KR960029736U - 웨이퍼의 온도불균일 상태 검출장치 - Google Patents

웨이퍼의 온도불균일 상태 검출장치

Info

Publication number
KR960029736U
KR960029736U KR2019950002841U KR19950002841U KR960029736U KR 960029736 U KR960029736 U KR 960029736U KR 2019950002841 U KR2019950002841 U KR 2019950002841U KR 19950002841 U KR19950002841 U KR 19950002841U KR 960029736 U KR960029736 U KR 960029736U
Authority
KR
South Korea
Prior art keywords
detection device
wafer temperature
temperature unevenness
unevenness detection
wafer
Prior art date
Application number
KR2019950002841U
Other languages
English (en)
Other versions
KR0121227Y1 (ko
Inventor
안호갑
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950002841U priority Critical patent/KR0121227Y1/ko
Publication of KR960029736U publication Critical patent/KR960029736U/ko
Application granted granted Critical
Publication of KR0121227Y1 publication Critical patent/KR0121227Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
KR2019950002841U 1995-02-21 1995-02-21 웨이퍼의 온도불균일 상태 검출장치 KR0121227Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950002841U KR0121227Y1 (ko) 1995-02-21 1995-02-21 웨이퍼의 온도불균일 상태 검출장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950002841U KR0121227Y1 (ko) 1995-02-21 1995-02-21 웨이퍼의 온도불균일 상태 검출장치

Publications (2)

Publication Number Publication Date
KR960029736U true KR960029736U (ko) 1996-09-17
KR0121227Y1 KR0121227Y1 (ko) 1998-08-01

Family

ID=19408192

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950002841U KR0121227Y1 (ko) 1995-02-21 1995-02-21 웨이퍼의 온도불균일 상태 검출장치

Country Status (1)

Country Link
KR (1) KR0121227Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100711265B1 (ko) * 2005-08-16 2007-04-25 삼성전자주식회사 메모리소자 테스트 시스템 및 챔버의 온도제어방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100711265B1 (ko) * 2005-08-16 2007-04-25 삼성전자주식회사 메모리소자 테스트 시스템 및 챔버의 온도제어방법

Also Published As

Publication number Publication date
KR0121227Y1 (ko) 1998-08-01

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