍼 이송부와, 이 웨이퍼 이송부에 의해 이송되는 반도체웨이퍼를 그 이송경로상의 소정위치에서 정지시키기 위한 웨이퍼 정지부를 갖춘 반도체웨이퍼 공급장치에 있어서, 상기 웨이퍼 정지부는, 서로 다른 높이상에 형성된 복수의 원호형 차단벽을 가지며 상기 반도체웨이퍼의 수평이송경로상에서 승강 가능하게 설치되는 스토퍼부재와, 이 스토퍼부재를 승강시키기 위한 승강수단을 구비하며; 상기 스토퍼부재의 차단벽들은 각각 다른 크기 반경을 가지며 그 곡률중심들은 동일 수직선상에 위치하는 것을 특징으로 하는 반도체웨이퍼 공급장치.
  2. 제1항에 있어서, 상기 승강수단은 승강용모터와, 상기 승강용모터의 출력축에 결합된 편심캠과, 상기 스토퍼부재에 고정되며 일측이 상기 편심캠의 외주면에 접촉되어 편심캠의 회전에 따라 승강하도록 된 캠팔로우어를 구비하여 된 것을 특징으로 하는 반도체웨이퍼 공급장치.
  3. 제1항 또는 제2항에 있어서, 상기 스토퍼부재의 상기 각 차단벽의 하측 바닥면들에는 그 바닥면에 상기 반도체웨이퍼가 놓여져 있는지를 감지하는 센서들이 설치된 것을 특징으로 하는 반도체웨이퍼 공급장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950049284A 1995-12-13 1995-12-13 반도체웨이퍼 공급장치 KR0165350B1 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1019950049284A KR0165350B1 (ko) 1995-12-13 1995-12-13 반도체웨이퍼 공급장치
US08/680,871 US5669752A (en) 1995-12-13 1996-07-16 Semiconductor wafer pre-aligning apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950049284A KR0165350B1 (ko) 1995-12-13 1995-12-13 반도체웨이퍼 공급장치

Publications (2)

Publication Number Publication Date
KR970053292A true KR970053292A (ko) 1997-07-31
KR0165350B1 KR0165350B1 (ko) 1999-02-18

Family

ID=19439621

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950049284A KR0165350B1 (ko) 1995-12-13 1995-12-13 반도체웨이퍼 공급장치

Country Status (2)

Country Link
US (1) US5669752A (ko)
KR (1) KR0165350B1 (ko)

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JPH09213769A (ja) * 1996-01-31 1997-08-15 Komatsu Electron Metals Co Ltd 半導体ウェハの搬送装置
US5980195A (en) * 1996-04-24 1999-11-09 Tokyo Electron, Ltd. Positioning apparatus for substrates to be processed
US6113165A (en) * 1998-10-02 2000-09-05 Taiwan Semiconductor Manufacturing Co., Ltd. Self-sensing wafer holder and method of using
US6185830B1 (en) * 1999-03-25 2001-02-13 Lucent Technologies, Inc. Semiconductor wafer fixture for alignment in a grating exposure process
US6409463B1 (en) * 2000-02-08 2002-06-25 Seh America, Inc. Apparatuses and methods for adjusting a substrate centering system
JP3581303B2 (ja) * 2000-07-31 2004-10-27 東京エレクトロン株式会社 判別方法及び処理装置
US6631935B1 (en) * 2000-08-04 2003-10-14 Tru-Si Technologies, Inc. Detection and handling of semiconductor wafer and wafer-like objects
US6682295B2 (en) * 2001-06-21 2004-01-27 Novellus Systems, Inc. Flatted object passive aligner
US6638004B2 (en) 2001-07-13 2003-10-28 Tru-Si Technologies, Inc. Article holders and article positioning methods
US6935830B2 (en) * 2001-07-13 2005-08-30 Tru-Si Technologies, Inc. Alignment of semiconductor wafers and other articles
US7334826B2 (en) * 2001-07-13 2008-02-26 Semitool, Inc. End-effectors for handling microelectronic wafers
US7281741B2 (en) * 2001-07-13 2007-10-16 Semitool, Inc. End-effectors for handling microelectronic workpieces
US6615113B2 (en) 2001-07-13 2003-09-02 Tru-Si Technologies, Inc. Articles holders with sensors detecting a type of article held by the holder
US7104578B2 (en) * 2002-03-15 2006-09-12 Asm International N.V. Two level end effector
US20060043750A1 (en) * 2004-07-09 2006-03-02 Paul Wirth End-effectors for handling microfeature workpieces
US20070014656A1 (en) * 2002-07-11 2007-01-18 Harris Randy A End-effectors and associated control and guidance systems and methods
JP2004282002A (ja) * 2003-02-27 2004-10-07 Tokyo Electron Ltd 基板処理装置及び基板処理方法
US7181132B2 (en) 2003-08-20 2007-02-20 Asm International N.V. Method and system for loading substrate supports into a substrate holder
DE10348821B3 (de) * 2003-10-13 2004-12-16 HAP Handhabungs-, Automatisierungs- und Präzisionstechnik GmbH Vorrichtung zum Transportieren und Ausrichten von scheibenförmigen Elementen
US20070020080A1 (en) * 2004-07-09 2007-01-25 Paul Wirth Transfer devices and methods for handling microfeature workpieces within an environment of a processing machine
KR101450820B1 (ko) * 2008-10-31 2014-10-14 주식회사 탑 엔지니어링 본딩장치의 척스테이지 승강장치
JP6099916B2 (ja) * 2012-09-25 2017-03-22 株式会社ダイヘン ワーク搬送ロボット
CN105655278B (zh) * 2014-11-11 2018-06-19 沈阳新松机器人自动化股份有限公司 晶圆尺寸可在线调整的预对准装置
US10867822B1 (en) 2019-07-26 2020-12-15 Yaskawa America, Inc. Wafer pre-alignment apparatus and method

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JPS6372138A (ja) * 1986-09-12 1988-04-01 Metsukusu:Kk シリコンウエハ−の位置決め装置
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Publication number Publication date
KR0165350B1 (ko) 1999-02-18
US5669752A (en) 1997-09-23

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