KR940023197U - 웨이퍼 온도측정장치 - Google Patents

웨이퍼 온도측정장치

Info

Publication number
KR940023197U
KR940023197U KR2019930003436U KR930003436U KR940023197U KR 940023197 U KR940023197 U KR 940023197U KR 2019930003436 U KR2019930003436 U KR 2019930003436U KR 930003436 U KR930003436 U KR 930003436U KR 940023197 U KR940023197 U KR 940023197U
Authority
KR
South Korea
Prior art keywords
measuring device
temperature measuring
wafer temperature
wafer
temperature
Prior art date
Application number
KR2019930003436U
Other languages
English (en)
Other versions
KR950004588Y1 (ko
Inventor
전병섭
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR2019930003436U priority Critical patent/KR950004588Y1/ko
Publication of KR940023197U publication Critical patent/KR940023197U/ko
Application granted granted Critical
Publication of KR950004588Y1 publication Critical patent/KR950004588Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67248—Temperature monitoring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/02—Means for indicating or recording specially adapted for thermometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/14—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
KR2019930003436U 1993-03-09 1993-03-09 웨이퍼 온도측정장치 KR950004588Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930003436U KR950004588Y1 (ko) 1993-03-09 1993-03-09 웨이퍼 온도측정장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930003436U KR950004588Y1 (ko) 1993-03-09 1993-03-09 웨이퍼 온도측정장치

Publications (2)

Publication Number Publication Date
KR940023197U true KR940023197U (ko) 1994-10-22
KR950004588Y1 KR950004588Y1 (ko) 1995-06-10

Family

ID=19351800

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930003436U KR950004588Y1 (ko) 1993-03-09 1993-03-09 웨이퍼 온도측정장치

Country Status (1)

Country Link
KR (1) KR950004588Y1 (ko)

Also Published As

Publication number Publication date
KR950004588Y1 (ko) 1995-06-10

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